CN102980739B - Pulse gas laser intracavity flow field measurement device based on four-quadrant detector - Google Patents
Pulse gas laser intracavity flow field measurement device based on four-quadrant detector Download PDFInfo
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- CN102980739B CN102980739B CN201210423106.3A CN201210423106A CN102980739B CN 102980739 B CN102980739 B CN 102980739B CN 201210423106 A CN201210423106 A CN 201210423106A CN 102980739 B CN102980739 B CN 102980739B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
- H01S3/22—Gases
- H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
- H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex
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Abstract
The invention discloses a pulse gas laser intracavity flow field measurement device based on a four-quadrant detector. The pulse gas laser intracavity flow field measurement device comprises a detection light source, a detection light receiving system and a signal processing system. A light beam sent out by the detection light source is parallel to the optical axis direction of a pulse gas laser. The detection light receiving system comprises a four-quadrant photoelectric detector, a photosensitive face faces towards a detection area and is perpendicular to a detection light beam to be used for receiving the detection laser light beam, and signals of the four-quadrant photoelectric detector can be processed by a signal processing system to obtain laser wave transmission characteristic parameters. The pulse gas laser intracavity flow field measurement device is simple in structure and convenient to operate. The four-quadrant photosensitive sensor simplifies an experiment device. Laser wave disturbance and transmission direction of the laser wave can be judged according to movement of the center of a light spot of the four-quadrant photosensitive detector to improve detection flexibility. Simultaneously, a dichroic mirror is used to separate the detection light beam form laser of the pulse gas laser. The laser oscillation can simultaneously obtain real-time test results to overcome the defect that thermal deposition in non-laser resonant cavity test discharging area is high.
Description
Technical field
The invention belongs to field of optical measuring technologies, what relate to is the device measuring flow field fluctuation, particularly measure a device for the shock propagation characteristic in flow field based on four-quadrant photo detector, utilize all quadrants exporting change of four-quadrant photo detector to realize swashing the measurement of direction of wave travel and disturbance size thereof.The method is particularly useful for the measurement of gas flowfield disturbance in pulsed gas laser.
Background technology
Adopt the pulsed gas laser of pulsed discharge pumping to have the feature that repetition rate is high, energy is large and cost is low industrially to obtain a wide range of applications, as integrated circuit (IC) etching, laser medicine and industrial processes etc.In the pulsed gas laser course of work, because in the finite space, Implantation Energy is larger instantaneously, thus the shock wave of each different directions development can be produced, these shock waves can move back and forth in laser cavity, the change of density can be brought in communication process, the homogeneity of chamber underexcitation medium is changed, and therefore the disturbance size of shock wave characterizes the homogeneity in flow field.Because the unevenness of laser cavity flow field directly can affect Uniform discharge, and then affect the beam quality of Laser output and the stability of output power, therefore the measurement of Shock Wave Characteristics parameter (comprising size and the direction of propagation of shock wave) is seemed particularly important.
The measuring method of traditional flow field fluctuation often can adopt pressure probe method (O.Uteza; Ph.Delaporte; B.Fontaine; B.Forestier, M. Sentis, I. Tassy; J.P.Truong:Appl.Phys.B 64; 531 (1997)), the method adopts piezoelectric transducer the pressure surge in flow field to be converted to electric signal and exports, can disturbance size in Real-Time Monitoring flow field.The method belongs to a kind of contact type measurement, needs to be arranged on laser cavity inwall, cannot arbitrarily movement, compare and be difficult to realize accurate location, and the method cannot judge source and the propagation characteristic of disturbance during measurement.
