CN102778594B - Insulation mensuration probe unit and insulation determinator - Google Patents

Insulation mensuration probe unit and insulation determinator Download PDF

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Publication number
CN102778594B
CN102778594B CN201210140815.0A CN201210140815A CN102778594B CN 102778594 B CN102778594 B CN 102778594B CN 201210140815 A CN201210140815 A CN 201210140815A CN 102778594 B CN102778594 B CN 102778594B
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Prior art keywords
insulation
probe
mentioned
contact
periphery
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CN102778594A (en
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大地隆广
宇田隆
前川贵史
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Photovoltaic Devices (AREA)

Abstract

The present invention relates to a kind of insulation mensuration probe unit and insulation determinator, can the short time easily and check the residual film of the periphery of substrate accurately.Insulation mensuration probe unit measures the state of insulation between the inside portion of substrate surface and periphery.This insulation mensuration probe unit comprises: face probe, and it is formed as the shape identical with the periphery on aforesaid substrate surface, with the overall planar of periphery contact with whole conducting; Contact probe, it contacts with the inside portion on aforesaid substrate surface, described insulation mensuration probe unit measure and above-mentioned probes touch aforesaid substrate surface periphery and and above-mentioned contact probes touch aforesaid substrate surface inside portion between state of insulation.Comprise conveying mechanism, check platform, measure circuit unit, elevating mechanism etc. insulation determinator on be assembled with above-mentioned insulation mensuration probe unit.

Description

Insulation mensuration probe unit and insulation determinator
Technical field
The present invention relates to a kind of the insulation mensuration probe unit and the insulation determinator that measure the state of insulation of the periphery of the substrate of solar panel etc.
Background technology
In the substrate of solar panel etc., for the object etc. of installing supporting frame, be provided with insulating regions at its periphery.For solar panel, at the upper side stacked solar cell film of substrate, at the upper side of solar cell film via the stacked backboard of adhesive tape.Then, remove the solar cell film etc. of periphery, insulating regions is set.
Patent documentation 1 is the example of such solar panel.The solar panel of this patent documentation 1 manufactures as follows.
First, film used for solar batteries is formed in the interarea entirety of substrate.Then, by laser scribing means, the film of formation is cut into rectangular shape.By repeating such operation, be made into the solar module be connected in series.
Then, remove the film used for solar batteries of interarea edge last week, expose substrate.Specifically, by adopting the clear limit device of laser, remove the film used for solar batteries of periphery, or, by the grinding of the sandblasting of the grinding, sandblasting etc. of the grinding stone of rotation, remove the film used for solar batteries of periphery.Then, configuration adhesive tape and backboard, by joints such as vacuum layer platen presses.
In this case, remain if the film used for solar batteries in substrate periphery portion is not completely removed to also have, then fully can not obtain and the close property of adhesive tape and engaging force, may gap be produced.If produce gap, in this gap, immerse moisture, then may cause the deterioration of the decline of the insulativity of solar cell or film used for solar batteries.Further, also have residual film, dielectric voltage withstand declines, and solar panel fetching Agencies makes between body and may produce earth fault.
In order to eliminate these problems, need the film used for solar batteries positively removing substrate periphery portion.
So, in order to positively remove residual film, or improve the output of laser of above-mentioned clear limit device, or in above-mentioned abrasive blasting, adopt the Minisize sand blasting device producing grain dust to carry out limit clearly, but all respectively have relative merits, be difficult to remove residual film completely.
For this reason, need to be confirmed whether the residual film not having film used for solar batteries.For this reason, after removal film used for solar batteries, check.Specifically, surveyed sample by visual, resistance meter.
Again, the manufacture method as solar cell also has described in patent documentation 2 such.The manufacture method of this solar cell comprises following steps and forms: string formation process, multiple surface at light transmission insulated substrate is stacked gradually the 1st electrode layer, photoelectric conversion layer and the 2nd electrode layer and forms film photoelectric conversion element and form the string that mutual connected in electrical series is connected; Film removing step, by the film photoelectric conversion element part of the peripheral part formation of laser ablation on the surface of light transmission insulated substrate, to form non-conductive surface region at complete cycle; Clear cleaning procedure, removes electric conductivity attachment that produce in film removing step, that adhere in non-conductive surface region.
