CN103137048A - Array detection apparatus having multiple probe units - Google Patents
Array detection apparatus having multiple probe units Download PDFInfo
- Publication number
- CN103137048A CN103137048A CN2012101051656A CN201210105165A CN103137048A CN 103137048 A CN103137048 A CN 103137048A CN 2012101051656 A CN2012101051656 A CN 2012101051656A CN 201210105165 A CN201210105165 A CN 201210105165A CN 103137048 A CN103137048 A CN 103137048A
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- China
- Prior art keywords
- glass
- probe
- array detection
- platform
- detection device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2836—Fault-finding or characterising
- G01R31/2844—Fault-finding or characterising using test interfaces, e.g. adapters, test boxes, switches, PIN drivers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
Abstract
The invention provides an array detection apparatus having multiple probe units. Multiple probe units are mounted in the array detection apparatus, one probe unit detects a specific glass model, and another probe unit exchanges probe cards to detect another piece of LCD glass with different pattern width, such that the idling time of the apparatus for exchanging the probe cards is reduced.
Description
Technical field
The present invention relates to a kind of array detection device with a plurality of contact units, be particularly related to and a kind of a plurality of contact units be arranged in array detection device, production period at the LED product, when probe card contacts the pattern of LCD glass, carry out Check processing, thereby a contact unit detects a specific LCD glass, and another contact unit exchanges to detect with probe the array detecting device that another one has the LCD glass of different pattern live width simultaneously.
Background technology
As is known in the art, flat-panel monitor comprises liquid crystal display (LCDs), Plasmia indicating panel (PDPs) and field-emitter display (FEDs).
For making such flat-panel monitor, comprise the step of making infrabasal plate, make the step of upper substrate and with the step of upper and lower substrate bonding.
In more detail, form a plurality of unit on for the manufacture of the glass disc of infrabasal plate, many x wires and many vertical lines are set in each unit, its mode according to matrix is intersected mutually.And form the pixel cell with transparent pixels electrode on each cross part of x wire and vertical line.
In each pixel cell, thin film transistor (TFT) is connected with x wire, vertical line and pixel electrode.
After detecting step, by a plurality of unit that form on scribe step glass-cutting dish, and each in a plurality of unit is cut down from glass disc, namely, after the preparation process of upper substrate is completed, infrabasal plate is bonded on upper substrate, then will assembles for the driving circuit and the various element that drive pixel cell, to complete the preparation of a flat-panel monitor.
Then, in the manufacture process of above-mentioned flat-panel monitor, in the step that a plurality of unit that form on to glass disc detect, by using probe unit, power detection signal is put on circuit diagram, thus the state of testing circuit.
Figure 1A and Figure 1B schematically set forth vertical view and the front view of the probe clamp device that is used for traditional flat-panel monitor pick-up unit.The probe clamp device comprises probe adjustment slide block 1 and 2, probe adjustment slide block installing plate 3, substrate 4, fixed station 5, is used for camera and the probe 7 of aligning probe and glass pattern.
Therefore, in order to carry out the step that detects flat-panel monitor, a cover or a plurality of probe corresponding to corresponding glass model are installed to probe adjust on the slide block installing plate to detect.
That is, when driving platform to front, rear, left and right, when upper and lower movement, glassy phase is fixed on platform for probe, and platform contacts with glassy phase with probe, detects.
Yet, in traditional flat-panel monitor pick-up unit of mentioning, due to when glass model changes, for the pattern with different live widths is detected, must exchange probe, so that described detection is used for various flat panel display glass models in the above.When probe exchanges, can not detect operation, the running time of equipment reduces significantly, and a plurality of different probe must be installed, to address the above problem.
And, increase the essential regions of platform movement due to the mobile type of platform, and increased the volume of device, therefore when using traditional device multiplicative glass is measured to size, limitation is arranged.
Summary of the invention
Therefore, the present invention is with solving the problems referred to above that occur in prior art, and the purpose of this invention is to provide a kind of array detection device, this device has a plurality of contact units, wherein a plurality of contact units are arranged in array detection device, thereby a contact unit detects a specific glass model, and another contact unit exchange probe detects another LCD glass with different pattern live width, reduces as much as possible the standby time that brings due to the exchange probe.
In order to reach this purpose, the invention provides a kind of array detection device, this pick-up unit has a plurality of contact units, comprise: substrate, has surveyed area, middle body at this surveyed area detects flat panel display glass, and has idle area, and this idle area is positioned at the relative both sides of surveyed area; Platform is arranged on the surveyed area of substrate, and specific glass is positioned on platform; At least two contact units are equipped with a plurality of probe on it, be used for detect the characteristic that is formed on circuit diagram on glass, and described contact unit being arranged on substrate when electrically contacting with circuit diagram; The first linear motor is used for forward and to the rear drive platform; With the second linear motor, be used for driving a plurality of contact units left and to the right.
