CN102495010B - High sensitivity optical system of DOAS analyzer - Google Patents

High sensitivity optical system of DOAS analyzer Download PDF

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CN102495010B
CN102495010B CN 201110370806 CN201110370806A CN102495010B CN 102495010 B CN102495010 B CN 102495010B CN 201110370806 CN201110370806 CN 201110370806 CN 201110370806 A CN201110370806 A CN 201110370806A CN 102495010 B CN102495010 B CN 102495010B
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lens set
optical
lens group
focus lens
spectroscope
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CN102495010A (en
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汤光华
陈书建
陈祥
曲震
凌雁波
苗丰
王新培
许明扬
张西谋
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Nanjing Guodian Environmental Protection Technology Co., Ltd.
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NANJING GUODIAN ENVIRONMENTAL PROTECTION EQUIPMENT CO Ltd
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Abstract

The present invention relates to a high sensitivity optical system of a differential optical absorption spectroscopy (DOAS) analyzer for gas concentration detection. According to the system, two optical axes of a collimating lens set and a condenser lens set intersect on a side of a large lens to form the optical axis intersection point, wherein the collimating lens set is arranged perpendicular to the condenser lens set; optical axes on both sides of the collimating lens set are respectively provided with a light source and a transmitted light reflector; optical axes of both sides of the condenser lens set are respectively provided with an optical fiber spectrometer and a reference light reflector; a spectroscope plated with a reflecting film is positioned on an angular bisector of a right angle, wherein the optical axes of the two adjacent sides of the collimating lens set and the condenser lens set intersect to form the right angle; the spectroscope is concurrently and obliquely arranged on the optical path comprising the half outgoing beam of the collimating lens set and the half incoming beam of the condenser lens set in the angle of 45 DEG, and the other half outgoing beam of the collimating lens set and the other half incoming beam of the condenser lens are provided with moveable baffles, wherein the positions of the movable baffles are switchable; the half of the beam emitted by the light source enters the reference light path, and the other half of the beam enters the measurement light path. According to the present invention, under the same light source radiation conditions, the light energy passing through the optical system of the present invention is strong, the signal-to-noise ratio is high, and the measurement precision is improved.

Description

The high sensitivity optical system of DOAS analyser
Technical field
The present invention relates to a kind of optics and spectroscopy technology utilized gas concentration is carried out the high sensitivity optical system of the DOAS analyser of on-line measurement, the physical channel that this optical system is transmitted as gas concentration information is the core component of whole system.
Background technology
The boiler smoke of industrial smoke, particularly fuel-burning power plant contains a large amount of SO 2, NO X, NH 3Etc. multiple harmful constituent, must carry out could qualified discharge after the purified treatment such as desulphurization and denitration.Flue gas discharge continuous monitoring system (CEMS, Continuous Emission Monitoring System) refers to conduct electricity the important watch-dog of desulphurization and denitration system of factory operation with closed ring, is again the important monitoring equipment of fume emission simultaneously.Along with the continuous propelling of China's energy-saving and emission-reduction work, SO in the gaseous contaminant 2, NO X, NH 3Deng concentration of emission more and more lower, especially when low concentration is measured, the absorption meeting of steam causes very large measuring error to infrared absorption spectrum measurement, and the water vapor absorption increase that can cause system corrosion to bring standby redundancy, and is difficult to above-mentioned polycomponent is measured simultaneously.Therefore traditional direct extraction cryochem that is applicable to low humidity, high-sulfur based on infrared absorption spectroscopies no longer is fit to present high humidity, the operating mode of low-sulfur.Success and widely application in the direct measurement of atmospheric trace gas concentration monitor and pollution source smoke emissioning concentration, have been obtained as more representational difference absorption spectrum in the direct method of measurement (Differential Optical Absorption Spectroscopy, lower abbreviation DOAS).