Interferometric method and schlieren method are two kinds of conventional non-contact measurement methods, for observing the evolution (P.Delaporte of shock wave in pulsed gas laser, B.Fontaine, B.Forestier, M. Sentis, J.P.Truong, O.Uteza, D.Zeitoun, D.Tarabelli:Proc.18th Int.Symp.Shock Waves2,1301 (1991)).Interferometric method optical system obtains shock wave in flow field by the change of the interference fringe on receiving screen in communication process, causes the change information of gas density, thus judges size and the direction of propagation of shock-wave disturbance.Similarly, the density perturbation convert information that shock wave can cause by schlieren method optical system is the change of intensity on receiving screen, is changed the position and the direction of propagation that judge shock wave by power.These two kinds of methods can obtain the situation in flow field intuitively by change information photodistributed on receiving screen, judge origin and the evolution thereof of shock wave.But these two kinds of methods are all the methods by sequential, take different pulse and flow field in the same time do not develop, combined the evolutionary process of shock wave in the flow field obtained, real-time signal can not be obtained; And these two kinds of system and devices all more complicated and need more precision optics equipment, operation and data processing all cumbersome.Shock strength after the people such as Wingate carry out the pulsed discharge of paired pulses gas laser by single-point schlieren method in flow field has carried out measuring (F.Wingate, J.T.Lee, AIAAPaper81-1286 (1981)).Although utilize this device can obtain the disturbance of shock wave in flow field, the method cannot swash direction of wave travel by accurate detection.
Summary of the invention
The object of the present invention is to provide the measurement mechanism of shock wave in a kind of pulsed gas laser flow field, this device can shock-wave disturbance size simply and exactly in ranging pulse gas laser flow field and the direction of propagation, and the subsequent treatment of signal is also relatively simple.
A kind of pulsed gas laser chamber flow field measurement mechanism based on 4 quadrant detector provided by the invention, comprise probe source, detection optical receiver system and signal processing system, it is characterized in that: the light beam that probe source sends is parallel with the optical axis direction of pulsed gas laser; Described detection optical receiver system comprises four-quadrant photo detector, and wherein the photosurface of four-quadrant photo detector is vertical with detecting light beam towards search coverage, for receiving the exploring laser light light beam that probe source sends; The signal of four-quadrant photo detector obtains the propagation characteristic parameter of shock wave after signal processing system process.
One as technique scheme is improved, described detection optical receiver system also comprises dichroic mirror, laser line filter, described double-colored minute surface becomes 45 degree with detecting light beam, filter plate and four-quadrant photo detector are just to detecting light beam, and probe source, dichroic mirror, laser line filter and four-quadrant photo detector are positioned in same light path successively.
Another kind as technique scheme improves, described detection optical receiver system also comprises dichroic mirror, laser line filter and spectroscope, described light splitting minute surface, double-colored minute surface become miter angle with detecting light beam, described laser rays filter plate is vertical with detecting light beam, described detecting light beam is respectively through the center of light splitting minute surface and double-colored minute surface, and via after measured laser device reflective surface again through double-colored minute surface and the center of light splitting minute surface and the center of laser rays filter plate, finally received by 4 quadrant detector.
Instant invention overcomes the shortcomings such as typical measuring arrangements system complex, apparatus expensive, improve precision and the sensitivity of measurement simultaneously, disturbance size and the direction of propagation of the shock wave in flow field can be obtained in real time.During pulsed gas laser work, in flow field, larger energy is injected instantaneously after each discharge excitation, and in flow field, form various shock wave, there is the wave front of a high-density region in these shock waves, detecting light beam generation deviation can be made, the change that all quadrants utilizing four-quadrant photo detector to obtain exports, transfer to computing machine to process and display facula deviation information by data acquisition circuit, the particular kind of relationship utilizing the propagation characteristic of the side-play amount of spot center and shock wave to exist obtains disturbance size and the direction of propagation of shock wave.