According to the present invention, when the different models of flat panel display glass detect by an array detection device, because a contact unit in a plurality of contact units detects a specific glass model, and probe of another probe exchange detects another glass with different pattern live width, due to the vacant time decreased of the equipment that the exchange probe is brought, so the running efficiency of system is improved.
Description of drawings
By following detailed description and can make by reference to the accompanying drawings above the present invention and other purpose, feature and advantage clearer, wherein:
Figure 1A and Figure 1B are vertical view and front view, and it schematically shows the probe clamp device for traditional flat-panel monitor pick-up unit.
Fig. 2 is stereographic map, shows the structure of array detection device of the present invention, and this array detection device has a plurality of contact units;
Fig. 3 is front view, shows the structure with array detection device of a plurality of contact units of the present invention;
Fig. 4 is vertical view, shows the structure with array detection device of a plurality of contact units of the present invention;
Fig. 5 is stereographic map, shows the structure of the platform of the array detection device with a plurality of contact units of the present invention;
Fig. 6 is stereographic map, shows the structure of each contact unit of the array detection device with a plurality of contact units of the present invention;
Fig. 7 is stereographic map, shows the structure of the converting means of the array detection device with a plurality of contact units of the present invention.
Embodiment
Below, describe typical embodiment of the present invention in detail with reference to accompanying drawing.
Fig. 2 is stereographic map, shows the structure with array detection device of a plurality of contact units of the present invention.Fig. 3 is front view, shows the structure with array detection device of a plurality of contact units of the present invention.Fig. 4 is vertical view, shows the structure with array detection device of a plurality of contact units of the present invention.Fig. 5 is stereographic map, shows the structure of the platform of the array detection device with a plurality of contact units of the present invention.Fig. 6 is stereographic map, shows the structure of each contact unit of the array detection device with a plurality of contact units of the present invention.Fig. 7 is stereographic map, shows the structure of the converting means of the array detection device with a plurality of contact units of the present invention.
At first, array detection device with a plurality of contact units of the present invention is realized in the following manner, a plurality of contact units 50 are arranged in array detection device, to measure specific flat panel display glass 100 with a contact unit 50, and exchange probe with another contact unit 50, detect another glass with different pattern live width.
For this reason, in the array detection device with a plurality of contact units of the present invention, platform 30 and a pair of contact unit 50 are arranged on the substrate 10 with ad hoc structure, this substrate by the first linear motor 20 and the second linear motor 40 can be up and down, front and rear moves.
To be installed in the surveyed area A of substrate 10 for location particular glass 100 to carry out the platform of testing process, the first linear motor 20 be arranged on platform 30 below, be used for driving platform 30 forward and backward.
Be used for to drive contact unit 50 left and the second linear motor 40 that moves right be arranged on the rear end of substrate 10, so contact unit 50 is set to move selectively between the surveyed area A of substrate 10 and idle area B by the second linear motor 40.
A plurality of probe 60 are arranged on contact unit 50, be used for when electrically contacting with circuit diagram, detection and location are on platform 30, characteristic that be formed at the circuit diagram in corresponding glass 100, and wherein a pair of contact unit 50 is installed on the substrate 10 of embodiments of the invention.
In to the more detailed description of contact unit 50, contact unit 50 comprises: have the carriage 52 of given shape, this carriage is arranged on the second linear motor 40; With a probe group.This probe group is installed in carriage 52, comprising: a plurality of probe 60, this probe are used for detecting the characteristic that is formed at the circuit diagram in glass 100 when electrically contacting with circuit diagram; With a plurality of cameras 54 for pin and the measured zone of probe are made a video recording.
In addition, a plurality of driving motor 56a and 56e are arranged in carriage 52, this driving motor be used for applying predetermined driving force move up and down a plurality of probe 60 and make camera 54 up and down, the left and right moves.
Simultaneously, be used for clamping and maintain the exchange tool 70 of probe group selectively, be respectively installed in the idle area B of substrate 10, described probe group is corresponding to the glass model of the specific flat-panel monitor that will detect.
That is, in order to clamp the specific probe group that comprises for detection of the glass of flat-panel monitor, and the manual platform of the probe of can aliging on X, Y, Z, Ry and Rz direction, step shelf 72 is installed in exchange tool 70.Shelf 72 is set to move forward and backward along slide rail 74, and when driving by plunger 76, plunger can be positioned at selectively contact unit 50 below.
