CN102717598A - Control method in ink-jet applying apparatus - Google Patents
Control method in ink-jet applying apparatus Download PDFInfo
- Publication number
- CN102717598A CN102717598A CN201210186606XA CN201210186606A CN102717598A CN 102717598 A CN102717598 A CN 102717598A CN 201210186606X A CN201210186606X A CN 201210186606XA CN 201210186606 A CN201210186606 A CN 201210186606A CN 102717598 A CN102717598 A CN 102717598A
- Authority
- CN
- China
- Prior art keywords
- inkjet head
- ink
- alburnum
- control method
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
- B41J2/16517—Cleaning of print head nozzles
- B41J2/16552—Cleaning of print head nozzles using cleaning fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/165—Preventing or detecting of nozzle clogging, e.g. cleaning, capping or moistening for nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
Abstract
Provided are a cleaning method, a nozzle inspecting method, an application control method and a filming method in an ink-jet applying apparatus. An ink-jet head cleaning method is characterized by comprising covering an ink-jet head with a unit member, injecting a rinsing liquid for a predetermined time period by applying an attraction force to the unit member, and applying an attracting force, while the ink-jet head and the unit member being slightly spaced, to dry the ink-jet head. The ink-jet application control method is characterized by comprising replacing, after the discharging action, the discharging liquid material filling the passage by a replacing material of a low volatility, and replacing the replacing material again by the discharging liquid material just before the discharging action is started. The ink-jet head inspecting method is characterized by impacting a liquid material injected from the ink-jet head, on an inspecting member having different reflection powers on an impacted portion and an unimpacted portion. The ink-jet filming method is characterized by injecting the liquid material to the position to contact or partially overlap the droplet having impacted at the preceding step, after the droplet injected at the preceding step and left on the work is dried to a non-fluid state.
Description
The application is that application number is 200880005764.2, and the applying date is on February 21st, 2008, and denomination of invention is divided an application for the one Chinese patent application of " cleaning method of ink-jet coating apparatus ".
Technical field
The present invention relates to a kind of ink mist recording shower nozzle is arranged cleaning method, nozzle check method, coating control method, and film build method of ink-jet coating apparatus of (below be called " inkjet head ") of possessing, particularly a kind of cleaning method of removing in order to dirty, the chip that will be adhered at the nozzle face of inkjet head and periphery thereof, impurity etc., nozzle check method, coating control method, and film build method.
In addition, the inkjet head in this specification does not have special qualification, is to possess the inkjet head that single or a plurality of nozzles are arranged.
Background technology
In the ink-jet recording apparatus, in order to keep high-quality recording quality, just must spue at the printing ink of ink mist recording shower nozzle face institute residual ink, impurity etc. are removed.
Disclosing in the patent documentation 1 has, and makes the wiping scraper plate relatively to the face that spues of the printing ink in shower nozzle, through carrying out in the method that wiping action cleans, in order to promote cleaning performance, just studies about the material of wiping scraper plate, angle, the way of contact etc.
Disclosing in the patent documentation 2 has; Discharge opening is provided with absorption of inks in the downstream of the answer direction of operating of said scraper plate cleaning and uses slit relatively; To scrape the printing ink utilization of getting through said scraper plate and have the absorption of inks that is parallel to the pump orifice that a plurality of discharge openings and slit-shaped be provided with and use slit, draw said printing ink with the method for lifting performance etc.
In patent documentation 3, disclosing has, and nozzle from rose towards inkjet head and periphery thereof blow out and implement after the cleaning of said nozzle face, and utilizes scraper plate to strike off etc. the detergent remover of nozzle that is attached to inkjet head and periphery thereof.
Disclosing in the patent documentation 4 has, and the drop of the alignment film method that spues makes the inkjet head with a plurality of nozzles of arranging with both determining deviations; Substrate is relatively moved; And from said nozzle with the drop of the alignment film method on said substrate that spues, wherein, the direction that said inkjet head relatively moves to said substrate; Be to constituting cancellate line of pixels column direction in the said substrate, being set angle and tilting.
Disclosing in the patent documentation 5 has, and film forming device includes: have a plurality of nozzles of arranging at certain intervals respectively, possess the shower nozzle of single or a plurality of inkjet heads supporting structure is arranged; And has on the orthogonal direction of these a plurality of nozzle arrangement directions the substrate conveyance mechanism of the substrate conveyance platform that can between these a plurality of nozzles, relatively move; And from said a plurality of nozzles film formation is sprayed on the substrate surface that is carried on the said substrate conveyance platform with solution, and implement coating and film forming non-contact type thin film formation device; It is characterized in that possessing and have: innerly at least be provided with said substrate conveyance platform, inkjet head, and said shower nozzle supporting structure be contained in inner poor as the vacuum of spraying the coating film forming chamber; And spray coating film forming in order under reduced pressure atmosphere, to implement, and with the inner decompression means of implementing decompression of said vacuum tank.
Disclosing in the patent documentation 6 has, alignment film formation method, and possessing has: use inkjet nozzle that alignment film material is dripped with drop, through the droplet patterns of this drippage, check the inspection step that said inkjet nozzle is unusual; And when when this inspection step judges that droplet patterns is in set scope, just make said ink-jet and substrate relatively to, and use said inkjet nozzle alignment film material to be dropped in the film forming step of the alignment film that forms on this substrate with drop.
Disclosing in the patent documentation 7 has, the manufacturing approach of device, and the pattern that includes substrate forms the zone, from drop the spue manufacturing approach of device of step of fluent material of shower nozzle that spues; It is characterized in that including: to form the spue rinsing step of said fluent material of set zone the zone except that said pattern.
Patent documentation 1: TOHKEMY 2004-291364 communique
Patent documentation 2: TOHKEMY 2004-42571 communique
Patent documentation 3: TOHKEMY 2002-19132 communique
Patent documentation 4: TOHKEMY 2006-320839 communique
Patent documentation 5: TOHKEMY 2006-289355 communique
Patent documentation 6: TOHKEMY 2006-058772 communique
Patent documentation 7: TOHKEMY 2003-282245 communique
Summary of the invention
(problem that invention institute desire solves)
The object of the present invention is to provide the cleaning method of stating the ink-jet coating apparatus of technical problem after a kind of solution the, nozzle check method, coating control method, and film build method.
(means of dealing with problems)
The 1st invention is an ink-jet head cleaning method; It is characterized in that; With the purification zone of inkjet head, utilize unit member to cover, and pass through from pump orifice effect suction force with detergent remover supply opening and pump orifice; From with pump orifice relatively to the detergent remover supply opening, spray detergent remover towards purification zone and clean.
The 2nd invention is, in the 1st invention, after said clean, inkjet head and unit member only left a little, through to unit member effect suction force, makes the purification zone drying of inkjet head.
The 3rd invention is that in the 1st or 2 inventions, detergent remover is to use by the liquid that solvent constituted with the factor that makes the alburnum dissolving.
The 4th invention is the inspection method of inkjet head, makes the alburnum that nozzle ejected that has from inkjet head, drips in inspection and uses member, and check said nozzle according to the droplet patterns of drippage; The inspection method of said inkjet head is characterised in that, said inspection is that reflectivity material different by alburnum drippage place and non-drippage place constitutes with member.
The 5th invention is that in the 4th invention, said inspection is the film that the drippage owing to alburnum dissolves with member.
The 6th invention is an ink-jet application control method; It is characterized in that; After the operation that spues of inkjet head; Spuing of will the stream in inkjet head filling replaces with the low volatility alternate material with alburnum, and before the operation that just will begin to spue, and alternate material replaced with to spue once more use alburnum.
The 7th invention is that in the 6th invention, alternate material is to use by the liquid that solvent constituted that possesses the factor that makes the alburnum dissolving.
The 8th invention is the ink-jet film-forming method, implements the system film through a plurality of injecting steps; Said method is characterised in that, waits on the workpiece that last step sprays after droplet drying to the immobilising degree, alburnum sprayed to the alburnum drop with last step drippage contact or partly overlapping position.
The 9th invention is in the 8th invention, to increase the number of times of injecting step, and reduce emitted dose each time.
The 10th invention is in the 8th or 9 inventions, to form wiring pattern by film.
(invention effect)
(1) about the cleaning of inkjet head, because solids such as scraper plate do not touch the nozzle and the periphery thereof of inkjet head, so can under the situation that abrasion dust does not take place, clean inkjet head.
In addition, because use detergent remover, so, still can clean with powerful cleaning strength in situation such as alburnums such as printing ink drying.
In addition, also have and can shorten the activity duration, can cheap characteristic of making.
(2) the nozzle unfavorable condition of inkjet head can be detected with high visual identity property, visual identity property can be improved significantly in the particularly transparent alburnum.
(3) the coating control problem of solution inkjet head can be carried out stable disgorging motion.Particularly to the higher effect of high-volatile alburnum tool.
(4) in film forming,, can dwindle the thickness difference of whole face than existing gimmick by ink-jet.
Description of drawings
Fig. 1 a is the whole approximate vertical view that possesses the device of the wiper mechanism that embodiment 1 is arranged.
Fig. 1 b is the whole summary side elevation that possesses the device of the wiper mechanism that embodiment 1 is arranged.
