CN102947088B - 具有结合的聚合物薄膜磨损表面的气动轴承及其制造方法 - Google Patents

具有结合的聚合物薄膜磨损表面的气动轴承及其制造方法 Download PDF

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Publication number
CN102947088B
CN102947088B CN201180030828.6A CN201180030828A CN102947088B CN 102947088 B CN102947088 B CN 102947088B CN 201180030828 A CN201180030828 A CN 201180030828A CN 102947088 B CN102947088 B CN 102947088B
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China
Prior art keywords
polyimide film
substrate
bearing
epoxy resin
radiation
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CN201180030828.6A
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English (en)
Chinese (zh)
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CN102947088A (zh
Inventor
达格斯·帕里扎
圣地亚哥·德普埃尔托
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ASML Holding NV
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ASML Holding NV
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/20—Sliding surface consisting mainly of plastics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/18—Layered products comprising a layer of metal comprising iron or steel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/38—Layered products comprising a layer of synthetic resin comprising epoxy resins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/005—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising one layer of ceramic material, e.g. porcelain, ceramic tile
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B9/045—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/20—Sliding surface consisting mainly of plastics
    • F16C33/201—Composition of the plastic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C43/00—Assembling bearings
    • F16C43/02—Assembling sliding-contact bearings
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/50—Properties of the layers or laminate having particular mechanical properties
    • B32B2307/536—Hardness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/50—Properties of the layers or laminate having particular mechanical properties
    • B32B2307/558—Impact strength, toughness
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/70—Other properties
    • B32B2307/732—Dimensional properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2457/00—Electrical equipment
    • B32B2457/08—PCBs, i.e. printed circuit boards
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Sliding-Contact Bearings (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Laminated Bodies (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CN201180030828.6A 2010-06-23 2011-04-06 具有结合的聚合物薄膜磨损表面的气动轴承及其制造方法 Active CN102947088B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US35777110P 2010-06-23 2010-06-23
US61/357,771 2010-06-23
PCT/EP2011/055378 WO2011160867A1 (en) 2010-06-23 2011-04-06 Pneumatic bearing with bonded polymer film wear surface and production method thereof

Publications (2)

Publication Number Publication Date
CN102947088A CN102947088A (zh) 2013-02-27
CN102947088B true CN102947088B (zh) 2017-06-13

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CN201180030828.6A Active CN102947088B (zh) 2010-06-23 2011-04-06 具有结合的聚合物薄膜磨损表面的气动轴承及其制造方法

Country Status (6)

Country Link
US (1) US10267360B2 (enExample)
JP (1) JP5945269B2 (enExample)
KR (1) KR101806345B1 (enExample)
CN (1) CN102947088B (enExample)
TW (1) TWI515376B (enExample)
WO (1) WO2011160867A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20140110826A1 (en) * 2012-10-23 2014-04-24 Nxp B.V. Backside protection for a wafer-level chip scale package (wlcsp)
US9245804B2 (en) 2012-10-23 2016-01-26 Nxp B.V. Using a double-cut for mechanical protection of a wafer-level chip scale package (WLCSP)
CN106919000B (zh) * 2015-12-28 2018-11-30 清华大学 平面电机永磁体阵列气浮表面的加工方法
CN106917821B (zh) * 2015-12-28 2019-06-18 清华大学 一种平面电机永磁体阵列气浮表面的加工方法
CN109054625B (zh) * 2018-07-20 2020-09-08 中国科学院兰州化学物理研究所 一种气浮轴承用复合聚酰亚胺薄膜及其制备方法
EP3627226A1 (en) * 2018-09-20 2020-03-25 ASML Netherlands B.V. Optical system, metrology apparatus and associated method

Citations (6)

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CN1035871A (zh) * 1989-01-26 1989-09-27 何生荣 一种推力滑动轴承及其制造方法
CN1300908A (zh) * 1999-12-17 2001-06-27 Skf诺瓦股份公司 空气轴承中的一种装置
US20060078239A1 (en) * 2004-09-01 2006-04-13 Florin Dimofte Wave bearings in high performance applications
CN101131178A (zh) * 2006-08-25 2008-02-27 台达电子工业股份有限公司 动压轴承及其制作方法
CN101303531A (zh) * 2007-01-24 2008-11-12 Asml控股股份有限公司 晶片卡盘和形成晶片卡盘的方法
CN101408224A (zh) * 2007-10-10 2009-04-15 大同金属工业株式会社 滑动轴承

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JPH0257721A (ja) 1988-08-22 1990-02-27 Canon Inc 真空用エアーベアリング
JP2775454B2 (ja) 1989-02-14 1998-07-16 キヤノン株式会社 真空用エアーベアリング
JPH09144757A (ja) 1995-11-27 1997-06-03 Sony Corp 静圧軸受装置及び静圧軸受装置の製造方法
JPH09329133A (ja) 1996-06-10 1997-12-22 Sankyo Seiki Mfg Co Ltd 動圧軸受装置の製造方法
US5989444A (en) 1998-02-13 1999-11-23 Zywno; Marek Fluid bearings and vacuum chucks and methods for producing same
JP4334035B2 (ja) 1998-04-21 2009-09-16 株式会社ミツトヨ 流体軸受の製造方法
US6296990B1 (en) 1998-05-14 2001-10-02 Asm Lithography, B.V. Gas bearing and lithographic apparatus including such a bearing
US6487440B2 (en) * 1998-07-08 2002-11-26 Lifespex, Inc. Optical probe having and methods for difuse and uniform light irradiation
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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1035871A (zh) * 1989-01-26 1989-09-27 何生荣 一种推力滑动轴承及其制造方法
CN1300908A (zh) * 1999-12-17 2001-06-27 Skf诺瓦股份公司 空气轴承中的一种装置
US20060078239A1 (en) * 2004-09-01 2006-04-13 Florin Dimofte Wave bearings in high performance applications
CN101131178A (zh) * 2006-08-25 2008-02-27 台达电子工业股份有限公司 动压轴承及其制作方法
CN101303531A (zh) * 2007-01-24 2008-11-12 Asml控股股份有限公司 晶片卡盘和形成晶片卡盘的方法
CN101408224A (zh) * 2007-10-10 2009-04-15 大同金属工业株式会社 滑动轴承

Also Published As

Publication number Publication date
CN102947088A (zh) 2013-02-27
TWI515376B (zh) 2016-01-01
US10267360B2 (en) 2019-04-23
US20130108203A1 (en) 2013-05-02
KR20130139839A (ko) 2013-12-23
WO2011160867A1 (en) 2011-12-29
JP5945269B2 (ja) 2016-07-05
KR101806345B1 (ko) 2018-01-18
TW201207261A (en) 2012-02-16
JP2013532263A (ja) 2013-08-15

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