WO2021063003A1 - Gas spectrum analyzer - Google Patents
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- WO2021063003A1 WO2021063003A1 PCT/CN2020/091143 CN2020091143W WO2021063003A1 WO 2021063003 A1 WO2021063003 A1 WO 2021063003A1 CN 2020091143 W CN2020091143 W CN 2020091143W WO 2021063003 A1 WO2021063003 A1 WO 2021063003A1
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- 238000001228 spectrum Methods 0.000 title claims abstract description 23
- 239000013307 optical fiber Substances 0.000 claims abstract description 38
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/031—Multipass arrangements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/33—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using ultraviolet light
Definitions
- N is the number of light spots on the main mirror
- L is the cavity length of the White cell
- the ultraviolet absorption rate of the above-mentioned ultraviolet optical fiber is less than 10%.
- the present invention is different from the point measurement of the traditional electrochemical sensor, and uses a small ultraviolet multiple reflection cell to realize the linear measurement within the optical path range, so that the measurement result is more representative and reliable.
- Figure 4 is a diagram of the optical path system of the multiple reflection pool
- Figure 5 is a graph of the spectral reflectance of the reflecting pool
- Figure 7 is a diagram showing the light spots of an aspherical focusing lens
- the reference signs are: ultraviolet light source 1, lens group 2, ultraviolet multiple reflection cell 3, automatic calibration cell 4, ultraviolet optical fiber 5, optical fiber spectrometer 6 and transmission control unit 7.
- the gas spectrum analyzer of the present invention is based on Beer-Lambert's law, adopts a unique ultraviolet spectrum detection structure, uses differential absorption spectroscopy technology, a combination of a small ultraviolet multiple reflection pool and a fiber optic spectrometer to realize the detection of a variety of polluted gases Real-time online monitoring.
- the small ultraviolet multiple reflection pool technology the optical path is greater than 10 meters, the reflectance is improved, the stray light is reduced, the monitoring accuracy is improved, the volume is reduced, and the sensitivity and portability requirements of unorganized emission field detection are achieved.
- the ultraviolet light source 1 passes through the lens group 2, the ultraviolet multiple reflection cell 3, the automatic calibration cell 4, the beam expansion, multiple reflection, calibration, transmission and optical fiber spectrum analysis of the ultraviolet optical fiber 5 and the optical fiber spectrometer 6, to obtain a gas spectrum analysis result;
- the transmission control unit 7 communicates with the optical fiber spectrometer 6 to realize gas data collection, analysis, processing and uploading.
- the surface temperature of the deuterium lamp is very high when the system is working.
- a multi-wing aluminum alloy shell is designed, the deuterium lamp is built in, and diffusion coordination is adopted. The method of heat transfer, and then use forced air cooling to meet the temperature requirements.
- the lens group 2 is a collimating lens group, which can also be called a beam expander.
- a beam expander is designed to improve its divergence angle.
- the loss of light intensity in the white cell is mainly caused by gas absorption and the low reflectivity of the lens, which puts high demands on the UV coating technology.
- the substrate of the concave reflector is made of K9 glass, and the polishing is as high as possible to improve the coating efficiency. Because the coating wavelength band is too wide, the method of coating enhanced aluminum film is used to increase the reflectivity, and the reflectivity of the ultraviolet 190-310nm band is about 90%, as shown in Figure 5.
- the light spot sequence diagram of the aspheric surface before and after correction in the receiving field of view is shown in Figure 7.
- the ultraviolet optical fiber 6 adopts a customized high-performance ultraviolet optical fiber, which has a small dispersion coefficient, an ultraviolet absorption rate lower than 10%, and a high mechanical strength.
- the optical fiber spectrometer 6 considers that increasing the groove density of the diffraction grating can improve the optical resolution, but at the expense of the spectral range and signal strength; reducing the slit width or fiber diameter can improve the optical resolution. Resolution, this will cause a decrease in signal strength.
- the symmetrical Czerny-Turner optical structure design can not only avoid the stray light generated by additional absorption and scattering, but also reduce the volume of the spectrometer.
- the fiber optic spectrometer 6 has a wavelength range of 185-340nm, using 2048-unit linear array ultraviolet-sensitive silicon CCD, a slit width of 50 microns, and a wavelength resolution better than 0.5nm.
- the shell of the present invention uses aluminum alloy material, and the overall volume is less than 0.2 cubic meters.
- the gas spectrum analyzer uses a multi-component DOAS filtering algorithm, which is a combination of binomial coefficient filtering, polynomial fitting filtering, and Savitzky-Golay filtering.
- the DOAS technology realizes qualitative and quantitative measurement by analyzing the "fingerprint" absorption of light radiation by different molecules. Therefore, other processes are considered disturbances and need to be removed.
- M scattering and Rayleigh scattering change slowly with the wavelength, and have a greater impact on the weakening of the light intensity; fluorescence (secondary luminescence ⁇ '> ⁇ ) and Raman scattering (anti-Stokes and Stokes rays produced)
- the basic principle of DOAS technology is to solve this problem by dividing the absorption cross section into two parts.
- I( ⁇ ) I 0 ( ⁇ ) ⁇ exp[-L ⁇ ( ⁇ ′ i ( ⁇ )c i )] ⁇ exp[-L( ⁇ ( ⁇ i,b ( ⁇ )c i )+ ⁇ R ( ⁇ )+ ⁇ M ( ⁇ ))) ⁇ A( ⁇ )
- I′ 0 ( ⁇ ) I 0 ( ⁇ ) ⁇ exp[-L( ⁇ ( ⁇ i,b ( ⁇ )c i )+ ⁇ R ( ⁇ )+ ⁇ M ( ⁇ ))] ⁇ A( ⁇ )
- the concentration can be determined by studying the characteristic absorption of light radiation by gas.
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- Biochemistry (AREA)
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Abstract
A gas spectrum analyzer, comprising an ultraviolet light source (1), a lens group (2), an ultraviolet multiple reflection cell (3), an automatic calibration cell (4), an ultraviolet optical fiber (5), an optical fiber spectrometer (6) and a transmission control unit (7). The ultraviolet light source (1), the lens group (2), the ultraviolet multiple reflection cell (3) and the automatic calibration cell (4) constitute a unique ultraviolet spectrum detection structure; the ultraviolet light source (1) sequentially undergoes beam expansion, multiple reflection, calibration, transmission and optical fiber spectrum analysis by the lens group (2), the ultraviolet multiple reflection cell (3), the automatic calibration cell (4), the ultraviolet optical fiber (5) and the optical fiber spectrometer (6) so as to obtain a gas spectrum analysis result; and the transmission control unit (7) communicates with the optical fiber spectrometer to collect, analyze, process and upload gas data. The use of the small ultraviolet multiple reflection cell (3) greatly expands the measurement optical path, achieves the miniaturization of a device while ensuring the high precision of a measurement result, and simultaneously achieves linear measurement within the optical path range so that the measurement result is more representative and more reliable. Employing a multi-component DOAS filtering algorithm solves the problems of an ultraviolet waveband environment and multi-component cross-interference, and improves monitoring precision and accuracy.
