CN102888651B - A kind of crucible cover and crucible system - Google Patents
A kind of crucible cover and crucible system Download PDFInfo
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- CN102888651B CN102888651B CN201110206298.8A CN201110206298A CN102888651B CN 102888651 B CN102888651 B CN 102888651B CN 201110206298 A CN201110206298 A CN 201110206298A CN 102888651 B CN102888651 B CN 102888651B
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- Prior art keywords
- crucible
- cover
- cover wall
- positioning convex
- wall
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- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 12
- 239000010453 quartz Substances 0.000 abstract description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 14
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 7
- 229920005591 polysilicon Polymers 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 4
- 230000001681 protective effect Effects 0.000 abstract description 4
- 239000003963 antioxidant agent Substances 0.000 abstract description 3
- 230000003078 antioxidant effect Effects 0.000 abstract description 3
- 235000006708 antioxidants Nutrition 0.000 abstract description 3
- 239000000919 ceramic Substances 0.000 abstract description 3
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 3
- 230000007797 corrosion Effects 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 3
- 238000004064 recycling Methods 0.000 abstract description 3
- 238000005057 refrigeration Methods 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract description 3
- 230000035939 shock Effects 0.000 abstract description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000005266 casting Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 230000003245 working effect Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 239000002210 silicon-based material Substances 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The embodiment of the invention discloses the positioning convex that a kind of crucible cover comprises the circumferential cover wall closed and the middle part being arranged on described cover wall.When using production polysilicon, above-mentioned crucible cover being arranged on quartz crucible, thus adding the height of crucible, therefore can add the charging capacity of crucible.In addition, above-mentioned crucible cover and crucible are separation design, the material selection silicon nitride of crucible cover, and silicon nitride is a kind of important structural ceramic material, and itself has oilness, and wear-resistant, and resistance to corrosion is strong, anti-oxidant during high temperature.And it can also resist thermal shock, be heated to more than 1000 DEG C in atmosphere, quick refrigeration sharply heats again, also can not be cracked.Silicon nitride ceramics also has anti-metal meltbility, and in protective atmosphere ability 1800 DEG C of high temperature, can realize recycling.The embodiment of the invention also discloses a kind of crucible system with crucible cover.
Description
Technical field
The present invention relates to polysilicon equipment field, more particularly, relate to a kind of crucible cover and crucible system.
Background technology
In polycrystalline furnace ingot casting process must experience vacuumize, melt, crystallization, annealing, cooling double teacher.Wherein, scattered solid silicon material is mainly melted into liquid state by the fusion stage, and crystallisation stage then makes polysilicon realize oriented growth (also claiming directional freeze) by certain mode.Just scattered silicon material need be loaded in the quartz crucible sprayed before carrying out casting ingot process, and fix by graphite protective plate, then drop in polycrystalline furnace and carry out ingot casting.At present, the quartz crucible height used is 420mm, charging capacity is about 440kg, the silicon ingot height cast out is 270mm-290mm, and the liquid state when the melt stage, silicon material melted completely is highly 250mm-270mm, relative to the height of crucible, the space of 130mm height is at least still had not to be utilized, if charge amount can be improved on the basis of existing quartz crucible, the output of separate unit polycrystalline furnace can be increased, and reduce the energy consumption of silicon ingot unit weight.The method improving charge amount is increased by crucible height, such as, change the size of quartz crucible, particularly increase the height of himself, then can promote its charge amount.
Although charging capacity increases after quartz crucible height increases, but silicon ingot height is still lower than the height of former quartz crucible, and the height component causing quartz crucible to increase only works when feeding intake, and common quartz crucible use once afterwards namely can be damaged, cannot reuse, cause the waste of resource.
In addition, because crucible process for making camber is higher, the more difficult making of casting mold, adds the manufacture difficulty of quartz crucible.And after the increase of quartz crucible height, be prevent quartz crucible to be out of shape the height simultaneously needing increase crucible guard boards.
