CN101616805A - The cleaning method of ink-jet coating apparatus, nozzle check method, coating control method, and film build method - Google Patents

Abstract

The invention provides a kind of cleaning method, nozzle check method, coating control method, and film build method of ink-jet coating apparatus.Ink-jet head cleaning method is to cover inkjet head with unit member, and spray by unit member effect suction force being made detergent remover carry out given time, and come dry in the state effect suction force that inkjet head and unit member are only left a little.Ink-jet application control method is, will replace with the alternate material of low volatility with the liquid material spuing of filling of stream after the operation that spues, and before the operation that to be ready beginning to spue, and alternate material replaced with to spue once again use the liquid material.The inspection method of inkjet head is, makes the liquid material that ejects from inkjet head, drip in the inspection different of drippage place with the reflectivity at non-drippage place with member on.The ink-jet film build method is, the droplet drying on the workpiece that step is sprayed before waiting for to liquidity not, with the liquid material towards contact or the position of the liquid material drop that step is dripped before partially overlapping spray.

Description

The cleaning method of ink-jet coating apparatus, nozzle check method, coating control method, and film build method

Technical field

The present invention relates to a kind of ink mist recording shower nozzle is arranged cleaning method, nozzle check method, coating control method, and film build method of ink-jet coating apparatus of (hereinafter referred to as " inkjet head ") of possessing, particularly a kind of in order to the cleaning method that will remove at accompanying dirty, the chip of the nozzle face of inkjet head and periphery thereof, impurity etc., nozzle check method, coating control method, and film build method.

In addition, the inkjet head in this specification, there is no particular limitation, is to possess the inkjet head that single or multiple nozzle is arranged.

Background technology

In the ink-jet recording apparatus, in order to keep high-quality recording quality, just must spue at the printing ink of ink mist recording shower nozzle face institute residual ink, impurity etc. are removed.

Disclosing in the patent documentation 1 has, and makes the wiping scraper plate relatively to the face that spues of the printing ink in shower nozzle, by carrying out in the method that wiping action cleans, in order to promote cleaning performance, just studies about the material of wiping scraper plate, angle, the way of contact etc.

Disclosing in the patent documentation 2 has, discharge opening is provided with the absorption of inks slit in the downstream of the answer direction of operating of described scraper plate cleaning relatively, to scrape the printing ink utilization of getting through described scraper plate and have the absorption of inks slit that is parallel to the pump orifice that a plurality of discharge openings and slit-shaped be provided with, draw described printing ink with the method for lifting performance etc.

Disclosing in patent documentation 3 has, and nozzle from rose towards inkjet head and periphery thereof blow out and implement after the cleaning of described nozzle face, and utilizes scraper plate to strike off etc. the detergent remover that is attached to the nozzle of inkjet head and periphery thereof.

Disclosing in the patent documentation 4 has, the drop of the alignment film method that spues, make inkjet head with a plurality of nozzles of arranging with both determining deviations, substrate is relatively moved, and from described nozzle with spue method on described substrate of the drop of alignment film, wherein, the direction that described inkjet head relatively moves to described substrate, be to constituting cancellate line of pixels column direction in the described substrate, being set angle and tilting.

Disclosing in the patent documentation 5 has, and film forming device includes: have a plurality of nozzles of arranging at certain intervals respectively, possess the shower nozzle of single or multiple inkjet head supporting structure is arranged; And has on the orthogonal direction of these a plurality of nozzle arrangement directions the substrate conveyance mechanism of the substrate conveyance platform that can between these a plurality of nozzles, relatively move; And from described a plurality of nozzles film formation is sprayed on the substrate surface that is carried on the described substrate conveyance platform with solution, and implement coating and film forming non-contact type thin film formation device; It is characterized in that possessing and have: innerly at least be provided with described substrate conveyance platform, inkjet head, and described shower nozzle supporting structure be contained in inner poor as the vacuum of spraying the coating film forming chamber; And spray coating film forming in order under reduced pressure atmosphere, to implement, and with the inner decompression means of implementing decompression of described vacuum tank.

