CN102899617A

CN102899617A - Vacuum coating machine rotation mechanism

Info

Publication number: CN102899617A
Application number: CN2011102100636A
Authority: CN
Inventors: 黄水祥
Original assignee: YULIN AUTO ACCESSORIES (KUNSHAN) CO Ltd
Current assignee: YULIN AUTO ACCESSORIES (KUNSHAN) CO Ltd
Priority date: 2011-07-26
Filing date: 2011-07-26
Publication date: 2013-01-30

Abstract

A vacuum coating machine rotation mechanism comprises a rotary support and a motor driving the rotary support to rotate, wherein the rotary support is positioned in a vacuum chamber; the vacuum chamber is composed of a pedestal and a dome cover arranged on the pedestal; the rotary support comprises an upper carriage and a lower ring which can fix coating workpieces; the middle of the upper carriage is fixed on the top rotation shaft of the dome cover; the circumference of the upper carriage and the lower ring are connected and fixed through a plurality of parallel upright rods; the pedestal is provided with a plurality of rollers convenient for the rotation of the lower ring to correspond with the inner edge with the lower ring; the motor drives the driving rollers in close fitting with the inner edge of the lower ring and the lower ring to rotate; the upper carriage is composed of an upper inner ring, an upper outer ring and a plurality of spokes; the upper inner ring is fixed on the top rotation shaft of the dome cover; two ends of each of the spokes are respectively connected with the upper inner ring and the upper outer ring, and the spokes are distributed in a radial manner; and the upper outer ring and the lower ring are connected and fixed through the parallel upright rods.

Description

Rotating mechanism of vacuum coating machine

Technical field

The invention belongs to vacuum coating film equipment, particularly a kind of processing units of realizing evaporation coating by conversion film-coating workpiece position.

Background technology

Vacuum plating refers to and need to carry out plated film under higher vacuum, specifically comprises many types, comprises vacuum ionic evaporation, magnetron sputtering, and the MBE molecular beam epitaxy, PLD pulsed laser depositions etc. are a variety of, and main thought is to be divided into two kinds of evaporation and sputters.

For evaporation coating, generally be that the heating target makes surface component be evaporated out with atomic group or ionic species, and be deposited in substrate (or claiming workpiece) surface, form film by film process.Thickness evenness and component uniformity depend primarily on: the lattice match degree of workpiece material and target; Workpiece surface temperature; Target evaporation power and speed; Plated film vacuum tightness; Plated film time and thickness size.When having adjusted workpiece coating temperature and vacuum tightness, and behind the target evaporation conditions, just need to be according to the workpiece particular requirement, need to change continuously the film-coating workpiece position by the biography mechanism of reasonable setting, just can guarantee the workpiece coating quality, especially for the particularly important that seems of the large-scale workpiece such as automotive hub and so on.

Summary of the invention

In order to overcome defects, the invention provides a kind of rotating mechanism of vacuum coating machine, reach workpiece plated film uniformity coefficient by continuous setup film-coating workpiece position, improved efficient.

The present invention for the technical scheme that solves its technical problem and adopt is: a kind of rotating mechanism of vacuum coating machine, comprise swinging strut and drive the motor that this swinging strut rotates, this swinging strut is positioned at vacuum chamber, this vacuum chamber is comprised of base and the dome cover that is installed on this base, wherein:

1) this swinging strut comprises fixedly bracket and the lower ring of film-coating workpiece, this bracket middle part is fixed on this dome cover top rotation axis, be connected and fixed by a plurality of parallel up-and-down rods between this bracket ring week and this time ring, to descending the preglabellar field of ring, this base is provided with a plurality of rollers that this time ring rotates of being convenient to;

2) this motor drives related this time ring of the driving rolls rotation that is tight with at this time ring preglabellar field.

As a further improvement on the present invention, this bracket is comprised of upper inner ring, upper outer shroud and a plurality of spoke, this upper inner ring is fixed on this dome cover top rotation axis, these a plurality of spokes two ends connect respectively this upper inner ring and upper outer shroud, and distribute radially, be connected and fixed by a plurality of these parallel up-and-down rods between outer shroud and this time ring on this.

As a further improvement on the present invention, this driving rolls is fixed in the upper end of a coupling shaft, and this base is fixed at this coupling shaft middle part and the lower end stretches out in this base, and drives by this motor that is installed on this vacuum chamber outside and to rotate.

As a further improvement on the present invention, this driving rolls is gear, this time ring preglabellar field correspondence be provided with can with the annular rack of this gear engagement, this motor is step motor.

Useful technique effect of the present invention is: described bracket can be placed such as small-sized film-coating workpiece, also can fix the large-scale film-coating workpiece such as automotive hub, after described swinging strut produces when passing through its lower ring with the driving rolls close-fitting and rubs, drive this swinging strut and rotate, thereby realize the film-coating workpiece rotation.Further, described driving rolls adopts gear, and this time ring corresponding edge has engageable tooth bar, and described motor also adopts step motor to drive.Realized that thus described swinging strut controls arbitrarily the turned position, comprised forward or reverse, and the number of degrees that rotate.