This situation forms periphery as before, needs to confirm whether this periphery does not have the residual film of film used for solar batteries, the same during the situation of this point with patent documentation 1.
Again, be not limited to solar cell, for other panel etc., for needing the panel etc. arranging periphery to be all the same.Namely, need to confirm whether this periphery does not have the residual film of film used for solar batteries, the same during the situation of this point with patent documentation 1.
[prior art document]
[patent documentation]
[patent documentation 1] Japanese Unexamined Patent Publication 2003-142717 publication
[patent documentation 2] Japanese Unexamined Patent Publication 2009-206279 publication
Summary of the invention
[inventing the technical matters that will solve]
But, when surveying sample in above-mentioned each prior art, do not carry out exhaustive test, be therefore difficult to carry out tight inspection.Visual situation is also the same, is difficult to carry out tight inspection.On the other hand, exhaustive test, spended time, is difficult to promptly check.
So, miss in sampling check, have in the solar panel of residual film, have this residual membrane portions to become the situation of the occurring source of leakage current, also have to close from the part layer densification of residual film and peel off and soak thus the situation causing panels en bloc bad.
As can be seen here, even if residual film only has a bit, also can become the reason causing problem, therefore require tight inspection.Therefore, a kind of device that easily and accurately can check residual film in the short time is expected.
The present invention proposes just in view of the above-mentioned problems, its object is to provide a kind of insulation mensuration probe unit and the insulation determinator that easily and accurately can check residual film in the short time.
[technological means of dealing with problems]
Insulation mensuration probe unit of the present invention, it is the insulation mensuration probe unit for measuring the state of insulation between the inside portion of substrate surface and periphery, described insulation mensuration probe unit comprises: face probe, it is formed as the shape identical with the periphery on aforesaid substrate surface, with the overall planar of periphery contact with whole conducting; Contact probe, it contacts with the inside portion on aforesaid substrate surface, described insulation mensuration probe unit measure and above-mentioned probes touch aforesaid substrate surface periphery and and above-mentioned contact probes touch aforesaid substrate surface inside portion between state of insulation.
Insulation determinator of the present invention, comprises following mechanism and forms: insulation mensuration probe unit, and it is for measuring the state of insulation between the inside portion of substrate surface and periphery; Conveying mechanism, the substrate of determination object is transported to the downside of this insulation mensuration probe unit by it; Check platform, the substrate that its supporting is transported by this conveying mechanism is to check this substrate; Measure circuit unit, it is connected to above-mentioned insulation mensuration probe unit, measures the state of insulation between the inside portion on aforesaid substrate surface and periphery; Elevating mechanism, it makes above-mentioned inspection platform rise or above-mentioned insulation mensuration probe unit be declined, to make this insulation mensuration probe unit and aforesaid substrate surface contact.
[effect of invention]
According to above-mentioned formation, contact with while whole conducting to above-mentioned probe and the overall planar of the periphery on aforesaid substrate surface, contact probe contacts with the inside portion on aforesaid substrate surface, to measure the state of insulation between the periphery on aforesaid substrate surface and inside portion, therefore, the inspection of the residual film of periphery can easily and accurately be carried out in the short time.
Accompanying drawing explanation
Fig. 1 is the vertical view of the solar panel illustrated before the film removing periphery.
Fig. 2 is the vertical view of the solar panel illustrated after the film removing periphery.
Fig. 3 is the front view of the insulation determinator that embodiments of the present invention are shown.
Fig. 4 is the vertical view of the insulation determinator that embodiments of the present invention are shown.
Fig. 5 is the vertical view of the insulation mensuration probe unit that embodiments of the present invention are shown.
Fig. 6 is the sectional view of the direction of arrow of the A-A line of Fig. 5.