Fig. 2 is the summary description figure of wiper mechanism one form of expression embodiment 1.
Fig. 3 is the summary structural map of another form of wiper mechanism of expression embodiment 1.
Fig. 4 a is the structure vertical view of the clean unit of expression embodiment 1.
Fig. 4 b is the general structure side sectional view of the clean unit of expression embodiment 1.
Clean step and drying steps key diagram that Fig. 5 implements for the clean unit of embodiment 1.
Fig. 6 is the clean step and the drying steps flow chart of the inkjet head of embodiment 1.
The nozzle check mechanism key diagram that Fig. 7 relates to for embodiment 1.
Fig. 8 is the flow chart of the coating control enforcement order of expression inkjet head.
Fig. 9 is the simpleization notion structural map that is used to explain the inkjet head action.
Figure 10 is the pre-treatment action specification figure of the inkjet head in Fig. 9 structure.
Figure 11 is the post processing action specification figure of the inkjet head in Fig. 9 structure.
Figure 12 is the comparative illustration figure that existing thick film forms gimmick and thick film of the present invention formation gimmick.
The wiring pattern of Figure 13 for forming by film-forming method of the present invention.
The maintenance mechanism structural map that Figure 14 relates to for embodiment 2.
Figure 15 is the side view of absorption/flushing unit of expression perspective embodiment 2.
The signal waveform of Figure 16 for being exported from the machine class of embodiment 2.
Symbol description
2 alburnums
3 detergent removers
4 used detergent removers (waste liquid)
5 negative pressure
6 nozzles
7 switching mechanisms
8 signal generation devices
9 communication member
10 inkjet heads
The 11 alburnums face that spues
12a, 12b alburnum bottle
13 detergent remover bottles
14 work piece platform
15 personal computers (PC)
16 operation tables
19 pressure transfer pumps
20 clean the unit
21 receive liquid portion
22 drain valves
23 clean lip
24 bottom pump orifices
25 detergent remover supply openings
26 detergent removers reclaim mouth
28 openings
31a, 31b detergent remover nozzle magnetic valve
32a, 32b side nozzle atmospheric open valve
33 supply valves
34a, 34b negative pressure are used magnetic valve
35 detergent remover supply valves
36 material transfer valves
37 injectors
38 adjusters
40 waste liquid tanks
41 manual joints
51 open and close magnetic valve
52 full quantity sensors
61 abutting member
62 frameworks
63 supporting members
64 installation components
66 joints
71 formal liquid
Film is used in 72 inspections
73 plates
74 camera heads
75 indirect illuminations
76 transilluminations
The visual field of 77 camera heads
The formal liquid of 78 drippages
81 present and use roller
82 batch and use roller
101 inkjet head control boxes
102 absorption/flushing unit
103 nozzle cap unit
104 video cameras
105 alburnum switch units
106 ink-jets control substrate
107 alburnum jars
108 emergency stop switch
109 base plates
110 crossbeams
112 various pneumatics machines
113 instrument boxes
114 control boxes
121 X axle travel mechanisms
122 y-axis shift actuation mechanism
123 Z axle travel mechanisms
124 θ axle rotating mechanisms
125 H θ axle rotating mechanisms
151 first valves
152 second valves
The specific embodiment
The present invention is the basis with relevant following four technological thoughts of ink-jet coating apparatus.
(1) cleaning method and mechanism
[i] problem
The problem of first technological thought is to improve the low situation of the removal ability of on the outgoing plane of inkjet head, adhering to drop.
In addition, because the size of existing wiper mechanism is bigger, so more the target of miniaturization also belongs to problem to be solved.
Also have, do not use hard scraper plate execution cleaning also to belong to problem to be solved as existing.Reason is if make scraper plate touch nozzle or its peripheral part of inkjet head, and the problem that produces abrasion dust is then arranged.If the generation abrasion dust then becomes the reason that nozzle is stopped up, there are the surrounding enviroment of causing to suffer pollution problems.In addition, if the generation possibility of abrasion dust is arranged, then need in dust free room, use and be restricted.
[ii] purport
Contact with the detergent remover (remover) of dissolving alburnum for the alburnum that is adhered on the inkjet head outgoing plane being removed, make the alburnum that is adhered to, utilize detergent remover that alburnum is dissolved than the tool effect.
In addition, on said outgoing plane, form the exit wound of bullet that alburnum is penetrated, be important and make its periphery touch detergent remover with having no to omit.Outgoing plane is provided with the inkjet head of a plurality of exits wound of bullet, particular importance.
First technological thought is the detergent remover of supplying from inkjet head outgoing plane one end, on the surface of said outgoing plane, flows, and from reclaiming apart from a supply detergent remover end end farthest.Use detergent remover from the alburnum dissolving that the outgoing plane end will be adhered on outgoing plane, flow to the phase opposite end of outgoing plane simultaneously, can not have omission and efficient thus and outgoing plane is cleaned goodly.
Be preferably, from a plurality of positions of an end of outgoing plane detergent remover be supplied to outgoing plane, and detergent remover reclaimed from a plurality of positions of phase opposite end.Positional number to the supply detergent remover need be not identical with the positional number that detergent remover is reclaimed here.
More preferably, from the end supply detergent remover of the long side direction side of inkjet head outgoing plane, and detergent remover is reclaimed from the phase opposite end of identical outgoing plane long side direction side.Reason is the detergent remover distance of flow that can shorten on the ink-jet outgoing plane, can promote clean efficient.
According to inkjet head, also effective for the unit that the size change is big with a plurality of exits wound of bullet.
In addition, moistening through the outgoing plane of cleaning because of detergent remover, but, preferably implement dry in order to shorten the stand-by period.Dry means through clean outgoing plane are preferably air dry or blow dried, because can prevent that outgoing plane from being polluted.
As stated, if on the inkjet head outgoing plane the adhering to of dripless, then promote accuracy of measurement and the drippage positional precision of drop on workpiece from drop that inkjet head penetrates.
The detergent remover of preferred mode is to be made up of the colourless solvent (for example making the solvent of the principal component of printing ink dissolving) that possesses the factor of printing ink dissolving.
But the general employed printing ink of ink-jet printer can be categorized as dyestuff system or pigment system.So-called " dyestuff " is meant and utilizes mounting medium to disperse as molecule or fused colouring agent.Mounting medium at room temperature is in a liquid state or is solid-state.Common employed mounting medium is the mixture of water or water and organic cosolvent.Be principal component with water generally, and contain colouring agent therein and in order to prevent that situation such as obstruction from containing such as wetting agents such as glycerine.When mounting medium is to use the situation of water, generally water-fast fastness shortcoming on the low side also appears in this kind printing ink.
So-called " pigment " disperses or suspends with the small-particle form though be meant and be insoluble in the mounting medium, usually for unlikely generation cohesion and deposited phenomenon, utilizes dispersant and is the colouring agent of stabilization.This kind compound majority is known, for example exists to use interfacial agent or dispersant to give corpusculed pigment such as organic pigment or carbon black, and the pigment ink that uses through being scattered in the medium such as water and as colouring agent etc.
Present technique thought and dyestuff system or pigment system are irrelevant all applicable.The viscosity of printing ink is a main flow with the low-viscosity person of tens of cps degree, but under the prerequisite of ejection of can dispersing, also applicable situation more than the middle viscosity of hundreds of cps degree.
In addition, present technique thought also can be used in wiring pattern printing such as printed substrates, micro parts implemented the coating or the employed functional ink of situation such as the printing of outdoor light resistance display material, UV fixed oil ink print of lubricant.
[iii] enforcement order
The cleaning of inkjet head is to implement (with reference to Fig. 6) according to the order of A ~ D step.In addition, " B. cleans operation " describes with the order example of structure shown in Figure 3.
(the A. inkjet head is to the arrangement of wiper mechanism)
The inkjet head 10 and the clean unit 20 of wiper mechanism are connected.That is, make below the inkjet head 10, clean the mode that receives liquid portion 21 that unit 20 central portions are the concavity setting, be connected to and clean above the unit 20 to cover.Cleaning lip 23 (cleaner lip) just becomes below the inkjet head 10 and the contact-making surface above the clean unit 20.
(B. cleans operation)
1) opens detergent remover nozzle magnetic valve 31a, 31b, and be communicated in the stream that is connected via this magnetic valve 31a, 31b.
2) utilize being communicated with between side nozzle atmospheric open valve 32a, 32b blocking-up and atmosphere, and be positioned at the position that is connected state with the stream that is connected via this relief valve 32a, 32b.(utilize relief valve 32a will clean unit 20 and be connected, and utilize relief valve 32b that magnetic valve 31b is connected with drain valve 22 with magnetic valve 31a.)
3) utilize drain valve 22, make injector 37, be connected, and open negative pressure with magnetic valve 34a, 34b with the liquid portion 21 that receives of clean unit 20.
4) utilize to said 3) till step, to cleaning the stream of unit 20, produce negative pressure by injector 37, detergent remover stored in the detergent remover bottle 13 is supplied to cleans unit 20.
