CN112605786A - Air bag head mechanism capable of adjusting pressure in segmented mode and air bag polishing device - Google Patents
Air bag head mechanism capable of adjusting pressure in segmented mode and air bag polishing device Download PDFInfo
- Publication number
- CN112605786A CN112605786A CN202011367756.1A CN202011367756A CN112605786A CN 112605786 A CN112605786 A CN 112605786A CN 202011367756 A CN202011367756 A CN 202011367756A CN 112605786 A CN112605786 A CN 112605786A
- Authority
- CN
- China
- Prior art keywords
- air
- air bag
- pressure
- main shaft
- polishing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
- B24B13/012—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools conformable in shape to the optical surface, e.g. by fluid pressure acting on an elastic membrane
Abstract
The invention discloses an air bag polishing head mechanism capable of regulating pressure in sections and an air bag polishing device, wherein the polishing head mechanism comprises a back plate, a diaphragm, an air bag group and a fixed connection structure; the back plate is connected with the periphery of the diaphragm together, a sealed cabin is formed between the back plate and the diaphragm, and the bottom of the diaphragm is a circular plane; each air bag of the air bag group is concentrically and annularly arranged in the sealed cabin, the air bag group at least comprises a main pressure air bag and a side pressure air bag, each air bag is provided with an air valve, the air valve penetrates through a hole in the back plate to be connected with an air pipe, then different air pumps are connected, and a pipeline for connecting the air pipe and the air pump is provided with an electromagnetic overflow valve capable of controlling air inflation and deflation or controlling air pressure. The air bag polishing device also comprises a transmission mechanism, an air path mechanism and a fixing mechanism. The annular air bag group mechanism can control the air pressure of the annular air bag group in real time, thereby realizing real-time adjustment of the air pressure at each position of a polishing head and solving the problem of edge effect.
Description
Technical Field
The invention relates to the technical field of airbag polishing, in particular to an airbag head mechanism capable of adjusting pressure in a segmented mode and an airbag polishing device.
Background
High quality optical elements are very important in modern technology. In particular high quality aspheric optical elements. The fabrication of large terrestrial telescopes is a significant technical challenge, particularly in the fabrication of the optical components necessary to achieve very demanding performance. Very large terrestrial telescopes require many high quality large diameter optical elements to construct.
The use of ultra-precision optical polishing is based on computer-controlled optical surface fabrication. In contrast to other polishing methods, air-filled polishing heads are used as precision polishing tools that are flexible and can be well adapted to the shape of the part. As with other polishing techniques, edge quality is a critical factor affecting optical element performance.
A national invention patent entitled "a bladder polishing tool, system and method" having publication No. CN 104369064B discloses a bladder polishing tool based on an electrical proportional valve that can control the contact pressure and contact pressure of the polishing surface in real time. Comprises a motor, a speed reducer, a hollow rotating shaft and an air bag. The idle shaft is provided with a hollow cavity, two ends of the hollow cavity are respectively connected with the air bag and the vent pipe, the vent pipe is provided with an electric proportional valve, and the polishing air bag comprises a pressure sensor for detecting positive pressure. This patent can improve the machining precision, simplifies the polishing process, reduces the processing cost, nevertheless to the marginal effect problem that optical element produced in the course of working, can not effectual solution, leads to marginal machining precision very low.
The 'flexible air bag conformal polishing tool system' disclosed in the grant publication No. CN 207629812U adopts a turning type layout method that a motor is separated from a main shaft, so that air can enter the air bag through a rotary joint and a hollow shaft, and the problem that an air bag polishing tool head is easy to wind is avoided. It also does not solve the edge effect problem.
CN201010156371.0 discloses a main combined type gasbag polishing tool of assisting, its gasbag intussuseption is filled with a plurality of solid pressing sub-gasbags and a plurality of controllable pressing sub-gasbags, and this technique has increased supplementary gasbag control link, has improved the controllability to gasbag inner structure, and the inside combination property of gasbag is good, satisfies the variability demand. However, this patent application does not solve the problem of edge effect even if a plurality of air bags are provided.
In a word, the existing air bag polishing mechanism mostly solves the problem of directly inflating an air bag head and improves the processing precision by changing the contact pressure. The problem that the pressure generated by different positions of the air bag polishing head is different when the air bag polishing head is in contact with a workpiece is ignored, and the problem is directly brought about by an edge effect problem, namely the phenomenon that the edge is easy to warp or collapse in the machining process is easy to occur, and the phenomenon is particularly obvious for a flat-bottom polishing disk.
Therefore, a polishing device based on an air bag type is needed, which can solve the problem of edge effect caused by different pressures generated at different processing positions, and further improve the polishing precision.
Disclosure of Invention
The invention aims to solve the technical problem of providing an air bag head mechanism capable of adjusting pressure in a segmented mode.
