CN102800560B - 自动监控制程的方法 - Google Patents
自动监控制程的方法 Download PDFInfo
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- CN102800560B CN102800560B CN201110138133.1A CN201110138133A CN102800560B CN 102800560 B CN102800560 B CN 102800560B CN 201110138133 A CN201110138133 A CN 201110138133A CN 102800560 B CN102800560 B CN 102800560B
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CN201110138133.1A CN102800560B (zh) | 2011-05-26 | 2011-05-26 | 自动监控制程的方法 |
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CN201110138133.1A CN102800560B (zh) | 2011-05-26 | 2011-05-26 | 自动监控制程的方法 |
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CN102800560A CN102800560A (zh) | 2012-11-28 |
CN102800560B true CN102800560B (zh) | 2015-04-01 |
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CN201110138133.1A Expired - Fee Related CN102800560B (zh) | 2011-05-26 | 2011-05-26 | 自动监控制程的方法 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN106449464A (zh) * | 2016-11-30 | 2017-02-22 | 上海华力微电子有限公司 | 晶圆测试方法 |
CN108345234A (zh) * | 2017-01-23 | 2018-07-31 | 迅得机械股份有限公司 | 制程监控方法 |
CN111099306A (zh) * | 2019-11-22 | 2020-05-05 | 珠海格力智能装备有限公司 | 工装板卡板的确定方法及装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH05129412A (ja) * | 1991-11-07 | 1993-05-25 | Fujitsu Ltd | 装置の稼働監視方法 |
US6907305B2 (en) * | 2002-04-30 | 2005-06-14 | Advanced Micro Devices, Inc. | Agent reactive scheduling in an automated manufacturing environment |
JP5635270B2 (ja) * | 2009-02-13 | 2014-12-03 | 株式会社日立国際電気 | 基板処理装置及び基板処理システム及び基板処理装置の表示方法及び基板処理装置のパラメータ設定方法及び記録媒体 |
CN101498921B (zh) * | 2009-02-26 | 2012-05-30 | 晶澳(扬州)太阳能科技有限公司 | 一种自动监控太阳能电池加工过程中碎片率的方法 |
CN101572280B (zh) * | 2009-06-01 | 2011-03-02 | 无锡尚德太阳能电力有限公司 | 用于制作薄膜太阳电池金属电极层的沉积装置 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: MOTECH INDUSTRIES INC. Free format text: FORMER OWNER: TOPCELL SOLAR INTERNATIONAL CO., LTD. Effective date: 20150528 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20150528 Address after: China Taiwan New Taipei City District North pit deep road 3 No. 248 6 floor Patentee after: Motech Industries Inc. Address before: No. 1560, Zhongshan Road section, Guanyin Township, Taoyuan County, Taiwan, China Patentee before: Topcell Solar International Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150401 Termination date: 20160526 |
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CF01 | Termination of patent right due to non-payment of annual fee |