Description
本发明属于光谱分析和气体监测技术领域,具体涉及一种气体光谱分析仪。The invention belongs to the technical field of spectrum analysis and gas monitoring, and specifically relates to a gas spectrum analyzer.
随着工业及交通运输等事业的迅速发展,特别是煤和石油的大量使用,产生了大量有害物质,如烟尘、二氧化硫、氮氧化物、一氧化碳、碳氢化合物等。这些有害物质持续不断地排放到大气中,当其含量超过环境所能允许的极限并持续一定时间后,就会改变大气,特别是空气的正常组成,破坏自然的物理、化学和生态平衡体系,从而危害人们的生活、工作和健康,损害自然资源及财产、器物等,这种情况即被称为大气污染或空气污染。大气环境是人类赖以生存和发展的必要条件,保护和改善大气环境质量对于促进人类社会、经济的发展以及保障人体健康都具有十分重要的意义,而对大气环境的保护与监督有赖于大气环境监测。With the rapid development of industry and transportation, especially the large-scale use of coal and petroleum, a large number of harmful substances are produced, such as smoke, sulfur dioxide, nitrogen oxides, carbon monoxide, and hydrocarbons. These harmful substances are continuously discharged into the atmosphere. When their content exceeds the limit allowed by the environment and lasts for a certain period of time, they will change the normal composition of the atmosphere, especially the air, and destroy the natural physical, chemical and ecological balance system. Thereby endangering people's life, work and health, damaging natural resources, property, utensils, etc., this situation is called air pollution or air pollution. Atmospheric environment is a necessary condition for human survival and development. Protecting and improving the quality of the atmospheric environment is of great significance for promoting the development of human society and economy and safeguarding human health. The protection and supervision of the atmospheric environment depends on the atmospheric environment. monitor.
常用的污染源现场监测方法可以分为光学法和非光学法。光学方法包括紫外、红外光度法以及光谱分析法,非光学法主要有电化学法、色谱、质谱等。对于现场化工园区仪器,电化学法气体传感器体积小,可应用于便携现场测量,但其缺点是针对每种气体需要配置相应的气体传感器,只能进行当前位置的点式测量,并且寿命短,容易“中毒”导致测量失灵;色谱法对多组分化合物具有高效分离性,质谱法具有优越的结构鉴别和灵敏、准确的定量能力,但其时间分辨率较低、成本高、操作复杂,不宜于便携现场实时测量。国内开发的化工园区现场监测多是采用电化学法,相对于传统的电化学与气相色谱方法,光学方法具有快速,简单,准确的优点,其中紫外光谱法还具有可以同时测量多种气体组份、探测器件体积小等优点,是目前的发展趋势。而现有的光学监测仪器体积较大,或精度较低,不适合于监督性监测要求的化工园区需求,尚没有基于紫外吸收光谱技术的小型化高精度的在线气体监测产品。Commonly used on-site monitoring methods for pollution sources can be divided into optical methods and non-optical methods. Optical methods include ultraviolet, infrared photometry and spectroscopy. Non-optical methods mainly include electrochemical methods, chromatography, and mass spectrometry. For on-site chemical industry park instruments, the electrochemical gas sensor is small in size and can be applied to portable on-site measurement, but its disadvantage is that it needs to be equipped with a corresponding gas sensor for each gas. It can only perform point measurement at the current location and has a short life. It is easy to be "poisoned" and cause measurement failure; chromatography has high-efficiency separation of multi-component compounds, and mass spectrometry has superior structure identification and sensitive and accurate quantification capabilities, but its time resolution is low, cost is high, and the operation is complicated, so it is not suitable Real-time measurement in portable on-site. Most of the domestically developed chemical parks use electrochemical methods for on-site monitoring. Compared with traditional electrochemical and gas chromatography methods, optical methods have the advantages of fast, simple and accurate. Among them, ultraviolet spectroscopy can also measure multiple gas components at the same time. , The advantages of small size of the detector are the current development trend. However, the existing optical monitoring instruments are large in size or low in accuracy, and are not suitable for the needs of chemical parks that require supervisory monitoring. There is no miniaturized high-precision online gas monitoring product based on ultraviolet absorption spectroscopy technology.
差分吸收光谱法(DOAS)主要是利用吸收分子在紫外到可见光段的特征吸收来研究大气层的痕量气体成分。差分吸收光谱技术是利用空气中气体分子的窄带吸收特性来鉴别气体成分,并根据窄带吸收强度来推演气体的浓度,因此差分吸收光谱方法具有一些传统检测方法所无法比拟的优点。Differential absorption spectroscopy (DOAS) mainly uses the characteristic absorption of absorbing molecules in the ultraviolet to visible range to study the trace gas composition of the atmosphere. Differential absorption spectroscopy technology uses the narrow-band absorption characteristics of gas molecules in the air to identify gas components and derives the gas concentration based on the narrow-band absorption intensity. Therefore, the differential absorption spectroscopy method has some advantages that traditional detection methods cannot match.
发明内容Summary of the invention
本发明所要解决的技术问题是针对上述现有技术的不足,提供一种气体光谱分析仪,解决了现有的光学检测仪体积与精度不能兼容的问题,实现了体积小,精度高,安装方便,操作简单的现场实时测量。The technical problem to be solved by the present invention is to provide a gas spectrum analyzer in view of the above-mentioned shortcomings of the prior art, which solves the problem of incompatibility between the volume and accuracy of the existing optical detector, and realizes the small size, high precision and convenient installation. , Simple on-site real-time measurement.