Another object of the present invention is to provide an airbag polishing apparatus using the above airbag head mechanism.
In order to solve the technical problems, the technical solution of the invention is as follows:
a polishing head mechanism of an air bag capable of regulating pressure in sections comprises a back plate, a diaphragm, an air bag group consisting of at least two air bags and a fixed connection structure for fixing the edges of the back plate and the diaphragm; the back plate is connected with the periphery of the diaphragm, a sealed cabin is formed between the back plate and the diaphragm, and the bottom of the diaphragm is a circular plane; each air bag of the air bag group is concentrically and annularly arranged in the sealed cabin, the air bag group at least comprises a main pressure air bag positioned in the middle and a side pressure air bag positioned in an outer ring, each air bag is provided with an air valve, the air valve penetrates through a hole in the back plate to be connected with an air pipe, the air valves are respectively connected with different air pumps through air pipes, and a pipeline connected with the air pipes and the air pumps is provided with an electromagnetic overflow valve capable of controlling air charging and discharging or controlling air pressure.
Preferably, the airbag module further comprises one or more auxiliary pressure airbags located between the main pressure airbag and the side pressure airbag.
Preferably, the fixed connection structure comprises a locking nut and a flange plate, the sleeve below the flange plate is screwed in the locking nut, and the periphery edges of the back plate and the diaphragm are pressed and fixed by the sleeve below the flange plate and the step in the locking nut.
Preferably, the fixed connection structure comprises a locking nut and a sleeve, the sleeve is screwed in the locking nut, and the lower part of the sleeve and a step in the locking nut press and fix the peripheral edges of the back plate and the diaphragm together.
An air bag polishing device comprises the polishing head mechanism, a transmission mechanism, an air path mechanism and a fixing mechanism;
the transmission mechanism comprises a motor and a main shaft which are connected, the motor is fixed on the fixing mechanism, and the bottom end of the main shaft is locked in the locking nut;
the gas path mechanism comprises a rotary gas path structure, a fixed gas path structure and a gas pipe connecting structure; the rotary air path structure is arranged in the main shaft, namely, cavity bodies are axially arranged in the main shaft, and the number of the cavity bodies is the same as that of the air bags; the side wall of the main shaft is provided with air guide holes which are respectively communicated with the cavity bodies at different heights; the bottom of the main shaft is communicated with each cavity body and is respectively provided with an empty chamber; the fixed gas circuit structure comprises a gas circuit sleeve fixed on the fixing mechanism, inner ring grooves which are respectively opposite to each gas guide hole are formed in the inner wall of the gas circuit sleeve at different heights, and sealing structures are arranged among the inner ring grooves to prevent the grooves from being communicated; at least one vent hole which is communicated with the outer wall of the air path sleeve is arranged opposite to each inner ring groove, and each vent hole is connected with the air pump; one end of the air pipe connecting structure is respectively connected with different air bags, and the other end of the air pipe connecting structure is connected with different empty cabins at the tail end of the main shaft.
Preferably, the gas path sleeve is composed of a plurality of transition discs, the number of the transition discs is the same as that of the gas bags, sealing flanges are arranged between the transition discs and between the transition discs at the upper end and the lower end, and the transition discs and the sealing flanges are connected together through screws; the sealing flange plate is sleeved outside the main shaft in a sealing manner, the inner diameter of each transition plate is larger than the outer diameter of the main shaft, and gaps among the sealing flange plates, the transition plates and the main shaft form the inner annular groove; the side wall of each transition disc is provided with the vent hole.
Preferably, the fixing mechanism comprises a spindle box with an installation space therein, the motor is installed at the upper end of the spindle box, and the air passage sleeve is installed below the installation space.
Preferably, the gas circuit sleeve, namely each transition disc, is provided with an outer ring groove corresponding to each vent hole, and the upper side and the lower side of each outer ring groove are provided with sealing rings to seal each outer ring groove in a blocking way; the main spindle box is provided with air inlets corresponding to the positions of the outer ring grooves and communicated with the air pumps through the air inlets.
Preferably, the air pipe connecting structure comprises a cabin sealing plate and a plurality of quick-release joints; the cabin sealing plate is hermetically arranged at the lower end of the main shaft and seals each empty cabin; the bottom surface of the cabin sealing plate is provided with an opening corresponding to each empty cabin, and each opening is provided with one quick-release joint; one end of the quick-release joint is connected with one of the air pipes of the polishing head mechanism, and the other end of the quick-release joint is connected with a corresponding empty cabin.
