CN102975106A - Precision airbag polishing tool system - Google Patents

Precision airbag polishing tool system Download PDF

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CN102975106A
CN102975106A CN2012105686403A CN201210568640A CN102975106A CN 102975106 A CN102975106 A CN 102975106A CN 2012105686403 A CN2012105686403 A CN 2012105686403A CN 201210568640 A CN201210568640 A CN 201210568640A CN 102975106 A CN102975106 A CN 102975106A
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air bag
fixed
motor
sleeve
polishing tool
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CN102975106B (en
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郭隐彪
王春锦
王振忠
潘日
吴沿鹏
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Xiamen University
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Xiamen University
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Abstract

The invention provides a precision airbag polishing tool system and relates to a polishing tool. The precision airbag polishing tool system is provided with a polishing head, a hydraulic expansion sleeve, a movable balancing fixed plate, a movable balancing slide ring, a lower end cover, a ventilating hole hose joint, a spindle box body, a swinging arm, an upper end cover, a motor, a spiral water sleeve, a spindle, a sleeve, a motor encoder, a motor cover and a bearing, wherein the polishing head is fixed at the tail end of the spindle; the spindle is located in the spindle box body through the bearing, the upper end cover and the lower end cover; the spindle box body is arranged on the swinging arm in a sleeving manner; the ventilating hole hose joint is communicated with the spindle box body after penetrating through the swinging arm; the movable balancing fixed plate is fixed at the bottom of the swinging arm; the movable balancing slide ring is fixed on a shaft shoulder at the end part of the spindle; a motor mover is fixed on the spindle; the spiral water sleeve is fixed on a motor stator and placed outside the motor mover; the motor encoder is fixed at the top end of the spindle; the sleeve is arranged at the upper part of the spiral water sleeve in a sleeving manner; the motor cover presses the sleeve and is fixed on a motor housing; an airbag of the polishing head is arranged on a shaft end connecting head in a sleeving manner; an elastic sleeve is arranged on the airbag in a sleeving manner; and a sensor is stuck to the inner wall of the airbag.

Description

A kind of accurate air bag polishing tool system
Technical field
The present invention relates to polishing tool, especially relate to a kind of accurate air bag polishing tool system.
Background technology
The gasbag-type polishing technology is the polishing new technology of being united proposition by Britain ZEEKO company and optical laboratory, London the nineties in 20th century.It adopts the spherical air bag with certain inflation pressure as polishing tool, can guarantee that not only rubbing head and polished surface of the work anastomose property are good, and can be by regulating the surface quality of inside air bag pressure control polishing efficiency and polished workpiece, it is a kind of finishing method that has development potentiality, be particularly useful for the polishing of aspheric surface and free form surface, successfully be applied to EURO50 large-scale astronomical telescope engineering.Air bag polishing adopts a kind of precession motion mode of uniqueness, and namely in the polishing process, the air bag axis of rotation is fixed angle (title angle of precession) with the local normal of workpiece all the time and polishes.The profile of polishing air bag is flexible spherical crown, and special-purpose polished die is pasted in the outside, such as polyurethane polishing pad, polishing cloth etc.It is loaded on the workpiece of rotation, forms the cavity of sealing, be filled with low-pressure gas in the chamber, and can control the pressure of gas.The polishing air bag rotates with rotation working part, by the effect of polishing fluid, reaches the purpose on polished glass surface.
Present employed air bag polishing tool has following some deficiency:
1) main shaft main shaft when High Rotation Speed does not guarantee certain dynamic balancing.Because main shaft turns scooter 3000r/min when work, a small imbalance can cause very large eccentric moment, is necessary so regulate its dynamic balancing.
2) stress of polishing contact area can't gather.Air bag polishing belongs to the certainty polishing, and it removes the directly final precision of processing the back type of obtaining of function model.Because the removal function during air bag polishing can be represented by the formula according to the Princeton equation:
dz dt = k · p · v
In the formula
Figure BDA00002639456500012
Be material removing rate, k is for removing proportionality coefficient, and is relevant with the condition of polishing, and such as pad material, polishing fluid material etc. can obtain by experiment; ν is polishing velocity, can draw by the motion model computing; P is contact zone stress, at present can only theoretical calculate, but calculate that result and actual result have a certain distance, particularly necessity so the stress distribution that adopts laboratory facilities to obtain the contact zone seems.
