CN102754217B - 吸光基材的织构化表面 - Google Patents
吸光基材的织构化表面 Download PDFInfo
- Publication number
- CN102754217B CN102754217B CN201080052042.XA CN201080052042A CN102754217B CN 102754217 B CN102754217 B CN 102754217B CN 201080052042 A CN201080052042 A CN 201080052042A CN 102754217 B CN102754217 B CN 102754217B
- Authority
- CN
- China
- Prior art keywords
- particles
- substrate
- etching
- coating
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F77/00—Constructional details of devices covered by this subclass
- H10F77/70—Surface textures, e.g. pyramid structures
- H10F77/707—Surface textures, e.g. pyramid structures of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Photovoltaic Devices (AREA)
- Surface Treatment Of Glass (AREA)
- Weting (AREA)
- Drying Of Semiconductors (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US26187509P | 2009-11-17 | 2009-11-17 | |
| US61/261,875 | 2009-11-17 | ||
| PCT/US2010/055772 WO2011062791A2 (en) | 2009-11-17 | 2010-11-08 | Texturing surface of light-absorbing substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102754217A CN102754217A (zh) | 2012-10-24 |
| CN102754217B true CN102754217B (zh) | 2016-07-06 |
Family
ID=43901496
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201080052042.XA Expired - Fee Related CN102754217B (zh) | 2009-11-17 | 2010-11-08 | 吸光基材的织构化表面 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9034684B2 (enExample) |
| EP (1) | EP2502279B1 (enExample) |
| JP (1) | JP5690348B2 (enExample) |
| CN (1) | CN102754217B (enExample) |
| WO (1) | WO2011062791A2 (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8729798B2 (en) | 2008-03-21 | 2014-05-20 | Alliance For Sustainable Energy, Llc | Anti-reflective nanoporous silicon for efficient hydrogen production |
| US8815104B2 (en) * | 2008-03-21 | 2014-08-26 | Alliance For Sustainable Energy, Llc | Copper-assisted, anti-reflection etching of silicon surfaces |
| EP2697820B1 (en) | 2009-11-11 | 2018-04-04 | Alliance for Sustainable Energy, LLC | Wet-chemical method for producing a black silicon substrate |
| EP2502279B1 (en) * | 2009-11-17 | 2016-04-20 | 3M Innovative Properties Company | Texturing surface of light-absorbing substrate |
| US9017566B2 (en) * | 2010-04-30 | 2015-04-28 | Corning Incorporated | Anti-glare surface treatment method and articles thereof |
| US8828765B2 (en) | 2010-06-09 | 2014-09-09 | Alliance For Sustainable Energy, Llc | Forming high efficiency silicon solar cells using density-graded anti-reflection surfaces |
| JP2014512673A (ja) | 2011-03-08 | 2014-05-22 | アライアンス フォー サステイナブル エナジー リミテッド ライアビリティ カンパニー | 向上された青色感度を有する効率的なブラックシリコン光起電装置 |
| TWI435360B (zh) * | 2011-10-17 | 2014-04-21 | Au Optronics Corp | 場發射顯示器及其顯示陣列基板的製造方法 |
| CN104684858B (zh) * | 2012-05-29 | 2017-10-24 | 康宁股份有限公司 | 对玻璃表面进行织构化的方法 |
| CN104584243B (zh) * | 2012-08-21 | 2018-12-25 | 王子控股株式会社 | 半导体发光元件用基板及半导体发光元件以及该等之制造方法 |
| US9721767B2 (en) * | 2012-08-21 | 2017-08-01 | Regents Of The University Of Minnesota | Embedded mask patterning process for fabricating magnetic media and other structures |
| US9831361B2 (en) * | 2012-12-14 | 2017-11-28 | Robert Bosch Gmbh | Method of fabricating nanocone texture on glass and transparent conductors |
| US9082925B2 (en) | 2013-03-13 | 2015-07-14 | Sunpower Corporation | Methods for wet chemistry polishing for improved low viscosity printing in solar cell fabrication |
| WO2015116267A1 (en) * | 2013-10-31 | 2015-08-06 | University Of Florida Research Foundation, Inc. | Substrates having an antireflection layer and methods of forming an antireflection layer |
| CN104195644B (zh) * | 2014-07-27 | 2016-08-24 | 北京工业大学 | 一种单晶硅衬底亚微米金字塔结构激光-化学制备方法 |
| US10347467B2 (en) | 2015-08-21 | 2019-07-09 | Regents Of The University Of Minnesota | Embedded mask patterning process for fabricating magnetic media and other structures |
| WO2017078164A1 (ja) * | 2015-11-04 | 2017-05-11 | 株式会社カネカ | 結晶シリコン系太陽電池の製造方法および結晶シリコン系太陽電池モジュールの製造方法 |