Preferably, a bearing mechanism is further provided; the bearing mechanism comprises a bearing shell, a bearing and an end cover; the lower end of the bearing shell is fixedly connected with the end cover through a screw, the outer ring of the upper end of the bearing shell is connected with the fixing mechanism through a screw, and the inner ring of the upper end of the bearing shell is connected with the fixed gas circuit structure through a screw; the bearing shell, the fixing mechanism and the end cover are fixedly connected to form a sealed space, and the bearing is arranged in the sealed space.
After adopting the scheme, compared with the existing air bag polishing head and air bag polishing device, the air bag polishing device has the following outstanding characteristics:
1. by adopting the annular air bag group mechanism, the air pressure of the annular air bag group can be controlled in real time, so that the air pressure at each position of the polishing head can be adjusted in real time. In the process of air bag polishing, a to-be-polished piece is contacted with a polishing head to realize polishing operation in a certain path, pressure and angle, but when the to-be-polished piece is polished to the edge of a workpiece, the polishing head is partially out of the workpiece, so that the pressure on the surface of the workpiece is changed, and the removal amount is changed. The pressure change of the contact position can be regulated and controlled by changing the air pressure of each position of the polishing head, so that the aim of balancing the removal amount is fulfilled. An electromagnetic overflow valve is further arranged on a pipeline between the air pump and the air pipe, so that the input pressure of the air pump can be controlled in real time, and the air pressure of each position of the polishing head can be adjusted in real time.
2. According to the air bag polishing device, the main shaft is ventilated by the multiple cavities, so that different air bags can be independently regulated at the same time, and the problem of winding of an air pipe in the polishing process is solved. Because the main shaft of the invention adopts a semi-hollow multi-cavity structure, the inflation and deflation of a plurality of air bags in the annular air bag group can be independently controlled without mutual interference, so that the air bag polishing head can also adjust the air pressure in the rotating process, thereby realizing one-shaft multi-pass, solving the winding problem of a plurality of air pipes and ensuring the air tightness in the ventilating process.
3. The problem of polishing precision caused by the problem of air tightness of the mechanism is avoided. The invention mainly adopts the motor, the spindle box and the bearing mechanism, so the whole structure is compact, the motor rotates the spindle through the coupler, the ventilation structure adopts a rotary sealing mode, the air holes on different layers are respectively sealed by adopting the transition discs, the rotary sealing rings are arranged between every two layers, and the sealing rings are also arranged between the lower end of the spindle and the end cover for sealing, so the air tightness of the whole structure is good, and the processing precision in the processing process is ensured.
Therefore, the method can ensure the advantages of real-time regulation and control of the air pressure of the air bag head in the polishing process, high polishing precision, strong air tightness, good protection effect and the like, thereby having great research value and feasibility.
Drawings
FIG. 1 is a schematic front side view of a polishing head mechanism according to the present invention;
FIG. 2 is a schematic rear side view of the polishing head mechanism according to the present invention;
FIG. 3 is a schematic rear side view, half-cut, of the polishing head mechanism according to the present invention;
FIG. 4 is a schematic view of the installation position of the annular air bag unit of the polishing head mechanism according to the present invention;
FIG. 5 is a schematic view of the polishing head mechanism of the present invention after covering the backing plate;
FIG. 6 is a schematic view of a lock nut of the polishing head mechanism according to the present invention;
FIG. 7 is a schematic view of the structure of an annular air bag unit of the polishing head mechanism according to the present invention;
FIG. 8 is a schematic overall cross-sectional view of the bladder polishing apparatus of the present invention;
FIG. 9 is a schematic view showing the overall appearance of the bladder polishing apparatus according to the present invention;
FIG. 10 is a schematic view of a polishing head mechanism in the air bag polishing apparatus according to the present invention;
FIG. 11 is a schematic view of a spindle head of the airbag polishing apparatus according to the present invention;
FIG. 12 is a schematic view of a spindle cavity of the bladder polishing apparatus of the present invention;
FIG. 13 is a schematic view of the structure of the fixed air passage of the airbag polishing apparatus according to the present invention;
FIG. 14 is an exploded view of a fixed air passage of the airbag polishing apparatus of the present invention;
FIG. 15 is an exploded view of the air tube connection mechanism of the air bag polishing device of the present invention.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples.
Disclosed is a segmented pressure-adjustable air bag polishing head mechanism, as shown in FIGS. 1-7, which is a preferred embodiment of the polishing head mechanism of the present invention. The polishing head mechanism 1 comprises a back plate 11, a diaphragm 12 and an air bag group consisting of at least two air bags. Wherein:
the back plate 11 and the diaphragm 12 are connected together at their peripheries, specifically, they can be connected by screws, and a sealed chamber 13 is formed between them. The diaphragm 12 is basin-shaped, and the bottom of the diaphragm is a circular plane. The material of the back plate 11 can be 45# steel, and the material of the diaphragm 12 can be a sealing diaphragm made of rubber.