3) air bag axially draws high distortion.During axially the drawing high distortion and will directly cause polishing of air bag, the volume under pressure of air bag is difficult to control, causes difficult processing to carry out.
4) it is serious that the motor feels hot.
Chinese patent CN101829945A discloses a kind of main and auxiliary combined type air bag polishing tool, comprises air bag, and gas transmission shaft and air pump, air bag comprise retainer and air bag outer cover, and the air bag outer cover is installed on retainer; The hollow section of gas transmission shaft is connected with the other end of retainer, and the solid-end of gas transmission shaft is connected with a rotary drive mechanism; The gas transmission shaft is set in the gas conducting cover, and the gas conducting puts and is provided with through hole, and through hole is communicated with the gas outlet of air pump, is tightly connected between gas conducting cover and the gas transmission shaft; Air bag is communicated with the gas transmission shaft by rotating disk, fills the sub-air bag of a plurality of solid pressures and the sub-air bag of a plurality of controllable pressure in the air bag; Rotating disk is provided with main passage and secondary passage, and rotating disk is connected with guiding mechanism.This invention has increased the auxiliary balloon controlling unit, has improved the controllability to the inside air bag structure; The inside air bag composite behaviour is good, satisfies the polytropy demand; Structure realizes simple and convenient.
Chinese patent CN101823228A discloses a kind of air bag polishing tool that can initiatively distribute abrasive particle, comprise air bag, gas transmission shaft and air pump, air bag comprises retainer and air bag outer cover, the gas transmission shaft is set in the gas conducting cover, the gas conducting puts and is provided with through hole, and through hole is communicated with the gas outlet of air pump, is tightly connected between gas conducting cover and the gas transmission shaft; Polishing tool comprises that also the priming device and that is loaded with polishing fluid connects liquid device; Connect liquid device and comprise that the liquid dish that is fixed on the gas transmission shaft and Duo Gen carry the woven hose of polishing fluid, liquid dish is provided with annular and connects liquid bath and be communicated with the fluid course that connects liquid bath and woven hose; Connect liquid bath and aim at the fluid injection nozzle of priming device, the fluid injection nozzle with connect flume seal and be connected; Be evenly distributed with a series of fluid hole on the air bag outer cover, fluid hole is communicated with the outlet of woven hose.This invention has the advantage that automatic interpolation polishing fluid, abrasive particle initiatively distribute and abrasive dust is processed automatically in polishing process.
Summary of the invention
The object of the invention is to solve the deficiencies in the prior art, a kind of accurate air bag polishing tool system is provided.
The present invention is provided with rubbing head, hydraulic expanding cover, dynamic balancing fixed disk, dynamic balancing slip ring, bottom end cover, passage hose coupling, main spindle box body, swing arm, upper end cover, motor housing, motor stator, electric mover, spiral water jacket, main shaft, sleeve, motor encoder, motor cover and bearing; Described rubbing head is fixed in the end of main shaft by hydraulic expanding cover, and main shaft is positioned in the main spindle box body by two bearings and upper end cover and bottom end cover, and main spindle box body is placed in the swing arm, and the passage hose coupling passes swing arm and is threaded connection with main spindle box body and is communicated with; The dynamic balancing fixed disk is fixed in the swing arm bottom, and the dynamic balancing slip ring is fixed on the shaft shoulder of spindle nose, and electric mover is fixed on the main shaft, and spiral water jacket is fixed on the motor stator and places electric mover outside; Motor encoder is fixed in the main shaft top, and sleeve is placed in spiral water jacket top, and the motor cover clamp sleeve also is fixed on the motor housing; Described rubbing head is provided with axle head connector, air bag, resilient sleeve, lock sleeve and sensor, and air bag is placed on the axle head connector, and resilient sleeve is placed on the air bag, and sensor is affixed on the air bag inwall, and the array distribution of sensor is looked the size of air bag and concrete condition and changed.
Described main shaft is by two bearings and upper end cover and bottom end cover is positioned in the main spindle box body and usefulness sealing felt-ring seal.
Described main spindle box body is placed in the swing arm and passes through screw lock.
Described dynamic balancing slip ring is fixed by screws on the shaft shoulder of end of main shaft.
Described spiral water jacket is fixed on the motor stator and places electric mover outside and locate by motor housing.
Described motor cover clamp sleeve also is fixed on the motor housing by screw.
Described resilient sleeve is placed on the air bag and by screwing lock sleeve from the radial and axial air bag of fixing.