Summary of the invention
In view of this, the invention provides a kind of crucible cover and crucible system, occur with the phenomenon realizing reducing the wasting of resources on the charge amount basis of improving crucible.
For achieving the above object, the invention provides following technical scheme:
A kind of crucible cover, comprise the positioning convex at the circumferential cover wall closed and the middle part being arranged on described cover wall, the material of described cover wall and described positioning convex is silicon nitride.
Preferably, in above-mentioned crucible cover, described positioning convex is arranged on the outside of described cover wall, is 30mm-40mm apart from one of them distance along limit of described cover wall, is 50mm-70mm apart from another distance along limit of described cover wall.
Preferably, in above-mentioned crucible cover, described positioning convex is that closed is distributed on described cover wall.
Preferably, in above-mentioned crucible cover, described positioning convex is distributed on described cover wall in interval shape.
Preferably, in above-mentioned crucible cover, described cover wall is rectangular configuration.
A kind of crucible system, comprise crucible, also comprise crucible cover, described crucible cover comprises the positioning convex at the circumferential cover wall closed and the middle part being arranged on described cover wall, the crucible wall of described cover wall and described crucible fits, and described crucible along limit and described positioning convex inconsistent, the material of described cover wall and described positioning convex is silicon nitride.
Preferably, in above-mentioned crucible system, described positioning convex is arranged on the outside of described cover wall, is 30mm-40mm apart from one of them distance along limit of described cover wall, is 50mm-70mm apart from another distance along limit of described cover wall.
Preferably, in above-mentioned crucible system, described positioning convex is that closed is distributed on described cover wall.
Preferably, in above-mentioned crucible system, described positioning convex is distributed on described cover wall in interval shape.
Preferably, in above-mentioned crucible system, described cover wall is rectangular configuration.
Crucible cover in the present invention comprises the positioning convex at the circumferential cover wall closed and the middle part being arranged on described cover wall.When using production polysilicon, above-mentioned crucible cover being arranged on quartz crucible, thus adding the height of crucible, therefore can add the charging capacity of crucible.
In addition, above-mentioned crucible cover and crucible are separation design, the material selection silicon nitride of crucible cover, and silicon nitride is a kind of important structural ceramic material, and itself has oilness, and wear-resistant, and resistance to corrosion is strong, anti-oxidant during high temperature.And it can also resist thermal shock, be heated to more than 1000 DEG C in atmosphere, quick refrigeration sharply heats again, also can not be cracked.Silicon nitride ceramics also has anti-metal meltbility, and in protective atmosphere ability 1800 DEG C of high temperature, can realize recycling.
Accompanying drawing explanation
In order to be illustrated more clearly in the embodiment of the present invention or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
The main TV structure schematic diagram of crucible cover that Fig. 1 provides for the embodiment of the present invention one;
The crucible cover plan structure schematic diagram that Fig. 2 provides for the embodiment of the present invention one;
The crucible cover perspective view that Fig. 3 provides for the embodiment of the present invention one;
The crucible system perspective view that Fig. 4 provides for the embodiment of the present invention one;
The main TV structure schematic diagram of crucible cover that Fig. 5 provides for the embodiment of the present invention two;
The crucible cover plan structure schematic diagram that Fig. 6 provides for the embodiment of the present invention two;
The crucible cover perspective view that Fig. 7 provides for the embodiment of the present invention two;
The crucible system perspective view that Fig. 8 provides for the embodiment of the present invention two;
The crucible cover perspective view that Fig. 9 and Figure 10 provides for the embodiment of the present invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
The invention discloses a kind of crucible cover and the crucible system with above-mentioned crucible cover, occur with the phenomenon realizing reducing the wasting of resources on the charge amount basis of improving crucible.
Wherein, above-mentioned crucible cover comprises the positioning convex at the circumferential cover wall closed and the middle part being arranged on cover wall, and the material of cover wall and positioning convex is silicon nitride.