| US10475940B2 (en) | 2016-01-26 | 2019-11-12 | King Abdullah University Of Science And Technology | Packaging glass with hierarchically nanostructured surface |
| WO2018035091A1 (en) | 2016-08-15 | 2018-02-22 | University Of Florida Research Foundation, Inc. | Methods and compositions relating to tunable nanoporous coatings |
| US10120111B2 (en) * | 2016-12-14 | 2018-11-06 | Google Llc | Thin ceramic imaging screen for camera systems |
| DE102017109386A1 (de) * | 2017-05-02 | 2018-11-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Strukturieren einer Substratoberfläche |
| WO2018213570A2 (en) | 2017-05-17 | 2018-11-22 | University Of Florida Research Foundation | Methods and sensors for detection |
| JP6908487B2 (ja) * | 2017-09-28 | 2021-07-28 | 積水化学工業株式会社 | 表面処理方法及び装置 |
| US12248123B2 (en) | 2017-12-20 | 2025-03-11 | University Of Florida Research Foundation, Inc. | Methods of forming an antireflective layer on a complex substrate and complex substrates having the antireflective layer |
| WO2019126248A1 (en) | 2017-12-20 | 2019-06-27 | University Of Florida Research Foundation | Methods and sensors for detection |
| US11705527B2 (en) | 2017-12-21 | 2023-07-18 | University Of Florida Research Foundation, Inc. | Substrates having a broadband antireflection layer and methods of forming a broadband antireflection layer |
| WO2020027871A2 (en) | 2018-02-13 | 2020-02-06 | University Of Florida Research Foundation | Chromogenic materials, methods of making chromogenic materials, and methods of use |
| WO2019246370A1 (en) | 2018-06-20 | 2019-12-26 | University Of Florida Research Foundation | Intraocular pressure sensing material, devices, and uses thereof |
| KR102272710B1 (ko) * | 2019-11-29 | 2021-07-05 | 한국과학기술연구원 | 중공 나노 기둥이 구비된 유리의 제조방법 및 이를 이용하여 제조된 중공 나노 기둥이 구비된 유리 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6037104A (en) * | 1998-09-01 | 2000-03-14 | Micron Display Technology, Inc. | Methods of forming semiconductor devices and methods of forming field emission displays |
| US20090199898A1 (en) * | 2008-02-13 | 2009-08-13 | Younggu Do | Solar cell and method of texturing solar cell |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4407695A (en) * | 1981-12-31 | 1983-10-04 | Exxon Research And Engineering Co. | Natural lithographic fabrication of microstructures over large areas |
| US5510156A (en) * | 1994-08-23 | 1996-04-23 | Analog Devices, Inc. | Micromechanical structure with textured surface and method for making same |
| US5676853A (en) * | 1996-05-21 | 1997-10-14 | Micron Display Technology, Inc. | Mask for forming features on a semiconductor substrate and a method for forming the mask |
| US6495296B1 (en) * | 1999-02-17 | 2002-12-17 | Micron Technology, Inc. | Method for limiting particle aggregation in a mask deposited by a colloidal suspension |
| GB9919479D0 (en) * | 1999-08-17 | 1999-10-20 | Imperial College | Island arrays |
| US6984842B1 (en) * | 1999-10-25 | 2006-01-10 | The Board Of Trustees Of The University Of Illinois | Silicon nanoparticle field effect transistor and transistor memory device |
| WO2002003472A2 (en) * | 2000-06-29 | 2002-01-10 | California Institute Of Technology | Aerosol silicon nanoparticles for use in semiconductor device fabrication |
| US6579463B1 (en) * | 2000-08-18 | 2003-06-17 | The Regents Of The University Of Colorado | Tunable nanomasks for pattern transfer and nanocluster array formation |
| US6521541B2 (en) * | 2000-08-23 | 2003-02-18 | California Institute Of Technology | Surface preparation of substances for continuous convective assembly of fine particles |
| AU2002239780A1 (en) * | 2000-10-25 | 2002-06-03 | Tufts University | Polymeric microspheres |
| JP3861197B2 (ja) * | 2001-03-22 | 2006-12-20 | 株式会社東芝 | 記録媒体の製造方法 |
| WO2003099708A1 (en) * | 2002-05-28 | 2003-12-04 | Matsushita Electric Industrial Co., Ltd. | Process for producing nanoparticle and nanoparticle produced by the process |
| EP1579511B1 (de) | 2002-12-30 | 2012-03-28 | OSRAM Opto Semiconductors GmbH | Verfahren zum aufrauhen einer oberfläche eines optoelektronischen halbleiterkörpers. |