Described sensor can adopt the piezoelectric type bilateral transducer.
The present invention has following outstanding feature:
1. dispose sliding ring type dynamic balancing control system, solved the dynamic equilibrium problems of main shaft.
2. can extract accurately the pressure distribution of polishing contact area, and show its pressure distribution cloud atlas by supporting control display system, and can change by control system the input voltage of sensor, and make it that deformation occur, solve air bag and press down the problem that occurs indent in the process.
3. use unique air bag locking technology, not only make the air bag mounting or dismounting convenient, and can suppress air bag axially draw high distortion, thereby improve the surface precision of the workpiece after the polishing.
4. solved the heat dissipation problem of spindle motor, avoided affecting its normal operation because electric machine temperature rise is too high.
Description of drawings
Fig. 1 is the structural representation of the embodiment of the invention.
Fig. 2 is the structural representation of rubbing head in the embodiment of the invention.
Fig. 3 is the distribution schematic diagram of piezoelectric type bilateral transducer in air bag in the embodiment of the invention.
Fig. 4 is the structural representation of embodiment of the invention Elastic cover.
Fig. 5 is the operation principle schematic diagram of embodiment of the invention Elastic cover.
Below provide the mark of each critical piece in Fig. 1~5:
The 1-rubbing head, 1-1-axle head connector, 1-2-air bag, 1-3-resilient sleeve, 14-lock sleeve, 1-5-piezoelectric type bilateral transducer; The 2-hydraulic expanding cover, 3-dynamic balancing fixed disk, 4-dynamic balancing slip ring, the 5-bottom end cover, 6-passage hose coupling, 7-casing, the 8-swing arm, the 9-upper end cover, 10-seals felt collar, the 11-motor housing, 12-motor stator, 13-electric mover, the 14-spiral water jacket, 15-main shaft, 16-sleeve, the 17-motor encoder, 18-motor cover, 19-bearing.
The specific embodiment
The technical solution adopted for the present invention to solve the technical problems is: by the supporting control system of sliding ring type dynamic balance instrument control slip ring inner two independently the movement of balancing rotor realize the dynamic balancing of main shaft.Outside thermostatted water enters spiral water jacket by the water inlet on the motor housing, and water is through the cooling effect of the realization of the spiral channel in the spiral water jacket to motor stator, and the delivery port from motor housing flows out.When the rubbing head polishing workpiece, the piezoelectric type bilateral transducer of rubbing head inside can spread out of voltage signal, and is converted into pressure signal and demonstration and output pressure data by the control system of outside.Because air bag is in pressing down process, increase along with volume under pressure, the indent phenomenon can appear, be unfavorable for processing, can utilize the pressure signal of output this moment, judges the position of indent, the input voltage of the piezoelectric type bilateral transducer by changing this position, make it that deformation occur, resist the indent of air bag, thereby make the pressure maintenance class Gauss's of contact zone distribution.
Below in conjunction with accompanying drawing technical scheme of the present invention is further elaborated.
Shown in Fig. 1~5, the primary structure of the embodiment of the invention is comprised of rubbing head 1, hydraulic expanding cover 2, dynamic balancing fixed disk 3, dynamic balancing slip ring 4, bottom end cover 5, passage hose coupling 6, main spindle box body 7, swing arm 8, upper end cover 9, sealing felt collar 10, motor housing 11, motor stator 12, electric mover 13, spiral water jacket 14, main shaft 15, sleeve 16, motor encoder 17, motor cover 18 and bearing 19.Rubbing head 1 is fixed in the end of main shaft 15 by hydraulic expanding cover 2, main shaft 15 by two bearings 19 and up and down end cap 5,9 be positioned in the main spindle box body 7 and with 10 sealings of sealing felt collar, main spindle box body 7 is placed in the swing arm 8, by screw lock, passage hose coupling 6 passes swing arm 8 and is threaded connection with main spindle box body 7 and is communicated with.Dynamic balancing fixed disk 3 is fixed in swing arm 8 bottoms, dynamic balancing slip ring 4 is fixed by screws on the shaft shoulder of end of main shaft 15, electric mover 13 is fixed on the main shaft 15, spiral water jacket 14 is fixed in and places electric mover 13 outside by motor housing 11 location on the motor stator 12, motor encoder 17 is fixed in main shaft 15 tops, sleeve 16 is placed in spiral water jacket 14 tops, and motor cover 18 clamp sleeves 16 also are fixed on the motor housing 11 by screw.