为实现上述技术目的,本发明采取的技术方案为:In order to achieve the above technical objectives, the technical solutions adopted by the present invention are as follows:
一种气体光谱分析仪,包括紫外光源、透镜组、小型紫外多次反射池、自动校准池、紫外光纤、光纤光谱仪和传输控制单元;A gas spectrum analyzer, including an ultraviolet light source, a lens group, a small ultraviolet multiple reflection pool, an automatic calibration pool, an ultraviolet optical fiber, an optical fiber spectrometer, and a transmission control unit;
所述紫外光源、透镜组、小型紫外反射池以及自动校准池构成独特的紫外光谱探 测结构;The ultraviolet light source, lens group, small ultraviolet reflection cell and automatic calibration cell constitute a unique ultraviolet spectrum detection structure;
所述紫外光源依次经过透镜组、小型紫外多次反射池、自动校准池、紫外光纤和光纤光谱仪;The ultraviolet light source passes through a lens group, a small ultraviolet multiple reflection cell, an automatic calibration cell, an ultraviolet optical fiber, and an optical fiber spectrometer in sequence;
所述紫外光源依次经过透镜组、小型紫外多次反射池、自动校准池、紫外光纤和光纤光谱仪的扩束、多次反射、校准、传输和光纤光谱分析,得到气体光谱分析结果;The ultraviolet light source sequentially passes through the lens group, the small ultraviolet multiple reflection pool, the automatic calibration pool, the beam expansion, multiple reflection, calibration, transmission and fiber spectrum analysis of the ultraviolet fiber and the fiber spectrometer to obtain the gas spectrum analysis result;
所述的传输控住单元与光纤光谱仪通信,实现气体数据采集,分析,处理和上传。The transmission control unit communicates with the optical fiber spectrometer to realize gas data collection, analysis, processing and uploading.
为优化上述技术方案,采取的具体措施还包括:In order to optimize the above technical solutions, the specific measures taken also include:
上述的所述紫外光源为氘灯,光谱范围覆盖180~400nm的紫外光谱,发光面直径大小为Ф1mm,所述氘灯具有多翅状铝合金外壳。The above-mentioned ultraviolet light source is a deuterium lamp, the spectral range covers the ultraviolet spectrum of 180-400nm, the diameter of the light-emitting surface is Φ1mm, and the deuterium lamp has a multi-wing aluminum alloy housing.
上述的所述的透镜组为准直透镜组,采用伽利略望远镜倒置的结构型式,前组透镜为短焦距正透镜,后组透镜采用正负透镜组合形成的正透镜组,透镜均采用石英(JGS1)玻璃,并且均镀180~400nm的紫外增透膜。The above-mentioned lens group is a collimating lens group, which adopts the structure type of Galileo telescope inverted. The front lens group is a short focal length positive lens, and the rear lens group adopts a positive lens group formed by a combination of positive and negative lenses. The lenses are all made of quartz (JGS1 ) Glass, and are coated with 180-400nm UV antireflection coating.
上述的所述紫外多次反射池由曲率半径相同的凹球面反射镜A、B和C共轭放置,反射镜A为主镜,反射镜B和C为副镜,反射镜B和C并排放置;The above-mentioned ultraviolet multiple reflection pool is conjugated by concave spherical mirrors A, B and C with the same radius of curvature. Mirror A is the main mirror, mirrors B and C are secondary mirrors, and mirrors B and C are placed side by side. ;
反射镜A、B和C的基片选用K9玻璃,镀增强铝膜,对紫外190~310nm波段反射率大于90%;The substrates of the mirrors A, B and C are made of K9 glass, plated with reinforced aluminum film, and the reflectivity of the ultraviolet 190~310nm band is greater than 90%;
所述紫外多次反射池采用Whtie型,怀特池内气体吸收光程由公式计算:The ultraviolet multiple reflection cell adopts the Whtie type, and the gas absorption optical path in the White cell is calculated by the formula:
L
a=n×L=2(N+1)×L
L a =n×L=2(N+1)×L
其中,N为主镜上光斑的个数,L为怀特池的腔长;Among them, N is the number of light spots on the main mirror, and L is the cavity length of the White cell;
所述怀特池的腔长为600mm,来回反射20次,整个气体吸收光程为12m。The cavity of the White cell is 600mm long, reflects 20 times back and forth, and the entire gas absorption optical path is 12m.
上述的所述的自动校准池采用非球面单透镜为物镜,所述非球面透镜具体参数为:通光孔径Ф24mm,中心厚度5.75mm,焦距50mm,偏心率e
2=-0.59,材料为JGS1,镀180~400nm紫外增透膜。
The above-mentioned automatic calibration cell adopts an aspheric single lens as the objective lens, and the specific parameters of the aspheric lens are: clear aperture Ф24mm, center thickness 5.75mm, focal length 50mm, eccentricity e 2 =-0.59, material is JGS1, Coated with 180~400nm UV antireflection coating.
上述的所述紫外光纤紫外吸收率低于10%。The ultraviolet absorption rate of the above-mentioned ultraviolet optical fiber is less than 10%.
上述的所述光纤光谱仪采用对称式Czerny-Turner光学结构,用两个凹面反射镜取代Fastie-Ebert装置中所使用的单个反射镜;The above-mentioned optical fiber spectrometer adopts a symmetrical Czerny-Turner optical structure, and uses two concave mirrors to replace the single mirror used in the Fastie-Ebert device;
所述光纤光谱仪波长范围在185-340nm,使用2048单元线阵紫外敏感型硅CCD和1800线闪耀光栅,狭缝宽度50微米,波长分辨率优于0.5nm。The optical fiber spectrometer has a wavelength range of 185-340nm, uses a 2048-unit linear array ultraviolet-sensitive silicon CCD and a 1800-line blazed grating, a slit width of 50 microns, and a wavelength resolution better than 0.5nm.
上述的所述传输控制单元采用DSP系列单片机作为控制核心,采用RS232/RS485标准通信接口,具有无线通讯模块。The above-mentioned transmission control unit adopts DSP series single-chip microcomputer as the control core, adopts RS232/RS485 standard communication interface, and has a wireless communication module.
上述的所述气体光谱分析仪采用多组份DOAS滤波算法,所述多组份DOAS滤波算法是二项式系数滤波、多项式拟合滤波以及Savitzky-Golay滤波的结合。The aforementioned gas spectrum analyzer uses a multi-component DOAS filtering algorithm, which is a combination of binomial coefficient filtering, polynomial fitting filtering, and Savitzky-Golay filtering.