Fig. 7 is the sectional view of the direction of arrow of the B-B line of Fig. 6.
Fig. 8 illustrates the insulation mensuration probe unit of embodiments of the present invention and measures the schematic configuration diagram of circuit unit.
Fig. 9 is the front view of the inspection platform of the insulation determinator that embodiments of the present invention are shown.
Figure 10 is the process flow diagram of the action of the insulation determinator that embodiments of the present invention are shown.
Figure 11 is the schematic configuration diagram that variation of the present invention is shown.
Embodiment
Below, with reference to accompanying drawing, the insulation mensuration probe unit of embodiment of the present invention and insulation determinator are described.Insulation mensuration probe unit of the present invention and insulation determinator are the devices of the state of insulation between the inside portion on the surface of substrate for measuring solar panel etc. and periphery.As determination object substrate, there are whole substrates of the insulating regions eliminating electrode etc. for object at the periphery of substrate surface.This periphery be in order to ensure adjacent other substrate (solar battery cell etc.) between electric insulation or the region retained in order to the ground installation frame etc. that keeps insulating.Below, solar panel is adopted to be described as determination object substrate.
When solar panel 1, as shown in Figure 1, in manufacturing process, form film used for solar batteries in the interarea entirety of substrate 2, by laser scribing means, the film of formation is cut into rectangular shape.By repeating such operation, be cut into multiple solar battery cell 3A.Then, as shown in Figure 2, the solar cell film 3 of the periphery on the surface of substrate 2 is removed, to make periphery (clear edge) 4.Thus, in the surface of substrate 2, the region being trapped among inner side with periphery 4 becomes inside portion 5.
So the periphery 4 of substrate 2 has residual film, as mentioned above, there is the problems such as leakage current, correct mensuration is needed whether to have residual film.Therefore, by residual film determinator, the insulation carried out between periphery 4 and inside portion 5 measures.Below, the insulation determinator with insulation mensuration probe unit is described.
Insulation determinator 7 is devices of the state of insulation between the inside portion 5 on surface for measuring substrate 2 and periphery 4.Insulation determinator 7 as shown in Figure 3,4, comprises insulation mensuration probe unit 8, conveying mechanism 9, checks platform 10, measures circuit unit 11, elevating mechanism 12.
Insulation mensuration probe unit 8 is inside portion 5 and the state of insulation between periphery 4 on surface in order to measure substrate 2 and the device that contacts with them.Insulation mensuration, is made up of face probe 14, contact probe 15, fixed hurdle 16, probe substrate 21 with probe unit 8 as shown in Fig. 5 ~ 7.
Face probe 14 is formed as the shape identical with the periphery 4 on the surface of aforesaid substrate 2, be for the probe that contacts of periphery 4 overall planar ground.This face probe 14 and whole conducting of periphery 4, even if periphery 4 is only covered by a bit residual film remained, also can positively contact with face probe 14.
The mask that face probe 14 is configured to having flexible while, at least contact with periphery 4 entirety on aforesaid substrate surface is conductive.
Face probe 14 is made up of anisotropic conductive rubber, or is made up of elastic component and electroconductive member.
When face probe 14 is made up of anisotropic conductive rubber, this anisotropic conductive rubber is formed as the ring-type with the form fit of the periphery 4 on the surface of substrate 2.Here, substrate 2 is quadrilaterals, and periphery 4 is quadrilaterals of ring-type, and therefore, anisotropic conductive rubber is cross section is the bar-shaped of quadrilateral, this club-shaped material is formed the quadrilateral of ring-type to form face probe 14.Elastic component is sized to the dimensional fits with periphery 4.Namely, elastic component is set to cover whole of periphery 4 and the size do not contacted with inside portion 5.Be provided with insulation division 17 at the medial surface (being positioned at the wall of the inner side of the face probe 14 of the quadrilateral of ring-type) of face probe 14, with the medial surface making face probe 14 not with inside portion 5 electrical contact on the surface of substrate 2.This insulation division 17 is made up of the dielectric film etc. of the medial surface being attached to face probe 14.
