CN102778440A - Total-reflection type optical system of flue gas concentration analyzer - Google Patents
Total-reflection type optical system of flue gas concentration analyzer Download PDFInfo
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- CN102778440A CN102778440A CN201210276668XA CN201210276668A CN102778440A CN 102778440 A CN102778440 A CN 102778440A CN 201210276668X A CN201210276668X A CN 201210276668XA CN 201210276668 A CN201210276668 A CN 201210276668A CN 102778440 A CN102778440 A CN 102778440A
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Abstract
The invention aims at the defects of low sensitivity and signal to noise ratio and poor stability and reliability of an existing optical system of a flue gas concentration analyzer to provide a total-reflection type optical system of a flue gas concentration analyzer. The system comprises a light source, a measurement light reflector, a reference light reflector, a spectrometer, a movable light shield, a first (collimation) off axis parabolic mirror and a second (focusing) off axis parabolic mirror, wherein the first off axis parabolic mirror and the measurement light reflector are oppositely arranged to form a measuring optical path; a center symmetry axis of the measurement light reflector is coincident with an optical axis of the first off axis parabolic mirror; the second off axis parabolic mirror and the reference light reflector are oppositely arranged to form a reference optical path; and a center symmetry axis of the reference light reflector is coincident with an optical axis of the second off axis parabolic mirror. The system is also provided with a spectroscope and an optical fiber.
Description
Technical field
The present invention relates to a kind of optical system of utilizing optics and spectroscopy technology that gas concentration is measured; Optical system as the optical signal transmission physical channel is the core and the key component of flue gas concentration analyser, and its signal to noise ratio (S/N ratio) and light transmissioning efficiency have directly determined the key indexs such as signal to noise ratio (S/N ratio), sensitivity and accuracy of measurement of whole analyser to a great extent.
Background technology
Flue gas discharge continuous monitoring system (CEMS, Continuous Emission Monitoring System) is meant the important watch-dog of the desulfurization of conduction factory, denitrating system operation with closed ring, is again the important monitoring equipment of fume emission simultaneously.Along with the continuous propelling of China's energy-saving and emission-reduction work, SO in the gaseous contaminant
2, NO
X, NH
3Deng concentration of emission more and more lower, originally be difficult to adapt to present high humidity, the operating mode of low-sulfur based on the direct extraction cryochem that is applicable to low humidity, high-sulfur of infrared absorption spectroscopies.Late 1970s is proposed by people such as the Platt.U of Heidelberg, Germany university; (Differential Optical Absorption Spectroscopy DOAS) has obtained success and application widely in the direct measurement of atmospheric trace gas concentration monitor and pollution source smoke emissioning concentration as more representational DOAS in the direct method of measurement.
Based on the flue gas concentration analyser of ultraviolet difference absorption spectrum technology, optical system is core and a key component wherein, and its sensitivity, signal to noise ratio (S/N ratio) etc. have determined the key indexs such as sensitivity, signal to noise ratio (S/N ratio) and accuracy of measurement of analyser to a great extent.The direct measuring system of flue gas concentration is installed on before and after the desulphurization denitration and floss hole such as the chimney or the flue etc. of pollution source; Because measurand is common and coexistences such as other interference gas and dust, so there is certain requirement in system to the energy of launching light beam and Returning beam; And because the on-the-spot influence that has factors such as vibration, high temperature requires system to have higher reliability and stability.At present, this type of analytical instrument adopts refraction type and refractive and reflective optical system mostly.Because the used light source of system is generally deuterium lamp (190-410 nm) or xenon lamp (200-1100 nm), radiation of light source wave band broad for requiring transmission broadband light beam to have the refraction type or the catadioptric formula system of higher-energy again simultaneously, must carry out chromatic aberration correction; In addition, the material that can see through ultraviolet light is seldom added factors such as on-the-spot vibration and high temperature, and more complicated is understood in the refractive optical system design.Refractive optical system is often selected CaF for use
2Carry out chromatic aberration correction, because its material softness is frangible, poor for applicability to temperature, processing has certain degree of difficulty; Simultaneity factor will have higher energy, must use the optics original paper achromatism of different materials, and system complex, processing cost is higher and the reliability and stability of system can not get guaranteeing.
