CN102979941A - 一种自带传感器的大流量压电叠堆阀 - Google Patents
一种自带传感器的大流量压电叠堆阀 Download PDFInfo
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- CN102979941A CN102979941A CN2012105436910A CN201210543691A CN102979941A CN 102979941 A CN102979941 A CN 102979941A CN 2012105436910 A CN2012105436910 A CN 2012105436910A CN 201210543691 A CN201210543691 A CN 201210543691A CN 102979941 A CN102979941 A CN 102979941A
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110425305A (zh) * | 2019-09-27 | 2019-11-08 | 潍柴动力股份有限公司 | 泄压阀及控制泄压阀压力的方法 |
CN110440046A (zh) * | 2019-09-06 | 2019-11-12 | 厦门赛尔特电子有限公司 | 一种液体传递行程放大式压电开关阀 |
CN111373182A (zh) * | 2017-11-24 | 2020-07-03 | 株式会社富士金 | 阀装置以及使用该阀装置的控制装置的控制方法、流体控制装置以及半导体制造装置 |
CN113775772A (zh) * | 2021-08-25 | 2021-12-10 | 南京航空航天大学 | 一种航空燃油计量调节压电阀及其工作方法 |
CN114294290A (zh) * | 2022-01-10 | 2022-04-08 | 江苏大学 | 一种阵列压电叠堆驱动式高速开关阀及其控制方法 |
CN114427554A (zh) * | 2021-12-28 | 2022-05-03 | 南京航空航天大学 | 一种压电叠堆驱动的滑阀式高速开关阀及控制方法 |
US11530755B2 (en) | 2018-11-27 | 2022-12-20 | Hamilton Sundstrand Corporation | Servo valve |
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JPH06117561A (ja) * | 1992-10-05 | 1994-04-26 | Unisia Jecs Corp | 圧電素子駆動流体制御弁 |
JPH1113583A (ja) * | 1997-06-25 | 1999-01-19 | Nissan Motor Co Ltd | エンジンの燃料噴射装置 |
CN1472457A (zh) * | 2000-05-08 | 2004-02-04 | 速睦喜股份有限公司 | 压电式流体控制阀 |
EP1135595B1 (de) * | 1999-09-30 | 2004-12-15 | Robert Bosch Gmbh | Ventil zum steuern von flüssigkeiten |
CN101319688A (zh) * | 2007-06-04 | 2008-12-10 | 北京航空航天大学 | 一种新型智能压电型电液伺服阀 |
DE102008001647A1 (de) * | 2008-05-08 | 2009-11-12 | Zf Friedrichshafen Ag | Steuerventil |
CN202108708U (zh) * | 2011-06-24 | 2012-01-11 | 浙江师范大学 | 自带传感器的压电叠堆泵 |
CN202992329U (zh) * | 2012-12-13 | 2013-06-12 | 浙江师范大学 | 一种自带传感器的大流量压电叠堆阀 |
-
2012
- 2012-12-13 CN CN201210543691.0A patent/CN102979941B/zh active Active
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS6078179A (ja) * | 1983-10-04 | 1985-05-02 | Shoketsu Kinzoku Kogyo Co Ltd | 流体制御弁 |
US4762300A (en) * | 1985-02-19 | 1988-08-09 | Nippondenso Co., Ltd. | Control valve for controlling fluid passage |
JPH06117561A (ja) * | 1992-10-05 | 1994-04-26 | Unisia Jecs Corp | 圧電素子駆動流体制御弁 |
JPH1113583A (ja) * | 1997-06-25 | 1999-01-19 | Nissan Motor Co Ltd | エンジンの燃料噴射装置 |
EP1135595B1 (de) * | 1999-09-30 | 2004-12-15 | Robert Bosch Gmbh | Ventil zum steuern von flüssigkeiten |
CN1472457A (zh) * | 2000-05-08 | 2004-02-04 | 速睦喜股份有限公司 | 压电式流体控制阀 |
CN101319688A (zh) * | 2007-06-04 | 2008-12-10 | 北京航空航天大学 | 一种新型智能压电型电液伺服阀 |
DE102008001647A1 (de) * | 2008-05-08 | 2009-11-12 | Zf Friedrichshafen Ag | Steuerventil |
CN202108708U (zh) * | 2011-06-24 | 2012-01-11 | 浙江师范大学 | 自带传感器的压电叠堆泵 |
CN202992329U (zh) * | 2012-12-13 | 2013-06-12 | 浙江师范大学 | 一种自带传感器的大流量压电叠堆阀 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111373182A (zh) * | 2017-11-24 | 2020-07-03 | 株式会社富士金 | 阀装置以及使用该阀装置的控制装置的控制方法、流体控制装置以及半导体制造装置 |
US11530755B2 (en) | 2018-11-27 | 2022-12-20 | Hamilton Sundstrand Corporation | Servo valve |
CN110440046A (zh) * | 2019-09-06 | 2019-11-12 | 厦门赛尔特电子有限公司 | 一种液体传递行程放大式压电开关阀 |
CN110425305A (zh) * | 2019-09-27 | 2019-11-08 | 潍柴动力股份有限公司 | 泄压阀及控制泄压阀压力的方法 |
CN113775772A (zh) * | 2021-08-25 | 2021-12-10 | 南京航空航天大学 | 一种航空燃油计量调节压电阀及其工作方法 |
CN114427554A (zh) * | 2021-12-28 | 2022-05-03 | 南京航空航天大学 | 一种压电叠堆驱动的滑阀式高速开关阀及控制方法 |
CN114294290A (zh) * | 2022-01-10 | 2022-04-08 | 江苏大学 | 一种阵列压电叠堆驱动式高速开关阀及其控制方法 |
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Inventor after: Han Junwu Inventor after: Yu Li Inventor after: Wang Shuyun Inventor after: Zeng Ping Inventor after: Cheng Guangming Inventor after: Ren Ping Inventor after: Liu Zuoming Inventor before: Han Junwu Inventor before: Yu Li Inventor before: Wang Shuyun Inventor before: Zeng Ping Inventor before: Cheng Guangming |
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Effective date of registration: 20140324 Address after: 321001 Zhejiang province Jinhua City Yingbin Road No. 688 Applicant after: Zhejiang Normal University Applicant after: Jilin Academy of Electric Power Science Applicant after: State Grid Corporation of China Address before: 321001 Zhejiang province Jinhua City Yingbin Road No. 688 Applicant before: Zhejiang Normal University |
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