Be as follows when face probe 14 is made up of elastic component and electroconductive member.Elastic component be core as face probe 14 component, be formed as the shape roughly the same with face probe 14.Electroconductive member is the film-form or netted component that reel on the surface of elastic component.
Elastic component is formed as the ring-type with the form fit of periphery 4.Specifically, the club-shaped material of elastic component to be Formation cross-section be quadrilateral, the quadrilateral that again this club-shaped material is formed as ring-type are formed.Elastic component is sized to the dimensional fits with periphery 4.Namely, elastic component is set as covering whole of periphery 4 and the size do not contacted with inside portion 5.Elastic component is had the materials such as flexible synthetic resin or rubber and forms by polyurathamc etc.No matter whether there is electric conductivity can.Again, elastic component is made up of rubber tube etc., utilizes air pressure, small concavo-convex with what can coordinate periphery 4 flexibly.
Electroconductive member is formed as film-form or netted, by being wound on around elastic component, is positively contacted with periphery 4 by the elasticity of elastic component.Namely, electroconductive member by being configured to film-form or netted and be wound on elastic component, bent by the resilient flexibility of elastic component, and be close to the surface of periphery 4.When electroconductive member is formed as netted, is that the silk of electric conductivity (conducting rubber, Carbon fibe, tinsel etc.) is configured to netted, then is wound on around elastic component.Under the silk of this electric conductivity has flexible situation, be only wound on the surrounding of elastic component.Under the silk of electric conductivity does not have flexible situation, or by bonding agent, this net formed is fixed on around elastic component, or is engaged by melting.When film, be attached to around elastic component by cementing agent or melting.
Thus, electroconductive member by elastic component elasticity, be close to the surface of periphery 4 flexural buckling, positively contact with the residual film remaining with periphery 4.
On the medial surface (wall for the inner side of the face probe 14 of ring-type quadrilateral) of face probe 14, be provided with insulation division 17 with same above, with not electric with the inside portion 5 on the surface of substrate 2 contact.This insulation division 17 is made up of the dielectric film etc. of the medial surface being attached to face probe 14.
Contact probe 15 is the probes contacted for the inside portion 5 on the surface with substrate 2.Contact probe 15 is made up of the spring probe that can stretch flexibly stretched.Thus, when contact probe 15 abuts with substrate 2, contact positively electric with the surface of substrate 2 while contraction.
As shown in Figure 7,8, contact probe 15 configures ordinatedly with the solar battery cell 3A of substrate 2.Specifically, a contact probe 15 is respectively arranged in the end positions of the length direction of rectangular solar battery cell 3A.Further, the surface of the solar battery cell 3A at the two ends in the solar battery cell 3A of multiple arranging arranged side by side, arranges contact probe 15 in the equally spaced plurality of positions on this surface.For the solar battery cell 3A at the two ends in solar battery cell 3A, in fig. 8, for convenience of description, arrange contact probe 15 at 7 places, such as, on the panel of 1.4m × 1m, arranged about 35 places.Further, in Fig. 8, be conveniently divided into 13 solar battery cell 3A, the panel of such as 1.4m × 1m, divided into about 100 solar battery cell 3A.Thus, in Fig. 8, be equipped with 36 contact probes 15 in position, complete cycle 36 place.On the panel of 1.4m × 1m, be equipped with 270 contact probes 15 in the position at 270 places.
Each contact probe 15 is divided into two systems.Specifically, many (7 of Fig. 8) contact probes 15 of the solar battery cell 3A of the end of a side (right of Fig. 8) of the contact probe 15 being arranged in one end (upper end of Fig. 8) of the length direction of solar battery cell 3A and the solar battery cell 3A being arranged in multiple arranging arranged side by side belong to a system.Galvanometer 19 is respectively equipped with for these contact probes 15.Again, the many contact probes 15 being positioned at the solar battery cell 3A of the end of a side are electrically connected, and are provided with a galvanometer 19, are detected by the short circuit of optional position in the solar battery cell 3A of these galvanometer 19 pairs of ends.Now, owing to can not determine short circuit part, therefore, the periphery 4 of the part of the solar battery cell 3A of this end is all as handling object.