When using production polysilicon, above-mentioned crucible cover being arranged on quartz crucible, thus adding the height of crucible, therefore can add the charging capacity of crucible.In addition, above-mentioned crucible cover and crucible are separation design, the material selection silicon nitride of crucible cover, and silicon nitride is a kind of important structural ceramic material, and itself has oilness, and wear-resistant, and resistance to corrosion is strong, anti-oxidant during high temperature.And it can also resist thermal shock, be heated to more than 1000 DEG C in atmosphere, quick refrigeration sharply heats again, also can not be cracked.Silicon nitride ceramics also has anti-metal meltbility, and in protective atmosphere ability 1800 DEG C of high temperature, can realize recycling.
Embodiment one
As shown in Figure 1 to Figure 3, crucible cover 1 disclosed in the embodiment of the present invention comprises cover wall 11 and positioning convex 12, and wherein, this cover wall 11 circumference is closed, to stop the leakage of silicon raw material; Above-mentioned positioning convex 12 is arranged on the middle part in the outside of cover wall 11, is arranged on crucible 2 smoothly to facilitate this crucible cover 1; And in order to improve the repeating utilization factor of crucible cover 1 work-ing life extending crucible cover 1, the cover wall 11 in crucible cover 1 and the material of positioning convex 12 are silicon nitride.
For the crucible 2 of different size, in order to improve its charging capacity, the concrete size of the size of the crucible cover 1 so corresponded is not identical, in embodiments of the present invention, positioning convex 12 is 30mm-40mm apart from one of them distance along limit of cover wall 11, and another distance along limit of distance cover wall 11 is 50mm-70mm.In use, one of cover wall 11 stretches in crucible 2 along limit, realizes the radial location of crucible cover 1; The inconsistent axial location realizing crucible cover 1 of crucible wall of positioning convex 12 and crucible 2.
In order to coordinate the use of existing crucible 2, namely when producing polysilicon, crucible 2 is mostly rectangular configuration, in order to coordinate the use of crucible 2, preferentially selecting cover wall 11 is set to rectangular configuration in the embodiment of the present invention.
And above-mentioned positioning convex 12 can be distributed in the outside of cover wall 11 in closed when reality uses, as shown in Figure 1 to Figure 3; The outside of cover wall 11 can also be distributed in, as shown in Figure 9 in interval shape.
The embodiment of the invention also discloses a kind of crucible system, as shown in Figure 4, this crucible system comprises crucible 2 and crucible cover 1, and crucible cover 1 comprises cover wall 11 and positioning convex 12, and wherein, this cover wall 11 circumference is closed, to stop the leakage of silicon raw material; Above-mentioned positioning convex 12 is arranged on the middle part in the outside of cover wall 11, is arranged on crucible 2 smoothly to facilitate this crucible cover 1; And in order to improve the repeating utilization factor of crucible cover 1 work-ing life extending crucible cover 1, the cover wall 11 in crucible cover 1 and the material of positioning convex 12 are silicon nitride; Cover wall 11 fits with the crucible wall of crucible 2, and crucible 2 along limit and positioning convex 12 inconsistent.
Crucible 2 preferably rectangular configuration in embodiments of the present invention, the crucible cover 1 corresponded is preferred is also rectangular configuration.
In order to fixing crucible cover 1, in the embodiment of the present invention, positioning convex 12 is 30mm-40mm apart from one of them distance along limit of cover wall 11, and another distance along limit of distance cover wall 11 is 50mm-70mm.In use, one of cover wall 11 stretches in crucible 2 along limit, realizes the radial location of crucible cover 1; Positioning convex 12 is inconsistent with the crucible wall of crucible 2, realizes the axial location of crucible cover 1, and because crucible cover 1 is axial and radial direction all has location, crucible cover 1 can realize stable being arranged on crucible 2.