Structure of the present invention is simple, easy to operate, adopts four-quadrant photo detector to enormously simplify experimental provision, is judged disturbance size and the direction of propagation of shock wave, improve the sensitivity of detection by the movement of four-quadrant photo detector spot center; Adopt dichroic mirror to be separated by the laser of detecting light beam and pulsed gas laser, laser generation obtains real-time test result simultaneously, avoids the defect that when testing without laserresonator, region of discharge heat deposition is higher simultaneously.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is that the present invention is applied to detecting light beam and pulsed gas laser light direction a kind of example in the same way;
Fig. 3 is a kind of example that the present invention is applied to the pulsed gas laser that rear anti-mirror is all-trans;
Fig. 4 is the sectional view of the four-quadrant photo detector adopted in the present invention;
Fig. 5 is workflow diagram of the present invention;
Fig. 6 is the experimental result with Matlab software simulation.
Embodiment
The wave front of the high-density region composition that the various shock waves formed during pulsed gas laser work are corresponding is propagated to surrounding, in its communication process, form a density perturbation region; The region deviation that when light beam is propagated in nonhomogeneous media, the past density of meeting is high, the size of deviation is directly proportional to density gradient, deviation direction is identical with shock front normal direction, therefore can characterize by the size of facula deviation the density perturbation size that shock wave causes, and the angle of facula deviation judges sharp direction of wave travel.Utilize four-quadrant photo detector can real time record detection spot center position skew over time, disturbance size and the direction of propagation of shock wave in pulsed gas laser flow field can be obtained by the size of skew and angle.
The present invention is based on above-mentioned principle design to form, below in conjunction with accompanying drawing, the specific embodiment of the present invention is described further.It should be noted that at this, the explanation for these embodiments understands the present invention for helping, but does not form limitation of the invention.In addition, if below in described each embodiment of the present invention involved technical characteristic do not form conflict each other and just can mutually combine.
As shown in Figure 1, in pulsed gas laser chamber provided by the invention, the measurement mechanism of shock wave mainly comprises probe source 1, dichroic mirror 2, laser line filter 3, four-quadrant photo detector 4, data acquisition circuit 5 and computing machine 6.Wherein dichroic mirror 2, laser line filter 3 and four-quadrant photo detector 4 form opto-electronic receiver part, output signal in four-quadrant photo detector 4 is transferred to computing machine 6 processs and displays by data acquisition circuit 5, obtains size and the direction of propagation of shock wave.
Probe source 1 sends the optical axis direction keeping parallelism that the direction of light beam and pulsed gas laser produce, as shown in Figure 2, select the optical maser wavelength of probe source 1, can through the rear anti-mirror 11 of pulsed gas laser 10 and output window 12, can not the laser generation of paired pulses gas laser should have an impact through light beam; The spot diameter of light beam and the angle of divergence should be less, ensure to be less than 1mm at the spot diameter of search coverage, improve detection accuracy; Probe source 1 and four-quadrant photo detector 4 can together with controlled by two-dimension translational platform, thus can the real-time disturbance of shock wave of direct impulse gas laser flow field diverse location.Described in Fig. 2 is that rear anti-mirror 11 and output window 12 are all transparent to detecting light beam, if anti-mirror 21 is opaque after pulsed gas laser 20, but output window 22 is transparent, then device can be changed into device as shown in Figure 3, wherein the effect of spectroscope 23 is semi-transparent semi-reflecting to detecting light beam; Detecting light beam can enter from output window 22, through after after anti-mirror 21 reflects, still left by output window 22, by dichroic mirror 2, and after spectroscope 23, be irradiated to four-quadrant photo detector 4 through laser line filter 3.
Dichroic mirror 2 is at 45 ° with the optical axis of pulsed gas laser, and dichroic mirror 2 is narrowband reflection filters, and the centre wavelength of reflection is the output wavelength of laser instrument, and half peak value overall with (FWHM) of its reflection is less than 10nm; It only makes laser beam reflect and other wavelength light beam can be made to pass through, namely the laser emission of paired pulses gas laser has very high reflection, but the beam reflection of launching probe source is lower, this makes this measurement mechanism can not the duty of paired pulses gas laser and light path have an impact in test process, also avoids the destruction of laser emission to 4 quadrant detector of pulsed gas laser; Laser line filter 3 is arrowband transmission filter, its through centre wavelength be the wavelength that probe source sends, through half peak value overall with (FWHM) be less than 5nm, i.e. its laser that can only be launched by probe source 1, and the light of other wavelength of filtering; Thus reduce other factors further to the impact of detector.