Another system of each contact probe 15, in the position relative with said system, has the formation same with this system.
Each contact probe 15 arranges respectively at each determination object position of the inside portion 5 on substrate 2 surface, and is supported integratedly by fixed hurdle 16 in this case.
This fixed hurdle 16, as shown in Figure 6, is fixed on probe substrate 21.Face probe 14 is also the same, is fixed on probe substrate 21.Thus, face probe 14 and contact probe 15 are supported integratedly.Further, the top ends (bottom) of contact probe 15 is set as the face side (downside) of surface of contact (lower surface) closer to substrate 2 of specific surface probe 14.Thus, contact probe 15 first with the surface contact of substrate 2, then face probe 14 again with the surface contact of substrate 2.
Conveying mechanism 9 is devices of the downside for the substrate 2 of determination object being transported to insulation mensuration probe unit 8.Conveying mechanism 9 as shown in Figure 3,4, is made up of the conveying roller 25 of multiple arranging arranged side by side, the drive division (not shown) of each conveying roller of rotary actuation 25.
Each conveying roller 25 coordinates the throughput direction of substrate 2, is disposed in the upper side of framework (frameworks as the bone lattice of insulation determinator 7) 26 side by side.Each conveying roller 25 is connected to drive division, to rotate integratedly.Further, when insulation determinator 7 is assembled into production line, each conveying roller 25 coordinates the conveying device of production line and arranges, and can be transported to insulation determinator 7 continuously to make substrate 2 from the conveying device of this production line.
Check that platform 10 is the platforms supported to check the substrate 2 carried by conveying mechanism 9.Check platform 10, as shown in Fig. 3,9, comprise the substrate equipped section 28 of substrate 2 of carrying and being carried by above-mentioned conveying mechanism 9 and substrate positioning mechanism 29 that the substrate 2 being equipped on this substrate equipped section 28 is positioned and forming.
Substrate equipped section 28 comprises multiple backing roll 30, and the plurality of backing roll 30 is accepted the substrate 2 carried by above-mentioned conveying mechanism 9 and can to its supporting under the state of movement at substrate 2.Each backing roll 30 is connected to drive division (not shown), is driven in rotation integratedly.Thus, each backing roll 30 driven part drives, and makes substrate 2 move to position immediately below insulation mensuration probe unit 8 and support it.
Substrate positioning mechanism 29 is made up of spacer 32 and mobile device 33.Spacer 32, from extending out between multiple backing roll 30, abutting with the edge of substrate 2, is the component for locating this substrate 2.Spacer 32 is supported by inlet/outlet mechanism (not shown).Inlet/outlet mechanism is made up of straight-line motion mechanism.Thus, inlet/outlet mechanism makes it pass in and out by supporting spacer 32, suitably to switch the holding state of the bottom being positioned at backing roll 30 and to extend the operating state abutted with the edge of substrate 2 upward.Spacer 32 is set to two, with from both sides chucking substrate 2.
Mobile device 33 is the devices for making spacer 32 movement.Mobile device 33 by be disposed in spacer 32 movement direction screw rod 34, be threaded into this screw rod 34 and the slide plate 35 slided along with the rotation of this screw rod 34, be connected to screw rod 34 with the CD-ROM drive motor 36 of this screw rod 34 of rotary actuation.
Mobile device 33 and spacer 32 are provided with two ordinatedly.Spacer 32 is installed on slide plate 35.Thus, by two mobile devices 33, each spacer 32 is moved in a direction close to each other, clip substrate 2, alignment settings position and fixing from both sides.
Substrate equipped section 28 and substrate positioning mechanism 29 are located at lifting frame 37 integratedly.This lifting frame 37 is supported on elevating mechanism 12.