Because there are above shortcoming in refraction type or catadioptric formula system, be necessary the optical system of existing flue gas concentration analyser is carried out innovative design.
Summary of the invention
It is low to the present invention is directed to existing flue gas concentration analyser optical system signal to noise ratio (S/N ratio) and sensitivity, and the shortcoming of stability and poor reliability provides a kind of flue gas analyzer total-reflection type optical system.
Collimation property according to parabolic mirror; Promptly in the ideal case; The light beam of focus outgoing is strict parallel characteristics after parabolic reflector; Through corner cube prism, spectroscope (single face plating reflectance coating), off-axis parabolic mirror reasonable space layout and structure and dimensionally-optimised, the present invention designs a kind of total-reflection type optical system of no color differnece.Compare with the flue gas concentration measuring system of same principle, have higher sensitivity, accuracy of measurement and reliability, have stability preferably simultaneously based on the flue gas concentration analyser of this optical system.Especially under the more weak or tested gas concentration condition with higher of the radiation light intensity of light source, the sensitivity and the accuracy of measurement of system also significantly improve; Simultaneously, the high sensitivity design of Optical System has also prolonged the effective storage life of light source relatively.
Concrete technical solution of the present invention is following:
A kind of flue gas concentration analyser total-reflection type optical system; This system comprises light source, measuring light catoptron, reference light catoptron, spectrometer and movable shadow shield; It is characterized in that: this system also comprises first (collimation) off-axis parabolic mirror and second (focusing) off-axis parabolic mirror
Wherein first off-axis parabolic mirror and measuring light catoptron are oppositely arranged to form and measure light path, and the optical axis coincidence of the central symmetry axis of measuring light catoptron and first off-axis parabolic mirror;
Wherein second off-axis parabolic mirror and reference light catoptron are oppositely arranged the formation reference path, and the optical axis coincidence of the central symmetry axis of reference light catoptron and second off-axis parabolic mirror;
The optical axis of the optical axis of first off-axis parabolic mirror and second off-axis parabolic mirror intersects vertically, and on the measurement light path on intersection point right side, is provided with exhaust gases passes; One spectroscope places first, second off-axis parabolic mirror two optical axes crosspoint places, and is located on half light path of first, second off-axis parabolic mirror (top); The optical axis of second off-axis parabolic mirror and this spectroscope angle are 45
0, the central symmetry axis of reference light catoptron and this spectroscope angle are 135
0
Said movable shadow shield activity is located on second half light paths of first and second off axis paraboloid mirrors (bottom);
Said light source is positioned on the focus of first off-axis parabolic mirror, and an optical fiber input end is positioned at the along of second off-axis parabolic mirror, and the exit end of this optical fiber connects spectrometer.
Further design of the present invention is that said spectroscope is coated with reflectance coating in face of the face single face of first off-axis parabolic mirror.
The edge that said spectroscope is positioned at first, second off-axis parabolic mirror two optical axes crosspoint places one side is provided with 45
0Chamfering, this chamfering is towards the measuring light catoptron.
The caliber size of said measuring light catoptron, first off-axis parabolic mirror, reference light catoptron, second off-axis parabolic mirror is all identical.
Said movable shadow shield is a curved baffle, and is connected on the rotating mechanism.
Said measuring light catoptron and reference light catoptron all adopt corner cube prism.
Technique effect of the present invention is following:
1, flue gas concentration analyser total-reflection type optical system of the present invention, the light beam that light source is sent has half can get into reference path, and second half can get into the measurement light path;
2, system adopts the total reflection design, and off-axis parabolic mirror is partly adopted in beam collimation, has realized no color differnece theoretically; Thereby the light beam that light source is sent can access good collimation; Avoided dioptric system because chromatic aberration correction difficulty, beam divergence and energy loss in the beam propagation process that causes are behind the collimation; The luminous energy of radiation of light source has half to get into reference path, and second half has got into the measurement light path;
3, compare with refraction type or catadioptric formula system, under the same light source irradiation intensity, the luminous energy through native system improves greatly, and system sensitivity increases;
4, the ratio of the system signal noise ratio useful light intensity signal that equals to receive and the root mean square of noise, under integral time and average time the same terms, the detector noise is identical, and light intensity is big more, and system signal noise ratio is high more, and the measuring accuracy of system is also just high more;
5, utilize the collimation property of off-axis parabolic mirror, the present invention adopt optical system of total reflection solve ultraviolet broadband refraction type or refractive and reflective optical system aberration big with pass through ultraviolet band material problem seldom.Under the radiation intensity of same light source, the light intensity of using highly sensitive optical system to get into photodetector will improve the sensitivity and the signal to noise ratio (S/N ratio) of flue gas analyzer far above general optical system, makes the accuracy of measurement of instrument be improved.The raising of optical system sensitivity, also relatively " prolongation " serviceable life of light source.
