CN102929104B - 光学成像装置 - Google Patents

光学成像装置 Download PDF

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Publication number
CN102929104B
CN102929104B CN201210424595.4A CN201210424595A CN102929104B CN 102929104 B CN102929104 B CN 102929104B CN 201210424595 A CN201210424595 A CN 201210424595A CN 102929104 B CN102929104 B CN 102929104B
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CN
China
Prior art keywords
imaging device
component
optical
unit
substrate
Prior art date
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Active
Application number
CN201210424595.4A
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English (en)
Chinese (zh)
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CN102929104A (zh
Inventor
Y-B.P.克万
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
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Carl Zeiss SMT GmbH
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Publication of CN102929104A publication Critical patent/CN102929104A/zh
Application granted granted Critical
Publication of CN102929104B publication Critical patent/CN102929104B/zh
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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70833—Mounting of optical systems, e.g. mounting of illumination system, projection system or stage systems on base-plate or ground

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Public Health (AREA)
  • Toxicology (AREA)
  • Atmospheric Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Microscoopes, Condenser (AREA)
CN201210424595.4A 2005-06-02 2006-06-02 光学成像装置 Active CN102929104B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US68684905P 2005-06-02 2005-06-02
US60/686,849 2005-06-02
US71497505P 2005-09-08 2005-09-08
US60/714,975 2005-09-08

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN2006800265792A Division CN101248392B (zh) 2005-06-02 2006-06-02 光学成像装置

Publications (2)

Publication Number Publication Date
CN102929104A CN102929104A (zh) 2013-02-13
CN102929104B true CN102929104B (zh) 2016-08-03

Family

ID=36952670

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201210424595.4A Active CN102929104B (zh) 2005-06-02 2006-06-02 光学成像装置
CN2006800265792A Active CN101248392B (zh) 2005-06-02 2006-06-02 光学成像装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2006800265792A Active CN101248392B (zh) 2005-06-02 2006-06-02 光学成像装置

Country Status (6)