本发明具有以下有益效果:The present invention has the following beneficial effects:
1.本发明采用紫外光作为光源,紫外光不易受到水分子的吸收,可以直接对潮湿气体进行分析;1. The present invention uses ultraviolet light as the light source, which is not easily absorbed by water molecules, and can directly analyze moist gas;
2.与传统DOAS系统比较,本发明的特点是利用多次反射池技术代替了开放式光路,根据Lambet-Beer定律测定气体浓度的原理,增加探测光程可以提高检测灵敏度,利用多次反射池可使光束在小体积内完成多次反射使气体的吸收光程得到显著增加,从而实现以下优点:2. Compared with the traditional DOAS system, the present invention is characterized by the use of multiple reflection pool technology instead of the open optical path. According to the principle of the Lambet-Beer law to determine the gas concentration, the detection sensitivity can be improved by increasing the detection optical path, and the multiple reflection pool is used. The light beam can be reflected multiple times in a small volume, and the absorption path of the gas can be significantly increased, thereby achieving the following advantages:
小体积:设备体积小于0.2立方米;Small volume: the volume of the equipment is less than 0.2 cubic meters;
高精度:检出限达到100ppb以下,部分气体如SO2,NH3等检出限可达5ppb以下;High precision: the detection limit can reach below 100ppb, and the detection limit of some gases such as SO2, NH3 can reach below 5ppb;
快速响应:响应时间低于45s;Quick response: the response time is less than 45s;
多气体同时监测:可同时监测NH
3、NO
2、SO
2、CS
2、苯、甲苯、甲醛、丁二烯等多种气体浓度。
Simultaneous multi-gas monitoring: It can monitor the concentration of NH 3 , NO 2 , SO 2 , CS 2 , benzene, toluene, formaldehyde, butadiene and other gases at the same time.
3.本发明区别于传统的电化学传感器的点式测量,使用小型紫外多次反射池实现了光程范围内的线式测量,使得测量结果更具代表性,更可靠。3. The present invention is different from the point measurement of the traditional electrochemical sensor, and uses a small ultraviolet multiple reflection cell to realize the linear measurement within the optical path range, so that the measurement result is more representative and reliable.
4.本发明采用多组份DOAS滤波算法,解决紫外波段环境及多组份交叉干扰问题,提高监测精度和准确度。4. The present invention adopts a multi-component DOAS filter algorithm to solve the problems of ultraviolet band environment and multi-component cross-interference, and improve the accuracy and accuracy of monitoring.
图1为本发明一种气体光谱分析仪的模块化链接示意图;Figure 1 is a schematic diagram of modular links of a gas spectrum analyzer of the present invention;
图2为氘灯光谱图;Figure 2 is a spectrogram of a deuterium lamp;
图3为透镜组光路系统图;Figure 3 is a diagram of the optical path system of the lens group;
图4为多次反射池光路系统图;Figure 4 is a diagram of the optical path system of the multiple reflection pool;
图5为反射池光谱反射率曲线图;Figure 5 is a graph of the spectral reflectance of the reflecting pool;
图6为非球面聚焦透镜光路示意图;Fig. 6 is a schematic diagram of the optical path of an aspherical focusing lens;
图7为非球面聚焦透镜光斑点列图;Figure 7 is a diagram showing the light spots of an aspherical focusing lens;
图8为吸收光谱中宽带和窄带图;Figure 8 is a graph of broadband and narrowband in the absorption spectrum;
其中的附图标记为:紫外光源1、透镜组2、紫外多次反射池3、自动校准池4、紫外光纤5、光纤光谱仪6和传输控制单元7。The reference signs are: ultraviolet light source 1, lens group 2, ultraviolet multiple reflection cell 3, automatic calibration cell 4, ultraviolet optical fiber 5, optical fiber spectrometer 6 and transmission control unit 7.
以下结合附图对本发明的实施例作进一步详细描述。The embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings.
本发明的一种气体光谱分析仪,基于比尔-朗伯定律,采用独特的紫外光谱探测结构,利用差分吸收光谱技术,小型紫外多次反射池、光纤光谱仪相结合,实现对多种污染气体的实时在线监测。通过小型紫外多次反射池技术,使光程大于10米,提高反射率、降低杂散光,提高监测精度,减小体积,达到无组织排放现场探测的灵敏度以及便携要求。The gas spectrum analyzer of the present invention is based on Beer-Lambert's law, adopts a unique ultraviolet spectrum detection structure, uses differential absorption spectroscopy technology, a combination of a small ultraviolet multiple reflection pool and a fiber optic spectrometer to realize the detection of a variety of polluted gases Real-time online monitoring. Through the small ultraviolet multiple reflection pool technology, the optical path is greater than 10 meters, the reflectance is improved, the stray light is reduced, the monitoring accuracy is improved, the volume is reduced, and the sensitivity and portability requirements of unorganized emission field detection are achieved.
通过结合二项式系数滤波、多项式拟合滤波以及Savitzky-Golay滤波等多种数字滤波方法的Multi-Filter技术,根据气体吸收特征,采用多组份DOAS滤波算法,解决紫外波段环境及多组份交叉干扰问题,提高监测精度和准确度。Through the Multi-Filter technology combining binomial coefficient filtering, polynomial fitting filtering and Savitzky-Golay filtering and other digital filtering methods, according to the gas absorption characteristics, the multi-component DOAS filtering algorithm is adopted to solve the ultraviolet band environment and multi-component Cross-interference issues improve the accuracy and accuracy of monitoring.
如图1所示,本发明的一种气体光谱分析仪,包括紫外光源1、透镜组2、紫外多次反射池3、自动校准池4、紫外光纤5、光纤光谱仪6和传输控制单元7;As shown in Figure 1, a gas spectrum analyzer of the present invention includes an ultraviolet light source 1, a lens group 2, an ultraviolet multiple reflection cell 3, an automatic calibration cell 4, an ultraviolet optical fiber 5, an optical fiber spectrometer 6 and a transmission control unit 7;
其中,所述紫外光源1、透镜组2、紫外反射池3以及自动校准池4构成独特的紫外光谱探测结构;Wherein, the ultraviolet light source 1, the lens group 2, the ultraviolet reflection cell 3, and the automatic calibration cell 4 constitute a unique ultraviolet spectrum detection structure;
所述紫外光源1依次经过透镜组2、紫外多次反射池3、自动校准池4、紫外光纤5和光纤光谱仪6;The ultraviolet light source 1 passes through the lens group 2, the ultraviolet multiple reflection cell 3, the automatic calibration cell 4, the ultraviolet optical fiber 5, and the optical fiber spectrometer 6 in sequence;
所述紫外光源1依次经过透镜组2、紫外多次反射池3、自动校准池4、紫外光纤5和光纤光谱仪6的扩束、多次反射、校准、传输和光纤光谱分析,得到气体光谱分析结果;The ultraviolet light source 1 passes through the lens group 2, the ultraviolet multiple reflection cell 3, the automatic calibration cell 4, the beam expansion, multiple reflection, calibration, transmission and optical fiber spectrum analysis of the ultraviolet optical fiber 5 and the optical fiber spectrometer 6, to obtain a gas spectrum analysis result;
所述的传输控住单元7与光纤光谱仪6通信,实现气体数据采集,分析,处理和上传。The transmission control unit 7 communicates with the optical fiber spectrometer 6 to realize gas data collection, analysis, processing and uploading.