Description of drawings
Fig. 1 is a flue gas concentration analyser total-reflection type light path design synoptic diagram of the present invention, and wherein baffle plate present position A and position B are in respectively and measure light path and reference path.
Among Fig. 1,1, light source; 2, bulb glass wall; 3, first off-axis parabolic mirror; 4, the first off-axis parabolic mirror main shaft; 5, spectroscope; 6, reference light catoptron; 7, measuring light catoptron; 8, second off-axis parabolic mirror; 9, the second off-axis parabolic mirror main shaft; 10, optical fiber; 11, shifting board; 12, spectrometer; 13, exhaust gases passes.
Embodiment
Instance one:
As shown in Figure 1; Flue gas concentration analyser total-reflection type optical system of the present invention; In the plane that optical axis intersection is formed in the first off-axis parabolic mirror optical axis and second off-axis parabolic mirror, four-quadrant existence one rotating mechanism drives a shifting board and between reference path and measurement light path, switches.Wherein, four-quadrant angular bisector has been divided into the residing A of baffle plate, two positions of B with this quadrant, and position A is in the measurement light path, and position B is in reference path.The center of rotation of rotating mechanism through rotary magnet electric and dead electricity drive baffle plate A switch with two positions of position B in the position, thereby realized the timesharing measurement of reference light and measuring light.
First, second off-axis parabolic mirror and spectroscope 5 all with quartz material as substrate; First, second is from axle parabolic reflector outside surface plating ultraviolet highly reflecting films; Spectroscope 5 simultaneously plates single face ultraviolet highly reflecting films in face of that of first off-axis parabolic mirror, and purpose is in order to reduce the reflected light spectral composition difference that double-sided coating difference causes as far as possible.The optical axis of the spectroscope 5 and first off-axis parabolic mirror 3 is the α angle, and size is 45
0, being the β angle with reference light catoptron central symmetry axis, size is 135
0, and be in the spectroscope edge at the first off-axis parabolic mirror optical axis and the second off-axis parabolic mirror optical axis intersection place, become 45
0Edge of a knife shape, the edge of a knife is towards the measuring light catoptron.
Reference light catoptron 6 (or measuring light catoptron 7) is a corner cube prism, has three right angle faces and a rounded face, is the inner full-reflection prism of making according to the critical angle principle.The directional light of vertical incidence prism surface, inner at prism through after the total reflection, will be reflected back efficiently by original optical path.
Spectrometer 12 of the present invention is a photodetector, and it is transformed into electric signal with the light signal that receives.Can through processing unit signal be linked computing machine again, export full wave spectrogram at last on computers.
Optical fiber 10 is that 0.22 height passes through UV fiber for core diameter 600um, numerical aperture, and the optical fiber two ends are the SMA905 modular connection.
Shifting board 11 has been realized the switching of reference light and measuring light for having the circular arc thin slice of certain width and height under the drive of rotary magnet.
Among Fig. 1, system is the horizontal primary optical axis of system with first off-axis parabolic mirror, 3 place optical axises, is vertical primary optical axis of system with second off-axis parabolic mirror, 8 place optical axises.The light that light source 1 sends is collimated into directional light through first off-axis parabolic mirror 3; Directional light is vertical measuring light catoptron 7, the optical axis coincidence of the central symmetry axis of measuring light catoptron 7 and first off-axis parabolic mirror 3 of getting into after half light beam wherein being arranged behind the spectroscope 5 pass measured object.Measuring light catoptron 7 is called corner cube prism again, has been characterized in three right angle faces, light within it portion after total reflection along incident light outgoing in the other direction.