Embodiment two
As shown in Figures 5 to 7, crucible cover 1 disclosed in the embodiment of the present invention comprises cover wall 11 and positioning convex 12, and wherein, this cover wall 11 circumference is closed, to stop the leakage of silicon raw material; Above-mentioned positioning convex 12 is arranged on the middle part of the inner side of cover wall 11, is arranged on crucible 2 smoothly to facilitate this crucible cover 1; And in order to improve the repeating utilization factor of crucible cover 1 work-ing life extending crucible cover 1, the cover wall 11 in crucible cover 1 and the material of positioning convex 12 are silicon nitride.
For the crucible 2 of different size, in order to improve its charging capacity, the concrete size of the size of the crucible cover 1 so corresponded is not identical, in embodiments of the present invention, positioning convex 12 is 30mm-40mm apart from one of them distance along limit of cover wall 11, and another distance along limit of distance cover wall 11 is 50mm-70mm.In use, the crucible wall of crucible 2 stretches in cover wall 11, realizes the radial location of crucible cover 1; The inconsistent axial location realizing crucible cover 1 of crucible wall of positioning convex 12 and crucible 2.
In order to coordinate the use of existing crucible 2, namely when producing polysilicon, crucible 2 is mostly rectangular configuration, in order to coordinate the use of crucible 2, preferentially selecting cover wall 11 is set to rectangular configuration in the embodiment of the present invention.
And above-mentioned positioning convex 12 can be distributed in the inner side of cover wall 11 in closed when reality uses, as shown in Figures 5 to 7; The inner side of cover wall 11 can also be distributed in, as shown in Figure 10 in interval shape.
The embodiment of the invention also discloses a kind of crucible system, as shown in Figure 8, this crucible system comprises crucible 2 and crucible cover 1, and crucible cover 1 comprises cover wall 11 and positioning convex 12, and wherein, this cover wall 11 circumference is closed, to stop the leakage of silicon raw material; Above-mentioned positioning convex 12 is arranged on the middle part of the inner side of cover wall 11, is arranged on crucible 2 smoothly to facilitate this crucible cover 1; And in order to improve the repeating utilization factor of crucible cover 1 work-ing life extending crucible cover 1, the cover wall 11 in crucible cover 1 and the material of positioning convex 12 are silicon nitride; Cover wall 11 fits with the crucible wall of crucible 2, and crucible 2 along limit and positioning convex 12 inconsistent.
Crucible 2 preferably rectangular configuration in embodiments of the present invention, the crucible cover 1 corresponded is preferred is also rectangular configuration.
In order to fixing crucible cover 1, in the embodiment of the present invention, positioning convex 12 is 30mm-40mm apart from one of them distance along limit of cover wall 11, and another distance along limit of distance cover wall 11 is 50mm-70mm.In use, the crucible wall of crucible 2 stretches in cover wall 11, realizes the radial location of crucible cover 1; Positioning convex 12 is inconsistent with the crucible wall of crucible 2, realizes the axial location of crucible cover 1, and because crucible cover 1 is axial and radial direction all has location, crucible cover 1 can realize stable being arranged on crucible 2.
In addition, it should be noted that embodiment one and embodiment two difference are the setting of the position of positioning convex 12, the inner side that positioning convex 12 can be arranged on cover wall 11 can also be arranged on the outside of cover wall 11, for the structure be arranged on outside cover wall 11 due to one of cover wall 11 is stretched in crucible along limit, therefore the dimensional requirement for cover wall 11 is less, therefore can the waste of saving resource.And positioning convex 12 is arranged on the structure of inner side, because crucible is deeply in cover wall 11, its dimensional requirement is comparatively large, can realize.Therefore, the present invention preferentially selects the related art scheme of embodiment one.
And the design of the intermittent type of positioning convex 12 also can reduce the wasting of resources further.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the present invention.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein can without departing from the spirit or scope of the present invention, realize in other embodiments.Therefore, the present invention can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. a crucible cover, it is characterized in that, comprise the positioning convex (12) at the circumferential cover wall (11) closed and the middle part being arranged on described cover wall (11), described positioning convex (12) is for being arranged on crucible (2) smoothly by this crucible cover (1), and described cover wall (11) is silicon nitride with the material of described positioning convex (12).