Measuring circuit unit 11 and be connected to the face probe 14 of insulation mensuration probe unit 8 and each contact probe 15, is the device of the state of insulation between the inside portion 5 on the surface for measuring substrate 2 and periphery 4.Measure circuit unit 11, as shown in Fig. 3,6,8, comprise power supply 38, galvanometer 19, handling part (not shown) etc. and form.Power supply 38 is connected to each galvanometer 19 and face probe 14, between inside portion 5 and periphery 4, apply voltage.Further, face probe 14 is grounded.Handling part is connected to each galvanometer 19.Galvanometer 19 is the testers for measuring the electric current changed by the difference of state of insulation.Thus, flow through how many amperometric determination state of insulation according to which galvanometer 19, and there occurs short circuit near the position determining the contact probe 15 flowing through this electric current.Again, as analyzer, being not limited to galvanometer 19, also can be the instrument measuring other electrical value such as voltage, resistance.As long as measure the analyzer of the electric numerical value changed along with short circuit.
Elevating mechanism 12 makes inspection platform 10 increase, to make the device of the surface contact of insulation mensuration probe unit 8 and substrate 2.Elevating mechanism 12, as shown in Figure 3, by the screw rod 40 arranged at above-below direction, be threaded into this screw rod 40 with the lift plate 41 of the rotation oscilaltion along with this screw rod 40, be connected to screw rod 40 and formed with the CD-ROM drive motor 42 of this screw rod 40 of rotary actuation.Lift plate 41 is fixed on the lifting frame 37 checking platform 10.Thus, along with the rotation of the screw rod 40 driven by CD-ROM drive motor 42, check that platform 10 is elevated.
Then, based on the process flow diagram of Figure 10, the action of the insulation determinator 7 of said structure is described.
First, menu (step S1) is set.Set each condition about substrate 2 and insulation determinator 7.
Then, substrate 2 is arranged at insulation determinator 7(step S2).Specifically, from the conveying device etc. of production line, substrate 2 is transported to conveying mechanism 9.Thus, conveying roller 25 is accepted substrate 2 and is transferred to immediately below insulation mensuration probe unit 8.Then, spacer 32 is made to be transformed to from the holding state being positioned at backing roll 30 bottom the operating state extended upward by inlet/outlet mechanism.Then, by the screw rod 34 of CD-ROM drive motor 36 rotary actuation mobile device 33, make spacer 32 mobile with close to each other together with slide plate 35.Thus, two spacers 32 clip substrate 2 from both sides, with to its positioning support.
Then, the mensuration (step S3) of a system is carried out.Specifically, make the Analytical system action of the upper right side of Fig. 8 to measure.Now, first, CD-ROM drive motor 42 action of elevating mechanism 12 rotates to make screw rod 40, and lift plate 41 rises along with the rotation of screw rod 40.Thus, check that platform 10 rises, the insulation mensuration contact probe 15 of probe unit 8 contacts with solar battery cell 3A.Specifically, each contact probe 15 contacts with each solar battery cell 3A of the inside portion 5 of substrate 2.Check after contact that platform 10 still rises, while each contact probe 15 is shunk by pressure, face probe 14 contacts with periphery 4.Thus, face probe 14 is shunk by pressure and is close to.In this case, between opposite probe 14 and each contact probe 15, apply voltage, measure electric current by each galvanometer 19.
Then, the mensuration (step S4) of another system is carried out.Specifically, the Analytical system action of the lower left side of Fig. 8 is made, to measure.Specifically, the same with the mensuration of said system.
Then, judge whether each system has low resistance place (step S5).Specifically, judge whether the numerical value of each galvanometer 19 has high.
When there is low resistance place, determine this low resistance place (step S6).Specifically, the contact probe 15 of the galvanometer 19 that current value is high because resistance is low is determined.Now, the current value being connected to the galvanometer 19 of each system at the two ends of the solar battery cell 3A of short circuit uprises, and determines as follows.Namely, the resistance value of rectangular solar battery cell 3A self is considered in calculating, compare the current value of two galvanometer 19, only exceed the region being nearby defined as existing residual film of the contact probe 15 of the current value of above-mentioned resistance value part.
When low resistance part, enter into step S7.