Four-quadrant photo detector 4 has four symmetric photosurfaces, as shown in Figure 4.Before measuring, need finely tune position and the angle of four-quadrant photo detector 4, the hot spot that probe source 1 is launched is evenly distributed in four quadrants.The response frequency of four-quadrant photo detector 4 can reach tens megahertzes, and the shock-wave disturbance cycle is in several microsecond, therefore, it is possible to meet the demand of real-time detection.Optical filter described in light path only makes detection light pass through, and can prevent the laser etc. of pulsed gas laser from causing damage to four-quadrant photo detector.
Data acquisition circuit 5 comprises enlarge leadingly, and photosignal is input to computing machine 6 and processs and displays by A/D change-over circuit etc., obtains spot center offset information; Utilize the light beam deviation rule caused in shock propagation process to obtain the size and Orientation of shock-wave disturbance further, wherein the size of side-play amount characterizes sharp wave intensity, and the angle of side-play amount can judge sharp direction of wave travel.
The workflow of shock wave measurement device in pulsed gas laser flow field of the present invention is described according to Fig. 5 below.
Before pulse gas work, mobile probe source 1 is placed on the position of required detection, the position of corresponding adjustment four-quadrant photo detector 4, makes hot spot that probe source 1 is launched behind the flow field of pulsed gas laser, is evenly distributed in four quadrants of four-quadrant photo detector 4.Can produce the strong electromagnetic of tens nanoseconds after pulsed gas laser pulse excitation, this electromagnetic interference (EMI) is as the trigger pip of four-quadrant photo detector 4.
Pulse excitation is along with a large amount of energy depositions, a lot of shock waves is produced in the flow field of pulsed gas laser, these shock waves are to surrounding diffusive transport, can make it that deviation occurs through detection light, spot center is moved, and the output of four quadrants of four-quadrant photo detector 4 changes.The voltage making one to four-quadrant produce is respectively U
1, U
2, U
3, U
4, then hot spot is respectively in horizontal and vertical side-play amount:
Wherein k is the preset parameter of four-quadrant photodetection, reflects the variable quantity of light intensity and the relation of facula position amount of movement, can obtain by carrying out demarcation to detector.(1) formula of utilization can obtain facula deviation size ρ and deviation angle θ:
Shock wave is when detecting light beam, and detecting light beam can towards shock wave deviation, and offset direction and wave front normal direction are mutually on the contrary when shock wave is through detecting light beam, and detecting light beam is equally towards shock wave deviation, and now deviation direction is identical with wave front normal direction.Therefore at shock wave through detecting light beam, deflection of light size remains constant, but shock wave near and away from time deflection of light degree can differ 180 °, and the direction of shock propagation and shock wave away from time the hot spot deflection angle that causes equal.Because the high density wave front of Shock wave has certain width, what can detect is the output signal of Temporal Evolution, and what therefore obtain is the real-time information of facula deviation.When shock wave is by detecting light beam, the not facula deviation amount ρ of t in the same time
(t)can be expressed from the next with hot spot deflection angle theta (t):
Figure 6 shows that the real-time change information of the facula deviation amount size that shock wave that Matlab software simulation propagates toward 45 ° of directions causes through detecting light beam and hot spot deflection angle size, the size of wherein shock-wave disturbance is ρ
(t) max, and angle when shock propagation direction and shock wave leave detecting light beam is identical, namely identical with the latter half of hot spot angular deflection result, propagates toward 45 ° of directions.Because four-quadrant photo detector 4 has higher look-in frequency, therefore, it is possible to reflect the evolution of shock wave in flow field in real time, the shock-wave disturbance size and Orientation in observation flow field.