2. crucible cover as claimed in claim 1, it is characterized in that, described positioning convex (12) is arranged on the outside of described cover wall (11), being 30mm-40mm apart from one of them distance along limit of described cover wall (11), is 50mm-70mm apart from another distance along limit of described cover wall (11).
3. crucible cover as claimed in claim 1 or 2, it is characterized in that, described positioning convex (12) is distributed in closed on described cover wall (11).
4. crucible cover as claimed in claim 1 or 2, is characterized in that, described positioning convex (12) is distributed on described cover wall (11) in interval shape.
5. crucible cover as claimed in claim 1 or 2, it is characterized in that, described cover wall (11) is rectangular configuration.
6. a crucible system, comprise crucible (2), it is characterized in that, also comprise crucible cover (1), described crucible cover (1) comprises the positioning convex (12) at the circumferential cover wall (11) closed and the middle part being arranged on described cover wall (11), described cover wall (11) fits with the crucible wall of described crucible, and described crucible along limit and described positioning convex (12) inconsistent, the material of described cover wall (11) and described positioning convex (12) is silicon nitride.
7. crucible system as claimed in claim 6, it is characterized in that, described positioning convex (12) is arranged on the outside of described cover wall (11), being 30mm-40mm apart from one of them distance along limit of described cover wall (11), is 50mm-70mm apart from another distance along limit of described cover wall (11).
8. crucible system as claimed in claims 6 or 7, it is characterized in that, described positioning convex (12) is distributed in closed on described cover wall (11).
9. crucible system as claimed in claims 6 or 7, is characterized in that, described positioning convex (12) is distributed on described cover wall (11) in interval shape.
10. crucible system as claimed in claims 6 or 7, it is characterized in that, described cover wall (11) is rectangular configuration.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201110206298.8A CN102888651B (en) | 2011-07-22 | 2011-07-22 | A kind of crucible cover and crucible system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110206298.8A CN102888651B (en) | 2011-07-22 | 2011-07-22 | A kind of crucible cover and crucible system |
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| CN102888651A CN102888651A (en) | 2013-01-23 |
| CN102888651B true CN102888651B (en) | 2015-09-23 |
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| CN104515391B (en) * | 2014-04-09 | 2018-03-27 | 赣州鑫磊稀土新材料股份有限公司 | A kind of fence type melting kettle |
| CN104109903A (en) * | 2014-07-28 | 2014-10-22 | 常熟华融太阳能新型材料有限公司 | Recyclable quartz ceramic crucible for polycrystalline silicon ingot and preparation method of quartz ceramic crucible |
| CN106087054A (en) * | 2016-08-26 | 2016-11-09 | 常熟华融太阳能新型材料有限公司 | A kind of Novel polycrystalline silicon quartz crucible for ingot casting card article |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101864591A (en) * | 2010-06-04 | 2010-10-20 | 浙江芯能光伏科技有限公司 | Improving method of silicon monocrystalline furnace thermal field system |
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| KR101370180B1 (en) * | 2008-09-19 | 2014-03-05 | 엠이엠씨 싱가포르 피티이. 엘티디. | Directional solidification furnace for reducing melt contamination and reducing wafer contamination |
| JP4547031B2 (en) * | 2009-03-06 | 2010-09-22 | 新日本製鐵株式会社 | Crucible for producing silicon carbide single crystal, and apparatus and method for producing silicon carbide single crystal |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101864591A (en) * | 2010-06-04 | 2010-10-20 | 浙江芯能光伏科技有限公司 | Improving method of silicon monocrystalline furnace thermal field system |
Non-Patent Citations (1)
| Title |
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| 朱克皓等.大容量石英坩埚使用的研究.《上海金属(有色分册)》.1985,第6卷(第2期),32-36. * |
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