CN102761995B - 一种半导体电热膜制备方法 - Google Patents
一种半导体电热膜制备方法 Download PDFInfo
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- CN102761995B CN102761995B CN201210250016.9A CN201210250016A CN102761995B CN 102761995 B CN102761995 B CN 102761995B CN 201210250016 A CN201210250016 A CN 201210250016A CN 102761995 B CN102761995 B CN 102761995B
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 30
- 238000002360 preparation method Methods 0.000 title claims abstract description 22
- 239000012528 membrane Substances 0.000 title abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 44
- 239000000463 material Substances 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 28
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims abstract description 8
- 238000001816 cooling Methods 0.000 claims abstract description 6
- 239000005388 borosilicate glass Substances 0.000 claims abstract description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000006243 chemical reaction Methods 0.000 claims abstract description 4
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 claims abstract description 4
- YONPGGFAJWQGJC-UHFFFAOYSA-K titanium(iii) chloride Chemical compound Cl[Ti](Cl)Cl YONPGGFAJWQGJC-UHFFFAOYSA-K 0.000 claims abstract description 4
- 239000000243 solution Substances 0.000 claims description 15
- 238000005245 sintering Methods 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 7
- 238000005507 spraying Methods 0.000 claims description 7
- 238000000889 atomisation Methods 0.000 claims description 5
- 229910052571 earthenware Inorganic materials 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims description 3
- FAPDDOBMIUGHIN-UHFFFAOYSA-K antimony trichloride Chemical compound Cl[Sb](Cl)Cl FAPDDOBMIUGHIN-UHFFFAOYSA-K 0.000 claims description 3
- 235000014121 butter Nutrition 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 239000000470 constituent Substances 0.000 claims description 3
- 239000012153 distilled water Substances 0.000 claims description 3
- 239000002003 electrode paste Substances 0.000 claims description 3
- 230000036571 hydration Effects 0.000 claims description 3
- 238000006703 hydration reaction Methods 0.000 claims description 3
- 239000011259 mixed solution Substances 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 238000003756 stirring Methods 0.000 claims description 3
- 238000010792 warming Methods 0.000 claims description 3
- 239000005995 Aluminium silicate Substances 0.000 claims description 2
- 235000012211 aluminium silicate Nutrition 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 239000000110 cooling liquid Substances 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims description 2
- NLYAJNPCOHFWQQ-UHFFFAOYSA-N kaolin Chemical compound O.O.O=[Al]O[Si](=O)O[Si](=O)O[Al]=O NLYAJNPCOHFWQQ-UHFFFAOYSA-N 0.000 claims description 2
- 239000004408 titanium dioxide Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 abstract description 3
- 238000002834 transmittance Methods 0.000 abstract description 3
- 229910021627 Tin(IV) chloride Inorganic materials 0.000 abstract 1
- DAMJCWMGELCIMI-UHFFFAOYSA-N benzyl n-(2-oxopyrrolidin-3-yl)carbamate Chemical compound C=1C=CC=CC=1COC(=O)NC1CCNC1=O DAMJCWMGELCIMI-UHFFFAOYSA-N 0.000 abstract 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 229910001385 heavy metal Inorganic materials 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 238000010923 batch production Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- WKBPZYKAUNRMKP-UHFFFAOYSA-N 1-[2-(2,4-dichlorophenyl)pentyl]1,2,4-triazole Chemical compound C=1C=C(Cl)C=C(Cl)C=1C(CCC)CN1C=NC=N1 WKBPZYKAUNRMKP-UHFFFAOYSA-N 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012467 final product Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000011031 topaz Substances 0.000 description 2
- 229910052853 topaz Inorganic materials 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000005485 electric heating Methods 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000004801 process automation Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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Abstract
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Application Number | Priority Date | Filing Date | Title |
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CN201210250016.9A CN102761995B (zh) | 2012-07-19 | 2012-07-19 | 一种半导体电热膜制备方法 |
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CN201210250016.9A CN102761995B (zh) | 2012-07-19 | 2012-07-19 | 一种半导体电热膜制备方法 |
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CN102761995A CN102761995A (zh) | 2012-10-31 |
CN102761995B true CN102761995B (zh) | 2014-04-16 |
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CN201210250016.9A Expired - Fee Related CN102761995B (zh) | 2012-07-19 | 2012-07-19 | 一种半导体电热膜制备方法 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104486849A (zh) * | 2014-12-10 | 2015-04-01 | 罗敏 | 一种用于制备半导体电热膜的饱和溶液 |
CN104529181B (zh) * | 2014-12-31 | 2017-05-10 | 安徽中科天虹纳米电热膜设备研发有限公司 | 电热膜板的开放式生产方法及生产设备 |
CN104837224B (zh) * | 2015-04-04 | 2018-04-20 | 西南民族大学 | 高温电热膜的制备工艺 |
CN106358325A (zh) * | 2016-08-30 | 2017-01-25 | 丁玉琴 | 一种耐高温强附着型电热膜的制备方法 |
CN107172727A (zh) * | 2017-05-31 | 2017-09-15 | 广西泰亿诺新能源有限公司 | 纳米电热膜膜液配方及制备方法及电热管的制备方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN2467987Y (zh) * | 2000-11-08 | 2001-12-26 | 鹤壁市智胜科技有限公司 | 可控气氛箱式高温炉 |
CN1413064A (zh) * | 2001-10-16 | 2003-04-23 | 吴远浦 | 一种纳米电热膜的制造方法和用纳米电热膜制成的散热板 |
CN100521835C (zh) * | 2005-12-29 | 2009-07-29 | 梁敏玲 | 电阻膜加热装置的制造方法及所形成的电阻膜加热装置 |
CN100585001C (zh) * | 2007-12-27 | 2010-01-27 | 北京石油化工学院 | 火焰喷雾热分解薄膜制备设备 |
CN102131316B (zh) * | 2010-09-28 | 2013-03-06 | 施吉承 | 电热膜发热管导电薄膜溶液 |
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Effective date of registration: 20201021 Address after: 7 / F, No.3, Lilin Industrial Zone, Baihua community, Guangming Street, Guangming New District, Shenzhen City, Guangdong Province Patentee after: SHENZHEN YUNMO TECHNOLOGY Co.,Ltd. Address before: 518103 Meiying (Phoenix) Zhihui Innovation Park R&D Building, No. 3 Fenghuang Xingye Road, Fuyong Street, Baoan District, Shenzhen City, Guangdong Province, 1 Building, 5 Floors Patentee before: SHENZHEN ROCKPILE THERMAL TECHNOLOGY Co.,Ltd. |
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Effective date of registration: 20210118 Address after: Room 202, 18 Bass Township Garden, Songling Town, Wujiang District, Suzhou City, Jiangsu Province Patentee after: Gao Zhumei Address before: 518000 7th floor, No.3, Lilin Industrial Zone, Baihua community, Guangming Street, Guangming New District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN YUNMO TECHNOLOGY Co.,Ltd. |
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