The present invention can well detect shock wave in laser chamber, accurately can judge size and the direction of propagation of shock wave, and have higher sensitivity, the series of advantages such as measurement mechanism is simple, method is easy.
The above is preferred embodiment of the present invention, but the present invention should not be confined to the content disclosed in this embodiment and accompanying drawing.The equivalence completed under not departing from spirit disclosed in this invention so every or amendment, all fall into the scope of protection of the invention.
Claims (1)
1. the pulsed gas laser chamber flow field measurement mechanism based on 4 quadrant detector, comprise probe source, detection optical receiver system, data acquisition circuit and computing machine, it is characterized in that: the light beam that probe source sends is parallel with the optical axis direction of pulsed gas laser; Described detection optical receiver system comprises four-quadrant photo detector, and wherein the photosurface of four-quadrant photo detector is vertical with detecting light beam towards search coverage, for receiving the exploring laser light light beam that probe source sends; Export on computing machine after the signal of four-quadrant photo detector is gathered by data acquisition circuit and process and display;
Described detection optical receiver system also comprises dichroic mirror, laser line filter and spectroscope, described light splitting minute surface, double-colored minute surface become miter angle with detecting light beam, described laser rays filter plate is vertical with detecting light beam, described detecting light beam is respectively through the center of light splitting minute surface and double-colored minute surface, and via after measured laser device reflective surface again through double-colored minute surface and the center of light splitting minute surface and the center of laser rays filter plate, finally received by 4 quadrant detector; Laser line filter is to the high saturating arrowband transmission filter of exploring laser light bundle; Dichroic mirror is the high anti-narrowband reflection filter of paired pulses laser beam; Spectroscope is to the semi-transparent semi-reflecting optical filter of detection light;
Before pulse gas work, mobile probe source is placed on the position of required detection, the position of corresponding adjustment four-quadrant photo detector, the hot spot that probe source is launched, behind the flow field of pulsed gas laser, is evenly distributed in four quadrants of four-quadrant photo detector; Can produce the strong electromagnetic of tens nanoseconds after pulsed gas laser pulse excitation, this electromagnetic interference (EMI) is as the trigger pip of four-quadrant photo detector;
During pulsed gas laser work, in flow field, larger energy is injected instantaneously after each discharge excitation, and in flow field, form various shock wave, there is the wave front of a high-density region in these shock waves, detecting light beam generation deviation can be made, the change that all quadrants utilizing four-quadrant photo detector to obtain exports, transfer to computing machine to process and display facula deviation information by data acquisition circuit, the particular kind of relationship utilizing the propagation characteristic of the side-play amount of spot center and shock wave to exist obtains disturbance size and the direction of propagation of shock wave.
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| CN201210423106.3A CN102980739B (en) | 2012-10-30 | 2012-10-30 | Pulse gas laser intracavity flow field measurement device based on four-quadrant detector |
| PCT/CN2012/084929 WO2014067184A1 (en) | 2012-10-30 | 2012-11-21 | Apparatus based on four-quadrant detector and for measuring flow field in cavity of pulsed gas laser |
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| CN201210423106.3A CN102980739B (en) | 2012-10-30 | 2012-10-30 | Pulse gas laser intracavity flow field measurement device based on four-quadrant detector |