Fig. 2 is the schematic diagram after rubbing head amplifies, and rubbing head 1 comprises axle head connector 1-1, air bag 1-2, resilient sleeve 1-3, lock sleeve 1-4, piezoelectric type bilateral transducer 1-5.Air bag 1-2 is placed on the axle head connector 1-1, resilient sleeve 1-3 is placed on the air bag 1-2, be threaded connection between lock sleeve 1-4 and the axle head connector 1-1, by screwing lock sleeve 1-4 from the radial and axial air bag 1-2 that fixes, piezoelectric type bilateral transducer 1-5 is affixed on air bag 1-2 inwall.
Fig. 3 is the array distribution schematic diagram of piezoelectric type bilateral transducer 1-5 in air bag 1-2.Because the angle of precession in when polishing is mostly between 0~30 degree, thus for the distribution of piezoelectric type bilateral transducer 1-5 as shown in Figures 2 and 3, distribute ringwise, and the angle number that equates of each central spacer.And in reality processing the angle of precession that adopt about 20 degree values more, so the distribution of piezoelectric type bilateral transducer be in the middle of the close both sides rule of dredging, be convenient to accurately extract pressure distribution.For actual conditions, can adjust according to the angle of precession that size and the processing of air bag 1-2 are adopted often the distribution of piezoelectric type bilateral transducer 1-5.Piezoelectric type bilateral transducer 1-5 has had corresponding control system just and display system and software, can be used for the demonstration output of pressure distribution, and the distortion of multi channel piezoelectric type bilateral transducer 1-5, is used for overcoming the indent problem that air bag 1-2 presses down process.
Fig. 4 is the schematic diagram of resilient sleeve 1-3, and it is inverted-cone ringwise, is made by plastics or softer metal material.Has symmetrical grooving, so that it is easy to occur contraction radially.As shown in Figure 5, by screwing lock sleeve 1-4, provide pressure to the resilient sleeve 1-3 conical surface, after this pressure decomposes, respectively effect and the axial A of air bag 1-2 and radially B, thus one side is fixed air bag 1-2, can prevent that again it from axial drawing high distortion.In Fig. 5, mark P is that lock sleeve applies power.
During work, main shaft 15 High Rotation Speeds, by the supporting control system of sliding ring type dynamic balance instrument (3,4) control dynamic balancing slip ring 4 inner two independently the movement of balancing rotor realize the dynamic balancing of main shaft 15.Outside thermostatted water enters spiral water jacket 14 by the water inlet on the motor housing 11, and water is through the cooling effect of the realization of the spiral channel in the spiral water jacket 14 to motor stator 12, and the delivery port from motor housing 11 flows out.When rubbing head 1 polishing workpiece, the piezoelectric type bilateral transducer 1-5 of rubbing head 1 inside can spread out of voltage signal, and is converted into pressure signal and demonstration and output pressure data by the control system of outside.Because air bag 1-2 is in pressing down process, increase along with volume under pressure, the indent phenomenon can appear, be unfavorable for processing, can utilize the pressure signal of output this moment, judges the position of indent, the input voltage of piezoelectric type bilateral transducer 1-5 by changing this position, make it that deformation occur, resist the indent of air bag, thereby make the pressure maintenance class Gauss's of contact zone distribution.

Claims (8)

1. an accurate air bag polishing tool system is characterized in that being provided with rubbing head, hydraulic expanding cover, dynamic balancing fixed disk, dynamic balancing slip ring, bottom end cover, passage hose coupling, main spindle box body, swing arm, upper end cover, motor housing, motor stator, electric mover, spiral water jacket, main shaft, sleeve, motor encoder, motor cover and bearing; Described rubbing head is fixed in the end of main shaft by hydraulic expanding cover, and main shaft is positioned in the main spindle box body by two bearings and upper end cover and bottom end cover, and main spindle box body is placed in the swing arm, and the passage hose coupling passes swing arm and is threaded connection with main spindle box body and is communicated with; The dynamic balancing fixed disk is fixed in the swing arm bottom, and the dynamic balancing slip ring is fixed on the shaft shoulder of spindle nose, and electric mover is fixed on the main shaft, and spiral water jacket is fixed on the motor stator and places electric mover outside; Motor encoder is fixed in the main shaft top, and sleeve is placed in spiral water jacket top, and the motor cover clamp sleeve also is fixed on the motor housing; Described rubbing head is provided with axle head connector, air bag, resilient sleeve, lock sleeve and sensor, and air bag is placed on the axle head connector, and resilient sleeve is placed on the air bag, and sensor is affixed on the air bag inwall.