Country Link
US (2) US7817248B2 (https=)
EP (2) EP2357529A3 (https=)
JP (2) JP5237091B2 (https=)
KR (2) KR101346957B1 (https=)
CN (2) CN102929104B (https=)
WO (1) WO2006128713A2 (https=)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008110212A1 (en) * 2007-03-15 2008-09-18 Carl Zeiss Smt Ag Optical imaging arrangement
US7903866B2 (en) 2007-03-29 2011-03-08 Asml Netherlands B.V. Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object
WO2009039883A1 (en) * 2007-09-26 2009-04-02 Carl Zeiss Smt Ag Optical imaging device with thermal stabilization
US8792079B2 (en) 2007-12-28 2014-07-29 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body
DE102008004762A1 (de) 2008-01-16 2009-07-30 Carl Zeiss Smt Ag Projektionsbelichtungsanlage für die Mikrolithographie mit einer Messeinrichtung
NL1036579A1 (nl) * 2008-02-19 2009-08-20 Asml Netherlands Bv Lithographic apparatus and methods.
DE102008026077B4 (de) * 2008-05-30 2017-11-09 Integrated Dynamics Engineering Gmbh Lithographiesystem
DE102008030664A1 (de) * 2008-07-01 2010-01-21 Carl Zeiss Smt Ag Optische Abbildungseinrichtung mit Bestimmung von Abbildungsfehlern
DE102009013720A1 (de) * 2009-03-20 2010-09-23 Carl Zeiss Smt Ag Verfahren zur Ausrichtung von Referenzkomponenten von Projektionsobjektiven, Projektionsobjektiv für die Halbleiterlithographie und Hilfselement
DE102009054860A1 (de) 2009-12-17 2011-06-22 Carl Zeiss SMT GmbH, 73447 Optisches System, insbesondere in einer mikrolithographischen Projektionsbelichtungsanlage
WO2011039036A2 (en) 2009-09-30 2011-04-07 Carl Zeiss Smt Gmbh Optical system, in particular in a microlithographic projection exposure apparatus
DE102009043501A1 (de) 2009-09-30 2011-03-31 Carl Zeiss Smt Gmbh Optisches System, insbesondere in einer mikrolithographischen Projektionsbelichtungsanlage
US20120127445A1 (en) * 2010-11-18 2012-05-24 Akimitsu Ebihara Isolation system for an optical element of an exposure apparatus
EP2726939B1 (en) * 2011-07-01 2020-09-16 Carl Zeiss SMT GmbH Optical imaging arrangement with individually actively supported components
WO2013178277A1 (en) * 2012-05-31 2013-12-05 Carl Zeiss Smt Gmbh Optical imaging arrangement with multiple metrology support units
JP6066592B2 (ja) 2012-06-12 2017-01-25 キヤノン株式会社 露光装置及びデバイス製造方法
WO2015043682A1 (en) * 2013-09-30 2015-04-02 Carl Zeiss Smt Gmbh Optical imaging arrangement with simplified manufacture
DE112014006641A5 (de) * 2014-05-05 2017-01-26 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät zum Bestimmen von geometrischen Eigenschaften eines Messobjekts
JP6754699B2 (ja) * 2014-05-14 2020-09-16 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学素子上のアクチュエータ及びセンサ点の最適配置
DE102014212104A1 (de) * 2014-06-24 2015-12-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und verfahren zur relativen positionierung einer multiaperturoptik mit mehreren optischen kanälen relativ zu einem bildsensor
DE102015211286A1 (de) 2015-06-18 2016-12-22 Carl Zeiss Smt Gmbh Abbildungssystem und verfahren
WO2017092815A1 (en) * 2015-12-03 2017-06-08 Carl Zeiss Smt Gmbh Optical imaging arrangement with actively adjustable metrology support units
WO2018015079A1 (en) * 2016-07-22 2018-01-25 Asml Netherlands B.V. Lithographic apparatus, lithographic projection apparatus and device manufacturing method
US10048599B2 (en) * 2016-12-30 2018-08-14 Mapper Lithography Ip B.V. Adjustment assembly and substrate exposure system comprising such an adjustment assembly
IL267672B2 (en) 2016-12-30 2023-04-01 Asml Netherlands Bv An adjustable assembly and a substrate exposure system containing this adjustable assembly
US10348306B2 (en) * 2017-03-09 2019-07-09 University Of Utah Research Foundation Resistive random access memory based multiplexers and field programmable gate arrays
CN109945777A (zh) * 2017-12-21 2019-06-28 北京矩阵空间科技有限公司 一种三维自动成像系统
DE102020206249A1 (de) * 2020-05-18 2021-11-18 Carl Zeiss Smt Gmbh Verfahren zur Instandhaltung einer Projektionsbelichtungsanlage, Servicemodul und Anordnung für die Halbleiterlithographie

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758091A (en) * 1986-11-20 1988-07-19 Ateo Corporation Pattern generator part holder
US4790642A (en) * 1986-12-01 1988-12-13 Gca Corporation/Tropel Division Integrated metrology for microlithographic objective reducing lens
EP0502583A1 (en) * 1991-03-07 1992-09-09 Koninklijke Philips Electronics N.V. Imaging apparatus comprising a focus-error and/or tilt detection device
US6741358B1 (en) * 1999-09-20 2004-05-25 Nikon Corporation Exposure apparatus and device production method in which position of reference plate provided on substrate stage is measured
EP1503246A2 (en) * 2003-07-31 2005-02-02 Canon Kabushiki Kaisha Positioning mechanism, exposure apparatus, and device manufacturing method