The air bags of the air bag group are concentrically and annularly arranged in the sealed chamber 13, the air bag group at least comprises a main pressure air bag 14 positioned in the middle and a side pressure air bag 15 positioned in the outer ring, and one or more auxiliary pressure air bags 16 can be arranged between the main pressure air bag 14 and the side pressure air bag 15. In the present embodiment, three air bags, namely, a main pressure air bag 14, an auxiliary pressure air bag 16 and a side pressure air bag 15 are provided, and the three air bags in the air bag group have different diameters but are concentric.
Each air bag of the air bag group is provided with an air valve 17, a hole is formed in the back plate 11 at a position opposite to the air valve 17, each air valve 17 is arranged in one hole and penetrates out of the back plate 11 to be connected with an air pipe 18, and the air valves 17 and the air pipe 18 can be connected through a quick-change connector (not shown in the figure). The other end of each air pipe 18 is connected with a different air pump (not shown in the figure); therefore, the inflation and deflation of each air bag of the air bag set are controlled by controlling the air pressure of each air pump, and the pressure change generated by the air bag set is reflected on the diaphragm 12 in real time due to the action of the back plate 11.
Further, the polishing head mechanism 1 further includes a fixing connection structure 19, the fixing connection structure 19 is used to press and fix the periphery of the back plate 11 and the membrane 12 to prevent air leakage from the sealed chamber 13, and can be used to mount the entire polishing head mechanism 1 on the polishing machine or the connection mechanism. Specifically, the fixed connection structure 19 described in this embodiment includes a lock nut 191 and a flange 192, the sleeve below the flange 192 is screwed into the lock nut 191, and the lower part of the sleeve and the step in the lock nut 191 compress and fix the peripheral edges of the back plate 11 and the diaphragm 12; and the flange 192 may be mounted on the end flange of the industrial robot in use, thereby mounting the entire polishing head mechanism 1 on the industrial robot. The flange 192 can also be directly replaced by a sleeve 193 (as shown in fig. 10) and then directly screwed onto the spindle mechanism of the polishing apparatus by a lock nut 191.
For further polishing, a polishing pad 10 can be adhered to the bottom of the membrane 12; specifically, the bottom of the membrane 12 is a circular plane, and the polishing pad 10 is cut to a corresponding size and directly attached to the circular plane of the bottom of the membrane 12. Before polishing, a to-be-polished piece is fixed on a rotary worktable 9 of a polishing machine, and the polishing head mechanism 1 is arranged on a robot and is contacted with the to-be-polished piece on the rotary worktable 9 according to a certain path to perform polishing operation under the action of a polishing pad 10.
In order to further achieve the purpose of improving the edge effect in the process of polishing the plane, the air bag group realizes the change of the removal amount in the polishing process through different pressure changes. Specifically, the polishing head mechanism 1 polishes the workpiece to be polished according to a certain path under the action of a robot, when the polishing head mechanism 1 reaches the outermost end of the workpiece to be polished, the polishing pad 10 starts to move out of the surface of the workpiece, the pressure intensity is increased due to the reduction of the contact surface, and the pressure of the side pressure air bag 15 in the air bag set is reduced at the moment so as to balance the increased pressure intensity; when the polishing head mechanism 1 continues to move towards the outer ring, the pressure of the auxiliary pressure air bag 16 in the air bag group is reduced; when the polishing head mechanism 1 moves to the outermost circle, the pressure of the main pressure air bag 14 in the air bag group is reduced, so that the purpose of improving the edge effect in the process of polishing the plane can be achieved.
The polishing head mechanism 1 of the invention needs to be externally connected with a plurality of air pipes 18, and if the polishing head mechanism is used in occasions where polishing heads need to be transferred and processed, the air pipes are easy to wind. The invention designs a special air path structure aiming at the problem, and for this reason, the invention also discloses an air bag polishing device using the polishing light mechanism 1, as shown in fig. 8-15, which is a preferred embodiment of the air bag polishing device. The air bag polishing device also comprises the polishing head mechanism 1, the structure of the polishing head mechanism 1 is basically the same as that of the polishing head mechanism 1, and the flange 192 is replaced by a sleeve 193 because the flange does not need to be directly connected with a polishing robot.
The air bag polishing device also comprises a transmission mechanism 2, an air path mechanism 3, a fixing mechanism 4 and a bearing mechanism 5. Wherein:
the transmission mechanism 2 comprises a motor 21 and a spindle 22, the motor 21 is fixed on the fixing mechanism 4, an output shaft thereof can be connected with the top end of the spindle 22 through a coupling 23, and the bottom end of the spindle 22 is locked in a lock nut 191 of the polishing head mechanism 1.