Second half directional light edge of light source 1 emission light beam becomes 45 with spectroscope 5 normals
0Incident, reflected light are directional light and become 90 with incident light
0On the reflected light path of this side of light source, a reference light catoptron 6 is arranged at spectroscope 5; At the opposite side of spectroscope 5 off axis paraboloid mirror 8 is arranged along reference light catoptron 6 central symmetry axis, the optical axis coincidence of reference light catoptron 6 central symmetry axis and second off-axis parabolic mirror 8.
The course of work of the present invention is following:
Used light source is a deuterium lamp among the present invention, and the size of luminous point is 0.5mm.The diameter 30 mm light beams that deuterium lamp light source 1 sends become directional light through first off-axis parabolic mirror, 3 collimations earlier; This parallel beam on average becomes two-beam through spectroscope 5 backs by energy: a branch ofly be the semicircle parallel beam (measuring light) of diameter 42.5mm; Measure the semi circular surface of measuring light catoptron 7 on the light path through the measurand vertical incidence along the original optical path direction; After getting into light portion's process total reflection within it of measuring light catoptron 7, become 180 with incident light
0Do not plate that side surface of high-reflecting film from another one semi circular surface outgoing to the spectroscope 5 of measuring light catoptron 7; Shine on the high-reflecting film then; Getting into second off-axis parabolic mirror 8 through the parallel beam after the reflection focuses on; Get into to pass through the silica fibre of ultraviolet behind the light focusing, the conduction through optical fiber gets into spectrometer 12 again.The light signal that spectrometer 12 is loaded with flue gas concentration is converted into electric signal, can send into the computing machine that flue gas concentration measuring software is housed through becoming digital quantity after a series of processing again;
The semicircle parallel beam (reference light) that another road diameter is similarly 42.5mm is directly incident on that side surface that spectroscope 5 plates high-reflecting films; The semi circular surface of light vertical incidence reference light catoptron 6 after reflection; After total reflection, become 180 in reference light catoptron 6 inside with incident light
0Be incident to second off-axis parabolic mirror 8 from the another one semi circular surface edge of reference light catoptron 6 with the parallel direction of second off-axis parabolic mirror, 8 optical axises; Parallel rays gets into the silica fibre that passes through ultraviolet after second off axis paraboloid mirror reflection 8 focuses on, the reference light that will not comprise any measurand concentration information through optical fiber is sent into spectrometer.Utilize this reference light to carry out to judge when flue gas concentration calculates the serviceable life of light source.
For a certain moment, can only there be one tunnel light path to lead in the optical system, promptly reference light and measuring light can not exist simultaneously.Control rotary magnet as required and drive position A and the position B of shifting board in Fig. 1 and switch, thus the timesharing measurement that has realized utilizing single detector that reference light and measuring light are carried out.
Application example one:
According to Fig. 1, its concrete structure of the present invention and statement parameter are following:
The size of used deuterium lamp light source luminescent point is 0.5mm among the present invention, and the bulb wall thickness is 1mm, and the radiation of light source wavelength band is 190～410nm.The light source luminescent point places on the focus of first off-axis parabolic mirror 3; The apex horizontal distance that promptly is positioned at first off-axis parabolic mirror, 3 place parabolic mirrors is the position of 100mm; The radius of first off-axis parabolic mirror 3 is 200mm; Be 77.5mm from the axle amount, the aperture angle of first off-axis parabolic mirror 3 is 20.33
0,, can effectively accept the emittance of deuterium lamp greater than the angle of divergence of used deuterium lamp.The radius of second off-axis parabolic mirror 8 is 240mm; Be 75mm from the axle amount; Optical fiber interface places on the focus of second off-axis parabolic mirror 8, promptly is positioned at the paraboloidal apex horizontal distance in second off-axis parabolic mirror, 8 places and is the position of 120mm, and the numerical aperture of first off-axis parabolic mirror 3 is 0.172; Less than the numerical aperture that receives optical fiber, can effectively accept the energy of light.