如图2所示,实施例中,所述紫外光源1为氘灯,光谱范围覆盖180~400nm的紫外光谱,发光面直径大小约为Ф1mm,所述氘灯具有多翅状铝合金外壳。As shown in FIG. 2, in the embodiment, the ultraviolet light source 1 is a deuterium lamp with a spectral range covering the ultraviolet spectrum of 180-400 nm, and the diameter of the light-emitting surface is about Φ1 mm. The deuterium lamp has a multi-wing aluminum alloy housing.
系统工作时氘灯表面温度很高,为了保证氘灯工作时的可靠性、稳定性并延长氘灯的工作寿命,设计了多翅状铝合金外壳,将氘灯内置其中,采用了扩散配合传导的热传递方式,然后利用强制风冷来满足温度要求。The surface temperature of the deuterium lamp is very high when the system is working. In order to ensure the reliability and stability of the deuterium lamp and prolong the working life of the deuterium lamp, a multi-wing aluminum alloy shell is designed, the deuterium lamp is built in, and diffusion coordination is adopted. The method of heat transfer, and then use forced air cooling to meet the temperature requirements.
设计的装置可以调整氘灯发光面位置并能进行固定。一方面提高氘灯的散热效率,另一方面,散热装置还具有减少杂散光,保护光源系统的作用。The designed device can adjust the position of the light-emitting surface of the deuterium lamp and can be fixed. On the one hand, the heat dissipation efficiency of the deuterium lamp is improved. On the other hand, the heat sink also has the function of reducing stray light and protecting the light source system.
实施例中,所述的透镜组2为准直透镜组,也可称作光束扩束器。为了避免氘灯光束的发散角过大造成的光斑发散,提高光束的传输距离,即降低光束发散角,提高准直性,设计光束扩束器来改善其发散角。In the embodiment, the lens group 2 is a collimating lens group, which can also be called a beam expander. In order to avoid the divergence of the spot caused by the excessively large divergence angle of the deuterium lamp beam, and to increase the transmission distance of the beam, that is, to reduce the divergence angle of the beam and improve the collimation, a beam expander is designed to improve its divergence angle.
采用伽利略望远镜倒置的结构型式,前组透镜由一块短焦距正透镜构成,将氘灯的发散光束先进行初步准直,并保证一定的物方孔径角,尽可能多的接收光能量,后组透镜采用正负透镜组合形成的正透镜组用来矫正球差。通过控制三块透镜的彼此间距以及各自镜片的厚度,可以使得氘灯光束被较好的准直,其发散角大约控制在1°左右,如图3所示。The Galileo telescope is inverted. The front lens is composed of a short focal length positive lens. The divergent beam of the deuterium lamp is initially collimated, and a certain object aperture angle is ensured to receive as much light energy as possible. The lens adopts a positive lens group formed by a combination of positive and negative lenses to correct spherical aberration. By controlling the distance between the three lenses and the thickness of each lens, the beam of the deuterium lamp can be better collimated, and its divergence angle is controlled at about 1°, as shown in Figure 3.
所述透镜均采用石英(JGS1)玻璃,并且均镀180~400nm的紫外增透膜,从而更好地提高紫外光束的透过率。The lenses are all made of quartz (JGS1) glass, and are coated with a 180-400nm ultraviolet antireflection coating, so as to better improve the transmittance of the ultraviolet light beam.
如图4所示,实施例中,所述紫外多次反射池3由曲率半径相同的凹球面反射镜A、B和C共轭放置,反射镜A为主镜,反射镜B和C为副镜,反射镜B和C并排放置;As shown in FIG. 4, in the embodiment, the ultraviolet multiple reflection pool 3 is conjugated by concave spherical mirrors A, B and C with the same radius of curvature. The mirror A is the primary mirror, and the mirrors B and C are the secondary mirrors. Mirrors, mirrors B and C are placed side by side;
在怀特池中光强的损失主要是由气体吸收和镜片的反射率不高造成,对紫外镀膜技术提出很高要求。凹面反射镜的基片选用K9玻璃,抛光尽可能高,便于提高镀膜效率。由于镀膜波段过宽,采用镀增强铝膜的方式来提高反射率,其对紫外190~310nm波段反射率约为90%,如图5所示。The loss of light intensity in the white cell is mainly caused by gas absorption and the low reflectivity of the lens, which puts high demands on the UV coating technology. The substrate of the concave reflector is made of K9 glass, and the polishing is as high as possible to improve the coating efficiency. Because the coating wavelength band is too wide, the method of coating enhanced aluminum film is used to increase the reflectivity, and the reflectivity of the ultraviolet 190-310nm band is about 90%, as shown in Figure 5.
所述紫外多次反射池采用Whtie型,怀特池内气体吸收光程由公式计算:The ultraviolet multiple reflection cell adopts the Whtie type, and the gas absorption optical path in the White cell is calculated by the formula:
L
a=n×L=2(N+1)×L
L a =n×L=2(N+1)×L
其中,N为主镜上光斑的个数,L为怀特池的腔长;Among them, N is the number of light spots on the main mirror, and L is the cavity length of the White cell;
由于大气环境中的有毒气体含量都在ppb~ppm量级,为了降低仪器的检测下限使之能够满足对痕量气体检测的要求,根据Lambet-Beer定律测定气体浓度的原理,增加探测光程可以提高检测灵敏度,利用多次反射池可使光束在小体积内完成多次反射使气体的吸收光程得到显著增加。考虑到系统便携及所测气体要求,所述怀特池的腔长为600mm,来回反射20次,整个气体吸收光程为12m,由公式可得N=9。。Since the toxic gas content in the atmosphere is in the ppb~ppm order, in order to reduce the lower detection limit of the instrument so that it can meet the requirements for trace gas detection, according to the principle of Lambet-Beer law to determine the gas concentration, the detection optical path can be increased. Improve the detection sensitivity, the use of multiple reflection cells can make the beam multiple reflections in a small volume, so that the gas absorption path length can be significantly increased. Taking into account the portability of the system and the requirements of the gas to be measured, the cavity length of the White cell is 600mm, reflected 20 times back and forth, and the entire gas absorption optical path is 12m, and N=9 can be obtained from the formula. .