The air path mechanism 3 comprises a rotary air path structure, a fixed air path structure and an air pipe connecting structure. The rotary air path structure is arranged in the main shaft 22, that is, the main shaft 22 is an air transmission shaft, and the inside of the main shaft is provided with cavity bodies 31 along the axial direction, and the number of the cavity bodies 31 is the same as that of the air bags in the air bag group of the polishing head mechanism 1; the side wall of the main shaft 22 is provided with air vents 32 at different heights, which are respectively communicated with the cavity bodies 31; the bottom of the main shaft 22 is communicated with each cavity 31 and is respectively provided with a cavity 33, the cross section size of the cavity 33 is larger than that of each cavity 31, and the cavity can also be directly formed by the tail end of the cavity 31. The fixed gas circuit structure comprises a gas circuit sleeve fixed on the fixing mechanism 4, inner ring grooves 34 which are respectively opposite to the gas guide holes 32 are formed in the inner wall of the gas circuit sleeve at different heights, and sealing structures are arranged among the inner ring grooves 34 to prevent the grooves from being communicated; at least one vent hole 35 which leads to the outer wall of the air path sleeve is arranged at the position corresponding to each inner ring groove 34, and each vent hole 35 is connected with different air pumps through vent pipes (not shown in the figure) to realize air supply to the air path. In order to facilitate manufacture and installation, the air passage sleeve is composed of a plurality of transition disks 36, the number of the transition disks 36 is the same as that of air bags in the air bag group of the polishing head mechanism 1, sealing flange plates 37 are arranged between the transition disks 36 and between the transition disks 36 at the upper end and the lower end, and the transition disks 36 and the sealing flange plates 37 are connected together through screws. The sealing flange 37 is sleeved outside the main shaft 22 in a sealing manner, the inner diameter of each transition disc 36 is larger than the outer diameter of the main shaft 22, and the inner annular groove 34 is formed by the gaps among the sealing flange 37, the transition discs 36 and the main shaft 22; the side wall of each transition disc 36 is provided with the vent hole 35. One end of the air pipe connecting structure 30 is respectively connected with different air bags of the air bag group, and the other end is connected with different air chambers 33 at the tail end of the main shaft 22 through different quick change connectors, so that the air in each air chamber 33 at the tail end of the main shaft 22 is led to each air bag in the polishing head mechanism 1. The air pipe connecting structure 30 comprises a cabin sealing plate 301 and a plurality of quick release joints 302; a chamber sealing plate 301 which is hermetically attached to the lower end of the main shaft 22 and seals each of the empty chambers 33; the chamber sealing plate 301 is provided with openings 303 on the bottom surface corresponding to each empty chamber 33, and each opening 303 is provided with one quick-release joint 302; one end of the quick release joint 302 is connected to one of the air pipes 18 of the polishing head mechanism 1, and the other end is connected to the corresponding empty chamber 33.
The fixing mechanism 4 is used for fixedly mounting the transmission mechanism 2 and fixing the air path structure, and may include a main spindle box 41, an installation space is provided inside the main spindle box 41, the motor 21 is mounted at the upper end of the main spindle box 41, the coupler 23 is located above the installation space, and the air path sleeves, i.e., the transition discs 36, are mounted below the installation space. The air passage sleeve, namely each transition disc 36, can be provided with an outer ring groove 38 corresponding to each vent hole 35, and sealing rings 39 are arranged on the upper side and the lower side of each outer ring groove 38 to separate and seal each outer ring groove 38. The main spindle box 41 is provided with air inlets 42 corresponding to the positions of the outer ring grooves 38, and is communicated with air pumps through the air inlets 42, so that the vent holes 35 are indirectly connected with the corresponding air pumps to realize air supply to air paths. An electromagnetic relief valve (not shown) may be installed at the air inlet 42 to control the inflation/deflation or control the air pressure. The fixing mechanism 4 may further comprise a flange 43 disposed on a side of the headstock 41, the flange 43 being adapted to be connected to an end flange of an industrial robot. The flange plate is not required to be arranged, and the flange plate is directly connected with an industrial robot or a polishing machine through a clamping mechanism or other mechanisms.
The gas path conduction process of the gas path mechanism 3 is that gas passes through the passage of the gas path sleeve (each transition disk 36) from the gas inlet 42, reaches the inner ring groove 34 of the inner ring from the outer ring groove 38 of the outer ring through the vent hole 35, then reaches the sealed air chamber 33 at the lower end of the main shaft 22 from the upper end through the air chamber body 31 of the main shaft 22, and then transmits the gas in each air chamber 33 to the air bag of each polishing head mechanism 1 through the gas pipe connecting mechanism 30, thereby completing the rotary transmission operation of the gas. Through the arrangement of the rotary air path and the fixed air path structure, the air path can be arranged in the rotary main shaft 22, and the winding of the air path pipeline caused by the rotation of the main shaft 22 can be avoided.