Disclosing in the patent documentation 6 has, alignment film formation method, and possessing has: use inkjet nozzle that alignment film material is dripped with drop, by the droplet patterns of this drippage, check the inspection step that described inkjet nozzle is unusual; And when checking that at this step judges that droplet patterns is in set scope, just make described ink-jet relative with substrate to, and use described inkjet nozzle alignment film material to be dropped in the film forming step of the alignment film that forms on this substrate with drop.

Disclosing in the patent documentation 7 has, the manufacture method of device, and the pattern that includes substrate forms the zone, from drop the spue manufacture method of device of step of fluent material of shower nozzle that spues; It is characterized in that including: to form the spue rinsing step of described fluent material of set zone the zone except that described pattern.

Patent documentation 1: TOHKEMY 2004-291364 communique

Patent documentation 2: TOHKEMY 2004-42571 communique

Patent documentation 3: TOHKEMY 2002-19132 communique

Patent documentation 4: TOHKEMY 2006-320839 communique

Patent documentation 5: TOHKEMY 2006-289355 communique

Patent documentation 6: TOHKEMY 2006-058772 communique

Patent documentation 7: TOHKEMY 2003-282245 communique

Summary of the invention

(problem that invention institute desire solves)

The object of the present invention is to provide a kind of cleaning method that solves the ink-jet coating apparatus of aftermentioned technical problem, nozzle check method, coating control method, and film build method.

(means of dealing with problems)

The 1st invention is an ink-jet head cleaning method, it is characterized in that, purification zone with inkjet head, the unit member that utilization has detergent remover supply opening and pump orifice covers, and pass through from pump orifice effect suction force, from relative with pump orifice to the detergent remover supply opening, spray detergent remover towards purification zone and cleaned.

The 2nd invention is, in the 1st invention, after described clean, inkjet head and unit member only left a little, by to unit member effect suction force, makes the purification zone drying of inkjet head.

The 3rd invention is that in the 1st or 2 inventions, detergent remover is to use by the liquid that solvent constituted with the factor that makes the dissolving of liquid material.

The 4th invention is the inspection method of inkjet head, makes the liquid material that nozzle ejected that has from inkjet head, drips in checking to use member, and checks described nozzle according to the droplet patterns of drippage; The inspection method of described inkjet head is characterised in that described inspection member is to be made of the liquid material drippage place material different with the reflectivity at non-drippage place.

The 5th invention is that in the 4th invention, described inspection member is the film that the drippage owing to the liquid material dissolves.

The 6th invention is an ink-jet application control method, it is characterized in that, after the operation that spues of inkjet head, spuing of will the stream in inkjet head filling replaces with the low volatility alternate material with the liquid material, and before the operation that just will begin to spue, alternate material replaced with to spue once more use the liquid material.

The 7th invention is that in the 6th invention, alternate material is to use by the liquid that solvent constituted that possesses the factor that makes the dissolving of liquid material.

The 8th invention is the ink-jet film-forming method, implements the system film by a plurality of injecting steps; Described method is characterised in that, waits on the workpiece that previous step sprays droplet drying to the immobilising degree, the liquid material sprayed to the liquid material drop with the previous step drippage contact or partly overlapping position.

The 9th invention is in the 8th invention, to increase the number of times of injecting step, and reduce emitted dose each time.

The 10th invention is in the 8th or 9 inventions, to form wiring pattern by film.

(invention effect)

(1) about the cleaning of inkjet head, because solids such as scraper plate do not touch the nozzle and the periphery thereof of inkjet head, so can under the situation that abrasion dust does not take place, clean inkjet head.

In addition, because use detergent remover, so, still can clean with powerful cleaning strength in situations such as liquid materials such as printing ink drying.

In addition, also have and can shorten the activity duration, can cheap feature of making.

(2) the nozzle unfavorable condition of inkjet head can be detected with high visual identity, visual identity can be improved significantly in the particularly transparent liquid material.

(3) the coating control problem of solution inkjet head can be carried out stable disgorging motion.Particularly to the higher effect of high-volatile liquid material tool.

(4) in film forming,, can dwindle the thickness difference of whole face than existing gimmick by ink-jet.