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| EP3321628B1 (en) * | 2016-11-10 | 2020-01-01 | Klingelnberg AG | Coordinate measuring device comprising an optical sensor, and corresponding method |
| CN111439371B (en) * | 2020-04-22 | 2022-02-18 | 厦门大学 | Hypersonic aircraft drag reduction method based on laser plasma |
| CN111804913A (en) * | 2020-06-15 | 2020-10-23 | 上海航天设备制造总厂有限公司 | 3D printing apparatus integrating molding and detection |
| CN113295629B (en) * | 2021-04-08 | 2022-06-07 | 西安电子科技大学 | Spectral absorptivity distribution acquisition method and system |
| CN113514152A (en) * | 2021-06-18 | 2021-10-19 | 中国人民解放军国防科技大学 | Weak light signal detection system capable of identifying signal incoming direction |
| CN114577692B (en) * | 2022-04-21 | 2023-03-24 | 亿慧云智能科技（深圳）股份有限公司 | Intelligent negative ion concentration detection device and detection method |
| CN116256107B (en) * | 2023-05-16 | 2023-07-21 | 中北大学 | Dynamic and static balance detection device and method based on four-quadrant photoelectric detector |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1245894A (en) * | 1998-08-26 | 2000-03-01 | 中国科学院光电技术研究所 | Space three-dimensional flow field real-time measurement system |
| CN1844873A (en) * | 2006-05-22 | 2006-10-11 | 中国科学院光电技术研究所 | Supersonic speed flow field detection system based on H-S wave front sensor and detection method thereof |
| CN101464206A (en) * | 2009-01-20 | 2009-06-24 | 西安交通大学 | Test device for turbulent flow gas-liquid blending flow field in transverse flow |
| CN101782435A (en) * | 2010-03-11 | 2010-07-21 | 中国科学院上海光学精密机械研究所 | Laser parameter comprehensive test system |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2752375A1 (en) * | 1977-11-24 | 1979-06-07 | Messerschmitt Boelkow Blohm | Precision angular displacement transducer and indicator - use laser beam and quadrant detector with automatic alignment correction |
| JPS6070923U (en) * | 1983-10-19 | 1985-05-20 | パイオニア株式会社 | Focus error detection device |
| JP3345710B2 (en) * | 1998-06-29 | 2002-11-18 | 住友重機械工業株式会社 | Laser oscillator real-time image monitoring system and real-time image monitoring method |
| JP2005140528A (en) * | 2003-11-04 | 2005-06-02 | Toshiba Corp | Fluid measurement device |
| DE102004018529B4 (en) * | 2004-04-14 | 2007-01-18 | Enotec Gmbh, Prozess- Und Umweltmesstechnik | laser measurement system |
| CN100476364C (en) * | 2007-11-13 | 2009-04-08 | 长春理工大学 | Complete digitisation 4 quadrant detector detecting laser beam deflection angle device and method |
| CN101285666B (en) * | 2008-05-29 | 2011-04-13 | 重庆大学 | Laser targeting device based on four quadrant optical-electric detector |
| CN101806717B (en) * | 2010-04-21 | 2011-07-13 | 中国科学院上海光学精密机械研究所 | Measuring device for nonlinear transmission characteristic of laser beam |
| CN102323445B (en) * | 2011-06-14 | 2012-11-21 | 华中科技大学 | Method for measuring flowing velocity of recycle gas in multiple laser cavity |
-
2012
- 2012-10-30 CN CN201210423106.3A patent/CN102980739B/en not_active Expired - Fee Related
- 2012-11-21 WO PCT/CN2012/084929 patent/WO2014067184A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1245894A (en) * | 1998-08-26 | 2000-03-01 | 中国科学院光电技术研究所 | Space three-dimensional flow field real-time measurement system |
| CN1844873A (en) * | 2006-05-22 | 2006-10-11 | 中国科学院光电技术研究所 | Supersonic speed flow field detection system based on H-S wave front sensor and detection method thereof |
| CN101464206A (en) * | 2009-01-20 | 2009-06-24 | 西安交通大学 | Test device for turbulent flow gas-liquid blending flow field in transverse flow |
| CN101782435A (en) * | 2010-03-11 | 2010-07-21 | 中国科学院上海光学精密机械研究所 | Laser parameter comprehensive test system |
Non-Patent Citations (1)
| Title |
|---|
| Measurement of Gas Temperature Profile in Discharge Region of Excimer Laser with Laser Schlieren Method;Shinichiroh KOSUGI等;《Jpn.J.Appl.phys.》;19931130;第32卷;第4980-4986页 * |
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