5) be supplied to the detergent remover of cleaning unit 20, be supplied in inkjet head 10 from detergent remover supply opening 25.Detergent remover supply opening 25 forms near the following periphery of ink-jet 10, from the detergent remover that detergent remover supply opening 25 is discharged, is supplied in efficiently near the outer circumference end below the inkjet head 10.
6) to the inkjet head 10 following detergent removers of being supplied; Below inkjet head 10, flow; And formed detergent remover reclaims mouthfuls 26 near the opposite end mutually of the detergent remover supply side below ink-jet 10, is recovered in once again and cleans in the unit 20, or reclaims before mouthfuls 26 arriving detergent remover; Leave below the inkjet head 10, clean the receiving in the liquid portion 21 of unit 20 and be recovered in.Receive liquid portion 21 to be communicated in drain valve 22, drain valve 22 then be positioned at via other stream of drain valve 22, with the position that is communicated with blocking-up that receives 21 in liquid portion, thereby in receiving liquid portion 21, be detained detergent remover.
Reclaim mouthfuls 26 from detergent remover and flow in the detergent remover of cleaning unit 20, be recovered in the waste liquid tank 40 via drain valve 22 and injector 37.
7) through fully implement clean after, detergent remover nozzle 31a, 31b are closed, and negative pressure are closed with magnetic valve 34a, 34b, and make side nozzle atmospheric open valve 32a, position that 32b is positioned to be connected with atmosphere.Thus, stop detergent remover, receive the pressure of liquid portion 21 to become atmospheric pressure from negative pressure to cleaning the supply of unit 20.
(disengaging of C. inkjet head self-cleaning mechanism)
Make to leave below the inkjet head 10 and clean above the unit 20, below inkjet head 10 and between above the clean unit 20, form the gap.This gap is based on the follow-up drying operation that will implement, and is made as the distance that produces suitable air-flow.
(D. drying operation)
1) for waste liquid tank 40 is connected with clean unit 20, switch drain valve 22, negative pressure is opened with magnetic valve 34a, 34b.
2) thus, the liquid portion 21 that receives that cleans unit 20 is connected with waste liquid tank 40, and to receiving liquid portion 21 effect negative pressure, just flowed towards waste liquid tank 40 by detergent remover stored in the liquid portion 21, and the detergent remover that becomes waste liquid is by waste liquid tank 40 recovery.
3) in addition, below inkjet head 10 and between above the clean unit 20, the gap is set, and flowed in by the atmosphere of the negative pressure of liquid portion 21 payment from said gap to receive the liquid portion 21.The atmospheric action of in this gap, flowing is that the detergent remover that inkjet head 10 below, is adhered to is dripped, and the detergent remover that drips drips in receiving liquid portion 21, and by waste liquid tank 40 recovery.In addition, also can adjust air-flow (negative pressure) through below inkjet head 10, adjusting with the distance of 20 of clean unit.
4) stored detergent remover is recycled to after the waste liquid tank 40 in receiving liquid portion 21, if also keep this state, then in said gap flow air act as make below the inkjet head 10 dry.Below inkjet head 10, be formed with the exit wound of bullet that penetrates alburnum, do not carry out drying, so can said exit wound of bullet be remained in extremely clean state because can below this, can not touch the situation of other material.
5) with after the inkjet head 10 following fully dryings, make negative pressure move and be positioned at detent position, stop to clean the 20 pairs of negative voltage supplies that receive liquid portion 21 in unit with magnetic valve 34a, 34b.
6) then, make supply valve 33 produce action, and inkjet head 10 is connected with alburnum supply bottle 12, the alburnum stream is integrated into the state that can alburnum be supplied in inkjet head 10.
[iv] effect
According to like the said first illustrated technological thought, clean because utilize detergent remover to implement, so can not produce abrasion dust.
In addition, because be the principle of utilizing action of negative pressure that detergent remover is sprayed, so if inkjet head does not connect airtight clean unit then do not supply detergent remover.So,, can prevent the situation that detergent remover sprays outside cleaning the unit is taken place even, still can stop the supply of detergent remover because of vacuum breaking just in case inkjet head leaves with clean unit mutually.
In addition, because drying operation also is to utilize suction function to implement, can prevent that therefore the outside of cleaning the unit from suffering the pollution of detergent remover.
(2) nozzle check method and mechanism
[i] problem
Existing ink-jet coating apparatus is owing to belong to ink-jetting style, thus because of nozzle fault, nozzle towards, nozzle by reasons such as alburnum obstructions, cause that the problem that can't suitably be coated with the necessary amount drop to necessity place is arranged.
In addition, like 6 announcements of patent documentation, drip alburnum on film and in the inspection method implemented in inspection; Because behind drippage, till arriving the image identification camera, the shape of drop has collapsed diffusing; Even, still can't precision implement inspection goodly so droplet profile is implemented image identification.
[ii] purport
6 announcements of second technological thought such as patent documentation belong to through alburnum is dripped and carry out nozzle check in inspection with member (receiving to drip thing).Being different from patent documentation 6 parts is: be not to be conceived to the alburnum (drop) that is coated with, but receive to drip the contrast of part that the alburnum coating is arranged in the thing and other part.
The present invention of preferred mode is be made up of with film the inspection of tool dissolubility material by a thing.Thus, even to the transparent alburnum of visual identity property difference, this alburnum institute drippage place still can dissolve, and makes inspection produce muddy (transparency changes or is opaque) with film.So the visual identity property at drippage place is high, can detect the part of dripping easily.Effect when particularly using high grade of transparency fluent material is more remarkable.
The alburnum that receives to drip the corresponding ejaculation of thing of alburnum drippage suitably selects, and focusing on alburnum drippage reflectivity partly can change.If it is dissolved to receive to drip the drippage place of thing, then can change reflectivity, so image processing capable of using comes to capture accurately the drippage place because of diffuse reflection etc.Can be the combination that receives to drip thing and alburnum that is changed reflectivity by drippage, also can be that alburnum is infiltrated the mode that receives in the thing.Alburnum is infiltrated and receives to drip the mode in the thing, especially effectively, not with the fluent material of solvent as principal component, for example is the fluent material of solvent with water.
Be preferably, receive to drip thing in the just dissolving rapidly (or infiltration) of the moment of alburnum drippage.Reason is that drippage vestige diameter can enlarge if dripped in the retention time that receives to drip the alburnum above the thing longlyer.Be preferably, do not use the material of diffusion when dissolving, and use a thing that receives that dissolves in (or infiltration) material with the mode that runs through the below.Be the fluent material of solvent for example, be preferably and use the polystyrene film with toluene.Be preferably, receive to drip the thing thickness setting and receive to drip the thing back side for not dissolving to reach because of the drippage of alburnum.
It is transparent being preferably and receiving a thing, but may not be transparent, also pigmentable.It is good with the identity of non-drippage part to focus on dripping part.Receive to drip a thing yes and constitute, but comprise that also surface-coated, a plurality of films form the situation of stratiforms by homogenous material.
Alburnum to receiving to drip the thing drippage discerns, and can use such as sensing apparatus such as camera heads such as CCD camera, laser sensors.
Image processing is that for example to comprising the shooting visual field image at drippage place, acquisition of execution edge or binaryzation capture the drippage place thus.
[iii] enforcement order
To the inspection step of nozzle, describe with the order example of constructing shown in Fig. 7 (a).
1) makes and batch, make new inspection be positioned at inkjet head 10 belows with film 72 with roller 82 rotation.Here, the inspection that is positioned at inkjet head 10 belows is by plate 73 location with film 72, correctly keeps and the distance of 10 of inkjet heads.
2) the formal liquid 71 that from inkjet head 10, spues, and drip in inspection with film 72 above.Make inspection with film 72 dissolvings by drippage, and stay the vestige of drippage.
3) make again and batch, and make inspection be positioned at camera head 74 tops with the drippage position of film 72 with roller 82 rotation.
4) utilize camera head 74 to take inspection with film 72.In addition, the shooting of camera head 74 can make inspection stop to implement afterwards with film 72 again, also can under the state that inspection is moved with film 72, implement.
5) according to the image data of being obtained by camera head 74, the state of inspection inkjet head 10.Reach " diameter " from " the coming off " of dripping trace and just can check the obstruction item, and can check the unfavorable condition of dispersing from dripping departing from just of position.
(3) coating control method
[i] problem
Problem is: unfavorable conditions such as obstruction take place in the nozzle through preventing inkjet head, realize stablizing the printing ink disgorging motion, and have required precision.
When the alburnum disgorging motion stopped, near the stream the exit wound of bullet of inkjet head was dry, because of alburnum increase glutinousization, from alburnum the flight bending situation of separating out the alburnum of stopping up, spue of solid constituent, cause that the problem that can't stablize disgorging motion is arranged.
In addition; If the stability that spues of alburnum worsens; Have or not legal system to produce to require the problem of required precision product; In the volume production process, spue operation till next workpiece is implemented the operation that spues from what a workpiece was carried out, must implement that workpiece is taken out of, processing such as the moving into/locate of next workpiece, registration process.During this period, inkjet head does not spue operation and must wait for, but the problem of dry-out phenomenon takes place the alburnum that causes in inkjet head being filled because of wait easily.