In step S7, the above results is recorded to (step S7) in database.
Then, the display part (not shown) display the above results (step S8) near operator.
Further, the above results is sent to upper bit walk (step S9).On this, bit walk transmission information is carried out as required.Such as, when existence manages the control part of multiple device in the lump, these data are sent to this control part.
Check once terminate, even if check that platform 10 declines, takes out of substrate 2, and next substrate 2 is set, repeats above-mentioned process.
For the substrate 2 finding residual film, the film implementing periphery 4 in addition removes processing.
Thus, the residual film inspection of substrate 2 can easily be carried out in the short time.Further, face probe 14, contact probe 15 positively can be made to contact with periphery 4, inside portion 5, the inspection of the residual film of periphery can be carried out accurately.
Thus, the outflow of residual film defective products can positively be prevented.
[ variation ]
In above-mentioned embodiment, each contact probe 15 is respectively equipped with galvanometer 19, but also as shown in figure 11, can be provided with change-over switch 43, and galvanometer 19 only arranges one.Namely, on power supply 38 connect a galvanometer 19, make galvanometer 19 be connected to each contact probe 15 via change-over switch 43.Thus, change-over switch 43 switches successively, makes each contact probe 15 be connected to galvanometer 19 one by one, to detect current value.In this case, the effect same with above-mentioned embodiment can be played, reach same effect.
In above-mentioned embodiment, elevating mechanism 12 makes inspection platform 10 rise, but insulation mensuration probe unit 8 also can be made to decline, to make the surface contact of this insulation mensuration probe unit 8 and substrate 2.In this case, the effect same with above-mentioned embodiment can be played, reach same effect.
Again, substrate positioning mechanism 29 is provided with two in the both sides of substrate 2, also can be provided with four on 4 limits of substrate 2.
Again, said determination result also can be fed back the menu of the processing machine on clear limit.
In above-mentioned embodiment, be described the example arranging periphery 4 at solar panel 1, but be not limited to solar panel 1, other panel etc. also can be suitable for the present application.As long as namely, for needing the panel etc. being provided with periphery to need confirm whether this periphery does not have all panels etc. of residual film, the present application can be suitable for.
[symbol description]
1: solar panel, 2: substrate, 3: solar cell film, 3A: solar battery cell, 4: periphery, 5: inside portion, 7: insulation determinator, 8: insulation mensuration probe unit, 9: conveying mechanism, 10: check platform, 11: measure circuit unit, 12: elevating mechanism, 14: face probe, 15: contact probe, 16: fixed hurdle, 17: insulation division, 19: galvanometer, 21: probe substrate, 25: conveying roller, 26: framework, 28: substrate equipped section, 29: substrate positioning mechanism, 30: backing roll, 32: spacer, 33: mobile device, 34: screw rod, 35: slide plate, 36: CD-ROM drive motor, 37: lifting frame, 38: power supply, 40: screw rod, 41: lift plate, 42: CD-ROM drive motor, 43: change-over switch.

Claims (13)

1. insulate a mensuration probe unit, and it is the insulation mensuration probe unit for measuring the state of insulation between the inside portion of substrate surface and periphery, it is characterized in that,
Described insulation mensuration probe unit comprises: face probe, and it is formed as the shape identical with the periphery on aforesaid substrate surface, with the overall planar of periphery contact with whole conducting;
Contact probe, it contacts with the inside portion on aforesaid substrate surface,
Described insulation mensuration probe unit measure and above-mentioned probes touch aforesaid substrate surface periphery and and above-mentioned contact probes touch aforesaid substrate surface inside portion between state of insulation.
2. insulation mensuration probe unit as claimed in claim 1, is characterized in that,
Above-mentioned probe has elasticity, and the mask at least contacted with the periphery entirety on aforesaid substrate surface is conductive.
3. insulation mensuration probe unit as claimed in claim 1, is characterized in that,
Above-mentioned probe is made up of the elastic component of the ring-type of the form fit of the periphery with aforesaid substrate surface and the electroconductive member of the surrounding that is wound on this elastic component.