For for the flue gas concentration analyser of DOAS technology, optical system is nucleus module wherein, and the performances such as the sensitivity of optical system, signal to noise ratio (S/N ratio) are to improve the sensitivity of DOAS analyser and the key of measuring accuracy.At present, utilize the single detector timesharing to obtain in the DOAS analyser with reference to light intensity and transmitted light intensity, optical system adopts semi-transparent semi-reflecting design proposal mostly, or on this basis at lens surface plating ultraviolet anti-reflection film, no matter be reference light or transmitted light, all need twice through same semi-transparent semi-reflecting lens, the light that light source sends only has in theory at most 1/4th energy can enter photodetector, causes capacity usage ratio low; In addition, chromatic aberration correction is not considered in optical design mostly, for energy type but not for the imaging-type system, when the broadband light beam passes through this optical system, will again lose quite a few energy, especially in the situation that radiant light intensity is weak or tested concentration of component is higher or extremely low of light source, the signal to noise ratio (S/N ratio) that enters photo detector signal obviously reduces, cause sensitivity and the measuring accuracy of DOAS analyser excessively low, must again change light source, cause the serviceable life of light source shorter.
Summary of the invention
The object of the present invention is to provide a kind of high sensitivity optical system of the DOAS analyser for detection of gas composition content, can increase substantially the capacity usage ratio of light source, under the same intensity of light source, the luminous energy that enters photodetector is multiplied, improve the measurement signal to noise ratio (S/N ratio) of instrument, prolong the serviceable life of light source.
The high sensitivity optical system of DOAS analyser of the present invention, comprise light source, collimation lens set, spectroscope, transmitted light catoptron, focus lens group, reference light catoptron, optical fiber, fiber spectrometer and shifting board, described collimation lens set and focus lens group are comprised of large and small two lens that keep at a certain distance away respectively; Collimation lens set and each other vertical setting of focus lens group, it is optical axes crosspoint that the optical axis of the two intersects in large lens one side; Described light source and transmitted light catoptron lay respectively on the optical axis of collimation lens set both sides, and wherein the transmitted light catoptron is positioned at described optical axes crosspoint position in addition; Described optical fiber one end is positioned on the lenslet one sidelight axle of focus lens group, and the other end links to each other with fiber spectrometer; Described reference light catoptron is positioned at position outside the described optical axes crosspoint of large lens one side of focus lens group optical axis; Described spectroscope is the rectangle quartz glass that is coated with reflectance coating, it is tilting on rectangular angular bisector of the two optical axis intersection institute of collimation lens set and focus lens group sides adjacent, and namely spectroscope is simultaneously with on 45 jiaos of tilting half outgoing beams and the light path of half incident beam of focus lens group in collimation lens set; Described shifting board switchably keeps off on the light path of second half incident beam of second half outgoing beam of collimation lens set or focus lens group.
Large and small each lens in described collimation lens set and the focus lens group are compound and fixedly form with spacer ring by the calcium fluoride lens of fused quartz lens and ultraviolet level.
Described spectroscope is single face plating reflectance coating, and the one side that is coated with reflectance coating is not plated the one side of reflectance coating towards focus lens group towards collimation lens set.
The edge that described spectroscope is in collimation lens set optical axis and focus lens group optical axis intersection place is processed into 45 chamferings, and fillet surface is towards reference light catoptron direction.
Described transmitted light catoptron and reference light catoptron are corner cube prism.
Technique effect of the present invention is as follows:
1, the light beam that spectroscopical set-up mode sends light source in this optical system has half to enter reference path, second half has entered optical path, under the identical condition of light source intensity, improved greatly the luminous energy by optical system, the sensitivity of DOAS analyser is improved.The reflected light spectral composition difference that spectroscope single face plating reflectance coating can avoid traditional double-sided coating to cause because of difference.
2, according to system signal noise ratio be the principle of ratio of the root mean square of useful light intensity signal and noise, under integral time and average time the same terms, system signal noise ratio depends on light intensity, and the luminous energy of this optical system is improved, signal to noise ratio (S/N ratio) is high, and the measuring accuracy of system also improves.
3, compare with common system, adopt the DOAS analyser of this optical system to have higher signal to noise ratio (S/N ratio), under identical radiation of light source condition, stronger by the luminous energy of this optical system.Under identical measuring accuracy requires, the longer service life of this optical system light source.
4, be that collimation lens set or focus lens group have all adopted quartz lens and the compound structure of calcium fluoride lens in the light path system, thereby when having eliminated to a great extent the broadband light beam by same material because the aberration problem that the refractive index difference causes, the energy loss of bringing because of aberration in the time of further reducing the broadband light beam by optical system, the sensitivity that improves system.