Then, operation of the present invention will describe in detail hereinafter.
In the testing process of using the array detection device with a plurality of contact units according to the present invention to implement, when platform 30 is positioned at " loaded " position, at first stripper pin 32 rises, then, after will being positioned the upper end of stripper pin 32 by the corresponding glass 100 that specific filler (not shown) detects, stripper pin 32 descends, and corresponding glass 100 is positioned the upper surface of the main body 38 of platform 30.
After the corresponding glass 100 that needs are detected is positioned on platform 30, by driving the first linear motor 20, platform 30 is moved to the surveyed area A of substrate 10.
Therefore, at contact unit 50 places, probe group corresponding to the model of corresponding glass 100 is driven to platform 30 to contact corresponding glass 100, wherein, in order to contact the measurement point of corresponding glass 100, contact unit 50 by the second linear motor 40 left and move right, and glass 100 is along with moving together forward and to the platform 30 of rear drive by the first linear motor 20.
That is to say, the position of glass 100 determines by the pre aligner 34 that is arranged on platform 30, and identifies alignment mark by the camera 54 that is arranged on contact unit 50, thereby glass 100 can be to left and right, front and rear setting.
According to the model of glass 100, the middle body of glass 100 by being arranged on platform 30 and blowing function rotation-90 degree, 90 degree and 180 degree of the chuck 36 on platform 30.
Simultaneously, when specific flat panel display glass 100 by being arranged on probe group on contact unit 50 when the surveyed area A of substrate detects, another contact unit 50 that is positioned at idle area B exchanges a probe group selectively, is used for another piece glass with different pattern live width is detected.
That is to say, when a contact unit 50 when surveyed area A detects, can be simultaneously with a probe group and the probe group exchange that is used for the particular glass model in exchange tool 70 at another contact unit 50 of idle area B.
For this reason, the shelf 72 of exchange tool 70 can move forward and backward by manual operation along slide rail 74, and can work as when driving up and down by the driving of plunger 76 and exchange.Namely, an empty shelf in the shelf 72 of multilayer exchange tool 70, be positioned at another contact unit that is positioned at idle area B 50 below, and be arranged on contact unit probe group location on the shelf, shelf is pushed into.Then, after below the probe group is positioned at contact unit 50, this probe group is corresponding to glass model and will exchange by actuation plunger 76 and manual operations up and down, and the probe group can be exchanged by the fixing operation of for example coupling bolt.
Therefore, because specific glass model can detect by a contact unit, and the probe corresponding with another glass model with different pattern live width can be according to another contact unit exchange in the array detection device with a plurality of contact units of the present invention, the vacant time of the device that therefore produces due to exchange probe group can reduce, thus the duration of runs of having improved system.
Even can draw the embodiment of other modifications from the content that the present invention describes, clearly they can not individually be got rid of from technical spirit of the present invention or prospect, but belong to the protection domain of appended claims of the present invention.
Claims (4)
1. array detection device, it has a plurality of contact units, comprising:
Substrate has surveyed area and this is positioned at the idle area of the relative both sides of surveyed area, at the middle body of this surveyed area, flat panel display glass is detected;
Platform, this platform is arranged in the surveyed area of substrate, and specific glass is located thereon;
At least two contact units are equipped with a plurality of probe on it, be used for detect the characteristic that is formed on circuit diagram on glass, and described contact unit being arranged on substrate when electrically contacting with circuit diagram;
The first linear motor is used for forward and to the described platform of rear drive;
The second linear motor is used for driving a plurality of contact units left and to the right.
2. array detection device as claimed in claim 1, wherein at each idle area of substrate, exchange tool is installed, be used for clamping selectively the probe group corresponding with the particular glass model, the step shelf of wherein clamping the probe group is arranged in exchange tool, and shelf is set to move forward and backward along slide rail, and moves up and down by the driving of plunger.
3. array detection device as claimed in claim 1, wherein contact unit comprises:
Carriage is arranged on the second linear motor, thereby makes contact unit and move right left;
A plurality of probe are used for detecting the characteristic that is formed on circuit diagram on glass when electrically contacting with circuit diagram;
A plurality of cameras are used for pin and the measured zone of probe are made a video recording;
A plurality of driving motors are used for probe is moved up and down, and make camera up and down, the left and right moves.