Description of drawings

Fig. 1 a is the whole approximate vertical view that possesses the device of the wiper mechanism that embodiment 1 is arranged.

Fig. 1 b is the whole summary side elevation that possesses the device of the wiper mechanism that embodiment 1 is arranged.

Fig. 2 is the summary description figure of wiper mechanism one form of expression embodiment 1.

Fig. 3 is the summary structural map of another form of wiper mechanism of expression embodiment 1.

Fig. 4 a is the structure vertical view of the clean unit of expression embodiment 1.

Fig. 4 b is the general structure side sectional view of the clean unit of expression embodiment 1.

Clean step and drying steps key diagram that Fig. 5 implements for the clean unit of embodiment 1.

Fig. 6 is the clean step and the drying steps flow chart of the inkjet head of embodiment 1.

The nozzle check mechanism key diagram that Fig. 7 relates to for embodiment 1.

Fig. 8 is the flow chart of the coating control enforcement order of expression inkjet head.

Fig. 9 is the simplification notion structural map that is used to illustrate the inkjet head action.

Figure 10 is the pre-treatment action specification figure of the inkjet head in Fig. 9 structure.

Figure 11 is the post processing action specification figure of the inkjet head in Fig. 9 structure.

Figure 12 is the comparative illustration figure that existing thick film forms gimmick and thick film of the present invention formation gimmick.

The wiring pattern of Figure 13 for forming by film-forming method of the present invention.

The maintenance mechanism structural map that Figure 14 relates to for embodiment 2.

Figure 15 is the side view of absorption/flushing unit of expression perspective embodiment 2.

The signal waveform of Figure 16 for being exported from the machine class of embodiment 2.

Symbol description

2 liquid materials

3 detergent removers

4 used detergent removers (waste liquid)

5 negative pressure

6 nozzles

7 switching mechanisms

8 signal generation devices

9 communication member

10 inkjet heads

The 11 liquid materials face that spues

12a, 12b liquid material bottle

13 detergent remover bottles

14 work piece platform

15 personal computers (PC)

16 operation tables

19 pressure transfer pumps

20 clean the unit

21 are subjected to liquid portion

22 drain valves

23 clean lip

24 bottom pump orifices

25 detergent remover supply openings

26 detergent removers reclaim mouth

28 openings

31a, 31b detergent remover nozzle magnetic valve

32a, 32b side nozzle atmospheric open valve

33 supply valves

34a, 34b negative pressure magnetic valve

35 detergent remover supply valves

36 material transfer valves

37 injectors

38 adjusters

40 waste liquid tanks

41 manual joints

51 open and close magnetic valve

52 full quantity sensors

61 abutting member

62 frameworks

63 supporting members

64 installation components

66 joints

71 formal liquid

72 inspection films

73 plates

74 camera heads

75 indirect illuminations

76 transilluminations

The visual field of 77 camera heads

The formal liquid of 78 drippages

81 present and use roller

82 batch and use roller

101 inkjet head control boxes

102 absorption/flushing unit

103 nozzle cap unit

104 video cameras

105 liquid material switch units

106 ink-jets control substrate

107 liquid material jars

108 emergency stop switch

109 base plates

110 crossbeams

112 various pneumatics machines

113 instrument boxes

114 control boxes

121 X-axis travel mechanisms

122 y-axis shift actuation mechanism

123 Z axle travel mechanisms

124 θ axle rotating mechanisms

125 H θ axle rotating mechanisms

151 first valves

152 second valves

The specific embodiment

The present invention is based on relevant following four technological thoughts of ink-jet coating apparatus.

(1) cleaning method and mechanism

[i] problem

The problem of first technological thought is to improve the low situation of removal ability of accompanying drop on the outgoing plane of inkjet head.

In addition, because the size of existing wiper mechanism is bigger, so more the target of miniaturization also belongs to problem to be solved.

Also have, do not use hard scraper plate execution cleaning also to belong to problem to be solved as existing.Reason is if make scraper plate touch nozzle or its peripheral part of inkjet head, and the problem that produces abrasion dust is then arranged.If the generation abrasion dust then becomes the reason that nozzle is stopped up, there are the surrounding enviroment of causing to suffer pollution problems.In addition, if the generation possibility of abrasion dust is arranged, then need in dust free room, use and be restricted.