Description of drawings
Fig. 1 is optical system light path design diagram of the present invention.
Fig. 2 is the perspective view of corner cube prism.
Fig. 3 is the bare engine module cut-open view based on the DOAS analyser of optical system of the present invention.
Among the figure, 1, the light source luminescent point; 2, bulb glass wall, 3, collimation lens set; 4, spectroscope; 5, reference light catoptron; 6, transmitted light catoptron; 7, focus lens group; 8, optical fiber; 9, fiber spectrometer; 10, baffle plate, 11, the collimation lens set optical axis, 12, the focus lens group optical axis, 13, corner cube prism, 13-1, rounded bottom surface, 13-2, right angle face; 14, chimney, 15, the probe, 15-1, gas sampling hole, A, baffle plate are in the optical path position, B, baffle plate are in the reference path position, O, optical axes crosspoint.
Embodiment
Fig. 1 is the light path synoptic diagram of optical system embodiment of the present invention, and light source 1 is deuterium lamp.
Such as Fig. 1, the optical axis 11 of collimation lens set 3 intersects vertically into optical axes crosspoint O with the optical axis 12 of focus lens group 7.Collimation lens set 3 forms by large and small two lens with the coaxial assembling of a determining deviation with focus lens group 7, but large and small two lens distance of two lens combination are not identical.Each lens in above-mentioned two lens combination are compound and be fixed into one by spacer ring by the calcium fluoride biconvex lens curved surface kissing of the JGS1 fused quartz meniscus lens of same diameter and ultraviolet level; Spectroscope 4 is take certain thickness quartz glass as substrate and single face plating reflectance coating.As shown in Figure 1, spectroscope 4 is positioned at the sides adjacent of collimation lens set 3 and focus lens group 7, and on collimation lens set optical axis 11 and focus lens group optical axis 12 intersect vertically the right angle bisector that forms; Be that spectroscope 4 reaches on the light path of half incident beam that intersects with it also adjacent focus lens group 7 with 45 jiaos of tilting half outgoing beams in lens combination 3 simultaneously.Spectroscope 4 single faces are coated with reflectance coating, and the one side of plating reflectance coating is not plated the one side of reflectance coating towards focus lens group 7 towards collimation lens set 3.The edge that spectroscope 4 is in collimation lens set optical axis 11 and focus lens group optical axis 12 intersections becomes 45 chamferings, and fillet surface is towards the direction of reference light catoptron 5.Shifting board 10 is driven by rotary magnet, can come back rotation by 45 jiaos around optical axes crosspoint O, alternately as the light barrier of second half light beam of second half light beam of collimation lens set and focus lens group, and switching position between the two.
Fig. 3 is the sectional structure chart of the bare engine module embodiment in the DOAS analyser.
In the present embodiment, the optimal parameter that system adopts is as follows:
The size of deuterium lamp light source 1 luminous point is 0.5mm, and bulb walls 2 thickness are 1mm, and the radiation of light source wavelength band is 185~400nm.Light source 1 luminous point is 53mm apart from the centre distance of the first lens of collimation lens set 3.Two lens of collimation lens set 3 are that the optics spacer ring of 23.4mm is assemblied in the two in the aluminium lens barrel through blackout by spacing.In the collimation lens set 3, being respectively 55.78mm and 33.70mm, outside diameter near the lens of light source 1 one sides by spherical radius is that 26mm, center thickness are that the ultraviolet level calcium fluoride biconvex lens that the bent moon quartz lens of 3.5mm is 33.70mm with spherical radius and has an identical outside diameter utilizes curve form to be combined with each other.In the collimation lens set 3 near the lens of spectroscope 4 one sides by spherical radius be respectively ultraviolet level calcium fluoride biconvex lens that 29.31mm and 77.09mm, center thickness 8mm, outside diameter are 32mm and spherical radius be respectively 29.31 and 144.29mm, center thickness be that 4mm and the bent moon quartz lens with same diameter utilize the present situation of curved surface to be combined with each other.Focus lens group 7 has identical structure with collimation lens set 3, and the parameter of both optical mirror slips is identical, and unique difference is that the former is spaced apart 23.08mm at the distance of optics spacer ring.The nearest centre distance of the focus point of focus lens group 7 and focus lens group 7 lens is 53.98mm.