Description of drawings

Fig. 1 is axial sectional view of the present invention;

Fig. 2 is A-A sectional view of the present invention.

Contrast above accompanying drawing, be supplemented as follows explanation:

1---base 2---dome cover

The lower ring of 4---rollers 5---

6---up-and-down rod 9---upper inner ring

14---upper outer shroud 21---driving rolls

22---motor 25---spoke

27---conductive trough 28---rotation axis

Embodiment

In conjunction with Fig. 1 and Fig. 2, below be further described:

A kind of rotating mechanism of vacuum coating machine comprises swinging strut and drives the motor 22 that this swinging strut rotates that this swinging strut is positioned at vacuum chamber, and this vacuum chamber is comprised of base 1 and the dome cover 2 that is installed on this base, wherein:

1) this swinging strut comprises fixedly bracket and the lower ring 5 of film-coating workpiece, this bracket is comprised of upper inner ring 9, upper outer shroud 14 and a plurality of spoke 25, this upper inner ring 9 is fixed in (described rotation axis 28 with dashed lines in Fig. 1 marks) on these dome cover 2 top rotation axiss 28, these a plurality of spokes 25 two ends connect respectively this upper inner ring 9 and upper outer shroud 14, and distribute radially, upward be connected and fixed by a plurality of parallel up-and-down rods 6 between outer shroud 14 and this time ring 5, to descending the preglabellar field of ring, this base is provided with a plurality of rollers 4 that this time ring 5 rotates of being convenient to;

2) this motor 22 drives driving rolls 21 related this time ring 5 rotations that are tight with at this time ring 5 preglabellar fields, this driving rolls 21 is fixed in the upper end of a coupling shaft 24, this base 1 is fixed at these coupling shaft 24 middle parts and the lower end stretches out in this base, and drives by this motor 22 that is installed on this vacuum chamber outside and to rotate.

Rotate in order more accurately to control this swinging strut, this driving rolls 21 be gear, and this time encircles 5 preglabellar field correspondences and be provided with the annular rack that can mesh with this gear, and this motor 22 is step motor.

In order to finish vacuum plating processing, this dome cover sidepiece also must be provided with the hermatic door of being convenient to load and unload film-coating workpiece, in addition, this base is provided with target and heating arrangements, this heating arrangements is for placing the conductive trough 27 of this target, this conductive trough is installed on fixed support on this base, draw behind this vacuum chamber by two current conducting rods these conductive trough both sides, be connected with supply transformer secondary winding two ends respectively, needing in addition vaccum-pumping equipment in the described vacuum chamber and to the film-coating workpiece preheating equipment, all these are the necessary technique means of vacuum plating, also is the known technology of insider, not technological innovation of the present invention, be not described in detail inferior.

Claims

1. rotating mechanism of vacuum coating machine, comprise swinging strut and drive the motor (22) that this swinging strut rotates, this swinging strut is positioned at vacuum chamber, and this vacuum chamber is comprised of base (1) and the dome cover (2) that is installed on this base, it is characterized in that: wherein:

1) this swinging strut comprises fixedly bracket and the lower ring (5) of film-coating workpiece, this bracket middle part is fixed on this dome cover (2) top rotation axis (28), be connected and fixed by a plurality of parallel up-and-down rods (6) between this bracket ring week and this time ring, to descending the preglabellar field of ring, this base is provided with a plurality of rollers (4) that this time ring (5) rotates of being convenient to;

2) this motor (22) drives related this time ring of driving rolls (21) (5) rotation that is tight with at this time ring (5) preglabellar field.

2. rotating mechanism of vacuum coating machine according to claim 1, it is characterized in that: this bracket is comprised of upper inner ring (9), upper outer shroud (14) and a plurality of spoke (25), this upper inner ring (9) is fixed on this dome cover (2) top rotation axis, these a plurality of spokes (25) two ends connect respectively this upper inner ring (9) and upper outer shroud (14), and distribute radially, be connected and fixed by a plurality of parallel these up-and-down rods (6) between outer shroud on this (14) and this time ring (5).

3. rotating mechanism of vacuum coating machine according to claim 1 and 2, it is characterized in that: this driving rolls (21) is fixed in the upper end of a coupling shaft (24), this base (1) is fixed at this coupling shaft (24) middle part and the lower end stretches out in this base, and drives by this motor (22) that is installed on this vacuum chamber outside and to rotate.

4. rotating mechanism of vacuum coating machine according to claim 3, it is characterized in that: this driving rolls (21) is gear, this time ring (5) preglabellar field correspondence be provided with can with the annular rack of this gear engagement, this motor (22) is step motor.