[ii] purport

For liquid material accompanying on the inkjet head outgoing plane is removed, accompanying liquid material is contacted with the detergent remover (remover) of lysate material, utilize detergent remover that the liquid material is dissolved than the tool effect.

In addition, form the exit wound of bullet that the liquid material is penetrated on described outgoing plane, be important and make its periphery touch detergent remover with having no to omit.Outgoing plane is provided with the inkjet head of a plurality of exits wound of bullet, particular importance.

First technological thought is the detergent remover of supplying from inkjet head outgoing plane one end, on the surface of described outgoing plane, flows, and from reclaiming apart from a supply detergent remover end end farthest.Use detergent remover will on outgoing plane, dissolve by accompanying liquid material, flow to the phase opposite end of outgoing plane simultaneously, can not have omission and efficient thus and outgoing plane is cleaned goodly from the outgoing plane end.

Be preferably, from a plurality of positions of an end of outgoing plane detergent remover be supplied to outgoing plane, and detergent remover reclaimed from a plurality of positions of phase opposite end.Positional number to the supply detergent remover does not need identical with the positional number that detergent remover is reclaimed herein.

More preferably, from the end supply detergent remover of the long side direction side of inkjet head outgoing plane, and detergent remover is reclaimed from the phase opposite end of identical outgoing plane long side direction side.Reason is the mobile distance of detergent remover that can shorten on the ink-jet outgoing plane, can promote clean efficient.

According to inkjet head, also effective for the unit that the size change is big with a plurality of exits wound of bullet.

In addition, moistening through the outgoing plane of cleaning because of detergent remover, but, preferably implement dry in order to shorten the stand-by period.The dry means of the outgoing plane through cleaning are preferably air dry or blow dried, because can prevent that outgoing plane from being polluted.

As mentioned above, if on the inkjet head outgoing plane the adhering to of dripless, then promote accuracy of measurement and the drippage positional precision of drop on workpiece from the emitted drop of inkjet head.

The detergent remover of preferred mode is to be made of the colourless solvent (for example making the solvent of the principal component of printing ink dissolving) that possesses the factor of printing ink dissolving.

But the general employed printing ink of ink-jet printer can be categorized as dyestuff system or pigment system.So-called " dyestuff " is meant and utilizes mounting medium to disperse as molecule or fused colouring agent.Mounting medium at room temperature is in a liquid state or is solid-state.Common employed mounting medium is the mixture of water or water and organic cosolvent.Be principal component with water generally, and contain colouring agent therein and in order to prevent that situations such as obstruction from containing such as wetting agents such as glycerine.When mounting medium is to use the situation of water, generally water-fast fastness shortcoming on the low side also appears in this kind printing ink.

So-called " pigment " disperses or suspends with the small-particle form though be meant and be insoluble in the mounting medium, usually for unlikely generation cohesion and deposited phenomenon, utilizes dispersant and is the colouring agent of stabilization.This kind compound majority is known, for example exists to use interfacial agent or dispersant to give corpusculed pigment such as organic pigment or carbon black, and the pigment ink that uses by being scattered in the medium such as water and as colouring agent etc.

Present technique thought and dyestuff system or pigment system are irrelevant all applicable.The viscosity of printing ink is a main flow with the low-viscosity person of tens of cps degree, but under the prerequisite of ejection of can dispersing, also applicable situation more than the middle viscosity of hundreds of cps degree.

In addition, present technique thought also can be used in wiring pattern printing such as printed substrates, micro parts be implemented the coating or the employed functional ink of situation such as the printing of outdoor light resistance display material, UV fixed oil ink print of lubricant.

[iii] enforcement order

The cleaning of inkjet head is to implement (with reference to Fig. 6) according to the order of A～D step.In addition, " B. cleans operation " describes with the order example of structure shown in Figure 3.