Spectroscope 4 is that a rectangle is quartzy dull and stereotyped in the native system, wherein long for 39mm, wide be 23mm, the thick 4mm of being.In order to eliminate reference spectra and the structural difference of absorption spectrum that causes owing to the spectroscope plated film as far as possible, spectroscope 4 is in face of the side single face plating reflectance coating of light source.The lower limb of spectroscope 4 becomes 45 chamferings, and fillet surface overlaps with the optical axis 11 of collimation lens set 3.In the corner cube prism (see figure 2) as reference light reflection mirror 5, disc 13-1 diameter is 25.4mm, highly is 19.05mm, and the beam deflection angle is 180, and material is JGS1.Corner cube prism 13(as transmitted light catoptron 6 sees Fig. 2) in, the disc 13-1 diameter of prism is 50.8mm, highly is 38.1mm, beam deflection angle and material are identical with reference light catoptron 5.Catoptron 6 is contained in the probe 15, and probe 15 is provided with tested gas sampling hole 15-1.Optical fiber 8 is the high thoroughly UV fiber of core diameter 600 m, and the optical fiber two ends are the SMA905 modular connection.
Illustrate that below in conjunction with Fig. 1~Fig. 3 this optical system uses in the flue gas composition measurement of concetration.
Such as Fig. 3, will pop one's head in before measuring 15 from the measurement bore of chimney 14 in the insertion chimney, flue gas from chimney 14 by the time also pass through from 15 the gas sampling hole 15-1 of popping one's head in simultaneously, be full of flue gas in 15 the gas sampling zone of popping one's head in.
Send the parallel beam that diameter is 30mm through collimation lens set 3, this parallel beam is divided into behind spectroscope 4 measures light and reference light two light beams.
1. measuring beam
See Fig. 1 and Fig. 2, measuring beam is to be the half-cylindrical parallel beam of right-hand part of 30mm from the diameter that collimation lens set 3 penetrates.When baffle plate 10 rotates to the B state, semi-cylindrical measuring beam passes from the tested flue gas of popping one's head in 15 by the original optical path direction, then be incident to transmitted light catoptron 6, transmitted light catoptron 6 is corner cube prisms as shown in Figure 2, and it is comprised of rounded bottom surface 13-1 and three right angle face 13-2; This corner cube prism 6(is the transmitted light catoptron, lower with) axis of symmetry overlap with the optical axis 11 of collimation lens set 3.Measuring beam is after three right angle face total reflections of transmitted light catoptron 6 inside, namely oppositely (along the left side of the optical axis 11 among Fig. 1) is incident upon the side that spectroscope 4(does not plate reflectance coating), then by after the reflectance coating reflection that its another side plated, become 45 jiaos of ejaculations along spectroscope 4 normals, namely become and be 90 parallel beam with the incident light direction and enter the first half of focus lens group 7 left, enter the silica fibre 8 of ultraviolet after being focused, conduction by optical fiber 8 enters spectrometer 9 again, the light signal that spectrometer will be loaded with flue gas concentration is converted into electric signal, sends into the computing machine that flue gas concentration measuring software is housed through becoming digital quantity after a series of processing again.
2. reference beam
Reference beam is to incide this face of spectroscope 4(from the half-cylindrical parallel beam in the left side of the diameter 30mm of collimation lens set 3 ejaculations to be coated with reflectance coating), after spectroscope 4 reflections, light is incident to first disc (not having flue gas in the reference beam range) of the corner cube prism of reference light catoptron 5, rotate to the A condition situation at baffle plate 10, half-cylindrical reference beam is incident to focus lens group 7 from second disc of reference light catoptron 5 left along the direction parallel with focus lens group 7 optical axises 12 behind this corner cube prism inner full-reflection, parallel rays enters the silica fibre 8 of ultraviolet after lens combination 7 focuses on, the reference light that will not comprise any measurand concentration information by optical fiber 8 is sent into spectrometer 9.Utilizing this reference light and measurement light can carry out flue gas concentration calculates.