2. a kind of accurate air bag polishing tool as claimed in claim 1 system is characterized in that described main shaft is positioned in the main spindle box body by two bearings and upper end cover and bottom end cover and with the sealing felt-ring seal.
3. a kind of accurate air bag polishing tool as claimed in claim 1 system is characterized in that described main spindle box body is placed in the swing arm and passes through screw lock.
4. a kind of accurate air bag polishing tool as claimed in claim 1 system is characterized in that described dynamic balancing slip ring is fixed by screws on the shaft shoulder of end of main shaft.
5. a kind of accurate air bag polishing tool as claimed in claim 1 system is characterized in that described spiral water jacket is fixed on the motor stator and places electric mover outside and locate by motor housing.
6. a kind of accurate air bag polishing tool as claimed in claim 1 system is characterized in that described motor cover clamp sleeve and is fixed on the motor housing by screw.
7. a kind of accurate air bag polishing tool as claimed in claim 1 system is characterized in that described resilient sleeve is placed on the air bag and by screwing lock sleeve from the radial and axial air bag of fixing.
8. a kind of accurate air bag polishing tool as claimed in claim 1 system is characterized in that described sensor adopts the piezoelectric type bilateral transducer.
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Cited By (23)

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Publication number Priority date Publication date Assignee Title
CN103317424A (en) * 2013-07-10 2013-09-25 厦门大学 Flexible polishing head
CN103586775A (en) * 2013-11-27 2014-02-19 厦门大学 Off-line-type gas bag polishing tool finisher
CN104162834A (en) * 2014-08-07 2014-11-26 陈菊芳 Polishing head
CN104972380A (en) * 2015-07-13 2015-10-14 厦门大学 Air bag polishing procession mechanism
CN105817968A (en) * 2016-06-07 2016-08-03 厦门大学 Machine for grinding wheel finishing and optical component grinding
CN107052451A (en) * 2017-06-19 2017-08-18 佛山海格利德机器人智能设备有限公司 A kind of saw cutting system
CN107756239A (en) * 2017-11-30 2018-03-06 苏州陈那自动化技术有限公司 A kind of face contacts burnishing device
CN108098555A (en) * 2018-02-09 2018-06-01 新昌县羽林街道智西机械厂 A kind of curved surface polishing machine
CN109676480A (en) * 2019-02-21 2019-04-26 宁波华数机器人有限公司 A kind of cookware automatic grinding bottom vehicle mouth device
CN111230709A (en) * 2020-03-31 2020-06-05 福建省佳美集团公司 Gasbag formula pottery polishing equipment
CN111230653A (en) * 2020-02-03 2020-06-05 天津大学 Novel wheeled gasbag polishing device
CN111283538A (en) * 2020-03-31 2020-06-16 福建省佳美集团公司 Bag type ceramic polishing equipment
CN111584355A (en) * 2014-04-18 2020-08-25 株式会社荏原制作所 Substrate processing apparatus and substrate processing system
CN112171436A (en) * 2020-09-17 2021-01-05 恒迈光学精密机械(杭州)有限公司 Wheel type polishing device and machining method
CN112247836A (en) * 2020-10-21 2021-01-22 厦门大学 Novel adjustable gasbag instrument head can be monitored to state
CN112605786A (en) * 2020-11-29 2021-04-06 厦门理工学院 Air bag head mechanism capable of adjusting pressure in segmented mode and air bag polishing device
CN112677036A (en) * 2021-01-19 2021-04-20 机械科学研究总院海西(福建)分院有限公司 Self-balancing vibration suppression mechanism for air bag tool
CN112743453A (en) * 2021-01-19 2021-05-04 机械科学研究总院海西(福建)分院有限公司 Airbag tool knife handle hydraulic expansion sleeve coaxial structure
CN112757143A (en) * 2020-12-30 2021-05-07 上海理工大学 Replaceable air bag polishing device for inner raceway of bearing outer ring
CN113478335A (en) * 2021-07-15 2021-10-08 中国科学院长春光学精密机械与物理研究所 Pitch burnishing device