(the A. inkjet head is to the arrangement of wiper mechanism)

The inkjet head 10 and the clean unit 20 of wiper mechanism are connected.That is, make below the inkjet head 10, clean the mode that is subjected to liquid portion 21 that unit 20 central portions are the concavity setting, be connected to and clean above the unit 20 to cover.Cleaning lip 23 (cleaner lip) just becomes below the inkjet head 10 and the contact-making surface above the clean unit 20.

(B. cleans operation)

1) opens detergent remover nozzle magnetic valve 31a, 31b, and be communicated in the stream that is connected via this magnetic valve 31a, 31b.

2) utilize being communicated with between side nozzle atmospheric open valve 32a, 32b blocking-up and atmosphere, and be positioned at the position that is connected state with the stream that is connected via this relief valve 32a, 32b.(utilize relief valve 32a will clean unit 20 and be connected, and utilize relief valve 32b that magnetic valve 31b is connected with drain valve 22 with magnetic valve 31a.)

3) utilize drain valve 22, make injector 37, be connected, and open negative pressure magnetic valve 34a, 34b with the liquid portion 21 that is subjected to of clean unit 20.

4) utilize to described 3) till step, to cleaning the stream of unit 20, produce negative pressure by injector 37, stored detergent removers in the detergent remover bottle 13 are supplied to clean unit 20.

5) be supplied to the detergent remover of cleaning unit 20, be supplied in inkjet head 10 from detergent remover supply opening 25.Detergent remover supply opening 25 forms near the following periphery of ink-jets 10, from the detergent remover that detergent remover supply opening 25 is discharged, is supplied in efficiently near the outer circumference end below the inkjet head 10.

6) to the inkjet head 10 following detergent removers of being supplied, below inkjet head 10, flow, and formed detergent remover reclaims mouth 26 near the opposite end mutually of the detergent remover supply side below ink-jet 10, be recovered in once again and clean in the unit 20, or before arriving detergent remover recovery mouth 26, leave below the inkjet head 10, clean being subjected in the liquid portion 21 of unit 20 and be recovered in.Be subjected to liquid portion 21 to be communicated in drain valve 22, drain valve 22 then be positioned at via other stream of drain valve 22, with the position that is communicated with blocking-up that is subjected to 21 in liquid portion, thereby in being subjected to liquid portion 21, be detained detergent remover.

Reclaim mouthfuls 26 from detergent remover and flow in the detergent remover of cleaning unit 20, be recovered in the waste liquid tank 40 via drain valve 22 and injector 37.

7) through fully implement clean after, detergent remover nozzle 31a, 31b are closed, and negative pressure are closed with magnetic valve 34a, 34b, and make side nozzle atmospheric open valve 32a, position that 32b is positioned to be connected with atmosphere.Thus, stop detergent remover, be subjected to the pressure of liquid portion 21 to become atmospheric pressure from negative pressure to cleaning the supply of unit 20.

(disengaging of C. inkjet head self-cleaning mechanism)

Make to leave below the inkjet head 10 and clean above the unit 20, below inkjet head 10 and between above the clean unit 20, form the gap.This gap is based on the follow-up drying operation that will implement, and is made as the distance that produces suitable air-flow.

(D. drying operation)

1) for waste liquid tank 40 is connected with clean unit 20, switch drain valve 22, negative pressure is opened with magnetic valve 34a, 34b.

2) thus, the liquid portion 21 that is subjected to that cleans unit 20 is connected with waste liquid tank 40, and to being subjected to liquid portion 21 effect negative pressure, just flowed towards waste liquid tank 40 by detergent remover stored in the liquid portion 21, and the detergent remover that becomes waste liquid is by waste liquid tank 40 recovery.

3) in addition, below inkjet head 10 and between above the clean unit 20, the gap is set, and flowed in by the atmosphere of the negative pressure of liquid portion 21 payment from described gap to be subjected to the liquid portion 21.The atmospheric action of flowing in this gap is that detergent remover accompanying inkjet head 10 below is dripped, and the detergent remover that drips drips in being subjected to liquid portion 21, and by waste liquid tank 40 recovery.In addition, also can by below inkjet head 10 with the distance adjustment of 20 of clean unit, adjust air-flow (negative pressure).

4) stored detergent remover is recycled to after the waste liquid tank 40 in being subjected to liquid portion 21, if also keep this state, then in described gap flow air act as make below the inkjet head 10 dry.Below inkjet head 10, be formed with the exit wound of bullet that penetrates the liquid material, carry out drying, so described exit wound of bullet can be remained in extremely clean state because can below this, can not touch the situation of other material.

5) with below the inkjet head 10 fully after the dryings, make negative pressure with magnetic valve 34a, 34b action and be positioned at detent position, stop the 20 pairs of negative voltage supplies that are subjected to liquid portion 21 in clean unit.

6) then, make supply valve 33 produce action, and inkjet head 10 is connected with liquid material supply bottle 12, liquid material stream is integrated into the state that the liquid material can be supplied in inkjet head 10.

[iv] effect

According to the first illustrated as described technological thought, clean because utilize detergent remover to implement, so can not produce abrasion dust.

In addition, because be the principle that detergent remover is sprayed of being used for of utilizing negative pressure, so if inkjet head does not connect airtight and cleans the unit then do not supply detergent remover.So,, can prevent from the situation that detergent remover sprays outside cleaning the unit is taken place even, still can stop the supply of detergent remover because of vacuum breaking just in case inkjet head leaves mutually with clean unit.

In addition, because drying operation also is to utilize suction function to implement, can prevent that therefore the outside of cleaning the unit from suffering the pollution of detergent remover.

(2) nozzle check method and mechanism

[i] problem

Existing ink-jet coating apparatus is owing to belong to ink-jetting style, thus because of nozzle fault, nozzle towards, nozzle by reasons such as liquid material obstructions, cause that the problem that can't suitably be coated with the necessary amount drop to necessity place is arranged.

In addition, such as patent documentation 6 announcement, on checking, drip the liquid material and in the inspection method implemented with film, because behind drippage, till arriving the image identification camera, the shape of drop has collapsed diffusing, even, still can't precision implement inspection goodly so droplet profile is implemented image identification.

[ii] purport

Second technological thought such as patent documentation 6 announcement, belong to by the liquid material is dripped and carry out nozzle check in checking with member (being subjected to a thing).Being different from patent documentation 6 parts is: be not to be conceived to the liquid material (drop) that is coated with, but be subjected to drip the contrast of part that the coating of liquid material is arranged in the thing and other parts.

The present invention of preferred mode is be made of with film the inspection of tool dissolubility material by a thing.Thus, even to the transparent liquid material of visual identity difference, this liquid material place of drippage still can dissolve, and makes inspection produce muddy (transparency changes or is opaque) with film.So the visual identity height at drippage place can detect the part of dripping easily.Effect when particularly using high grade of transparency fluent material is more remarkable.

The liquid material that is subjected to drip the corresponding ejaculation of thing of liquid material drippage is suitably selected, and the reflectivity that focuses on liquid material drippage part can change.If it is dissolved to be subjected to drip the drippage place of thing, then can changes reflectivity, so can utilize image processing to capture the drippage place accurately because of diffuse reflection etc.Can be the combination that is subjected to drip thing and liquid material that is changed reflectivity by drippage, also can be that the liquid material infiltrates the mode that is subjected to drip in the thing.The liquid material infiltrates the mode that is subjected to drip in the thing, especially effectively, not with the fluent material of solvent as principal component, for example is the fluent material of solvent with water.

Be preferably, be subjected to drip thing in the just dissolving rapidly (or infiltration) of the moment of liquid material drippage.Reason is that drippage vestige diameter can enlarge if dripped in the retention time that is subjected to drip the liquid material above the thing longlyer.Be preferably, do not use the material of diffusion when dissolving, and use a thing that is subjected to that dissolves in (or infiltration) material in the mode that runs through the below.Be the fluent material of solvent for example, be preferably and use the polystyrene film with toluene.Be preferably, be subjected to drip the thing thickness setting and be subjected to drip the thing back side for not dissolving to reach because of the drippage of liquid material.

It is transparent being preferably and being subjected to a thing, but may not be transparent, also pigmentable.It is good with the identity of non-drippage part to focus on dripping part.Be subjected to drip a thing yes and constitute, but comprise that also surface-coated, a plurality of films form the situation of stratiforms by homogenous material.