4. array detection device as claimed in claim 1, wherein said platform has the main body of the rectangular plate shape of being essentially, and glass is positioned on this main body; And comprise: a plurality of stripper pins are used for the upper surface Locating Glass in main body; A plurality of pre aligner are for the position of determining corresponding glass; And chuck, this chuck is arranged on the middle body of main body, is used for rotating selectively corresponding glass when carrying out blowing function.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020110122749A KR101286250B1 (en) | 2011-11-23 | 2011-11-23 | Array test apparatus having multiple head unit |
| KR10-2011-0122749 | 2011-11-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103137048A true CN103137048A (en) | 2013-06-05 |
| CN103137048B CN103137048B (en) | 2015-10-21 |
Family
ID=48496811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210105165.6A Active CN103137048B (en) | 2011-11-23 | 2012-04-11 | There is the array detection device of multiple contact unit |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101286250B1 (en) |
| CN (1) | CN103137048B (en) |
| TW (1) | TWI491896B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106782234A (en) * | 2015-11-24 | 2017-05-31 | 飞腾动力公司 | System and method for promoting the inspection to the device to be tested including multiple panels |
| CN108074511A (en) * | 2016-11-09 | 2018-05-25 | 永友Dsp有限公司 | The clamping device of display panel detection probe unit |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108831359B (en) * | 2018-06-22 | 2020-08-11 | 惠科股份有限公司 | Display panel and display device thereof |
| CN109324253B (en) * | 2018-09-30 | 2024-03-08 | 江西合力泰科技有限公司 | Detection device and method for glass after PIN is installed |
| KR102097456B1 (en) * | 2019-07-01 | 2020-04-07 | 우리마이크론(주) | Probe block assembly for inspecting display panel, control method thereof and display panel inspection device |
| KR102097455B1 (en) * | 2019-07-01 | 2020-04-07 | 우리마이크론(주) | Probe block assembly for inspecting display panel, control method thereof and display panel inspection device |
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| CN101385137A (en) * | 2006-02-16 | 2009-03-11 | 飞而康公司 | Space transformer, manufacturing method of the space transformer and probe card having the space transformer |
| KR20090026638A (en) * | 2007-09-10 | 2009-03-13 | 주식회사 프로텍 | Auto probe unit |
| CN201429965Y (en) * | 2009-07-02 | 2010-03-24 | 北京京东方光电科技有限公司 | Circuit detection device and equipment of liquid crystal panel |
| CN102053400A (en) * | 2009-10-27 | 2011-05-11 | 塔工程有限公司 | Array substrate detecting device and method thereof |
| CN102072991A (en) * | 2009-11-20 | 2011-05-25 | 塔工程有限公司 | Array tester provided with probe rod replacing unit |
| CN102117588A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2007090465A1 (en) * | 2006-02-08 | 2007-08-16 | Verigy (Singapore) Pte. Ltd. | Testing devices under test by an automatic test apparatus having a multisite probe card |
| US7898272B2 (en) * | 2006-06-08 | 2011-03-01 | Nhk Spring Co., Ltd. | Probe card |
-
2011
- 2011-11-23 KR KR1020110122749A patent/KR101286250B1/en active IP Right Grant
-
2012
- 2012-04-11 CN CN201210105165.6A patent/CN103137048B/en active Active
- 2012-04-24 TW TW101114492A patent/TWI491896B/en active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101385137A (en) * | 2006-02-16 | 2009-03-11 | 飞而康公司 | Space transformer, manufacturing method of the space transformer and probe card having the space transformer |
| CN101308193A (en) * | 2007-05-15 | 2008-11-19 | 东京毅力科创株式会社 | Probe apparatus |
| KR20090026638A (en) * | 2007-09-10 | 2009-03-13 | 주식회사 프로텍 | Auto probe unit |
| CN201429965Y (en) * | 2009-07-02 | 2010-03-24 | 北京京东方光电科技有限公司 | Circuit detection device and equipment of liquid crystal panel |
| CN102053400A (en) * | 2009-10-27 | 2011-05-11 | 塔工程有限公司 | Array substrate detecting device and method thereof |
| CN102072991A (en) * | 2009-11-20 | 2011-05-25 | 塔工程有限公司 | Array tester provided with probe rod replacing unit |
| CN102117588A (en) * | 2009-12-31 | 2011-07-06 | 塔工程有限公司 | Array test device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106782234A (en) * | 2015-11-24 | 2017-05-31 | 飞腾动力公司 | System and method for promoting the inspection to the device to be tested including multiple panels |
| CN108074511A (en) * | 2016-11-09 | 2018-05-25 | 永友Dsp有限公司 | The clamping device of display panel detection probe unit |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20130057033A (en) | 2013-05-31 |
| TWI491896B (en) | 2015-07-11 |
| TW201321777A (en) | 2013-06-01 |
| CN103137048B (en) | 2015-10-21 |
| KR101286250B1 (en) | 2013-07-12 |
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