[ii] purport
The 3rd technological thought is characterised in that: after the operation that spues; Alburnum is used in spuing of being filled in will the stream in inkjet head; Replace with low volatility alburnum (alternate material), and before the operation that to be ready beginning to spue, alternate material is replaced with to spue once more use alburnum.Here, alternate material is preferably the liquid that the liquid or the tool of alburnum tool dissolution are cleaned effect.
Be preferably, after the stream that alternate material is filled in the inkjet head, append below the inkjet head that forms the exit wound of bullet that penetrates alburnum and implement the clean step of cleaning.
Fill and the inkjet head of cleaning step through said alternate material, it is residual not have alburnum, even if in the operation that spues is waited for, still do not have the misgivings that alburnum increases glutinousization, from alburnum, separates out solid constituent.So, can get rid of the generation of said problem up hill and dale.
According to present technique thought, even because of factors such as unexpected fault cause being in for a long time the operation stand-by period that spues, the separating out/solidify of still unlikely generation solid constituent, spray nozzle clogging situation.Also have,, therefore can fresh alburnum be used on the workpiece because alburnum was filled in the inkjet head before the operation that to be ready spuing.
[iii] enforcement order
The coating operation is implemented with following order.At first, nozzle cap unit that will institute's attaching below inkjet head breaks away from.The nozzle cap unit keeps clean for making the exit wound of bullet that is formed at below the inkjet head; And prevent with inkjet head that said exit wound of bullet is connected in stream in the fluid (alternate material) of being filled unnecessary evaporation takes place, carry out attaching and bide one's time in coating operation etc.
After the nozzle cap unit breaks away from, just in inkjet head, fill the alburnum of penetrating.Stream in the inkjet head before this alburnum is filled is filled with the fluid thing that is different from alburnum that is called alternate material.Alternate material is bright accordingly, is preferably the effect that has the alburnum dissolving.Like this, the alburnum filling operation covers with the said exit wound of bullet of absorption/flushing unit with inkjet head, and applies negative pressure and after aspirating the alternate material inkjet head in and discharging, likewise utilize suction action to carry out the printing ink filling again.That is, the maintaining method of the inkjet head of being implemented is with unit member the nozzle that inkjet head was had to be covered, and produces negative pressure and the maintaining method of pumping liquid; Wherein be provided with: unit member is produced the waste liquid tank that mechanism is connected with negative pressure; The low viscous liquid reservoir that is communicated with inkjet head; The ink containment portion that is communicated with inkjet head; And make inkjet head select the liquid switching mechanism that a ground is connected with low viscous liquid reservoir or ink containment portion; Low viscous liquid reservoir is connected with inkjet head, and makes unit member produce negative pressure, and in inkjet head, fill low viscous liquid, the follow-up ink containment portion that makes is connected with inkjet head, and in inkjet head, fills printing ink.
In inkjet head, fill and penetrate after the alburnum, alburnum is penetrated other the set position outside workpiece, and confirm whether to have certain ejaculation (virtual injection action).Particularly be provided with the situation of a plurality of exits wound of bullet, must confirm whether penetrate alburnum from all exits wound of bullet when inkjet head.Confirm in the operation that at this do not penetrating under the situation of alburnum from all exits wound of bullet, the alburnum that then will in inkjet head, be filled is all discharged, and fills once again.Method alternate material is replaced with alburnum is implemented.
After recharging, implement virtual injection action once again, and confirm whether penetrate alburnum from all exits wound of bullet.If confirm to penetrate alburnum from all exits wound of bullet, inkjet head is relatively moved with carrying the platform that is equipped with workpiece, and inkjet head is disposed at the coating position on the workpiece, implement the coating operation.
If set coating operation is accomplished, workpiece then is discharged from the workpiece accommodation device of common name unloader.During carrying out that this workpiece discharges, according to said main points, the alburnum of being filled in will the stream in ink-jet is discharged, and implements the operation of filling alternate material to inkjet head.Through this operation, the alburnum in the stream of inkjet head is replaced by alternate material.When alternate material has the situation with the alburnum dissolution, even if in stream also residual a little alburnum, also can solidify so alburnum can not be taken place in the stream of inkjet head owing to the alternate material that is dissolved in this filling.
The filling of alternate material is implemented static dissolving with the stream in the inkjet head and is cleaned.After the alternate material filling operation is accomplished, below inkjet head, implement cleaning.Be preferably, clean the gimmick that is utilized in use detergent remover illustrated in said first technological thought and implement.If accomplished to nozzle cleaning, then the inkjet head internal-external is all cleaned, and becomes the clean state that the aneroid material adheres to.
To be cleaned accomplished after, attaching nozzle cap unit below nozzle unit, thus prevent the volatilization of alternate material.Each workpiece is repeated to implement above step.
(4) film build method
[i] problem
The existing one-tenth embrane method of ink-jet of using has following two problems.The problem of first short transverse (thickness), another is the problem of horizontal direction.The former is that the coffee stain phenomenon (coffee stain phenomenon) that rises on the ridge appears in the end periphery that can't solve film forming face, and causing film forming to be the problem of homogeneous film thickness.The latter is that diffusing situation is oozed in the end (edge) in film forming face, causes forming the problem of sharp edge line.
Disclosing in the patent documentation 4 has: cause the alignment film thickness to form uneven problem for solving to link to each other to be integrally formed between drop, make substrate be set angle and tilt, still also do not have thoroughly to solve the problem of membrane thickness unevenness.
In addition, the coffee stain phenomenon is the phenomenon in the solution appearance of low-viscosity, becomes the fatal problem of alignment film of LCD assembly.Under the situation of alignment film,, principal component is difficult for dissolving because being polyimides, thus use gamma-butyrolacton, N-methylpyrrole pyridine ketone or the butyl match Lopa Nationality Soviet Union etc. of dissolved material in a large number, and spray coating with the low-viscosity execution, thereby the coffee stain phenomenon will take place easily.
[ii] purport
If the inventor finds to implement coating with the mode that liquid flow can not take place, then can carry out the film forming of whole homogeneous film thickness; And if find to spue and to drip between a plurality of drops on the surface of the work to combine from inkjet head, the seepage situation will appear in edge line, create the 4th technological thought thus.
The 4th technological thought is characterised in that: utilize first of inkjet head to penetrate after action penetrates on workpiece; When the contact position of the alburnum drop that drips through this ejaculation or lap position are penetrated; The drop of wait on workpiece is the not drying regime of liquidity (comprising the partial desiccation state that material stops to move), just implements then and penetrates.
So; If after utilizing first to penetrate the drying of first drop that action penetrated on the workpiece; Second penetrate action later also penetrate towards the contact position of first drop or lap position the time, second penetrates the later drop of action fluidity still can not occur and combine situation on workpiece.Promptly; Because the drop (first drop) that is penetrated by the first ejaculation action is drying regime; So can not occur penetrating the contact of the drop that penetrates (second drop) after the action because of second, and combination between so-called drop takes place and form the fluid combination situation of a drop phenomenon.
On the other hand, when as have now under situation that fluidity combines appears in first drop and second drop because occur the coffee stain phenomenon more significantly, thereby than the thickness of centre, the thickness of film edge portion thickens.That is, the drop centre thickness before combine, and edge's thickness between thickness difference, drop centre thickness that forms by combining between drop and the thickness difference between edge's thickness become bigger.But, when between drop, combine and form the situation of single drop, because because of flowing of alburnum forms the height homogenising, thereby after combination, impossible this contact area of visual identity or overlapping region.
To this point, in the present technique thought, because all dry and form film when penetrating action each time, so produce the gimmick that fluid combines than existing, the integral thickness difference of face can be dwindled.
Figure 12 is the comparison diagram that has injection method and the inventive method during film forms now.Among Figure 12; The alburnum that last figure (a) expression is penetrated on the workpiece combines and is the same existing method; Figure below (b) is illustrated on the workpiece each drop that penetrates the first drop crowd by first; Leave and dispose with other adjacent drop, and then the concrete film formation method example that penetrates with the mode of burying each drop gap.In figure below (b), implement of ejaculation position four ejaculation that towards the right side oblique downside penetrate of second ejaculation of ejaculation position ejaculation of the relative first drop crowd, the relative first drop crowd's ejaculation position towards the 3rd ejaculation of downside ejaculation, the relative first drop crowd towards the right side.Here, penetrating second, the 3rd penetrate, the 4th penetrate in the later ejaculation, also is respectively after the state that is dried to the mobile downtrod degree that is penetrated the drop that forms by last step certainly, just implements the ejaculation of next step.
And present technique thought also not only is confined to the illustrative ejaculation sequence of positions of Figure 12 certainly.Repeatedly penetrate step (injecting step) so long as utilize, the tool systematicness of on whole of workpiece, implementing evenly coating penetrates the position and gets final product.Thus, the number of times of ejaculation step also can also can reach more than five times below three times.If increase the number of times that penetrates step, and reduce the coating weight that every single penetrates step, then can dwindle the concavo-convex of surface of the work.Reason be surface of the work concavo-convex, with coating weight have association.In addition, if reduce coating weight, the effect that shortens drying time is arranged also.
