CN109490344A - A kind of example of transmission electron microscope bar - Google Patents

A kind of example of transmission electron microscope bar Download PDF

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Publication number
CN109490344A
CN109490344A CN201810954038.0A CN201810954038A CN109490344A CN 109490344 A CN109490344 A CN 109490344A CN 201810954038 A CN201810954038 A CN 201810954038A CN 109490344 A CN109490344 A CN 109490344A
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CN
China
Prior art keywords
sample
rod
electron microscope
sample body
club head
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Pending
Application number
CN201810954038.0A
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Chinese (zh)
Inventor
邱晓滨
欧阳亮
洪丽川
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Xiamen Chip Superb Technology Co ltd
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Xiamen Core Technology Co Ltd
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Publication date
Application filed by Xiamen Core Technology Co Ltd filed Critical Xiamen Core Technology Co Ltd
Priority to CN201810954038.0A priority Critical patent/CN109490344A/en
Publication of CN109490344A publication Critical patent/CN109490344A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G01N23/20025Sample holders or supports therefor

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

The invention discloses a kind of example of transmission electron microscope bars, including intelligent acess mouth connector, optical fiber, hold handle, the first sample body of rod, the second sample body of rod, sample club head, the intelligent acess mouth connector, which is mounted on, holds handle one end, one end of the first sample body of rod is connected with the handle other end is held, the other end of the first sample body of rod is connected with second sample body of rod one end, the second sample body of rod other end is connected with sample club head, sample accommodating chamber is equipped in the sample club head, the intelligent acess mouth connector includes light input end, light output end, the optical fiber inserts in holding handle, the first sample body of rod, in the second sample body of rod, and described optical fiber one end is connected with the light output end of intelligent acess mouth connector, the optical fiber other end is connected with the sample accommodating chamber of sample club head.Electron microscope of the present invention specimen holder can be passed through the laser and specific electric current of specific wavelength into packaged sample, realize effective observation to substance micro-variations under light passing or energization catalytic condition.