实施例中,所述的自动校准池4采用非球面单透镜为物镜,作为简单的物镜形成耦合光纤的聚焦系统,解决了由于出射光束本身发散角较大,轴外像差过大,很难形成较小光斑,从而导致能量损失的问题。In the embodiment, the auto-calibration cell 4 adopts an aspheric single lens as the objective lens, which is a simple objective lens to form a focusing system of the coupled fiber, which solves the problem that due to the large divergence angle of the outgoing beam itself, the off-axis aberration is too large. A small spot is formed, which leads to the problem of energy loss.
所述非球面透镜具体参数为:通光孔径Ф24mm,中心厚度5.75mm,焦距50mm,偏心率e
2=-0.59,材料为JGS1,镀180~400nm紫外增透膜,如图6所示。非球面在接收视场内修正前后的光斑点列图如图7所示。
The specific parameters of the aspheric lens are: a clear aperture of Ф24mm, a center thickness of 5.75mm, a focal length of 50mm, an eccentricity e 2 =-0.59, a material of JGS1, and a 180-400nm UV antireflection coating, as shown in FIG. 6. The light spot sequence diagram of the aspheric surface before and after correction in the receiving field of view is shown in Figure 7.
实施例中,所述紫外光纤6,采用定制高性能紫外光纤,色散系数小,紫外吸收率低 于10%,机械强度高。In the embodiment, the ultraviolet optical fiber 6 adopts a customized high-performance ultraviolet optical fiber, which has a small dispersion coefficient, an ultraviolet absorption rate lower than 10%, and a high mechanical strength.
实施例中,所述的光纤光谱仪6,考虑到增加衍射光栅的沟槽密度可以提高光学分辨率,但是要以牺牲光谱范围和信号强度为代价的;减小狭缝宽度或光纤直径可以提高光学分辨率,这样却要造成信号强度的减弱。通过研究污染气体在紫外波段的吸收特性,采用对称式Czerny-Turner光学结构设计,既可以避免额外的吸收和散射产生的杂散光,又减小谱仪体积。该光纤光谱仪6波长范围在185-340nm,使用2048单元线阵紫外敏感型硅CCD,狭缝宽度50微米,波长分辨率优于0.5nm。In the embodiment, the optical fiber spectrometer 6 considers that increasing the groove density of the diffraction grating can improve the optical resolution, but at the expense of the spectral range and signal strength; reducing the slit width or fiber diameter can improve the optical resolution. Resolution, this will cause a decrease in signal strength. By studying the absorption characteristics of the polluted gas in the ultraviolet band, the symmetrical Czerny-Turner optical structure design can not only avoid the stray light generated by additional absorption and scattering, but also reduce the volume of the spectrometer. The fiber optic spectrometer 6 has a wavelength range of 185-340nm, using 2048-unit linear array ultraviolet-sensitive silicon CCD, a slit width of 50 microns, and a wavelength resolution better than 0.5nm.
实施例中,所述传输控制单元7采用DSP系列单片机作为控制核心,采用RS232/RS485标准通信接口,具有无线通讯模块,能直接将采集到的数据上传到服务器平台。In the embodiment, the transmission control unit 7 adopts DSP series single-chip microcomputer as the control core, adopts RS232/RS485 standard communication interface, has a wireless communication module, and can directly upload the collected data to the server platform.
本发明外壳使用铝合金材料,整体体积小于0.2立方米。The shell of the present invention uses aluminum alloy material, and the overall volume is less than 0.2 cubic meters.
实施例中,所述气体光谱分析仪采用多组份DOAS滤波算法,所述多组份DOAS滤波算法是二项式系数滤波、多项式拟合滤波以及Savitzky-Golay滤波的结合。In an embodiment, the gas spectrum analyzer uses a multi-component DOAS filtering algorithm, which is a combination of binomial coefficient filtering, polynomial fitting filtering, and Savitzky-Golay filtering.
所述的气体光谱分析仪使用的DOAS技术,在实际气体测量中消光除了分子的吸收,还有散射现象,当光束通过待测量气团时,会遇到瑞利散射,米散射和拉曼散射的影响,其中瑞利和拉曼散射是由于气体分子造成的,而米散射是由气溶胶颗粒、或烟尘所造成。因而朗伯-比尔定律不能直接用于实际大气测量。The DOAS technology used in the gas spectrum analyzer, in the actual gas measurement, in addition to molecular absorption, there are also scattering phenomena. When the beam passes through the gas mass to be measured, it will encounter Rayleigh scattering, Mie scattering and Raman scattering. Among them, Rayleigh and Raman scattering are caused by gas molecules, while M scattering is caused by aerosol particles or smoke. Therefore, Lambert-Beer law cannot be directly used for actual atmospheric measurement.
在实例中DOAS技术是通过分析不同分子对光辐射的“指纹”吸收实现定性和定量测量,因此其它的作用过程被认为是扰动,需要去除。米散射和瑞利散射都是随波长作慢变化的,对光强的削弱影响较大;荧光(二次发光λ′>λ)和拉曼散射(产生的反斯托克斯线和斯托克斯线分别为λ′=λ±λv)取决于分子能级的内部结构,对光强的减弱影响很小。因此,可以描述为:In the example, the DOAS technology realizes qualitative and quantitative measurement by analyzing the "fingerprint" absorption of light radiation by different molecules. Therefore, other processes are considered disturbances and need to be removed. Both M scattering and Rayleigh scattering change slowly with the wavelength, and have a greater impact on the weakening of the light intensity; fluorescence (secondary luminescence λ'>λ) and Raman scattering (anti-Stokes and Stokes rays produced) The bars are respectively λ'=λ±λv) depends on the internal structure of the molecular energy level, and has little effect on the weakening of light intensity. Therefore, it can be described as:
式中,I
0(λ)为发射光强;I(λ)为经过大气吸收后的接收光强;σ
i(λ)是第i种气体分子的吸收截面;L是光程;c
i是第i种气体分子在光程上的平均浓度。ε
R(λ)和ε
M分别代表瑞利散射、米散射造成的光强衰减。
In the formula, I 0 (λ) is the emitted light intensity; I (λ) is the received light intensity after atmospheric absorption; σ i (λ) is the absorption cross section of the i-th gas molecule; L is the optical path; c i is The average concentration of the i-th gas molecule in the optical path. ε R (λ) and ε M represent the light intensity attenuation caused by Rayleigh scattering and M scattering, respectively.
DOAS技术的基本原理是通过将吸收截面分为两部分来解决这个问题的。The basic principle of DOAS technology is to solve this problem by dividing the absorption cross section into two parts.