4. insulation mensuration probe unit as claimed in claim 1, is characterized in that,
Above-mentioned probe is made up of the anisotropic conductive rubber of the ring-type of the form fit of the periphery with aforesaid substrate surface.
5. insulation mensuration probe unit as claimed in claim 1, is characterized in that,
Insulation division is provided with at the medial surface of above-mentioned probe.
6. insulation mensuration probe unit as claimed in claim 1, is characterized in that,
Above-mentioned contact probe is located at each determination object position of the inside portion on aforesaid substrate surface respectively, and each contact probe is supported integratedly by fixed hurdle.
7. insulation mensuration probe unit as claimed in claim 1, is characterized in that,
Above-mentioned contact probe is made up of the spring probe that can stretch.
8. insulation mensuration probe unit as claimed in claim 7, is characterized in that,
While above-mentioned probe and contact probe are supported integratedly, the top ends of above-mentioned contact probe is set as closer to aforesaid substrate face side relative to the surface of contact of above-mentioned probe, above-mentioned contact probe elder generation and aforesaid substrate surface contact, then above-mentioned probe and aforesaid substrate surface contact.
9. insulate a determinator, it is characterized in that, comprise following mechanism and form:
Insulation mensuration probe unit, it is for measuring the state of insulation between the inside portion of substrate surface and periphery;
Conveying mechanism, the substrate of determination object is transported to the downside of this insulation mensuration probe unit by it;
Check platform, the substrate that its supporting is transported by this conveying mechanism is to check this substrate;
Measure circuit unit, it is connected to above-mentioned insulation mensuration probe unit, measures the state of insulation between the inside portion on aforesaid substrate surface and periphery;
Elevating mechanism, it makes above-mentioned inspection platform rise or above-mentioned insulation mensuration probe unit is declined, to make this insulation mensuration probe unit and aforesaid substrate surface contact, wherein
Adopt the insulation mensuration probe unit described in any one in claim 1 to 8, as described insulation mensuration probe unit.
10. insulate determinator as claimed in claim 9, it is characterized in that,
Above-mentioned inspection platform comprises: the substrate equipped section of carrying the substrate that above-mentioned conveying mechanism transports, the substrate positioning mechanism positioned the substrate being equipped on this substrate equipped section,
Aforesaid substrate equipped section comprises accepts the substrate that transported by above-mentioned conveying mechanism and can carry out multiple rollers of supporting movably,
Aforesaid substrate detent mechanism comprises: from extending out between above-mentioned multiple roller and the edge being connected to aforesaid substrate, the spacer that positions this substrate.
11. insulate determinator as claimed in claim 9, it is characterized in that,
Said determination circuit unit comprises power supply and measures the analyzer of electrical value,
The two ends of length direction that the is inside portion on aforesaid substrate surface, arranged side by side, multiple each unit be split to form respectively with contact probes touch, and outermost unit arranged side by side, in multiple unit on described length direction equally spaced respectively with multiple contact probes touch
Be connected with above-mentioned power supply between the face probe contacted with the periphery on aforesaid substrate surface and above-mentioned each contact probe, and above-mentioned each contact probe is connected to said determination device, thus measures the state of insulation between the inside portion on aforesaid substrate surface and periphery.
12. insulate determinator as claimed in claim 11, it is characterized in that,
This insulation determinator is made up of the mensuration circuit of two systems,
Respectively with the contact probe of side's ends contact of the length direction of each unit, multiple contact probes of equally spaced contacting on described length direction with the outermost unit of a side in multiple unit arranged side by side as a system,
Respectively with the contact probe of the opposing party's ends contact of the length direction of each unit, multiple contact probes of equally spaced contacting on described length direction with the outermost unit of the opposing party in multiple unit arranged side by side as a system.
13. insulate determinator as claimed in claim 9, it is characterized in that,
Aforesaid substrate is solar panel.
CN201210140815.0A 2011-05-10 2012-05-08 Insulation mensuration probe unit and insulation determinator Expired - Fee Related CN102778594B (en)

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