CN114473854A (en) * 2021-12-30 2022-05-13 蚌埠中光电科技有限公司 Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head
CN114800224A (en) * 2022-06-06 2022-07-29 杭州问顶机器人制造有限公司 Spare part preprocessing device is used in coffee machine processing
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CN102328100A (en) * 2011-09-16 2012-01-25 安阳斯普机械有限公司 Electric main shaft for worm gear machine cutter
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Publication number Priority date Publication date Assignee Title
CN103317424B (en) * 2013-07-10 2016-04-13 厦门大学 A kind of flexible polishing head
CN103317424A (en) * 2013-07-10 2013-09-25 厦门大学 Flexible polishing head
CN103586775A (en) * 2013-11-27 2014-02-19 厦门大学 Off-line-type gas bag polishing tool finisher
CN111584355A (en) * 2014-04-18 2020-08-25 株式会社荏原制作所 Substrate processing apparatus and substrate processing system
CN104162834A (en) * 2014-08-07 2014-11-26 陈菊芳 Polishing head
CN104972380A (en) * 2015-07-13 2015-10-14 厦门大学 Air bag polishing procession mechanism
CN105817968A (en) * 2016-06-07 2016-08-03 厦门大学 Machine for grinding wheel finishing and optical component grinding
CN107052451A (en) * 2017-06-19 2017-08-18 佛山海格利德机器人智能设备有限公司 A kind of saw cutting system
CN107756239B (en) * 2017-11-30 2024-04-26 苏州陈那自动化技术有限公司 Surface contact polishing device
CN107756239A (en) * 2017-11-30 2018-03-06 苏州陈那自动化技术有限公司 A kind of face contacts burnishing device
CN108098555A (en) * 2018-02-09 2018-06-01 新昌县羽林街道智西机械厂 A kind of curved surface polishing machine
CN108098555B (en) * 2018-02-09 2023-08-22 佛山市东信机械有限公司 Curved surface polishing machine
CN109676480A (en) * 2019-02-21 2019-04-26 宁波华数机器人有限公司 A kind of cookware automatic grinding bottom vehicle mouth device
CN111230653A (en) * 2020-02-03 2020-06-05 天津大学 Novel wheeled gasbag polishing device
CN111283538B (en) * 2020-03-31 2022-03-29 福建省佳美集团公司 Bag type ceramic polishing equipment
CN111230709A (en) * 2020-03-31 2020-06-05 福建省佳美集团公司 Gasbag formula pottery polishing equipment
CN111283538A (en) * 2020-03-31 2020-06-16 福建省佳美集团公司 Bag type ceramic polishing equipment
CN112171436A (en) * 2020-09-17 2021-01-05 恒迈光学精密机械(杭州)有限公司 Wheel type polishing device and machining method
CN112247836A (en) * 2020-10-21 2021-01-22 厦门大学 Novel adjustable gasbag instrument head can be monitored to state
CN112605786A (en) * 2020-11-29 2021-04-06 厦门理工学院 Air bag head mechanism capable of adjusting pressure in segmented mode and air bag polishing device
CN112757143A (en) * 2020-12-30 2021-05-07 上海理工大学 Replaceable air bag polishing device for inner raceway of bearing outer ring
CN112743453A (en) * 2021-01-19 2021-05-04 机械科学研究总院海西(福建)分院有限公司 Airbag tool knife handle hydraulic expansion sleeve coaxial structure
CN112677036A (en) * 2021-01-19 2021-04-20 机械科学研究总院海西(福建)分院有限公司 Self-balancing vibration suppression mechanism for air bag tool
CN113478335B (en) * 2021-07-15 2022-09-20 中国科学院长春光学精密机械与物理研究所 Pitch burnishing device
CN113478335A (en) * 2021-07-15 2021-10-08 中国科学院长春光学精密机械与物理研究所 Pitch burnishing device
CN114473854A (en) * 2021-12-30 2022-05-13 蚌埠中光电科技有限公司 Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head
CN114473854B (en) * 2021-12-30 2023-02-28 蚌埠中光电科技有限公司 Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head
CN114800224A (en) * 2022-06-06 2022-07-29 杭州问顶机器人制造有限公司 Spare part preprocessing device is used in coffee machine processing
CN114800224B (en) * 2022-06-06 2023-08-18 厦门泰摩科技有限公司 Spare part preprocessing device for coffee machine processing
CN118404503A (en) * 2024-07-02 2024-07-30 中国工程物理研究院激光聚变研究中心 Machining force detection and control device, method and related equipment

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