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01122119A (ja) * 1987-11-05 1989-05-15 Canon Inc 露光装置
NL9100407A (nl) * 1991-03-07 1992-10-01 Philips Nv Optisch lithografische inrichting met een krachtgecompenseerd machinegestel.
JP3226704B2 (ja) * 1994-03-15 2001-11-05 キヤノン株式会社 露光装置
US6031598A (en) * 1998-09-25 2000-02-29 Euv Llc Extreme ultraviolet lithography machine
JP2000286189A (ja) 1999-03-31 2000-10-13 Nikon Corp 露光装置および露光方法ならびにデバイス製造方法
US6344083B1 (en) * 2000-02-14 2002-02-05 Memc Electronic Materials, Inc. Process for producing a silicon melt
US7289212B2 (en) * 2000-08-24 2007-10-30 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufacturing thereby
EP1182509B1 (en) 2000-08-24 2009-04-08 ASML Netherlands B.V. Lithographic apparatus, calibration method thereof and device manufacturing method
US20020080339A1 (en) * 2000-12-25 2002-06-27 Nikon Corporation Stage apparatus, vibration control method and exposure apparatus
US6881963B2 (en) * 2002-11-08 2005-04-19 Canon Kabushiki Kaisha Vibration control of an object
JP4298305B2 (ja) * 2003-01-20 2009-07-15 キヤノン株式会社 露光装置及び半導体デバイスの製造方法
JP2004246060A (ja) * 2003-02-13 2004-09-02 Canon Inc 反射型投影光学系の調整方法
JP4307140B2 (ja) * 2003-04-25 2009-08-05 キヤノン株式会社 光学素子位置決め装置、それを用いた露光装置、デバイスの製造方法
JP2004281654A (ja) * 2003-03-14 2004-10-07 Canon Inc 駆動機構及びそれを用いた露光装置、デバイスの製造方法
EP1469348B1 (en) * 2003-04-14 2012-01-18 ASML Netherlands B.V. Projection system and method of use thereof
EP1646074A4 (en) * 2003-07-09 2007-10-03 Nikon Corp EXPOSURE DEVICE AND METHOD FOR MANUFACTURING COMPONENTS
EP1643543B1 (en) 2003-07-09 2010-11-24 Nikon Corporation Exposure apparatus and method for manufacturing device
JP4366152B2 (ja) * 2003-09-09 2009-11-18 キヤノン株式会社 露光装置
JP4534986B2 (ja) 2003-09-17 2010-09-01 不二製油株式会社 油脂の乾式分別方法
US7589911B2 (en) * 2003-09-18 2009-09-15 Canon Kabushiki Kaisha Technique for positioning optical system element
JP2005236258A (ja) * 2003-09-18 2005-09-02 Canon Inc 光学装置およびデバイス製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758091A (en) * 1986-11-20 1988-07-19 Ateo Corporation Pattern generator part holder
US4790642A (en) * 1986-12-01 1988-12-13 Gca Corporation/Tropel Division Integrated metrology for microlithographic objective reducing lens
EP0502583A1 (en) * 1991-03-07 1992-09-09 Koninklijke Philips Electronics N.V. Imaging apparatus comprising a focus-error and/or tilt detection device
US6741358B1 (en) * 1999-09-20 2004-05-25 Nikon Corporation Exposure apparatus and device production method in which position of reference plate provided on substrate stage is measured
EP1503246A2 (en) * 2003-07-31 2005-02-02 Canon Kabushiki Kaisha Positioning mechanism, exposure apparatus, and device manufacturing method

Also Published As

Publication number Publication date
EP2357529A3 (en) 2015-09-02
KR20080019047A (ko) 2008-02-29
US20110001949A1 (en) 2011-01-06
EP1886191A2 (en) 2008-02-13
CN102929104A (zh) 2013-02-13
US8416392B2 (en) 2013-04-09
WO2006128713A3 (en) 2007-05-31
JP2008543070A (ja) 2008-11-27
JP5237091B2 (ja) 2013-07-17
JP2013051424A (ja) 2013-03-14
CN101248392A (zh) 2008-08-20
US20080212083A1 (en) 2008-09-04
KR101346957B1 (ko) 2014-01-02
JP5816152B2 (ja) 2015-11-18
CN101248392B (zh) 2012-12-19
KR20130014602A (ko) 2013-02-07
WO2006128713A2 (en) 2006-12-07
US7817248B2 (en) 2010-10-19
EP2357529A2 (en) 2011-08-17

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