σ
i(λ)=σ
i,b(λ)+σ′
i(λ)
σ i (λ)=σ i,b (λ)+σ′ i (λ)
式中σ
i,b(λ)随波长λ慢变化,σ′
i(λ)是随波长λ呈快变化的部分。吸收光谱宽带和窄带部分如图8所示。
Wherein σ i, b (λ) slowly varying with wavelength λ, σ 'i (λ) with wavelength [lambda] is a rapid change in shape portion. The broadband and narrowband parts of the absorption spectrum are shown in Figure 8.
截面分为两部分后,可以表示为:After the section is divided into two parts, it can be expressed as:
I(λ)=I
0(λ)·exp[-L∑(σ′
i(λ)c
i)]·exp[-L(∑(σ
i,b(λ)c
i)+ε
R(λ)+ε
M(λ))]·A(λ)
I(λ)=I 0 (λ)·exp[-L∑(σ′ i (λ)c i )]·exp[-L(∑(σ i,b (λ)c i )+ε R (λ )+ε M (λ)))·A(λ)
式中,第一个指数函数描述了痕量气体的差分吸收;第二项是大气中痕量气体慢变化吸收以及瑞利和米散射的影响,衰减因子A(λ)描述了光学传输随波长的慢变化。我们定义变量I′
0(λ)表示不含差分吸收的光强,也就是慢变化部分:
In the formula, the first exponential function describes the differential absorption of trace gases; the second term is the slow-varying absorption of trace gases in the atmosphere and the effects of Rayleigh and M scattering, and the attenuation factor A(λ) describes the optical transmission with wavelength Slow change. We define the variable I′ 0 (λ) to represent the light intensity without differential absorption, that is, the slow-changing part:
I′
0(λ)=I
0(λ)·exp[-L(∑(σ
i,b(λ)c
i)+ε
R(λ)+ε
M(λ))]·A(λ)
I′ 0 (λ)=I 0 (λ)·exp[-L(∑(σ i,b (λ)c i )+ε R (λ)+ε M (λ))]·A(λ)
则等式变为:Then the equation becomes:
I(λ)=I′
0(λ)×exp[-L∑(σ′
i(λ)c
i)]
I(λ)=I′ 0 (λ)×exp[-L∑(σ′ i (λ)c i )]
I(λ)只包含了窄带吸收结构;I′
0的光强被插值到某一种类足够窄的吸收线中。σ(λ)通常在实验室进行测量(或从文献中获得),然后经过数值滤波得到差分吸收截面σ′(λ)。得到差分光学密度:
I (λ) of the absorbent structure contains only a narrow band; I '0 is interpolated intensity to a certain kind of a sufficiently narrow absorption line. σ(λ) is usually measured in the laboratory (or obtained from the literature), and then numerically filtered to obtain the differential absorption cross-section σ'(λ). Obtain the differential optical density:
D′=log(I′
0(λ)/I(λ))=L∑(σ′
i(λ)c
i)
D′=log(I′ 0 (λ)/I(λ))=L∑(σ′ i (λ)c i )
已知L,从D和σ(λ)中推导出D′和σ′(λ),就可以计算出某种分子的浓度。Knowing L and deriving D'and σ'(λ) from D and σ(λ), the concentration of a certain molecule can be calculated.
由于气体分子具有各自的特征吸收截面,通过研究气体对光辐射的特征吸收可以确定其浓度。Since gas molecules have their own characteristic absorption cross sections, the concentration can be determined by studying the characteristic absorption of light radiation by gas.
实施例中,所述的气体光谱分析仪,在监测范围涵盖波长185-340nm的近紫外光谱区,支持同时监测多种气体含量。In an embodiment, the gas spectrum analyzer has a monitoring range covering the near-ultraviolet spectrum with a wavelength of 185-340 nm, and supports simultaneous monitoring of the content of multiple gases.
本发明的气体光谱分析仪,采用小型紫外多次反射池4,既增加了光程又减小了体积,使得设备结构紧凑,外壳体积小,便于安装和运输。The gas spectrum analyzer of the present invention adopts a small ultraviolet multiple reflection pool 4, which not only increases the optical path but also reduces the volume, so that the device has a compact structure, a small enclosure, and is convenient for installation and transportation.
以上仅是本发明的优选实施方式,本发明的保护范围并不仅局限于上述实施例,凡属于本发明思路下的技术方案均属于本发明的保护范围。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理前提下的若干改进和润饰,应视为本发明的保护范围。The above are only the preferred embodiments of the present invention, and the protection scope of the present invention is not limited to the above-mentioned embodiments. All technical solutions under the idea of the present invention belong to the protection scope of the present invention. It should be pointed out that for those of ordinary skill in the art, several improvements and modifications without departing from the principle of the present invention should be regarded as the protection scope of the present invention.
Claims (9)
- 一种气体光谱分析仪,其特征在于:包括紫外光源(1)、透镜组(2)、小型紫外多次反射池(3)、自动校准池(4)、紫外光纤(5)、光纤光谱仪(6)和传输控制单元(7);A gas spectrum analyzer, which is characterized in that it includes an ultraviolet light source (1), a lens group (2), a small ultraviolet multiple reflection cell (3), an automatic calibration cell (4), an ultraviolet optical fiber (5), and an optical fiber spectrometer ( 6) and transmission control unit (7);所述紫外光源(1)、透镜组(2)、小型紫外多次反射池(3)和自动校准池(4)构成紫外光谱探测结构;The ultraviolet light source (1), lens group (2), small ultraviolet multiple reflection cell (3) and automatic calibration cell (4) constitute an ultraviolet spectrum detection structure;所述紫外光源(1)依次经过透镜组(2)、小型紫外多次反射池(3)、自动校准池(4)、紫外光纤(5)和光纤光谱仪(6);The ultraviolet light source (1) sequentially passes through the lens group (2), the small ultraviolet multiple reflection cell (3), the automatic calibration cell (4), the ultraviolet optical fiber (5) and the optical fiber spectrometer (6);所述紫外光源(1)依次经过透镜组(2)、小型紫外多次反射池(3)、自动校准池(4)、紫外光纤(5)和光纤光谱仪(6)的扩束、多次反射、校准、传输和光纤光谱分析,得到气体光谱分析结果;The ultraviolet light source (1) sequentially passes through the beam expansion and multiple reflections of the lens group (2), the small ultraviolet multiple reflection pool (3), the automatic calibration pool (4), the ultraviolet optical fiber (5) and the optical fiber spectrometer (6) , Calibration, transmission and optical fiber spectrum analysis to obtain gas spectrum analysis results;所述的传输控住单元(7)与光纤光谱仪(6)通信,实现气体数据采集,分析,处理和上传。The transmission control unit (7) communicates with the optical fiber spectrometer (6) to realize gas data collection, analysis, processing and uploading.
