CN114473854B - Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head - Google Patents
Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head Download PDFInfo
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- CN114473854B CN114473854B CN202111655390.2A CN202111655390A CN114473854B CN 114473854 B CN114473854 B CN 114473854B CN 202111655390 A CN202111655390 A CN 202111655390A CN 114473854 B CN114473854 B CN 114473854B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/007—Weight compensation; Temperature compensation; Vibration damping
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
Abstract
The invention relates to an annular sectional adjusting and pressurizing device for a large-size substrate glass grinding head, which comprises a grinding support plate, wherein a support ring frame is arranged right above the grinding support plate, the support ring frame is fixedly connected with a connecting top frame, an air conveyor is arranged at the center of the lower side of the support ring frame, a plurality of pressure air bag mechanisms which are uniformly distributed in an annular array are arranged between a communicating pipe frame and the grinding support plate, the top of each pressure air bag mechanism is communicated with the communicating pipe frame, a plurality of supporting telescopic columns which are uniformly distributed in the annular array are arranged between the support ring frame and the grinding support plate, a plurality of polishing mechanisms which are uniformly distributed in the annular array are arranged on the lower surface of the grinding support plate, and the pressure of the grinding support plate on each ring of polishing mechanisms is gradually reduced from inside to outside in an annular sectional manner, so that the grinding efficiency of each ring of polishing mechanism on substrate glass is kept consistent, and the surface leveling effect of the polished surface of the substrate glass is ensured to be optimal.
Description
Technical Field
The invention relates to the technical field of glass grinding, in particular to an annular sectional adjusting and pressurizing device for a large-size substrate glass grinding head.
Background
The surface polishing of glass requires that a polishing pad and a polishing solution are used in cooperation to polish the surface of the glass, a suspended polishing head is usually used for polishing a large-size substrate glass surface and is positioned above a machine table, a polishing disk is adhered to a non-working surface of the polishing pad, the polishing pad faces downward to a processed surface of the glass, and a conventional polishing mechanism is shown in fig. 7.
The patent document with the publication number of CN105598830a discloses a glass grinding frame and a glass grinding device, which comprise a grinding square frame, a base and two front baffles used for clamping a glass substrate from the front and the back, wherein the two front baffles are respectively arranged on two opposite surfaces on the inner side of the grinding square frame and are respectively connected with the grinding square frame through first adjustable components to change the distance between the two front baffles; the base is arranged below the grinding frame and limits the glass substrate in the grinding frame.
The grinding efficiency of the working surface of the grinding pad of the existing grinding device for the substrate glass is different when the substrate glass is ground, the grinding efficiency of the grinding pad is increased along with the increase of the radius, the phenomenon that the surface flatness of the substrate glass is uneven from the center to the periphery is caused by the increase of the radius of the grinding pad, the phenomenon that a plurality of concentric rings are caused in the area with the same surface flatness is caused, the grinding pad is usually pasted on a grinding head in the grinding process of the existing grinding device for the substrate glass, the stress of the grinding pad is uneven in the grinding process, the phenomenon of edge separation is easy to occur, the grinding effect is influenced, the whole grinding pad is usually replaced due to the scratch of the grinding pad, and huge waste is caused.
Disclosure of Invention
The invention aims to solve the problems and the defects, and provides an annular sectional adjusting and pressurizing device for a large-size substrate glass grinding head, which improves the overall working efficiency.
The technical problem solved by the invention is as follows:
(1) When the prior substrate glass grinding device grinds the substrate glass, the grinding efficiency of the working surface of a grinding pad is different, so that the surface flatness of the substrate glass is uneven from the center to the periphery;
(2) The existing substrate glass grinding device usually pastes a grinding pad on a grinding head in the grinding process, so that the grinding pad is stressed unevenly in the grinding process, the phenomenon of edge separation is easy to occur, the grinding effect is influenced, and the whole grinding pad is often replaced due to the occurrence of a scratch, thereby causing huge waste.