In order to smoothly rotate the main shaft 22, a bearing mechanism 5 may be further provided. The bearing mechanism 5 includes a bearing housing 51, a bearing 52, and an end cover 53; the lower end of the bearing shell 51 is fixedly connected with an end cover 53 through a screw, the outer ring of the upper end of the bearing shell 51 is connected with the fixing mechanism 4 through a screw, and the inner ring of the upper end of the bearing shell 51 is connected with a fixed gas circuit structure (namely a gas circuit sleeve) through a screw; the bearing shell 51 and the fixing mechanism 4, namely the spindle box 41 and the end cover 53 are fixedly connected to form a sealed space, the upper part, the middle part and the lower part of the sealed space are respectively provided with a bearing 52, and an inner cabinet sleeve 54 is arranged between the lower bearing and the end cover 53 and used for positioning the bearing 52; and a sealing ring is arranged between the end cover 53 and the outer side of the main shaft 22. The bearing 52 may be an angular contact bearing.
The above-mentioned embodiments are only preferred embodiments of the present invention, and do not limit the technical scope of the present invention, so that the changes and modifications made by the claims and the specification of the present invention should fall within the scope of the present invention.
Claims (10)
1. The utility model provides an gasbag polishing head mechanism of segmentally pressure regulating which characterized in that: the polishing head mechanism (1) comprises a back plate (11), a diaphragm (12), an air bag group consisting of at least two air bags and a fixed connecting structure (19) for fixing the peripheral edges of the back plate (11) and the diaphragm (12); the back plate (11) is connected with the periphery of the diaphragm (12) together, a sealed cabin (13) is formed between the back plate and the diaphragm, and the bottom of the diaphragm (12) is a circular plane; each air bag of the air bag group is concentrically and annularly arranged in the sealed cabin (13), the air bag group at least comprises a main pressure air bag (14) positioned in the middle and a side pressure air bag (15) positioned on an outer ring, each air bag is provided with an air valve (17), the air valve (17) penetrates through a hole in the back plate (11) to be connected with an air pipe (18), then the air pipes (18) are respectively connected with different air pumps, and a pipeline connected with the air pumps by the air pipes is provided with an electromagnetic overflow valve capable of controlling air charging and discharging or controlling air pressure.
2. A segmented pressure adjustable air bag polishing head mechanism according to claim 1, wherein: the airbag module further comprises one or more auxiliary pressure airbags (16) located between the main pressure airbag (14) and the side pressure airbag (15).
3. A sectionally pressure-adjustable air bag polishing head mechanism according to claim 1 or 2, wherein: the fixed connecting structure (19) comprises a locking nut (191) and a flange plate (192), a sleeve below the flange plate (192) is screwed in the locking nut (191), and the lower part of the sleeve and a step in the locking nut (191) press and fix the peripheral edges of the back plate (11) and the diaphragm (12).
4. A sectionally pressure-adjustable air bag polishing head mechanism according to claim 1 or 2, wherein: the fixed connecting structure (19) comprises a locking nut (191) and a sleeve (193), the sleeve (193) is screwed in the locking nut (191), and the lower part of the sleeve and a step in the locking nut (191) press and fix the peripheral edges of the back plate (11) and the diaphragm (12).
5. An airbag polishing apparatus characterized in that: comprises the polishing head mechanism (1) according to claim 4, and further comprises a transmission mechanism (2), an air path mechanism (3) and a fixing mechanism (4);
the transmission mechanism (2) comprises a motor (21) and a main shaft (22) which are connected, the motor (21) is fixed on the fixing mechanism (4), and the bottom end of the main shaft (22) is locked in the locking nut (191);
the gas circuit mechanism (3) comprises a rotary gas circuit structure, a fixed gas circuit structure and a gas pipe connecting structure; the rotary air path structure is arranged in the main shaft (22), namely, cavity bodies (31) are arranged in the main shaft (22) along the axial direction, and the number of the cavity bodies (31) is the same as that of the air bags; the side wall of the main shaft (22) is provided with air vents (32) which are respectively communicated with each cavity body (31) at different heights; the bottom of the main shaft (22) is communicated with each cavity body (31) and is respectively provided with a cavity chamber (33); the fixed gas circuit structure comprises a gas circuit sleeve fixed on the fixed mechanism (4), inner ring grooves (34) which are respectively opposite to the gas guide holes (32) are formed in the inner wall of the gas circuit sleeve at different heights, and sealing structures are arranged among the inner ring grooves (34) to prevent the grooves from being communicated; at least one vent hole (35) leading to the outer wall of the air passage sleeve is arranged at the position corresponding to each inner ring groove (34), and each vent hole (35) is connected with the air pump; one end of the air pipe connecting structure (30) is respectively connected with different air bags, and the other end is connected with different air chambers (33) at the tail end of the main shaft (22).