Spectroscope 4 is that a rectangle is quartzy dull and stereotyped in the native system, wherein long for 64mm, wide be 43mm, the thick 4mm of being.In order to eliminate reference spectra and the structural difference of absorption spectrum that causes owing to spectroscope 4 plated films as far as possible, spectroscope 5 is in face of that face single face plating reflectance coating of light source.The edge that is in the spectroscope 5 on the first off-axis parabolic mirror optical axis becomes 45
0The oblique angle, spectroscope 5 becomes 45 with the light source side first off-axis parabolic mirror optical axis
0Angle, and spectroscope 5 is in the top of the first off-axis parabolic mirror optical axis.The big face diameter of reference light catoptron 6 is 85mm, highly is 63.75mm, and the beam deflection angle is 180
0, material is JGS1.The big face diameter of measuring light catoptron 7 is 85mm, highly is 63.75mm, and the beam deflection angle is identical with reference light catoptron 6 with material.At first off-axis parabolic mirror 3 and second off-axis parabolic mirror, 8 optical axis intersection places, there is a rotary magnet to drive shifting board 11 and rotates around this point, rotational angle is 45
0, the height of shifting board is 88mm, width is 5.31mm, is 1/8th of this circumference.
Claims (6)
1. flue gas concentration analyser total-reflection type optical system; This system comprises light source, measuring light catoptron, reference light catoptron, spectrometer and movable shadow shield; It is characterized in that: this system also comprises first off-axis parabolic mirror and second off-axis parabolic mirror
Wherein first off-axis parabolic mirror and measuring light catoptron are oppositely arranged to form and measure light path, and the optical axis coincidence of the central symmetry axis of measuring light catoptron and first off-axis parabolic mirror;
Wherein second off-axis parabolic mirror and reference light catoptron are oppositely arranged the formation reference path, and the optical axis coincidence of the central symmetry axis of reference light catoptron and second off-axis parabolic mirror;
The optical axis of the optical axis of first off-axis parabolic mirror and second off-axis parabolic mirror intersects vertically, and on the measurement light path on intersection point right side, is provided with exhaust gases passes; One spectroscope places first, second off-axis parabolic mirror two optical axes crosspoint places, and is located on half light path of first, second off-axis parabolic mirror; The optical axis of first off-axis parabolic mirror and this spectroscope angle are 45
0, the central symmetry axis of reference light catoptron and this spectroscope angle are 135
0
Said movable shadow shield activity is located on second half light path of first and second off axis paraboloid mirrors;
Said light source is positioned on the focus of first off-axis parabolic mirror, and an optical fiber input end is positioned at the along of second off-axis parabolic mirror, and the exit end of this optical fiber connects spectrometer.
2. flue gas concentration analyser total-reflection type optical system according to claim 1, it is characterized in that: said spectroscope is coated with reflectance coating in face of the face single face of first off-axis parabolic mirror.
3. flue gas concentration analyser total-reflection type optical system according to claim 1 and 2 is characterized in that: the edge that said spectroscope is positioned at first, second off-axis parabolic mirror two optical axes crosspoint places one side is provided with 45
0Chamfering, this chamfering is towards the measuring light catoptron.
4. flue gas concentration analyser total-reflection type optical system according to claim 3, it is characterized in that: the caliber size of said measuring light catoptron, first off-axis parabolic mirror, reference light catoptron, second off-axis parabolic mirror is all identical.
5. flue gas concentration analyser total-reflection type optical system according to claim 4, it is characterized in that: said movable shadow shield is a curved baffle, and is connected on the rotating mechanism.
6. flue gas concentration analyser total-reflection type optical system according to claim 5, it is characterized in that: said measuring light catoptron and reference light catoptron all adopt corner cube prism.
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| CN201210276668XA CN102778440A (en) | 2012-08-06 | 2012-08-06 | Total-reflection type optical system of flue gas concentration analyzer |
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| CN201210276668XA CN102778440A (en) | 2012-08-06 | 2012-08-06 | Total-reflection type optical system of flue gas concentration analyzer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110426349A (en) * | 2019-08-30 | 2019-11-08 | 青岛众瑞智能仪器有限公司 | A kind of method and its gas chamber, measuring instrument improving flue gas analyzer stability |
| CN111367067A (en) * | 2018-12-25 | 2020-07-03 | 中国科学院长春光学精密机械与物理研究所 | Total reflection type afocal optical system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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Application publication date: 20121114 |