- 根据权利要求1所述的一种气体光谱分析仪,其特征在于:A gas spectrum analyzer according to claim 1, characterized in that:所述紫外光源(1)为氘灯,光谱范围覆盖180~400nm的紫外光谱,发光面直径大小为Ф1mm,所述氘灯具有多翅状铝合金外壳。The ultraviolet light source (1) is a deuterium lamp with a spectral range covering an ultraviolet spectrum of 180-400 nm, a diameter of a light-emitting surface of Φ1 mm, and the deuterium lamp has a multi-wing aluminum alloy housing.
- 根据权利要求1所述的一种气体光谱分析仪,其特征在于:A gas spectrum analyzer according to claim 1, characterized in that:所述的透镜组(2)为准直透镜组,设有光束扩束器来改善其发散角;The lens group (2) is a collimating lens group with a beam expander to improve its divergence angle;所述所述的透镜组(2)采用伽利略望远镜倒置的结构型式,前组透镜由一块短焦距正透镜构成,将氘灯的发散光束先进行初步准直,并保证一定的物方孔径角,尽可能多的接收光能量,后组透镜采用正负透镜组合形成的正透镜组用来矫正球差;通过控制三块透镜的彼此间距以及各自镜片的厚度,使得氘灯光束被较好的准直,其发散角控制在1°左右。The said lens group (2) adopts the structure type of Galileo telescope inverted, and the front group lens is composed of a short focal length positive lens, which preliminarily collimates the divergent light beam of the deuterium lamp and ensures a certain aperture angle of the object. To receive as much light energy as possible, the rear lens group adopts a positive lens group formed by a combination of positive and negative lenses to correct spherical aberration; by controlling the distance between the three lenses and the thickness of each lens, the beam of the deuterium lamp can be better collimated Straight, its divergence angle is controlled at about 1°.所述透镜均采用石英玻璃,并且均镀180~400nm的紫外增透膜。The lenses are all made of quartz glass, and are coated with a 180-400nm ultraviolet antireflection film.
- 根据权利要求1所述的一种气体光谱分析仪,其特征在于:A gas spectrum analyzer according to claim 1, characterized in that:所述紫外多次反射池(3)由曲率半径相同的凹球面反射镜A、B和C共轭放置,反射镜A为主镜,反射镜B和C为副镜,反射镜B和C并排放置;The ultraviolet multiple reflection pool (3) is conjugated by concave spherical mirrors A, B and C with the same radius of curvature. The mirror A is the main mirror, the mirrors B and C are the secondary mirrors, and the mirrors B and C are side by side. place;反射镜A、B和C的基片选用K9玻璃,镀增强铝膜,对紫外190~310nm波段反射率大于90%;The substrates of the mirrors A, B and C are made of K9 glass, plated with reinforced aluminum film, and the reflectivity of the ultraviolet 190~310nm band is greater than 90%;所述紫外多次反射池采用Whtie型,怀特池内气体吸收光程由公式计算:The ultraviolet multiple reflection cell adopts the Whtie type, and the gas absorption optical path in the White cell is calculated by the formula:L a=n×L=2(N+1)×L L a =n×L=2(N+1)×L其中,N为主镜上光斑的个数,L为怀特池的腔长;Among them, N is the number of light spots on the main mirror, and L is the cavity length of the White cell;所述怀特池的腔长为600mm,来回反射20次,整个气体吸收光程为12m。The cavity of the White cell is 600mm long, reflects 20 times back and forth, and the entire gas absorption optical path is 12m.
- 根据权利要求1所述的一种气体光谱分析仪,其特征在于:A gas spectrum analyzer according to claim 1, characterized in that:所述的自动校准池(4)采用非球面单透镜为物镜,所述非球面透镜具体参数为:通光孔径Ф24mm,中心厚度5.75mm,焦距50mm,偏心率e 2=-0.59,材料为JGS1,镀180~400nm紫外增透膜。 The automatic calibration cell (4) adopts an aspheric single lens as the objective lens. The specific parameters of the aspheric lens are: clear aperture Ф24mm, center thickness 5.75mm, focal length 50mm, eccentricity e 2 =-0.59, and the material is JGS1 , Coated with 180~400nm UV antireflection coating.
- 根据权利要求1所述的一种气体光谱分析仪,其特征在于:A gas spectrum analyzer according to claim 1, characterized in that:所述紫外光纤(6)紫外吸收率低于10%。The ultraviolet absorption rate of the ultraviolet optical fiber (6) is lower than 10%.
- 根据权利要求1所述的一种气体光谱分析仪,其特征在于:A gas spectrum analyzer according to claim 1, characterized in that:所述光纤光谱仪(6)采用对称式Czerny-Turner光学结构,用两个凹面反射镜取代Fastie-Ebert装置中所使用的单个反射镜;The optical fiber spectrometer (6) adopts a symmetrical Czerny-Turner optical structure, and replaces a single reflector used in the Fastie-Ebert device with two concave reflectors;所述光纤光谱仪(6)波长范围在185-340nm,使用2048单元线阵紫外敏感型硅CCD和1800线闪耀光栅,狭缝宽度50微米,波长分辨率优于0.5nm。The optical fiber spectrometer (6) has a wavelength range of 185-340 nm, uses 2048-unit linear ultraviolet-sensitive silicon CCD and 1800 line blazed grating, the slit width is 50 microns, and the wavelength resolution is better than 0.5 nm.
- 根据权利要求1所述的一种气体光谱分析仪,其特征在于:A gas spectrum analyzer according to claim 1, characterized in that:所述传输控制单元(7)采用DSP系列单片机作为控制核心,采用RS232/RS485标准通信接口,具有无线通讯模块。The transmission control unit (7) adopts DSP series single-chip microcomputer as the control core, adopts RS232/RS485 standard communication interface, and has a wireless communication module.
- 根据权利要求1所述的一种气体光谱分析仪,其特征在于:A gas spectrum analyzer according to claim 1, characterized in that:所述气体光谱分析仪采用多组份DOAS滤波算法,所述多组份DOAS滤波算法是二项式系数滤波、多项式拟合滤波以及Savitzky-Golay滤波的结合。The gas spectrum analyzer adopts a multi-component DOAS filtering algorithm, which is a combination of binomial coefficient filtering, polynomial fitting filtering, and Savitzky-Golay filtering.
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