| US7045851B2 (en) * | 2003-06-20 | 2006-05-16 | International Business Machines Corporation | Nonvolatile memory device using semiconductor nanocrystals and method of forming same |
| US7989290B2 (en) * | 2005-08-04 | 2011-08-02 | Micron Technology, Inc. | Methods for forming rhodium-based charge traps and apparatus including rhodium-based charge traps |
| US7385231B2 (en) * | 2005-08-31 | 2008-06-10 | Fujifilmcorporation | Porous thin-film-deposition substrate, electron emitting element, methods of producing them, and switching element and display element |
| US7482619B2 (en) * | 2005-09-07 | 2009-01-27 | Samsung Electronics Co., Ltd. | Charge trap memory device comprising composite of nanoparticles and method of fabricating the charge trap memory device |
| JP2007273746A (ja) * | 2006-03-31 | 2007-10-18 | Sumitomo Chemical Co Ltd | 固体表面の微細加工方法および発光素子 |
| KR100742720B1 (ko) * | 2006-06-07 | 2007-07-25 | 한양대학교 산학협력단 | 화학적 큐어링에 의한 나노입자의 제조방법 |
| JP5359270B2 (ja) | 2006-06-30 | 2013-12-04 | 王子ホールディングス株式会社 | 単粒子膜エッチングマスクを用いた微細構造体の製造方法およびナノインプリント用または射出成型用モールドの製造方法 |
| SG140481A1 (en) * | 2006-08-22 | 2008-03-28 | Agency Science Tech & Res | A method for fabricating micro and nano structures |
| JP5229589B2 (ja) * | 2006-09-21 | 2013-07-03 | 富士レビオ株式会社 | 微小構造を製造するための方法および装置 |
| US7790560B2 (en) * | 2007-03-12 | 2010-09-07 | Board Of Regents Of The Nevada System Of Higher Education | Construction of flash memory chips and circuits from ordered nanoparticles |
| US20100175749A1 (en) * | 2008-03-24 | 2010-07-15 | Tsutsumi Eishi | Solar cell and method for manufacturing metal electrode layer to be used in the solar cell |
| US8445188B2 (en) * | 2008-09-17 | 2013-05-21 | National Science Foundation | Process for formation of highly uniform arrays of nano-holes and nano-pillars |
| US8323744B2 (en) * | 2009-01-09 | 2012-12-04 | The Board Of Trustees Of The Leland Stanford Junior University | Systems, methods, devices and arrangements for nanowire meshes |
| KR101155108B1 (ko) * | 2009-04-30 | 2012-06-11 | 국민대학교산학협력단 | 전하저장층 및 그의 형성 방법, 이를 이용한 비휘발성 메모리 장치 및 그의 제조 방법 |
| EP2502279B1 (en) * | 2009-11-17 | 2016-04-20 | 3M Innovative Properties Company | Texturing surface of light-absorbing substrate |
| US8039292B2 (en) * | 2009-11-18 | 2011-10-18 | International Business Machines Corporation | Holey electrode grids for photovoltaic cells with subwavelength and superwavelength feature sizes |
-
2010
- 2010-11-08 EP EP10779383.8A patent/EP2502279B1/en not_active Not-in-force
- 2010-11-08 JP JP2012538866A patent/JP5690348B2/ja not_active Expired - Fee Related
- 2010-11-08 WO PCT/US2010/055772 patent/WO2011062791A2/en not_active Ceased
- 2010-11-08 CN CN201080052042.XA patent/CN102754217B/zh not_active Expired - Fee Related
- 2010-11-08 US US13/509,504 patent/US9034684B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6037104A (en) * | 1998-09-01 | 2000-03-14 | Micron Display Technology, Inc. | Methods of forming semiconductor devices and methods of forming field emission displays |
| US20090199898A1 (en) * | 2008-02-13 | 2009-08-13 | Younggu Do | Solar cell and method of texturing solar cell |
Non-Patent Citations (1)
| Title |
|---|
| Fabrication of Efficient Light-Emitting Diodes With a Self-Assembled Photonic Crystal Array of Polystyrene Nanoparticles;Aaron J.Danner et al;《IEEE PHOTONICS TECHNOLOGY LETTERS》;20080101;第20卷(第1期);第48-50页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011062791A2 (en) | 2011-05-26 |
| EP2502279A2 (en) | 2012-09-26 |
| US9034684B2 (en) | 2015-05-19 |
| JP2013511151A (ja) | 2013-03-28 |
| US20120225517A1 (en) | 2012-09-06 |
| JP5690348B2 (ja) | 2015-03-25 |
| WO2011062791A3 (en) | 2012-07-19 |
| CN102754217A (zh) | 2012-10-24 |
| EP2502279B1 (en) | 2016-04-20 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160706 Termination date: 20191108 |
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| CF01 | Termination of patent right due to non-payment of annual fee |