6. The airbag polishing apparatus according to claim 5, characterized in that: the air path sleeve is composed of a plurality of transition discs (36), the number of the transition discs is the same as that of the air bags, sealing flange discs (37) are arranged between the transition discs (36) and between the transition discs (36) at the upper end and the lower end, and the transition discs (36) are connected with the sealing flange discs (37) through screws; the sealing flange (37) is sleeved outside the main shaft (22) in a sealing manner, the inner diameter of each transition disc is larger than the outer diameter of the main shaft, and gaps among the sealing flange (37), the transition disc (36) and the main shaft (22) form the inner annular groove (34); the side wall of each transition disc (36) is provided with the vent hole (35).
7. The airbag polishing apparatus according to claim 5 or 6, characterized in that: the fixing mechanism (4) comprises a spindle box (41) with an installation space inside, the motor (21) is installed at the upper end of the spindle box, and the air path sleeve is installed below the installation space.
8. The airbag polishing apparatus according to claim 7, characterized in that: the air passage sleeve, namely each transition disc (36), is provided with an outer ring groove (38) corresponding to each vent hole (35), and the upper side and the lower side of each outer ring groove are provided with sealing rings (39) for sealing each outer ring groove (38) in a blocking way; the main spindle box (41) is provided with air inlets (42) corresponding to the outer ring grooves, and is communicated with the air pumps through the air inlets (42).
9. The airbag polishing apparatus according to claim 5 or 6, characterized in that: the air pipe connecting structure (30) comprises a cabin sealing plate (301) and a plurality of quick-release joints (302); a chamber sealing plate which is hermetically attached to the lower end of the main shaft (22) and seals each empty chamber (33); the bottom surface of the cabin sealing plate (301) is provided with an opening (303) corresponding to each empty cabin (33), and each opening is provided with one quick-release joint (302); one end of the quick-release joint is connected with one air pipe (18) of the polishing head mechanism (1), and the other end of the quick-release joint is connected with a corresponding empty chamber (33).
10. The airbag polishing apparatus according to claim 5 or 6, characterized in that: a bearing mechanism (5) is further arranged; the bearing mechanism comprises a bearing shell (51), a bearing (52) and an end cover (53); the lower end of the bearing shell is fixedly connected with the end cover through a screw, the outer ring of the upper end of the bearing shell is connected with the fixing mechanism (4) through a screw, and the inner ring of the upper end of the bearing shell is connected with the fixed gas circuit structure through a screw; the bearing shell (51), the fixing mechanism (4) and the end cover (53) are fixedly connected to form a sealed space, and the bearing (52) is arranged in the sealed space.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011367756.1A CN112605786B (en) | 2020-11-29 | 2020-11-29 | Air bag polishing device and polishing head mechanism thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011367756.1A CN112605786B (en) | 2020-11-29 | 2020-11-29 | Air bag polishing device and polishing head mechanism thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112605786A true CN112605786A (en) | 2021-04-06 |
| CN112605786B CN112605786B (en) | 2022-09-09 |
Family
ID=75229731
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011367756.1A Active CN112605786B (en) | 2020-11-29 | 2020-11-29 | Air bag polishing device and polishing head mechanism thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112605786B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114248174A (en) * | 2021-12-31 | 2022-03-29 | 亳州市亚珠新材料有限公司 | Surface grinding device is used in carbon piece production |
| CN114473854A (en) * | 2021-12-30 | 2022-05-13 | 蚌埠中光电科技有限公司 | Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2712547Y (en) * | 2003-12-27 | 2005-07-27 | 上海华虹（集团）有限公司 | Polishing head structure for chemical mechanical polishing |
| JP2006263903A (en) * | 2005-02-25 | 2006-10-05 | Ebara Corp | Polishing device and polishing method |
| CN101829945A (en) * | 2010-04-27 | 2010-09-15 | 浙江工业大学 | Main and auxiliary combined type air bag polishing tool |
| CN102554749A (en) * | 2012-02-08 | 2012-07-11 | 厦门大学 | Dynamic load type flexible polishing head |
| CN102825543A (en) * | 2012-09-18 | 2012-12-19 | 厦门大学 | Air bag polishing head for air bag polishing |