Be provided with baffle plate 10 in the light path of this optical system, under the rotary magnet of computer instruction control drives, baffle plate 10 can be in Fig. 1 position A and position B between switch, make reference light and measure the light alternation, realize utilizing 9 pairs of reference lighies of fiber spectrometer and measurement light to carry out timesharing and measure.
In this optical system, the light that light source 1 sends has been divided into two-way: one tunnel reference light intensity that obtains for directly enter photodetector 9 without tested gas; Another Lu Weixian enters the measurement light intensity that photodetector 9 obtains again through tested gas (namely from pop one's head in 15 through), uses subsequently to carry out based on the mathematical model of Lambert-Beer law that certain constituent concentration calculates in the flue gas (tested gas).

Claims (5)

1.DOAS the high sensitivity optical system of analyser, it is characterized in that comprising light source, collimation lens set, spectroscope, transmitted light catoptron, focus lens group, reference light catoptron, optical fiber, fiber spectrometer and shifting board, described collimation lens set and focus lens group are comprised of large and small two lens that keep at a certain distance away respectively; The optical axis of collimation lens set and focus lens group is vertical setting each other, and it is optical axes crosspoint that the optical axis of the two intersects in large lens one side; Described light source and transmitted light catoptron lay respectively on the optical axis of collimation lens set both sides, and wherein the transmitted light catoptron is positioned at described optical axes crosspoint position in addition; Described optical fiber one end is positioned on the lenslet one sidelight axle of focus lens group, and the other end links to each other with fiber spectrometer; Described reference light catoptron is positioned at position outside the described optical axes crosspoint of large lens one side of focus lens group optical axis; Described spectroscope is the rectangle quartz glass that is coated with reflectance coating, it is tilting on rectangular angular bisector of the two optical axis intersection institute of collimation lens set and focus lens group sides adjacent, and namely spectroscope is simultaneously with on tilting half outgoing beam and the light path of half incident beam of focus lens group in collimation lens set in 45o angle; Described shifting board switchably keeps off on the light path of second half incident beam of second half outgoing beam of collimation lens set or focus lens group.
2. the high sensitivity optical system of DOAS analyser according to claim 1 is characterized in that large and small each lens in described collimation lens set and the focus lens group are compound and fixedly form with spacer ring by the calcium fluoride lens of fused quartz lens and ultraviolet level.
3. the high sensitivity optical system of DOAS analyser according to claim 2 it is characterized in that described spectroscope is single face plating reflectance coating, and the one side that is coated with reflectance coating is not plated the one side of reflectance coating towards focus lens group towards collimation lens set.
4. according to claim 1 and 2 or the high sensitivity optical system of 3 described DOAS analysers, it is characterized in that the edge that described spectroscope is in collimation lens set optical axis and focus lens group optical axis intersection place is processed into the 45o chamfering, fillet surface is towards reference light catoptron direction.
5. the high sensitivity optical system of DOAS analyser according to claim 4 is characterized in that described transmitted light catoptron and reference light catoptron are corner cube prism.
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CN102778440A (en) * 2012-08-06 2012-11-14 南京国电环保科技有限公司 Total-reflection type optical system of flue gas concentration analyzer
CN102879365A (en) * 2012-09-21 2013-01-16 常州大学 Capillary electrophoresis fluorescence detection device
CN103558680B (en) * 2013-11-01 2015-09-30 合肥金星机电科技发展有限公司 The brought into optical device of Copper making procedure transmission spectroscopic analysis system
CN104007069B (en) * 2014-05-20 2017-04-19 中国科学院合肥物质科学研究院 Differential optical absorption spectroscopy measurement system based on off-axis paraboloid mirror
CN105445750B (en) * 2015-11-25 2018-10-02 中国科学院上海光学精密机械研究所 Doppler frequency shift frequency discriminator
CN108956406B (en) * 2018-09-21 2023-09-19 安徽农业大学 Smoke detection optical system and method thereof
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CN110554002A (en) * 2019-09-30 2019-12-10 大连艾科科技开发有限公司 Hydrogen sulfide concentration detection module, hydrogen sulfide concentration telemeter and application

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