In addition,, penetrate by first and move between a plurality of drops (the first drop crowd) that penetrated, on workpiece, drip, do not contact between drop in the position of leaving mutually when ink jet unit has the situation of a plurality of exits wound of bullet.In the case, a plurality of drops (the second drop crowd) by the second ejaculation action is penetrated are not dried to and can just implement after the liquidity the first drop crowd, can obtain same effect certainly yet.
Droplet drying on the workpiece can be air dry, but carries the platform temperature put workpiece and rise through making, and is then can be more promptly in addition dry.
The temperature that makes droplet drying is according to condition such as alburnum kind, spacing, ejaculation amount and suitably adjustment; For example be set at from experimental situation temperature (for example 15 ~ 25 ℃) to 150 ℃ scope; Be preferably in the scope of experimental situation temperature to 100 ℃, be more preferred from the scope of experimental situation temperature to 50 ℃.
In addition, about making droplet drying to drying time that can not liquidity, also be according to condition such as platform temperature, alburnum kind, spacing, ejaculation amount and suitably adjustment for example preferably is set at from drippage about 20 ~ 100 seconds.
Like film build method of the present invention discussed above, than existing film build method, because can reduce the seepage discharge of edge part, so applicable to various uses such as alignment film formation such as LCD assembly.Film build method of the present invention also is applicable to the fine pitch wirings pattern that on substrate, forms shown in figure 13.That is, existing film build method probably will cause the situation that is connected occurring between wiring because seepage discharge is more, thus can't high density form fine pattern, but according to film build method of the present invention, then can highdensity formation fine pitch wirings.Reason is that film build method of the present invention can significantly reduce the laterally diffusing capacity of (horizontal direction) (afterwards state among the embodiment 3, diffusing capacity is about 1/10 of existing film build method).Film build method of the present invention is specially adapted to the film formation of thickness for number nm ~ tens of μ m.
In addition, film build method of the present invention also can be controlled thickness easily.In the existing film build method, the alburnum behind drippage combines with the alburnum of penetrating next time, and forms the same drop, and towards laterally (horizontal direction) diffusion, so difficult control thickness.Put, film build method of the present invention is to behind drippage, being the not alburnum of flow regime, penetrating next alburnum and pile up, increase thickness thus at this point, and therefore piling up number of times through control just can control thickness easily.
Below, utilize embodiment to describe to detailed content of the present invention, but the present invention does not receive any restriction of embodiment.
[embodiment 1]
The wiper mechanism of present embodiment possesses clean portion 2 is arranged, and this clean portion 2 has the function that inkjet head 1 is ejected the function of detergent remover 12 and ejects air.
Fig. 1 a is the whole approximate vertical view that expression possesses the device of present embodiment wiper mechanism, and Fig. 1 b is the whole summary side elevation of this device of expression.
The device of present embodiment is to make inkjet head 10, implement the ink-jet coating apparatus that is coated with when relatively moving with the work piece platform 14 that is positioned at its below.
Relatively moving and the action controls such as cleaning of inkjet head 10 of inkjet head 10 and work piece platform 14 can be carried out by the personal computer (PC) 15 on the set operation table 16 in apparatus for coating next door.
Fig. 2 is the summary description figure of expression present embodiment wiper mechanism one form.
Among Fig. 2, element numbers 42 is the compressed air from CDA (clean dry air), and element numbers 43 is that the CDA suction inlet opens and closes ball valve, and element numbers 44 is that evacuating air opens and closes ball valve, and element numbers 45 is discharge filter (control devices).
Fig. 3 is the summary structural map of another form of expression present embodiment wiper mechanism.
Detergent remover is used for the printing ink complete flushing that nozzle face and its periphery at inkjet head 10 are adhered to is fallen, thereby uses the colourless solvent (making the solvent of the principal component of printing ink dissolving) that possesses the factor of printing ink dissolving.
Fig. 4 a is the structure vertical view that unit 20 is cleaned in expression, and Fig. 4 b is the general structure side sectional view that unit 20 is cleaned in expression.
Key diagram when (a) of Fig. 5 is cleaning.As shown in the drawing, to clean unit 20 and be connected to inkjet head 10, detergent remover sprays near the outer circumference end below 10 from detergent remover supply opening 25 towards inkjet head, and reclaims mouth 26 and reclaimed by liquid portion 21 from detergent remover, implements thus and cleans.
(b) key diagram when being drying of Fig. 5.As shown in the drawing; After the end to be cleaned, make inkjet head 10 and clean unit 20 a little (for example 3mm) leave, be utilized in the atmosphere that flows in these gaps; The detergent remover that will on inkjet head 10, be adhered to blows and flies, and makes inkjet head 10 and clean unit 20 dryings.Clean unit 20 and be provided with bottom pump orifice 24, and the waste liquid that is aspirated is stored in the waste liquid tank 40.
The clean step of the present embodiment inkjet head 10 of above institute diagrammatic illustration and the flow chart of drying steps, as shown in Figure 6.
But when in making clean unit 20, producing negative pressure condition, the connecting airtight property that inkjet head 10 following (shower nozzle face) and clean unit are 20 is just very important.When the inclination of cleaning the 20 pairs of shower nozzle faces in unit is bigger, the problem that produces the gap is arranged then here.Therefore, in the present embodiment,, can guarantee to clean the connecting airtight property and the sealing of unit 20 through the structure of traceable shower nozzle face tilt.That is, constitute with softening elastomer, just have the free degree of traceable shower nozzle face tilt, can keep sealing through supporting the supporting member of cleaning unit 20.
In addition, clean unit 20 and be provided with the switching mechanism that makes its butt or be not connected to inkjet head 10.Switching mechanism can adopt general use as up-down usefulness such as mobile platforms such as hand, ball bearing screw type, linear formulas and constitute, there are SURUGA SEIKI corporate system, THK corporate system in for example known mobile platform manufacturer.
(nozzle check mechanism)
The nozzle check mechanism formation as shown in Figure 7 of present embodiment.
At first, inkjet head 10 is moved with the inspection area of film towards configuration inspection.In the inspection area, each inkjet nozzle state that inkjet head 10 is had is checked.
In the inspection area, the diaphany that the mode with crosscut inkjet head 10 belows that is provided with moves is with film 72.Inspection is to the deliquescent film of formal liquid 71 tools with film 72.Inspection is to batch in the form of a roll by presenting with roller with film 72, through batching with the batching of roller, can often new inspection is used for checking with film 72.
Drops from inkjet head 10 is made a video recording by camera head 74.Camera head 74 can be made up of general existing C CD camera etc.The mode that (a) expression camera head of Fig. 7 is made up of two image identification cameras (area sensor), the mode that (b) expression camera head 74 of Fig. 7 is made up of line sensor.In Fig. 7 (b), use indirect illumination 75 and transillumination 76 to improve identification through merging.Which kind of, decide with key elements such as the width of film 72, accuracy of detection according to inspection no matter select mode all to belong to the design item.
Inspection is with in the film 72, and in the situation of the drippage that does not have formal liquid 71 or drip the position and depart under the situation of both allocations, nozzle check mechanism then is regarded as occurring faults such as spray nozzle clogging, and demonstrates error message.
Fig. 9 is the simpleization notion structural map of the action specification of expression inkjet head 10.As shown in Figure 9, inkjet head 10 can optionally be communicated with formal liquid (alburnum of ejaculation) and detergent remover via alburnum switch unit 105.
Three unit of inboard configuration in the work piece platform side.Three unit that disposed replace with alternate material with the alburnum in the inkjet head stream in regular turn from the left side towards the right side or produce in order to alternate material is replaced with alburnum with the absorption/flushing unit 102 of negative pressure, clean unit 20 that execution below the nozzle is clean, with the nozzle cap unit 103 that carries out capping below the nozzle in Fig. 9.
Figure 10 is the pre-treatment action specification figure of Fig. 9 inkjet head 10 of constructing.Describe to six components shown in Figure 10.And in the switch unit 105, solid line is represented connected state, and dotted line is represented blocking state.
[10-1] is illustrated in and nozzle cap unit 103 is installed below the inkjet head 10, and utilizes be connected with the detergent remover figure of state of switch unit.Belong to the state that coating operation etc. is bide one's time.
[10-2] is expressed as and is coated with operation, and from the figure of inkjet head 10 with the state of nozzle cap unit 103 disengagings.Switch unit 105 is positioned at the position that inkjet head 10 is connected with detergent remover.
[10-3] expression inkjet head 10 is placed in the figure of the state of absorption/flushing unit 102.
[10-4] is placed in inkjet head 10 after absorption/flushing unit 102, utilizes switch unit 105 to switch to the position that alburnum is connected with inkjet head 10.Then, through to absorption/flushing unit 102 effect negative pressure, replace action (filling action) and carry out inkjet head 10 interior liquid.
After [10-5] expression is filled in alburnum in inkjet head 10 streams, on absorption/flushing unit 102, implement the figure of virtual injection action.This virtual injection is not utilization such as camera head or sensing apparatus, and whether confirm has the operation of penetrating alburnum from inkjet head 10 really, but the preparation mobile operational process of before the alburnum in inkjet head 10 streams is formally penetrated operation, being implemented.When execution is taken industry as really in order to carry out nozzle check, be preferably prior execution preparation mobile operational process.Certainly, through confirming the ejaculation in the operation, also can have the preparation mobile operational process concurrently.
[10-6] is illustrated in and makes under the situation that inkjet head 10 moves, and implements the figure of the state of coating operation.
Figure 11 is the post processing action specification figure of Fig. 9 inkjet head 10 of constructing.Six components to shown in Figure 11 describe.
[11-2] expression is placed in absorption/flushing unit 102 with inkjet head 10, and alburnum switch unit 105 switches to be connected with the detergent remover figure of state of position of inkjet head 10.
The liquid replacement end of job in the ink-jet shower nozzle 10 is treated in [11-3] expression, and inkjet head 10 breaks away from the figure of the state of absorption/flushing unit 102.
[11-4] expression is placed in inkjet head 10 and cleans unit 20, and implements the figure that cleans operation.Alburnum switch unit 105 remains in the position that inkjet head 10 is connected with detergent remover.
After [11-5] was illustrated in and cleans step, inkjet head 10 moved to the figure on the nozzle cap unit 103.
[11-6] is illustrated in the figure that inkjet head 10 following attachings have nozzle cap unit 103.Through the attaching of nozzle cap unit 103, it is clean that exit wound of bullet keeps, and can prevent that the alternate material of being filled in the stream in inkjet head 10 from unnecessary evaporation taking place.
[embodiment 2]
Figure 14 representes the maintenance mechanism structural map of present embodiment ink-jet coating apparatus.
The maintenance mechanism of present embodiment appends at said existing structure, utilizes second jar 13 that communication member 9 is connected with inkjet head 10 and select a ground to switch inkjet head 10 and first jar 12 or second jars 13 the liquid switch unit 105 that is communicated with.In second jar 13, store the detergent remover 3 of the low viscous liquid that when beginning to safeguard, flows at first.In the present embodiment, the solvent that detergent remover 3 uses printing ink 2 dissolvings.Thus, even also solubilized of the situation that solidifying appears in stream in printing ink 2.
In addition, shown in figure 15, the absorption of present embodiment/flushing unit 102 formations have the free degree of traceable shower nozzle face tilt.
Being connected to the abutting member 21 of shower nozzle face, is that the rubber by the elastomeric Xiao Shi A hardness of sclerosis 40 ~ 80 degree (being preferably 50 ~ 70 degree) (JIS K6253 specification) constitutes, and utilizes modes such as gluing or spiral shell be solid to be secured to above the framework 62.
According to the said present embodiment absorption/flushing unit 102 that constitutes, can not receive under the nozzle face obliquity effects, guarantee connecting airtight property and sealing completely.
The negative pressure of present embodiment produce mechanism by signal generation device 8, pressure transfer pump 19, adjuster 38, and injector 37 constitute, and be communicated in absorption/flushing unit 102 via waste liquid tank 40.In addition, negative pressure produces in the mechanism and also can add the muffler that can absorb air-borne sound.
A plurality of pattern times and waveform voltage signal can set and login to signal generation device 8, and from the pattern of a plurality of logins, only select, export arbitrary pattern.But the signal waveform voltage of adjuster 38 respective signal generation devices 8 carries out the pressure supply.Signal generation device 8 also can be made up of for example pulse generator, PC etc.
The pressure that injector 37 can corresponding be supplied from adjuster 38 produces negative pressure.Adjuster 38 can be made up of commercially available pneumatics machine with injector 37.
Even not to controlling by adjuster 38 and the negative pressure that is produced by injector 37; Also can be to keep under the situation of certain pressure from adjuster 38; Through the amount of restriction at the set choke valve of waste side of injector 37 is adjusted, carry out the control of negative pressure.
The negative pressure of present embodiment produces mechanism, is characterised in that to make the negative pressure that is produced in absorption/flushing unit 102 return back to atmospheric pressure lenitively.That is, the signal generation device 8 of present embodiment through sending the preset signals waveform changes the negative pressure in absorption/flushing unit 102 lenitively, can prevent sneaking into again of bubble thus.
Under the prerequisite of the negative pressure moderate change of signal waveform in making absorption/flushing unit 102 of setting, can be linearity, also can be curve property, also can be the signal waveform of trickle phasic Chang.Curve property waveform has Sin waveform shown in figure 16.Shown in Figure 16 (a); If will be made as the Sin waveform from the signal waveform that signal generation device 8 is exported; The pressure of then being supplied from adjuster 38 changes shown in Figure 16 (b); And the negative pressure of injector 37 is shown in Figure 16 (c), can prevent the meniscus of nozzle 6 front ends of inkjet head 10 is applied vibration.
The coating control method of present embodiment is implemented according to the order shown in the left map flow chart among Fig. 8.At first, with the electric power starting (beginning) of alburnum apparatus for coating, the alburnum apparatus for coating is carried out Initiation action (initial stage action).Then, set the relevant apparatus parameter (data setting) of the product of producing (kind).This device parameter is such as workpiece size, dispensing area, ejaculation condition etc.If these set completion, then accomplish and carry out the preparation of producing.
Then, workpiece from the workpiece feeding mechanism of common name loading machine, is supplied in the platform of alburnum apparatus for coating.The contained workpiece of putting on platform after being positioned on the platform, is confirmed the coating position on the workpiece, and the relative position deviation of the coating position on alburnum apparatus for coating and the workpiece is proofreaied and correct (aligning).This correction is to implement, and the location of workpiece is utilized camera head such as CCD camera, and captured image is implemented image processing.At this moment, except that the physical correction that distal ends is moved, also carry out the correction to program that robot moves the coordinate position correction of relative program.Through implementing processing so far, just accomplished in order the set coating correct position ground on oriented workpiece on the apparatus platform to be implemented the preparation of coating.If above treatment for correcting finishes, then begin to be coated with operation.
[embodiment 3]
The film build method of present embodiment is, the drop that drips through being dried to after the liquidity, does not just penetrate next drop, and forms the ink-jet application method of film through drippage.Alburnum is used polyimide solution, and substrate uses glass substrate.
Polyimide solution is in order to form semiconducting insulation layer, liquid crystal panel dielectric film.Glass substrate for the dry institute alburnum of drip to can not liquidity, can carry out on the platform that temperature adjusts and year place.
[comparative example]
Utilize existing ink-jet application method,, drip, after 70 micron pitch implement coating, following situation occurs with 30pl/ to the dispensing area at 25mm angle.
(A) horizontal (horizontal direction): with respect to the dispensing area of regulation, peripheral diffusion 0.5 ~ 1.0mm degree.
(B) vertical (short transverse): the dispensing area central portion is 80 ~ 85nm, and edge part then is the height about 1000nm.
[embodiment 3]
By the ink-jet application method of present embodiment,, drip, spray for four times, after 70 micron pitch implement coating, occur as following situation with 8pl/ likewise to the dispensing area of 25mm square.
(A) horizontal (horizontal direction): with respect to the dispensing area of regulation, peripheral diffusion 0.05 ~ 0.1mm degree.
(B) vertical (short transverse): the dispensing area central portion is 80nm ~ 100nm, and edge part then is the height about 80nm ~ 100nm.
As stated, the film build method that can confirm present embodiment is realized useful effect than existing film build method shown in the comparative example.More specifically, can confirm to realize that to the method for present embodiment minimizing is formed concavo-convex on film, reduce the difference of height of whole of film, also realize the effect that the edge part seepage discharge also reduces.
(utilizability on the industry)
The present invention also not only is confined to ink-jet printer, also applicable to various ink mist recordings such as precision spraying/injection device (comprising apparatus for coating), accurate apparatus for coating.Also applicable to the ink jet type patterning, the apparatus for coating/drawing apparatus/printing equipment of purposes such as organic EL display panel, the printing of large colour panel, industrial signature for example.
No matter about ink jet recording method also is that bubble producing methods such as mechanical switch modes such as piezoelectric type or resistance heat injecting type are all applicable.
In addition, also capable of using in the lens coloring step of lens manufacturing industry or the placard and the building materials and ornaments aspect of large-sized print industry.
Claims (9)
1. an ink-jet application control method is characterized in that, comprise,
First step, after the operation that spues of inkjet head, spuing of will the stream in inkjet head filling replaces with alternate material with alburnum;
Second step with the unit member of supply detergent remover, will be cleaned below the stream of inside has been filled the inkjet head of alternate material in covering;
Third step before the operation that just will begin to spue, replaces with alternate material once more to spue and uses alburnum.
2. ink-jet application control method according to claim 1 is characterized in that, in first step and third step, with the unit member that produces negative pressure cover inkjet head below, the liquid suction replacement of will the stream in inkjet head filling.
3. ink-jet application control method according to claim 1 and 2 is characterized in that, when the suction of liquid finishes, based on predefined sinusoidal signal waveform, the negative pressure in the unit member is returned to atmospheric pressure.
4. ink-jet application control method according to claim 1 and 2; It is characterized in that; Carrying the said unit member of work piece platform next door configuration put workpiece, take out of from the post-job workpiece that spues move into to next workpiece between, implement from said first step to third step.
5. ink-jet application control method according to claim 1 and 2 is characterized in that, alternate material is to use the liquid by the low volatility that solvent constituted that possesses the factor that makes the alburnum dissolving.
6. ink-jet application control method according to claim 1 and 2 is characterized in that, the nozzle cap unit, and biding one's time in coating operation etc. is installed in below the inkjet head.
7. ink-jet application control method according to claim 1 and 2 is characterized in that, said unit member has like lower member and constitutes: as the elastomeric abutting member that is connected to the shower nozzle face; Abutting member is secured to the framework above it; The supporting member that constitutes by the elastic component of support frame.
8. ink-jet application control method according to claim 1 and 2 is characterized in that, comprises the 4th step of carrying out virtual injection action.
9. ink-jet application control method according to claim 8 is characterized in that,
Said inkjet head has a plurality of exits wound of bullet,
In the 4th step, confirm to penetrate alburnum from all exits wound of bullet,
In the 4th step, do not penetrate under the situation of alburnum, then comprise the alburnum of in inkjet head, being filled is all discharged from all exits wound of bullet, and the 5th step of filling once again.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007040547 | 2007-02-21 | ||
| JP2007-040547 | 2007-02-21 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008800057642A Division CN101616805B (en) | 2007-02-21 | 2008-02-21 | Cleaning method of ink-jet applying apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102717598A true CN102717598A (en) | 2012-10-10 |
| CN102717598B CN102717598B (en) | 2014-12-17 |
Family
ID=39710109
Family Applications (4)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210186606.XA Active CN102717598B (en) | 2007-02-21 | 2008-02-21 | Control method in ink-jet applying apparatus |
| CN201210186524.5A Active CN102717597B (en) | 2007-02-21 | 2008-02-21 | Nozzle inspecting method and apparatus |
| CN2008800057642A Active CN101616805B (en) | 2007-02-21 | 2008-02-21 | Cleaning method of ink-jet applying apparatus |
| CN201210186764.5A Active CN102717596B (en) | 2007-02-21 | 2008-02-21 | Filming method in ink-jet applying apparatus |
Family Applications After (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210186524.5A Active CN102717597B (en) | 2007-02-21 | 2008-02-21 | Nozzle inspecting method and apparatus |
| CN2008800057642A Active CN101616805B (en) | 2007-02-21 | 2008-02-21 | Cleaning method of ink-jet applying apparatus |
| CN201210186764.5A Active CN102717596B (en) | 2007-02-21 | 2008-02-21 | Filming method in ink-jet applying apparatus |
Country Status (6)
| Country | Link |
|---|---|
| JP (4) | JP5302879B2 (en) |
| KR (4) | KR101411450B1 (en) |
| CN (4) | CN102717598B (en) |
| HK (4) | HK1172293A1 (en) |
| TW (4) | TWI556871B (en) |
| WO (1) | WO2008102837A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108015857A (en) * | 2018-01-24 | 2018-05-11 | 咸阳华清设备科技有限公司 | Pressure water jets impact force feedback protective device |
Families Citing this family (34)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5492633B2 (en) * | 2010-03-29 | 2014-05-14 | 株式会社日立製作所 | Inkjet coating apparatus and method |
| TWI458556B (en) * | 2010-01-25 | 2014-11-01 | Hon Hai Prec Ind Co Ltd | Ink jet printer |
| US8454120B2 (en) * | 2010-03-16 | 2013-06-04 | Seiko Epson Corporation | Liquid ejection device |
| CN102233308B (en) * | 2010-04-23 | 2015-09-02 | 赛恩倍吉科技顾问（深圳）有限公司 | Spray equipment |
| JP5845633B2 (en) * | 2011-05-26 | 2016-01-20 | セイコーエプソン株式会社 | Droplet discharge device |
| EP2540505B1 (en) * | 2011-06-29 | 2014-02-26 | Agfa Graphics N.V. | System and method for cleaning a nozzleplate |
| JP5871860B2 (en) * | 2013-06-28 | 2016-03-01 | 京セラドキュメントソリューションズ株式会社 | RECOVERY MECHANISM OF RECORDING HEAD, INKJET RECORDING DEVICE EQUIPPED WITH THE RECOVERY MECHANISM, AND RECOVERY METHOD OF RECORDING HEAD |
| JP2016010855A (en) * | 2014-06-27 | 2016-01-21 | 住友重機械工業株式会社 | Droplet discharge device and nozzle head cleaning method |
| JP6565331B2 (en) | 2014-06-30 | 2019-08-28 | 株式会社リコー | Nozzle inspection apparatus and image forming apparatus |
| KR102379011B1 (en) * | 2014-12-31 | 2022-03-29 | 세메스 주식회사 | Apparatus and method for treating substrate, and discharge rate measuring unit |
| KR102379012B1 (en) * | 2014-12-31 | 2022-03-29 | 세메스 주식회사 | Apparatus and method for treating substrate, and discharge rate measuring unit |
| CN104772989B (en) | 2015-04-22 | 2016-08-17 | 京东方科技集团股份有限公司 | A kind of spray head cleaning device |
| US10583466B2 (en) * | 2015-09-11 | 2020-03-10 | Hiraide Precision Co., Ltd. | Three-dimensional transport type bench top cleaning device |
| CN108885183B (en) | 2016-04-29 | 2021-11-05 | 惠普发展公司，有限责任合伙企业 | Drop detector |
| TWI655103B (en) * | 2016-08-31 | 2019-04-01 | 東友科技股份有限公司 | Inkjet printer and inspecting apparatus thereof |
| TWI598152B (en) * | 2016-09-02 | 2017-09-11 | 心誠鎂行動醫電股份有限公司 | Cleaning method of atomizing device, and atomizing device having the same |
| JP6913350B2 (en) * | 2017-04-28 | 2021-08-04 | 武蔵エンジニアリング株式会社 | Laser soldering method and equipment |
| JP6977350B2 (en) * | 2017-07-13 | 2021-12-08 | 株式会社リコー | Liquid discharge device and liquid discharge method |
| CN107723955B (en) * | 2017-10-10 | 2019-11-29 | 常熟市大晟针纺织品有限公司 | A kind of spray printing drying system for textile |
| JP6925749B2 (en) * | 2018-01-30 | 2021-08-25 | 住友重機械工業株式会社 | Membrane forming method and film forming apparatus |
| CN110174375B (en) * | 2018-02-20 | 2022-01-18 | 细美事有限公司 | Chemical liquid inspection method |
| JP7060839B2 (en) * | 2018-03-05 | 2022-04-27 | 株式会社リコー | Building materials with images, manufacturing methods of building materials with images, and manufacturing equipment for building materials with images |
| JP7082504B2 (en) * | 2018-03-12 | 2022-06-08 | 株式会社Ｓｃｒｅｅｎホールディングス | Nozzle inspection method, nozzle inspection device, and printing device |
| JP7144171B2 (en) | 2018-03-28 | 2022-09-29 | 株式会社日立産機システム | Cleaning device and inkjet recording device |
| JP6713570B2 (en) * | 2019-04-12 | 2020-06-24 | 東芝テック株式会社 | Inkjet device, inkjet printing method, and print processing program |
| CN110220730A (en) * | 2019-06-27 | 2019-09-10 | 宜兴硅谷电子科技有限公司 | A kind of abnormal quality method for detecting applied to character spray printing machine |
| KR20210003358A (en) | 2019-07-01 | 2021-01-12 | 삼성디스플레이 주식회사 | Apparatus and method for manufacturing a display device |
| JP7304001B2 (en) | 2019-08-26 | 2023-07-06 | 株式会社リコー | Drying equipment and printing equipment |
| CN110816069B (en) * | 2019-12-10 | 2021-05-28 | 江苏理工学院 | Product code spraying device |
| KR102334026B1 (en) | 2020-01-07 | 2021-12-03 | 동의대학교 산학협력단 | Self Monitoring Printing Head and Pneumatic Printing System including Self Monitoring Printing Head |
| KR102617400B1 (en) | 2020-08-06 | 2023-12-27 | 세메스 주식회사 | Head cleaning unit and apparatus for treating substrate including the same |
| CN114030303B (en) * | 2020-12-31 | 2022-09-09 | 广东聚华印刷显示技术有限公司 | Ink jet printing method, apparatus and storage medium |
| CN113619284B (en) * | 2021-07-28 | 2022-05-27 | 泰安易捷数字印刷有限公司 | Device is maintained in positive negative pressure washing of shower nozzle |
| CN114274674A (en) * | 2021-12-23 | 2022-04-05 | 东莞市图创智能制造有限公司 | Liquid performance testing equipment with printing function and control method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09174871A (en) * | 1995-12-27 | 1997-07-08 | Rohm Co Ltd | Ink channel cleaning method for ink jet printing head, cleaner and ink channel hydrophilic treating method for the head |
| CN1689817A (en) * | 2004-04-22 | 2005-11-02 | 精工爱普生株式会社 | Droplet discharge device, device for maintaining discharge performance of head, method for maintaining discharge performance of head |
| JP2005338875A (en) * | 2005-07-25 | 2005-12-08 | Seiko Epson Corp | Apparatus for manufacturing color filter and apparatus for manufacturing display device |