The purpose of the invention can be realized by the following technical scheme: the utility model provides a jumbo size base plate glass grinding head is with annular sectional regulation pressure device, including grinding the backup pad, be provided with the support ring frame directly over grinding the backup pad, the top center fixedly connected with of support ring frame is used for connecting and the connection roof-rack that remains stable, the gas transmission machine is installed at the downside center of support ring frame, the downside of support ring frame is located the gas transmission machine and installs the intercommunication pipe support around, gas transmission machine and intercommunication pipe support are linked together, install a plurality of pressure gasbag mechanism that is annular array evenly distributed between intercommunication pipe support and the grinding backup pad, the top and the intercommunication pipe support intercommunication of pressure gasbag mechanism, be provided with the flexible post of support that a plurality of is annular array evenly distributed between support ring frame and the grinding backup pad, the lower surface mounting of grinding the backup pad has the polishing mechanism that a plurality of is annular array evenly distributed.
As a further scheme of the invention, the communicating pipe frame comprises an inner ring pipe, an outer ring pipe and a middle ring pipe, the outer ring pipe is arranged on the periphery of the inner ring pipe, a plurality of middle ring pipes are arranged between the inner ring pipe and the outer ring pipe, equal intervals are kept between every two adjacent middle ring pipes, and the inner ring pipe, the outer ring pipe and the middle ring pipe are communicated through a plurality of communicating straight pipes which are uniformly distributed in an annular array.
As a further scheme of the invention, the pressure air bag mechanism comprises a supporting mounting plate, a connecting circular plate is arranged right below the supporting mounting plate, an air bag wall is arranged between the supporting mounting plate and the connecting circular plate, a communicating hose penetrates through the center of the supporting mounting plate, and a mounting ring frame is arranged on the top center of the supporting mounting plate and positioned on the periphery of the communicating hose.
As a further scheme of the invention, a plurality of telescopic connecting rods which are uniformly distributed at equal angles are arranged on the inner side of the air bag wall and around the communicating hose, and an outer limiting cylinder and an inner limiting cylinder are respectively sleeved on the periphery of the air bag wall.
As a further scheme of the invention, the wall of the air bag is composed of a plurality of telescopic rings, inner connecting rings and outer connecting rings, the telescopic rings are made of rubber, the telescopic rings are in a circular truncated cone shape, the thickness of the middle part of each telescopic ring is higher than that of the two ends of each telescopic ring, the inner connecting rings and the outer connecting rings are coaxially arranged and are arranged in a staggered and parallel mode, and the adjacent inner connecting rings and the outer connecting rings are connected through the telescopic rings.
According to a further scheme of the invention, the polishing mechanism comprises a clamping support plate, a clamping grinding pad is fixedly connected to the lower surface of the clamping support plate, and expansion bolt cylinders are fixedly connected to four corners of the upper surface of the clamping support plate.
As a further scheme of the invention, the periphery of the upper end of the expansion bolt cylinder is fixedly connected with a plurality of anti-skidding rings, a plurality of through holes which are in one-to-one correspondence with the expansion bolt cylinder are arranged on the grinding support plate in a penetrating way, both sides of the upper end of the expansion bolt cylinder are provided with through grooves, and the upper end of the expansion bolt cylinder is in threaded connection with an expansion screw.
As a further scheme of the invention, a plurality of limiting sliding grooves which are uniformly distributed in an equal angle are formed in the inner side wall of the outer limiting cylinder, which is close to the inner limiting cylinder, the periphery of the lower end of the inner limiting cylinder is fixedly connected with a plurality of limiting sliding blocks which are in one-to-one correspondence with the limiting sliding grooves, and the limiting sliding blocks are in sliding connection with the limiting sliding grooves.