| CN102975106A (en) * | 2012-12-24 | 2013-03-20 | 厦门大学 | Precision airbag polishing tool system |
| CN104369064A (en) * | 2014-11-20 | 2015-02-25 | 苏州大学 | Air bag polishing tool and system and method |
| CN108481189A (en) * | 2018-05-08 | 2018-09-04 | 厦门理工学院 | It can be from the air bag polishing head of air pressure adjusting |
| CN208196524U (en) * | 2018-05-08 | 2018-12-07 | 厦门理工学院 | Air bag polishing head with automatic buffer function |
| CN109676507A (en) * | 2019-01-23 | 2019-04-26 | 厦门大学 | A kind of high speed air-floating main shaft air bag polishing device |
| CN209190498U (en) * | 2018-12-26 | 2019-08-02 | 陕西国防工业职业技术学院 | Air bag polishing disk |
| CN110900436A (en) * | 2018-09-17 | 2020-03-24 | 三星电子株式会社 | Polishing head and polishing carrier device with polishing head |
-
2020
- 2020-11-29 CN CN202011367756.1A patent/CN112605786B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2712547Y (en) * | 2003-12-27 | 2005-07-27 | 上海华虹（集团）有限公司 | Polishing head structure for chemical mechanical polishing |
| JP2006263903A (en) * | 2005-02-25 | 2006-10-05 | Ebara Corp | Polishing device and polishing method |
| CN101829945A (en) * | 2010-04-27 | 2010-09-15 | 浙江工业大学 | Main and auxiliary combined type air bag polishing tool |
| CN102554749A (en) * | 2012-02-08 | 2012-07-11 | 厦门大学 | Dynamic load type flexible polishing head |
| CN102825543A (en) * | 2012-09-18 | 2012-12-19 | 厦门大学 | Air bag polishing head for air bag polishing |
| CN102975106A (en) * | 2012-12-24 | 2013-03-20 | 厦门大学 | Precision airbag polishing tool system |
| CN104369064A (en) * | 2014-11-20 | 2015-02-25 | 苏州大学 | Air bag polishing tool and system and method |
| CN108481189A (en) * | 2018-05-08 | 2018-09-04 | 厦门理工学院 | It can be from the air bag polishing head of air pressure adjusting |
| CN208196524U (en) * | 2018-05-08 | 2018-12-07 | 厦门理工学院 | Air bag polishing head with automatic buffer function |
| CN110900436A (en) * | 2018-09-17 | 2020-03-24 | 三星电子株式会社 | Polishing head and polishing carrier device with polishing head |
| CN209190498U (en) * | 2018-12-26 | 2019-08-02 | 陕西国防工业职业技术学院 | Air bag polishing disk |
| CN109676507A (en) * | 2019-01-23 | 2019-04-26 | 厦门大学 | A kind of high speed air-floating main shaft air bag polishing device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114473854A (en) * | 2021-12-30 | 2022-05-13 | 蚌埠中光电科技有限公司 | Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head |
| CN114473854B (en) * | 2021-12-30 | 2023-02-28 | 蚌埠中光电科技有限公司 | Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head |
| CN114248174A (en) * | 2021-12-31 | 2022-03-29 | 亳州市亚珠新材料有限公司 | Surface grinding device is used in carbon piece production |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112605786B (en) | 2022-09-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112605786B (en) | Air bag polishing device and polishing head mechanism thereof | |
| EP3597366A1 (en) | Water-saving cooling system of glass processing center | |
| CN201006554Y (en) | Ball high speed electric chief axis | |
| US5520216A (en) | Rotary valve assembly | |
| CN102975106A (en) | Precision airbag polishing tool system | |
| CN107052937B (en) | Pneumatic floating polisher | |
| CN110405261A (en) | Inner groove Grinder | |
| CN108481189B (en) | It can be from the air bag polishing head of air pressure adjusting | |
| CN209969691U (en) | Swinging head structure on double-swinging milling head | |
| CN102886534A (en) | High-speed and high-rigidity dynamic and static pressure built-in electric main shaft | |
| CN114571095A (en) | Pneumatic chuck for laser pipe cutting machine | |
| SE512806C2 (en) | Swivel coupling for regulating air pressure in vehicle tires | |
| US4286413A (en) | Hole grinding machine | |
| CN107649912B (en) | A kind of flexible support control device of Pneumatic Transmission | |
| CN214213414U (en) | Segmented pressure regulating type air bag polishing head | |
| CN218836943U (en) | A axle drive arrangement for digit control machine tool | |
| CN115780840A (en) | Numerical control lathe tailstock main shaft sealing structure and method thereof | |
| CN110900445A (en) | Floating polishing device | |
| CN207495140U (en) | Polishing system | |
| CN207103867U (en) | The non-contact supporting rotary main shaft device driven using air motor | |
| CN115946023A (en) | Airbag polishing assembly, airbag polishing device and airbag polishing equipment | |
| CN207447383U (en) | A kind of chuck drive mechanism | |
| JP4268431B2 (en) | Fluid pressure actuator | |
| CN108161768B (en) | Wet shot blasting machine | |
| CN212886413U (en) | AC five-axis |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |