CN102931079A - 一种锗硅异质结双极晶体管的制造方法 - Google Patents
一种锗硅异质结双极晶体管的制造方法 Download PDFInfo
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US20020192918A1 (en) * | 1999-06-22 | 2002-12-19 | Matsushita Electric Industrial Co., Ltd. | Heterojunction bipolar transistor and method for fabricating the same |
US6518111B1 (en) * | 2001-12-20 | 2003-02-11 | Texas Instruments Incorporated | Method for manufacturing and structure of semiconductor device with dielectric diffusion source and CMOS integration |
US20040123882A1 (en) * | 2002-11-15 | 2004-07-01 | Olmer Leonard J | In-situ removal of surface impurities prior to arsenic-doped polysilicon deposition in the fabrication of a heterojunction bipolar transistor |
US20050184359A1 (en) * | 2004-02-25 | 2005-08-25 | International Business Machines Corporation | Structure and method of self-aligned bipolar transistor having tapered collector |
CN1868061A (zh) * | 2003-08-29 | 2006-11-22 | 国际商业机器公司 | 具有凸起的外部基极的双极型晶体管及其制造方法 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20020192918A1 (en) * | 1999-06-22 | 2002-12-19 | Matsushita Electric Industrial Co., Ltd. | Heterojunction bipolar transistor and method for fabricating the same |
US6518111B1 (en) * | 2001-12-20 | 2003-02-11 | Texas Instruments Incorporated | Method for manufacturing and structure of semiconductor device with dielectric diffusion source and CMOS integration |
US20040123882A1 (en) * | 2002-11-15 | 2004-07-01 | Olmer Leonard J | In-situ removal of surface impurities prior to arsenic-doped polysilicon deposition in the fabrication of a heterojunction bipolar transistor |
CN1868061A (zh) * | 2003-08-29 | 2006-11-22 | 国际商业机器公司 | 具有凸起的外部基极的双极型晶体管及其制造方法 |
US20050184359A1 (en) * | 2004-02-25 | 2005-08-25 | International Business Machines Corporation | Structure and method of self-aligned bipolar transistor having tapered collector |
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