The invention has the beneficial effects that:
(1) The working surface of the polishing mechanism is abutted with the polished surface of the substrate glass, then, gas is continuously conveyed through a gas conveying machine, pressurized gas is conveyed through an inner ring pipe, an outer ring pipe, a middle ring pipe and a communication straight pipe which are communicated with a pipe frame, high-pressure gas in the communication pipe frame is conveyed into a pressure airbag mechanism through one of communication hoses and one-way gas pumps communicated with the communication hoses, so that the gas pressure in the airbag wall is increased, the connection discs are subjected to vertical downward pressure, the grinding support plate is pushed by the connection discs, the rings of the grinding support plate from inside to outside keep different pressures on the ground and polished substrate glass, the gas pressure in each circle of the pressure airbag mechanism is kept consistent, the pressure in each circle is kept consistent, the gas pressure in each circle of the pressure airbag mechanism is adjusted through two one-way gas pumps, the pressure airbag mechanisms are subjected to pressure control according to the distance from the axes of the grinding support plate, the pressure generated by the pressure airbag mechanisms communicated with each ring pipe is reduced along with the radius increase of each ring pipe, the pressure generated by the pressure airbag mechanisms communicated with each ring pipe, the grinding support plate, the polishing mechanism is gradually reduced by the polishing ring glass, and the polishing surface of the polishing glass substrate which is gradually reduced by the lowest polishing ring of the polishing mechanism;
(2) Install polishing mechanism at the lower surface of grinding the backup pad through the inflation bolt section of thick bamboo, it is more inseparable to make the inflation bolt section of thick bamboo be connected with the grinding backup pad through the inflation screw, keep adjacent polishing mechanism butt each other, and make polishing mechanism be annular array form evenly distributed, under the pressure regulation of pressure gasbag mechanism, every round polishing mechanism is degressive from inside to outside in proper order to base plate glass's pressure, thereby make every polishing mechanism keep unanimous to base plate glass's grinding efficiency, thereby improve base plate glass's surface smoothness, when the impaired situation appears in the surface of wherein certain block joint grinding pad, only need to change its place polishing mechanism can, thereby improve the availability factor, reduce waste, and save cost.
Drawings
In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.
FIG. 1 is a side view of the overall structure of the present invention;
FIG. 2 is a top view of the overall structure of the communicating pipe rack of the present invention;
FIG. 3 is a front view of the internal structure of the pressure bladder mechanism of the present invention;
figure 4 is a bottom view of the polishing mechanism of the present invention;
FIG. 5 is a schematic view of the polishing mechanism of the present invention;
FIG. 6 is a partial anatomical view of region A of FIG. 3 in accordance with the invention;
FIG. 7 is a schematic diagram of a prior art configuration;
in the figure: 1. grinding the support plate; 2. a support ring frame; 3. connecting the top frame; 4. a gas transmission machine; 5. the pipe frame is communicated; 6. a pressure bladder mechanism; 7. a polishing mechanism; 8. an inner ring pipe; 9. an outer ring pipe; 10. a middle ring pipe; 11. a straight pipe is communicated; 12. supporting the telescopic column; 13. supporting the mounting plate; 14. mounting a ring frame; 15. a communication hose; 16. a one-way air pump; 17. a telescopic ring; 18. an inner connecting ring; 19. an outer connecting ring; 20. a telescopic connecting rod; 21. an outer limiting cylinder; 22. an inner limiting cylinder; 23. clamping a support plate; 24. clamping the grinding pad; 25. an expansion bolt cylinder; 26. an expansion screw; 27. a through groove; 28. a limiting chute; 29. a limiting slide block; 30. the circular plate is connected.
Detailed Description
To further illustrate the technical means and effects of the present invention adopted to achieve the predetermined objects, the following detailed description of the embodiments, structures, features and effects according to the present invention will be made with reference to the accompanying drawings and preferred embodiments.
Please refer to fig. 1-6: the utility model provides a jumbo size base plate glass grinding head is with annular sectional regulation pressure device, including grinding backup pad 1, be provided with support ring frame 2 directly over grinding backup pad 1, the top center fixedly connected with of support ring frame 2 is used for connecting and the connection roof-rack 3 that remains stable, gas transmission machine 4 is installed at the downside center of support ring frame 2, the downside of support ring frame 2 is located gas transmission machine 4 and installs intercommunication pipe support 5 around, gas transmission machine 4 and intercommunication pipe support 5 are linked together, install a plurality of pressure gasbag mechanism 6 that is annular array evenly distributed between intercommunication pipe support 5 and the grinding backup pad 1, the top and the intercommunication pipe support 5 intercommunication of pressure gasbag mechanism 6, be provided with a plurality of support flexible post 12 that is annular array evenly distributed between support ring frame 2 and the grinding backup pad 1, the lower surface mounting of grinding backup pad 1 has a plurality of polishing mechanism 7 that is annular array evenly distributed.
The communicating pipe frame 5 comprises an inner ring pipe 8, an outer ring pipe 9 and a middle ring pipe 10, wherein the inner ring pipe 8 is arranged around the gas transmission machine 4, the outer ring pipe 9 is arranged on the periphery of the inner ring pipe 8, the periphery of the outer ring pipe 9 is close to the edge of the grinding support plate 1, a plurality of middle ring pipes 10 are arranged between the inner ring pipe 8 and the outer ring pipe 9, equal intervals are kept between every two adjacent middle ring pipes 10, the circle center of each inner ring pipe 8, the circle center of the outer ring pipe 9 and the middle ring pipe 10 where the gas transmission machine 4 is located is the same circle center, each inner ring pipe 8, the outer ring pipe 9 and the middle ring pipe 10 are communicated through a plurality of communicating straight pipes 11 which are uniformly distributed in an annular array, and each inner ring pipe 8, each outer ring pipe 9 and each middle ring pipe 10 are fixedly connected with the support ring frame 2 and keep equal intervals;
when the polishing device is used, the working surface of the polishing mechanism 7 is abutted to the polished surface of the substrate glass, then gas is continuously conveyed through the gas conveying machine 4, pressurized gas is conveyed to each pressure airbag mechanism 6 through the inner ring pipe 8, the outer ring pipe 9, the middle ring pipe 10 and the communication straight pipe 11 which are communicated with the pipe frame 5, so that each pressure airbag mechanism 6 performs pressure control according to the distance from the position to the axis of the polishing support plate 1, the pressure airbag mechanisms 6 keep constant pressure on the polishing support plate 1 and stably push in the vertical direction by receiving the pressurized gas conveyed by the communication pipe frame 5, meanwhile, the pressure generated by the pressure airbag mechanisms 6 communicated with each ring pipe 10 is reduced along with the increase of the radius of each ring pipe 10, the pressure generated by the pressure airbag mechanisms 6 communicated with the inner ring pipe 8 is ensured to be the highest, the pressure generated by the pressure airbag mechanisms 6 communicated with the outer ring pipe 9 is the lowest, and the pressure of the polishing support plate 1 on each ring polishing mechanism 7 is gradually reduced from inside to outside, so that the polishing efficiency of each ring polishing mechanism 7 on the substrate glass is kept consistent, and the polished surface of the substrate glass is ensured to achieve the optimal polished surface.
The pressure air bag mechanism 6 comprises a supporting mounting plate 13, a connecting circular plate 30 is arranged right below the supporting mounting plate 13, an air bag wall is arranged between the supporting mounting plate 13 and the connecting circular plate 30, a communicating hose 15 penetrates through the center of the supporting mounting plate 13, two groups of communicating hoses 15 are arranged, mounting ring frames 14 are arranged on the top centers of the two supporting mounting plates 13 and are positioned on the peripheries of the communicating hoses 15, one communicating hose 15 is communicated with the output end of a one-way air pump 16, the other communicating hose 15 is communicated with the input end of the one-way air pump 16, the inside of the pressure air bag mechanism 6 is communicated with a communicating pipe frame 5 through the communicating hose 15, the pressure air bag mechanism 6 is fixedly connected with the communicating pipe frame 5 through the mounting ring frames 14, a plurality of inclined support rods which are uniformly distributed at equal angles are arranged on the periphery of the mounting ring frames 14, and the mounting ring frames 14 and the supporting mounting plate 13 are kept perpendicular and stably connected with each other through the inclined support rods;
when the polishing device is used, high-pressure gas in the communicating pipe frame 5 is input into the pressure airbag mechanism 6 through one of the communicating hoses 15 and the one-way air pumps 16 communicated with the communicating hoses, so that the gas pressure in the airbag wall is increased, the connecting circular plate 30 is subjected to vertical downward pressure, the grinding support plate 1 is pushed through the connecting circular plate 30, the ground and polished substrate glass is kept at different pressures by circles of the grinding support plate 1 from inside to outside, the gas pressure in the pressure airbag mechanism 6 of each circle is kept consistent, the pressure of each circle is kept consistent, the gas pressure in each pressure airbag mechanism 6 of each circle is regulated through the two one-way air pumps 16, and the grinding efficiency of each circle of polishing mechanisms 7 is kept consistent.
A plurality of telescopic connecting rods 20 which are uniformly distributed at equal angles are arranged on the periphery of the communicating hose 15 on the inner side of the air bag wall, two ends of each telescopic connecting rod 20 are fixedly connected with the supporting mounting plate 13 and the connecting circular plate 30 respectively, an outer limiting cylinder 21 and an inner limiting cylinder 22 are sleeved on the periphery of the air bag wall respectively, the outer limiting cylinder 21 is sleeved on the peripheral side wall of the inner limiting cylinder 22 in a sliding manner, the inner side of the lower end of the outer limiting cylinder 21 is fixedly connected with the outer side of the lower end of the air bag wall, the inner side of the upper end of the inner limiting cylinder 22 is fixedly connected with the outer side of the upper end of the air bag wall, the outer side of the middle part of the air bag wall is respectively connected with the outer limiting cylinder 21 and the inner side wall of the inner limiting cylinder 22 in a sliding manner, a plurality of limiting sliding grooves 28 which are uniformly distributed at equal angles are formed in the inner side wall of the outer limiting cylinder 21 close to the inner limiting cylinder 22, a plurality of limiting sliding blocks 29 which are in one-to-one correspondence with the limiting sliding manner are fixedly connected with the outer periphery of the lower end of the inner limiting sliding grooves 28, and the limiting sliding blocks 29 are connected with the limiting sliding grooves 28;
when the gasbag wall expands along with the increase of inside atmospheric pressure during the use, carry on spacingly through outer spacing section of thick bamboo 21 and interior spacing section of thick bamboo 22 to the gasbag wall, thereby make the gasbag wall keep expanding in vertical direction, and then make pressure gasbag mechanism 6 keep vertical to the pressure of grinding backup pad 1, and through the inflation volume of outer spacing section of thick bamboo 21 and interior spacing section of thick bamboo 22 to the spacing reduction gasbag wall of gasbag wall, thereby improve pressure, improve the availability factor to high-pressure gas, further ensure simultaneously through telescopic connecting rod 20 and support telescopic column 12 that pressure gasbag mechanism 6 keeps vertical to the pressure of grinding backup pad 1.
The air bag wall is composed of a plurality of telescopic rings 17, inner connecting rings 18 and outer connecting rings 19, the telescopic rings 17 are made of rubber, the telescopic rings 17 are in a circular truncated cone shape, the thickness of the middle part of each telescopic ring 17 is higher than that of each of two ends, two sides of the middle part of each telescopic ring 17 are in an arc shape, the inner connecting rings 18 and the outer connecting rings 19 are coaxially maintained and are arranged in a staggered and parallel mode, adjacent inner connecting rings 18 and the outer connecting rings 19 are connected through the telescopic rings 17, the upper end of the air bag wall is fixedly connected with the supporting and mounting plate 13, and the lower end of the air bag wall is fixedly connected with the connecting circular plate 30;
when the internal pressure of the pressure air bag mechanism 6 rises during use, the air bag wall is pressed to expand, the deformation direction of the air bag wall is kept in the vertical direction through the limitation of the inner connecting ring 18 and the outer connecting ring 19, the deformation of the expansion ring 17 is reduced through the structure of the expansion ring 17 when the expansion ring 17 is pressed, each expansion ring 17 of the air bag wall is kept to extend towards the upper end and the lower end when the expansion ring is pressed, the expansion towards the periphery is avoided, the vertical downward stable thrust of the connecting circular plate 30 is ensured, and the utilization efficiency of high-pressure gas is further improved.
The polishing mechanism 7 comprises a clamping support plate 23, a clamping grinding pad 24 is fixedly connected to the lower surface of the clamping support plate 23, expansion bolt cylinders 25 are fixedly connected to four corners of the upper surface of the clamping support plate 23, the lower ends of the expansion bolt cylinders 25 are of a cylindrical solid structure, the upper ends of the expansion bolt cylinders 25 are of a cylindrical hollow structure, a plurality of anti-slip rings are fixedly connected to the periphery of the upper ends of the expansion bolt cylinders 25, a plurality of through holes corresponding to the expansion bolt cylinders 25 in a one-to-one mode are formed in the grinding support plate 1 in a penetrating mode, the expansion bolt cylinders 25 are clamped in the through holes of the grinding support plate 1 through the anti-slip rings, the polishing mechanism 7 is installed on the lower surface of the grinding support plate 1, through grooves 27 are formed in two sides of the upper end of each expansion bolt cylinder 25, and expansion screws 26 are connected to the upper end of each expansion bolt cylinder 25 through threads;
install polishing mechanism 7 at the lower surface of grinding backup pad 1 through inflation bolt section of thick bamboo 25 during the use, it is more inseparable to make inflation bolt section of thick bamboo 25 be connected with grinding backup pad 1 through inflation screw 26, keep adjacent polishing mechanism 7 butt each other, and make polishing mechanism 7 be annular array form evenly distributed, under the pressure adjustment of pressure gasbag mechanism 6, polishing mechanism 7 of every round is degressive from inside to outside in proper order to the pressure of base plate glass, thereby make every polishing mechanism 7 keep unanimous to base plate glass's grinding efficiency, thereby improve base plate glass's surface smoothness, when impaired situation appears in the surface of certain block joint grinding pad 24 wherein, only need to change polishing mechanism 7 at its place can, thereby improve the availability factor, reduce extravagantly, and save cost.
When the polishing device is used, the working surface of a polishing mechanism 7 is abutted with the polished surface of substrate glass, then gas is continuously conveyed through a gas conveyor 4, pressurized gas is conveyed through an inner ring pipe 8, an outer ring pipe 9, an intermediate ring pipe 10 and a communication straight pipe 11 which are communicated with a pipe frame 5, the high-pressure gas in the communication pipe frame 5 is conveyed into a pressure airbag mechanism 6 through one communication hose 15 and a one-way gas pump 16 communicated with the communication hose, so that the gas pressure in the airbag wall is increased, the connecting circular plate 30 is subjected to vertical downward pressure, and further, the grinding support plate 1 is pushed through the connecting circular plate 30, so that different pressures of the ground and polished substrate glass are kept by circles of the grinding support plate 1 from inside to outside, and the gas pressure in the pressure airbag mechanism 6 of each circle is kept consistent, so that the pressure of each circle is kept consistent, the gas pressure in each circle of pressure airbag mechanism 6 is adjusted by two one-way air pumps 16, so that each pressure airbag mechanism 6 performs pressure control according to the distance from the position of the pressure airbag mechanism to the axis of the grinding support plate 1, the pressure generated by the pressure airbag mechanism 6 communicated with each middle ring pipe 10 is reduced along with the increase of the radius of each middle ring pipe 10, the pressure generated by the pressure airbag mechanism 6 communicated with the inner ring pipe 8 is highest, and the pressure generated by the pressure airbag mechanism 6 communicated with the outer ring pipe 9 is lowest, so that the pressure of the grinding support plate 1 to each circle of polishing mechanisms 7 is gradually reduced from inside to outside in an annular sectional manner, the grinding efficiency of each circle of polishing mechanisms 7 to the substrate glass is kept consistent, and the surface leveling effect of the polished surface of the substrate glass is ensured to be optimal;
when the pressure airbag mechanism 6 is used, when the internal pressure of the pressure airbag mechanism 6 rises, the airbag wall is pressed to expand, the deformation direction of the airbag wall is kept in the vertical direction through the limiting of the inner connecting ring 18 and the outer connecting ring 19, the deformation of the expansion ring 17 is reduced through the structure of the expansion ring 17, each expansion ring 17 of the airbag wall keeps extending towards the upper end and the lower end when being pressed, the expansion towards the periphery is avoided, the vertical downward stable thrust on the connecting circular plate 30 is ensured, the airbag wall is limited through the outer limiting cylinder 21 and the inner limiting cylinder 22, the airbag wall is kept expanding in the vertical direction, the pressure of the pressure airbag mechanism 6 on the grinding support plate 1 is kept vertical, the expansion volume of the airbag wall is reduced through the limiting of the outer limiting cylinder 21 and the inner limiting cylinder 22 on the airbag wall, the pressure is improved, the use efficiency of high-pressure gas is improved, and meanwhile, the pressure of the pressure airbag mechanism 6 on the grinding support plate 1 is further ensured to be vertical through the expansion connecting rod 20 and the supporting expansion column 12;
install polishing mechanism 7 at the lower surface of grinding backup pad 1 through inflation bolt section of thick bamboo 25, it is more inseparable to make inflation bolt section of thick bamboo 25 be connected with grinding backup pad 1 through inflation screw 26, keep adjacent polishing mechanism 7 butt each other, and make polishing mechanism 7 be annular array form evenly distributed, under the pressure regulation of pressure gasbag mechanism 6, polishing mechanism 7 of every round is degressive from inside to outside in proper order to the pressure of base plate glass, thereby make every polishing mechanism 7 keep unanimous to base plate glass's grinding efficiency, thereby improve base plate glass's surface smoothness, when impaired situation appears in the surface of certain block joint grinding pad 24 wherein, only need to change its polishing mechanism 7 at place can, thereby improve the availability factor, reduce extravagantly, and save cost.
Although the present invention has been described with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the present invention.
Claims (1)
1. The utility model provides a but annular segmentation adjusts pressure device for jumbo size base plate glass grinding head which characterized in that, including grinding backup pad (1), be provided with support ring frame (2) directly over grinding backup pad (1), the top center fixedly connected with of support ring frame (2) is used for connecting and keep stable connection roof-rack (3), gas transmission machine (4) are installed at the downside center of support ring frame (2), the downside of support ring frame (2) is located gas transmission machine (4) and installs intercommunication pipe support (5) all around, gas transmission machine (4) and intercommunication pipe support (5) are linked together, install a plurality of pressure gasbag mechanism (6) that are annular array evenly distributed between intercommunication pipe support (5) and the grinding backup pad (1), the top and the intercommunication pipe support (5) intercommunication of pressure gasbag mechanism (6), be provided with a plurality of support expansion columns (12) that are annular array evenly distributed between support ring frame (2) and the grinding backup pad (1), the lower surface mounting of grinding backup pad (1) has a plurality of polishing mechanism (7) that are annular array evenly distributed;
the communicating pipe support (5) comprises an inner ring pipe (8), an outer ring pipe (9) and a middle ring pipe (10), the outer ring pipe (9) is arranged on the periphery of the inner ring pipe (8), a plurality of middle ring pipes (10) are arranged between the inner ring pipe (8) and the outer ring pipe (9), equal intervals are kept between every two adjacent middle ring pipes (10), and the inner ring pipe (8), the outer ring pipe (9) and the middle ring pipes (10) are communicated through a plurality of communicating straight pipes (11) which are uniformly distributed in an annular array;
the pressure air bag mechanism (6) comprises a supporting mounting plate (13), a connecting circular plate (30) is arranged right below the supporting mounting plate (13), an air bag wall is arranged between the supporting mounting plate (13) and the connecting circular plate (30), a communicating hose (15) is arranged in the center of the supporting mounting plate (13) in a penetrating mode, and a mounting ring frame (14) is arranged on the periphery, located on the communicating hose (15), of the center of the top of the supporting mounting plate (13);
a plurality of telescopic connecting rods (20) which are uniformly distributed at equal angles are arranged on the inner side of the air bag wall and positioned around the communicating hose (15), and an outer limiting cylinder (21) and an inner limiting cylinder (22) are respectively sleeved on the periphery of the air bag wall;
the airbag wall is composed of a plurality of telescopic rings (17), inner connecting rings (18) and outer connecting rings (19), the telescopic rings (17) are made of rubber, the telescopic rings (17) are in a circular table shape, the thickness of the middle parts of the telescopic rings (17) is higher than that of the two ends, the inner connecting rings (18) and the outer connecting rings (19) are coaxial and are arranged in a staggered and parallel mode, and the inner connecting rings (18) and the outer connecting rings (19) are connected with each other through the telescopic rings (17);
the polishing mechanism (7) comprises a clamping support plate (23), the lower surface of the clamping support plate (23) is fixedly connected with a clamping grinding pad (24), and four corners of the upper surface of the clamping support plate (23) are fixedly connected with expansion bolt cylinders (25);
the periphery of the upper end of the expansion bolt cylinder (25) is fixedly connected with a plurality of anti-skidding rings, a plurality of through holes which are in one-to-one correspondence with the expansion bolt cylinder (25) are formed in the grinding support plate (1) in a penetrating mode, through grooves (27) are formed in two sides of the upper end of the expansion bolt cylinder (25), and the upper end of the expansion bolt cylinder (25) is connected with an expansion screw (26) in a threaded mode;
a plurality of limiting sliding grooves (28) which are uniformly distributed at equal angles are formed in the inner side wall, close to the inner limiting cylinder (22), of the outer limiting cylinder (21), a plurality of limiting sliding blocks (29) which correspond to the limiting sliding grooves (28) one by one are fixedly connected to the periphery of the lower end of the inner limiting cylinder (22), and the limiting sliding blocks (29) are connected with the limiting sliding grooves (28) in a sliding mode;
the working surface of the polishing mechanism (7) is abutted against the polished surface of the substrate glass, then the gas is continuously conveyed through a gas conveying machine (4), the high-pressure gas in the communicating pipe frame (5) is conveyed into the pressure airbag mechanism (6) through an inner annular pipe (8), an outer annular pipe (9), a middle annular pipe (10) and a communicating straight pipe (11) of the communicating pipe frame (5), the gas pressure in the airbag wall is increased, so that the connecting circular plate (30) is subjected to vertical downward pressure, further, the grinding support plate (1) is pushed through the connecting circular plate (30), so that the circles of the grinding support plate (1) from inside to outside keep different pressures on the ground and polished substrate glass, the gas pressure in the pressure airbag mechanism (6) of each circle is kept consistent, the pressure of the gas in each pressure airbag mechanism (6) of each circle is regulated through two one-way air pumps (16), the gas pressure in the pressure airbag mechanisms (6) of each circle is kept consistent, the gas pressure in the pressure airbag mechanisms (6) of each circle is increased, the distance between the pressure generated by the pressure airbag mechanisms (6) is ensured, and the distance between the grinding support plate (6) is reduced according to the pressure generated by the gas pumps (6), the pressure generated by the pressure air bag mechanism (6) communicated with the outer ring pipe (9) is the lowest, so that the pressure of the grinding support plate (1) on each ring of polishing mechanisms (7) is gradually reduced in an annular sectional manner from inside to outside, and the grinding efficiency of each ring of polishing mechanisms (7) on the substrate glass is kept consistent.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111655390.2A CN114473854B (en) | 2021-12-30 | 2021-12-30 | Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111655390.2A CN114473854B (en) | 2021-12-30 | 2021-12-30 | Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114473854A CN114473854A (en) | 2022-05-13 |
| CN114473854B true CN114473854B (en) | 2023-02-28 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202111655390.2A Active CN114473854B (en) | 2021-12-30 | 2021-12-30 | Annular sectional adjusting and pressurizing device for large-size substrate glass grinding head |
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| CN (1) | CN114473854B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1447394A (en) * | 2002-03-25 | 2003-10-08 | 联华电子股份有限公司 | Chemical-mechanical grinding head possessing floating obstruct ring |
| CN2712547Y (en) * | 2003-12-27 | 2005-07-27 | 上海华虹（集团）有限公司 | Polishing head structure for chemical mechanical polishing |
| CN102975106A (en) * | 2012-12-24 | 2013-03-20 | 厦门大学 | Precision airbag polishing tool system |
| JP2019149562A (en) * | 2019-04-10 | 2019-09-05 | エイブリック株式会社 | Polishing head, cmp polishing device having polishing head, and method of manufacturing semiconductor integrated circuit using the same |
| CN112605786A (en) * | 2020-11-29 | 2021-04-06 | 厦门理工学院 | Air bag head mechanism capable of adjusting pressure in segmented mode and air bag polishing device |
-
2021
- 2021-12-30 CN CN202111655390.2A patent/CN114473854B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1447394A (en) * | 2002-03-25 | 2003-10-08 | 联华电子股份有限公司 | Chemical-mechanical grinding head possessing floating obstruct ring |
| CN2712547Y (en) * | 2003-12-27 | 2005-07-27 | 上海华虹（集团）有限公司 | Polishing head structure for chemical mechanical polishing |
| CN102975106A (en) * | 2012-12-24 | 2013-03-20 | 厦门大学 | Precision airbag polishing tool system |
| JP2019149562A (en) * | 2019-04-10 | 2019-09-05 | エイブリック株式会社 | Polishing head, cmp polishing device having polishing head, and method of manufacturing semiconductor integrated circuit using the same |
| CN112605786A (en) * | 2020-11-29 | 2021-04-06 | 厦门理工学院 | Air bag head mechanism capable of adjusting pressure in segmented mode and air bag polishing device |
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| Publication number | Publication date |
|---|---|
| CN114473854A (en) | 2022-05-13 |
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