Description

A kind of example of transmission electron microscope bar
Technical field
The present invention relates to a kind of example of transmission electron microscope bars, more particularly to a kind of example of transmission electron microscope bar Chip fixing structure in situ.
Background technique
Transmission electron microscope as a kind of microexamination equipment, can submicroscopic structure to material or ultra microstructure into Row effectively displaying, the convenient research to material.But the existing electron microscope sample bar provided by producer has a single function, Zhi Nengguan The microstructure for surveying fixed packaged sample can not be observed to having limitation in investigation of materials and simulate material under other conditions Real-time micro-variations, can not especially observe material light irradiation caused by variation and material can not be observed by energization institute The variation of generation seriously limits the research and progress of material.
Summary of the invention
The present invention provides a kind of example of transmission electron microscope bars, at least to solve electron microscope sample in the prior art Product bar can only observe the problem of fixed packaged sample microstructure.
The present invention provides a kind of example of transmission electron microscope bar, including intelligent acess mouth connector, optical fiber, hold handle, The first sample body of rod, the second sample body of rod, sample club head, the intelligent acess mouth connector, which is mounted on, holds handle one end, described One end of the first sample body of rod is connected with the handle other end is held, the other end of the first sample body of rod and the second sample body of rod one End is connected, and the second sample body of rod other end is connected with sample club head, and sample accommodating chamber is equipped in the sample club head, The intelligent acess mouth connector includes light input end, light output end, and the optical fiber, which inserts in, holds handle, the first sample body of rod, second In the sample body of rod, and described optical fiber one end is connected with the light output end of intelligent acess mouth connector, the optical fiber other end and sample The sample accommodating chamber of club head is connected.
Further, the sample club head includes example platform, chip clamping fixed plate, the example platform upper surface Equipped with sample pockets, the chip clamping fixed plate is mounted at the sample pockets of example platform upper surface, and core Clamping fixed board side on chip and example platform are hinged, the closed cavity of the sample pockets and the formation of chip clamping fixed plate For sample accommodating chamber.
Further, the sample club head further includes locking plate, bolt, and the locking plate is mounted on sample by bolt On product club head, and the side of the locking plate is equipped with buckle structure, and the chip clamping fixed plate is equipped with strip, the card Item is set to the opposite side of chip clamping fixed plate and the hinged side of example platform, and the buckle structure of the locking plate is pressed together on the strip On.
Further, the locking plate is equipped with sliding slot, and the bolt inserts in sliding slot, and the locking plate can pass through cunning Slot carries out the linear slide close to or far from chip clamping fixed plate,
Further, the sample club head further includes shaft screw, the chip clamping fixed plate side and example platform It is hinged by shaft screw.
Further, the specimen holder further includes generating device of laser, and the generating device of laser connects with intelligent acess mouth The light input end of head is connected.
Further, the specimen holder further includes connecting rod, and the connecting rod is mounted on the first sample body of rod, the second sample Between the body of rod.
Further, the area of section of the first sample body of rod is greater than the area of section of the second sample body of rod.
Further, the specimen holder further includes sealing ring, and the sealing ring is mounted in connecting rod.
Further, the specimen holder further includes guide positioning pin, and the guide positioning pin is mounted on the second sample body of rod On.
Further, positive plate, negative electrode tab are additionally provided on the locking plate, the positive plate, negative electrode tab are installed in parallel On locking plate, described positive plate one end, negative electrode tab one end are located at below buckle structure, and the specimen holder further includes cable, institute State cable and successively insert in and hold handle, the first sample body of rod, in the second sample body of rod, the cable close to the second sample body of rod one End is respectively equipped with positive terminal, anode connector, and the positive terminal, anode connector are tied on the locking plate far from buckle respectively Positive plate one end, negative electrode tab one end of structure are connected, and positive probe, negative probe, institute are additionally provided in the chip clamping fixed plate It states positive probe, negative probe to insert in parallel in chip clamping fixed plate, and the positive probe, negative probe one end are located at core The lower surface of clamping fixed board on chip, the positive probe, negative probe the other end be located on strip, and the buckle structure pressure It closes in the strip, the positive probe connects with positive plate one end, and the negative probe connects with negative electrode tab one end.
Compared with prior art, the present invention electron microscope of the present invention specimen holder, it not only can be to fixed packaged sample It is effectively observed, and the laser of specific wavelength can be passed through into packaged sample, and then realized under light passing catalytic condition Effective observation of substance micro-variations;More very can be passed through specific electric current into packaged sample, and then realize and energization urged Effective observation of substance micro-variations under the conditions of change.Therefore the present invention has effectively widened packaged sample material and has urged in different material The observation of micro-variations under the conditions of change.
Detailed description of the invention
Fig. 1 is the perspective view of the explosion of the embodiment of the present invention;
Fig. 2 is the structural schematic diagram of sample of embodiment of the present invention club head;
Fig. 3 is positive plate of the embodiment of the present invention, negative plate structure schematic diagram;
Fig. 4 is in the section of negative electrode tab and negative probe under stitching state and connect for buckle structure of the embodiment of the present invention with strip to be shown It is intended to.
Specific embodiment
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people The model that the present invention protects all should belong in member's every other embodiment obtained without making creative work It encloses.
It should be noted that description and claims of this specification and term " first " in above-mentioned attached drawing, " Two " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.
The embodiment of the invention discloses a kind of example of transmission electron microscope bars, as shown in Figure 1, including that intelligent acess mouth connects First 1, optical fiber 15, holding handle 2, the first sample body of rod 3, the second sample body of rod 6, sample club head 7, the intelligent acess mouth connector 1 is mounted on holding 2 one end of handle, and one end of the first sample body of rod 3 is connected with 2 other end of handle is held, first specimen holder The other end of body 3 is connected with the second sample body of rod, 6 one end, and 6 other end of the second sample body of rod is connected with sample club head 7, Sample accommodating chamber 16 is equipped in the sample club head 7, the intelligent acess mouth connector 2 includes light input end, light output end, institute It states optical fiber 15 and inserts in and hold handle 2, the first sample body of rod 3, in the second sample body of rod 6, and 15 one end of the optical fiber and intelligent acess The light output end of mouth connector 2 is connected, and 15 other end of optical fiber is connected with the sample accommodating chamber 16 of sample club head 7.
Optionally, as shown in Fig. 2, the sample club head 7 includes example platform 13, chip clamping fixed plate 9, the sample 13 upper surface of product platform is equipped with sample pockets, and the chip clamping fixed plate 9 is mounted on the sample of 13 upper surface of example platform At product pockets, and 9 side of chip clamping fixed plate and example platform 13 are hinged, the sample pockets and chip clamping The closed cavity that fixed plate 9 is formed is sample accommodating chamber 16.The sample club head 7 is mounted on the second sample by fixing bolt 12 On the product body of rod 6.
Particularly, the sample club head 7 further includes locking plate 10, bolt 11, and the locking plate 10 is pacified by bolt 11 On sample club head 7, and the side of the locking plate 10 is equipped with buckle structure 101, sets in the chip clamping fixed plate 9 There is strip 91, the strip 91 is set to the opposite side of chip clamping fixed plate 9 and the hinged side of example platform 13, the locking plate 10 Buckle structure 101 is pressed together on the strip 91.
Particularly, the locking plate 10 is equipped with sliding slot 102, and the bolt 11 inserts in sliding slot 102, the locking plate 10 The linear slide close to or far from chip clamping fixed plate 9 can be carried out by sliding slot 102,
Particularly, the sample club head 7 further includes shaft screw 8,9 side of chip clamping fixed plate and example platform 13 It is hinged by shaft screw 8.
Optionally, the specimen holder further includes generating device of laser, the generating device of laser and intelligent acess mouth connector 1 Light input end be connected.
Optionally, the specimen holder further includes connecting rod 17, and the connecting rod 17 is mounted on the first sample body of rod 3, second Between the sample body of rod 6.
Particularly, the area of section of the first sample body of rod 3 is greater than the area of section of the second sample body of rod 6.
Particularly, the specimen holder further includes sealing ring 4, and the sealing ring 4 is mounted in connecting rod 17.
Optionally, the specimen holder further includes guide positioning pin 5, and the guide positioning pin 5 is mounted on the second sample body of rod 6 On.
Wherein, chip clamping fixed plate 9 can carry out the rotary movement on certain angle in the shaft of shaft screw 8, The clamping of sample chip 14 is facilitated to take out.The first sample body of rod 3, the second sample body of rod 6, example platform 13, chip clamping are fixed Plate 9, fixing bolt 12, locking plate 10, bolt 11, shaft screw 8, guide positioning pin 5 are all made of non magnetic material and (can be used non- Magnetic material titanium alloy or brass or other non magnetic materials).Connecting rod 17 is thread 17, and sealing ring 4 is mounted on thread 17, The second sample body of rod 6 is connect by thread 17 with the first sample body of rod 3, and the main bar structure of specimen holder is fixedly mounted on holding On handle 2 on (holding handle 2 can be used stainless steel, titanium alloy, aluminium alloy or other non-metallic materials PEEK etc.).Vaccum seal ring 4 For viton seal ring.As shown in Fig. 2, example platform 13 is additionally provided with groove 18, locking plate 10 in sample pockets on one side It is mounted in groove 18, groove 18 is strip structure, and locking plate 10 can be carried out along the direction of groove 18 close to or far from core The sliding of clamping fixed board 9 on chip.Locking plate 10 is fixed in the groove 18 above sample head platform 13 by slide bolt 11, It can be slided in a certain range in 13 slot of sample head platform, facilitate the locking and unlock of chip clamping fixed plate 9.
When installing sample chip 14, chip clamping fixed plate 9 is opened, chip 14 is mounted in sample accommodating chamber 16, Lid closes chip clamping fixed plate 9, and locking plate 10 is moved along sliding slot 102, buckle structure 101 is made to be fastened on strip 91 On, complete the installation of sample chip 14.Example of transmission electron microscope bar is mounted in transmission electron microscope, the second sample The body of rod 6 is located in the vacuum structure in transmission electron microscope, and sealing ring 4 plays sealing function, completely cuts off the entrance of outside air.
When carrying out photocatalysis observation, laser introducing device is opened, specific wavelength needed for emitting laser introducing device Laser, laser import optical fiber 15 by intelligent acess mouth connector 1, and laser is imported in sample accommodating chamber 16 by optical fiber 15, to sample core Piece 14 carries out laser irradiation, is observed in real time by the photocatalytic process that staff carries out sample.
When taking out sample chip 14, locking plate 10 is moved along sliding slot 102, buckle structure 101 is made to be detached from card Item 91, chip clamping fixed plate 9 is detached from the limitation of buckle structure 101 at this time, can carry out free overturning by shaft screw 8, To make sample chip 14 take out.
The electron microscope sample bar of the embodiment of the present invention not only can effectively see fixed packaged sample chip 14 It surveys, and the laser of specific wavelength can be passed through into packaged sample chip 14, and then realize to substance under light passing catalytic condition The observation to material photocatalytically micro-variations has been widened in effective observation of micro-variations.In addition, the embodiment of the present invention Electron microscope sample club head 7 use chip clamping fixed plate 9 and 10 structure of locking plate with sliding slot 102, make work Personnel can be realized by the sliding of locking plate 10 to the locking and unlock of chip clamping fixed plate 9, facilitate sample chip 14 Installation and taking-up.
Particularly, as shown in figure 3, being additionally provided with positive plate 21, negative electrode tab 22 on the locking plate 10, the positive plate 21, Negative electrode tab 22 is installed in parallel on locking plate 10, and described 21 one end of positive plate, 22 one end of negative electrode tab are located under buckle structure 101 Side, the specimen holder further includes cable, and the cable, which successively inserts in, holds handle 2, the first sample body of rod 3, the second sample body of rod 6 In, the cable is respectively equipped with positive terminal, anode connector, the positive terminal, cathode close to one end of the second sample body of rod 6 Connector is connected with 21 one end of positive plate, 22 one end of negative electrode tab on the locking plate far from buckle structure 101 respectively, the chip Positive probe 92, negative probe 93 are additionally provided in clamping fixed plate 9, the positive probe 92, negative probe 93 insert in core in parallel In clamping fixed board 9 on chip, and the positive probe 92,93 one end of negative probe are located at the lower surface of chip clamping fixed plate 9, institute State positive probe 92, the other end of negative probe 93 is located on strip 91, and as shown in figure 4, the buckle structure 101 is pressed together on When the strip 91, the positive probe 92 connects with 21 one end of positive plate, the negative probe 93 and 22 one end phase of negative electrode tab It connects.
Wherein, by taking the connection structure of negative probe 93 and negative electrode tab 22 as an example, as shown in figure 4, negative probe 93 is located at card One end of 91 upper surface of item is connected to one end pressing that negative electrode tab 22 is located at 101 lower surface of buckle structure, forms energized structural.It is negative The other end of pole probe 93 is contacted with the upper surface of sample chip 14.
During the work time, testing staff can according to need to control cable and be powered, and then make positive probe 92, cathode Electric current is formed between probe 93 and sample chip 14, stimulates sample by electric current, testing staff is facilitated to observe material in electricity Micro-variations under stream effect are realized to be powered and widen the effect of detection, improve the detection function of specimen holder.
Finally it should be noted that the above embodiments are merely illustrative of the technical scheme of the present invention and are not intended to be limiting thereof, to the greatest extent Invention is explained in detail referring to above-described embodiment for pipe, it should be understood by a person of ordinary skill in the art that technology Personnel read present specification after still can with modifications or equivalent substitutions are made to specific embodiments of the invention, but this A little modifications are changed within all without departing from the present patent application accompanying claims protection scope.