| JP2006076266A (en) * | 2004-09-13 | 2006-03-23 | Fuji Xerox Co Ltd | Inkjet condition detection method and inkjet recording device |
| JP2006240010A (en) * | 2005-03-02 | 2006-09-14 | Olympus Corp | Recording apparatus |
| JP2006289809A (en) * | 2005-04-12 | 2006-10-26 | Seiko Epson Corp | Inkjet printer |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3083409B2 (en) * | 1992-07-24 | 2000-09-04 | キヤノン株式会社 | Ink jet recording apparatus and recovery method for the recording apparatus |
| JP3376027B2 (en) * | 1992-12-04 | 2003-02-10 | キヤノン株式会社 | Fabric image forming apparatus, fabric image forming method, article made of image-formed fabric, and printed matter manufacturing method |
| JP3059678B2 (en) * | 1995-07-14 | 2000-07-04 | キヤノン株式会社 | Method and apparatus for manufacturing color filter |
| JPH1178044A (en) * | 1997-09-03 | 1999-03-23 | Fuji Xerox Co Ltd | Method for cleaning recording head |
| US6158837A (en) * | 1997-09-19 | 2000-12-12 | Xerox Corporation | Printer having print mode for non-qualified marking material |
| US6637853B1 (en) * | 1999-07-01 | 2003-10-28 | Lexmark International, Inc. | Faulty nozzle detection in an ink jet printer by printing test patterns and scanning with a fixed optical sensor |
| JP4247704B2 (en) * | 2001-09-11 | 2009-04-02 | セイコーエプソン株式会社 | Droplet discharge apparatus and liquid filling method thereof, and device manufacturing apparatus and device manufacturing method |
| US6572213B2 (en) * | 2001-10-31 | 2003-06-03 | Hewlett-Packard Development Company, L.P. | System and method for detecting invisible ink drops |
| GB2391199B (en) * | 2002-07-30 | 2006-05-31 | Hewlett Packard Co | Fixer or ink detection in hardcopy apparatus |
| JP4164319B2 (en) * | 2002-08-29 | 2008-10-15 | キヤノン株式会社 | Inkjet recording device |
| JP3956223B2 (en) * | 2002-09-24 | 2007-08-08 | コニカミノルタホールディングス株式会社 | Liquid ejection device |
| JP2004209412A (en) * | 2003-01-06 | 2004-07-29 | Seiko Epson Corp | Liquid drop discharge device, electro-optical device, method for producing electro-optical device and electronic apparatus |
| KR20050013491A (en) * | 2003-07-28 | 2005-02-04 | 닛토덴코 가부시키가이샤 | Inspection method and inspection system of sheet type product |
| JP2005279958A (en) * | 2004-03-26 | 2005-10-13 | Fuji Photo Film Co Ltd | Printing state detector and its method |
| US7438407B2 (en) * | 2004-09-15 | 2008-10-21 | Masonite Corporation | Method and apparatus for creating an image on an article, and article resulting therefrom |
| US7824001B2 (en) * | 2004-09-21 | 2010-11-02 | Z Corporation | Apparatus and methods for servicing 3D printers |
| JP4100385B2 (en) * | 2004-09-22 | 2008-06-11 | セイコーエプソン株式会社 | Multilayer structure forming method, wiring board manufacturing method, and electronic device manufacturing method |
| JP4501615B2 (en) * | 2004-09-22 | 2010-07-14 | 富士ゼロックス株式会社 | Discharge state confirmation method using liquid confirmation film |
| KR20070097500A (en) * | 2005-01-14 | 2007-10-04 | 캐보트 코포레이션 | Security features, their use, and processes for making them |
| JP2006239899A (en) * | 2005-02-28 | 2006-09-14 | Seiko Epson Corp | Pattern forming method, identification-code forming method, droplet ejector, manufacturing method for electro-optic device, and electro-optic device |
| JP4779773B2 (en) * | 2005-06-23 | 2011-09-28 | セイコーエプソン株式会社 | Color element forming method, electro-optic device manufacturing method, and droplet discharge device |
| CN1883820A (en) * | 2005-06-23 | 2006-12-27 | 精工爱普生株式会社 | Color element forming method, electro-optical device manufacturing method, electro-optical device, and electronic device |
| CN101071187A (en) * | 2006-05-09 | 2007-11-14 | 虹创科技股份有限公司 | Thinfilm pattern layer manufacturing method |
-
2008
- 2008-02-21 TW TW103106251A patent/TWI556871B/en active
- 2008-02-21 WO PCT/JP2008/052934 patent/WO2008102837A1/en active Application Filing
- 2008-02-21 KR KR1020097016668A patent/KR101411450B1/en active IP Right Grant
- 2008-02-21 JP JP2009500228A patent/JP5302879B2/en active Active
- 2008-02-21 KR KR1020147003667A patent/KR101540350B1/en active IP Right Grant
- 2008-02-21 KR KR1020147003669A patent/KR101521901B1/en active IP Right Grant
- 2008-02-21 CN CN201210186606.XA patent/CN102717598B/en active Active
- 2008-02-21 TW TW103106250A patent/TWI556870B/en active
- 2008-02-21 TW TW103106249A patent/TWI556869B/en active
- 2008-02-21 KR KR1020147003668A patent/KR101471500B1/en active IP Right Grant
- 2008-02-21 TW TW097106211A patent/TWI430843B/en active
- 2008-02-21 CN CN201210186524.5A patent/CN102717597B/en active Active
- 2008-02-21 CN CN2008800057642A patent/CN101616805B/en active Active
- 2008-02-21 CN CN201210186764.5A patent/CN102717596B/en active Active
-
2010
- 2010-02-23 HK HK12112370.1A patent/HK1172293A1/en unknown
- 2010-02-23 HK HK10101889.0A patent/HK1134063A1/en unknown
- 2010-02-23 HK HK12112371.0A patent/HK1172294A1/en unknown
- 2010-02-23 HK HK12112369.4A patent/HK1172292A1/en unknown
-
2013
- 2013-06-21 JP JP2013130467A patent/JP5631448B2/en active Active
- 2013-06-21 JP JP2013130468A patent/JP5597753B2/en active Active
- 2013-06-21 JP JP2013130469A patent/JP5619962B2/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09174871A (en) * | 1995-12-27 | 1997-07-08 | Rohm Co Ltd | Ink channel cleaning method for ink jet printing head, cleaner and ink channel hydrophilic treating method for the head |
| CN1689817A (en) * | 2004-04-22 | 2005-11-02 | 精工爱普生株式会社 | Droplet discharge device, device for maintaining discharge performance of head, method for maintaining discharge performance of head |
| JP2006076266A (en) * | 2004-09-13 | 2006-03-23 | Fuji Xerox Co Ltd | Inkjet condition detection method and inkjet recording device |
| JP2006240010A (en) * | 2005-03-02 | 2006-09-14 | Olympus Corp | Recording apparatus |
| JP2006289809A (en) * | 2005-04-12 | 2006-10-26 | Seiko Epson Corp | Inkjet printer |
| JP2005338875A (en) * | 2005-07-25 | 2005-12-08 | Seiko Epson Corp | Apparatus for manufacturing color filter and apparatus for manufacturing display device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108015857A (en) * | 2018-01-24 | 2018-05-11 | 咸阳华清设备科技有限公司 | Pressure water jets impact force feedback protective device |
Also Published As
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN101616805B (en) | Cleaning method of ink-jet applying apparatus | |
| KR100743943B1 (en) | Liquid discharging apparatus, method of cleaning head, electro-optical device, method of manufacturing electro-optical device, and electronic apparatus | |
| US20070252863A1 (en) | Methods and apparatus for maintaining inkjet print heads using parking structures with spray mechanisms | |
| KR20070106472A (en) | Methods and apparatus for maintaining inkjet print heads using parking structures with spray mechanisms | |
| JP6992255B2 (en) | Liquid sprayer | |
| JP2007008103A (en) | Cleaning and holding device, printer, holding method for printing member, and printing method | |
| WO2016169372A1 (en) | Sprayer cleaning device | |
| JP2004216642A (en) | Ink jet recorder, cleaning method of its ink jet head, process for manufacturing image display element using ink jet recording method and process for manufacturing optical recording medium | |
| US20100009065A1 (en) | Droplet jetting applicator and method of manufacturing coated body | |
| KR100550026B1 (en) | Method and apparatus of forming film, method and apparatus of manufacturing device | |
| JPH10282329A (en) | Manufacture of color filter and its device | |
| KR20110012730A (en) | Head cleaning unit, and chemical liquid discharging apparatus using the same | |
| KR20110063145A (en) | Head cleaning unit and apparatus of dispecsing treating fluid with the same | |
| JP2010228300A (en) | Fluid jet apparatus and cleaning method | |
| CN203110522U (en) | Liquid injection device | |
| JP2008055356A (en) | Coating apparatus for solution | |
| JP2009145525A (en) | Film forming device of alignment layer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1172293 Country of ref document: HK |
|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| REG | Reference to a national code |
Ref country code: HK Ref legal event code: GR Ref document number: 1172293 Country of ref document: HK |