Claims (10)

1. a kind of example of transmission electron microscope bar, which is characterized in that the specimen holder include intelligent acess mouth connector, optical fiber, Handle, the first sample body of rod, the second sample body of rod, sample club head are held, the intelligent acess mouth connector, which is mounted on, holds handle one End, one end of the first sample body of rod are connected with the handle other end is held, the other end and the second sample of the first sample body of rod Product body of rod one end is connected, and the second sample body of rod other end is connected with sample club head, and sample is equipped in the sample club head Product accommodating chamber, the intelligent acess mouth connector include light input end, light output end, and the optical fiber, which inserts in, holds handle, the first sample In the body of rod, the second sample body of rod, and described optical fiber one end is connected with the light output end of intelligent acess mouth connector, and the optical fiber is another End is connected with the sample accommodating chamber of sample club head.
2. example of transmission electron microscope bar according to claim 1, which is characterized in that the sample club head includes sample Product platform, chip clamping fixed plate, the example platform upper surface are equipped with sample pockets, the chip clamping fixed plate peace At the sample pockets of example platform upper surface, and chip clamping fixed plate side and example platform are hinged, the sample The closed cavity that product pockets and chip clamping fixed plate are formed is sample accommodating chamber.
3. example of transmission electron microscope bar according to claim 2, which is characterized in that the sample club head further includes Locking plate, bolt, the locking plate are mounted on sample club head by bolt, and the side of the locking plate is equipped with buckle knot Structure, the chip clamping fixed plate are equipped with strip, and the strip is set to chip clamping fixed plate and the hinged side of example platform Opposite side, the buckle structure of the locking plate are pressed together on the strip.
4. example of transmission electron microscope bar according to claim 3, which is characterized in that the locking plate, which is equipped with, to be slided Slot, the bolt insert in sliding slot, and the locking plate can carry out the straight line close to or far from chip clamping fixed plate by sliding slot Sliding.
5. example of transmission electron microscope bar according to claim 1, which is characterized in that the specimen holder further includes laser Generating device, the generating device of laser are connected with the light input end of intelligent acess mouth connector.
6. example of transmission electron microscope bar according to claim 1, which is characterized in that the specimen holder further includes connection Bar, the connecting rod are mounted between the first sample body of rod, the second sample body of rod.
7. example of transmission electron microscope bar according to claim 6, which is characterized in that the first sample body of rod is cut Face area is greater than the area of section of the second sample body of rod.
8. example of transmission electron microscope bar according to claim 6 or 7, which is characterized in that the specimen holder further includes Sealing ring, the sealing ring are mounted in connecting rod.
9. example of transmission electron microscope bar according to claim 1, which is characterized in that the specimen holder further includes guiding Positioning pin, the guide positioning pin are mounted on the second sample body of rod.
10. example of transmission electron microscope bar according to claim 3, which is characterized in that be additionally provided on the locking plate Positive plate, negative electrode tab, the positive plate, negative electrode tab are installed in parallel on locking plate, described positive plate one end, negative electrode tab one end position Below buckle structure, the specimen holder further includes cable, and the cable, which successively inserts in, holds handle, the first sample body of rod, second In the sample body of rod, the cable is respectively equipped with positive terminal, anode connector close to one end of the second sample body of rod, and the anode connects Head, anode connector are connected with positive plate one end, negative electrode tab one end on the locking plate far from buckle structure respectively, the chip Positive probe, negative probe are additionally provided in clamping fixed plate, the positive probe, negative probe insert in chip clamping in parallel and fix In plate, and the positive probe, negative probe one end are located at the lower surface of chip clamping fixed plate, the positive probe, cathode The other end of probe is located on strip, and when the buckle structure is pressed together on the strip, the positive probe and positive plate one End connects, and the negative probe connects with negative electrode tab one end.
CN201810954038.0A 2018-08-21 2018-08-21 A kind of example of transmission electron microscope bar Pending CN109490344A (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110161063A (en) * 2019-05-31 2019-08-23 南京大学 A kind of scanning transmission electron beam-induced amperometry system and method
CN110895252A (en) * 2019-09-25 2020-03-20 北京工业大学 Optical sample rod system for in-situ liquid-gas environment transmission electron microscope
CN111024733A (en) * 2019-12-25 2020-04-17 大连理工大学 Transmission electron microscope double-inclined sample rod

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103000480A (en) * 2012-11-29 2013-03-27 中国科学院物理研究所 Transmission electron microscope sample rod capable of being added with optical fibers
CN104916516A (en) * 2015-05-26 2015-09-16 兰州大学 Transmission electron microscope sample rod capable of realizing electric and magnetic field loading
CN208767253U (en) * 2018-07-06 2019-04-19 厦门芯极科技有限公司 A kind of example of transmission electron microscope bar

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103000480A (en) * 2012-11-29 2013-03-27 中国科学院物理研究所 Transmission electron microscope sample rod capable of being added with optical fibers
CN104916516A (en) * 2015-05-26 2015-09-16 兰州大学 Transmission electron microscope sample rod capable of realizing electric and magnetic field loading
CN208767253U (en) * 2018-07-06 2019-04-19 厦门芯极科技有限公司 A kind of example of transmission electron microscope bar

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110161063A (en) * 2019-05-31 2019-08-23 南京大学 A kind of scanning transmission electron beam-induced amperometry system and method
CN110161063B (en) * 2019-05-31 2020-06-30 南京大学 Scanning transmission electron beam induced current analysis system and method
CN110895252A (en) * 2019-09-25 2020-03-20 北京工业大学 Optical sample rod system for in-situ liquid-gas environment transmission electron microscope
CN111024733A (en) * 2019-12-25 2020-04-17 大连理工大学 Transmission electron microscope double-inclined sample rod

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Inventor after: Qiu Xiaobin

Inventor after: OuYang Liang

Inventor after: Hong Lichuan

Inventor after: Liao Honggang

Inventor before: Qiu Xiaobin

Inventor before: OuYang Liang

Inventor before: Hong Lichuan

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Application publication date: 20190319