The liquid material that is subjected to drip the thing drippage is discerned, can be used such as sensing apparatus such as camera heads such as CCD camera, laser sensors.

Image processing is that for example to comprising the shooting visual field image at drippage place, acquisition of execution edge or binaryzation capture the drippage place thus.

[iii] enforcement order

To the inspection step of nozzle, describe with the order example of constructing shown in Fig. 7 (a).

1) makes and batch, make new inspection be positioned at inkjet head 10 belows with film 72 with roller 82 rotation.Herein, the inspection that is positioned at inkjet head 10 belows is by plate 73 location with film 72, correctly keeps and the distance of 10 of inkjet heads.

2) the formal liquid 71 that from inkjet head 10, spues, and drip in checking with above the film 72.By drippage inspection is dissolved with film 72, and stay the vestige of drippage.

3) make again and batch, and make the drippage position of checking with film 72 be positioned at camera head 74 tops with roller 82 rotation.

4) utilizing camera head 74 to take checks with film 72.In addition, the shooting of camera head 74 can make inspection stop to implement afterwards with film 72 again, also can implement under the state that inspection is moved with film 72.

5) according to by the obtained image data of camera head 74, check the state of inkjet head 10.Reach " diameter " from " the coming off " of dripping trace and just can check the obstruction item, and can check the unfavorable condition of dispersing from dripping departing from just of position.

(3) coating control method

[i] problem

Problem is: by the nozzle that prevents inkjet head unfavorable conditions such as obstruction take place, realize stablizing the printing ink disgorging motion, and have required precision.

When liquid material disgorging motion stops, near the stream drying the exit wound of bullet of inkjet head, because of the liquid material increase glutinousization, from the liquid material flight bending situation of separating out the liquid material that stops up, spues of solid constituent, cause that the problem that can't stablize disgorging motion is arranged.

In addition, if the stability that spues of liquid material worsens, have or not legal system to produce to require the problem of required precision product, in the volume production process, spue operation till next workpiece is implemented the operation that spues from what a workpiece was carried out, must implement that workpiece is taken out of, processing such as the moving into/locate of next workpiece, registration process.During this period, inkjet head does not spue operation and must wait for, but the problem of dry-out phenomenon takes place the liquid material that causes in inkjet head being filled because of wait easily.

[ii] purport

The 3rd technological thought is characterised in that: after the operation that spues, the liquid material is used in spuing of being filled in will the stream in inkjet head, replace with low volatility liquid material (alternate material), and before the operation that to be ready beginning to spue, alternate material is replaced with to spue once more use the liquid material.Herein, alternate material is preferably the liquid that the liquid or the tool of liquid material tool dissolution are cleaned effect.

Be preferably, after the stream that alternate material is filled in the inkjet head, append below the inkjet head that forms the exit wound of bullet that penetrates the liquid material and implement the clean step of cleaning.

Fill and the inkjet head of cleaning step through described alternate material, it is residual not have the liquid material, even if in the operation that spues is waited for, still the aneroid material increases glutinousization, separates out the misgivings of solid constituent from the liquid material.So, can get rid of the generation of described problem up hill and dale.

According to present technique thought, even because of factors such as unexpected fault cause being in for a long time the operation stand-by period that spues, the separating out/solidify of still unlikely generation solid constituent, spray nozzle clogging situation.Also have,, therefore the fresh liquid material can be used on the workpiece because the liquid material was filled in the inkjet head before the operation that to be ready spuing.

[iii] enforcement order

The coating operation is implemented in the following order.At first, nozzle cap unit that will institute's attaching below inkjet head breaks away from.The nozzle cap unit keeps clean for making the exit wound of bullet that is formed at below the inkjet head, and prevent with inkjet head that described exit wound of bullet is connected in stream in the fluid (alternate material) of being filled unnecessary evaporation takes place, carry out attaching and bide one's time in coating operation etc.

After the nozzle cap unit breaks away from, just in inkjet head, fill the liquid material that penetrates.Stream in the inkjet head before this liquid material is filled is filled with the fluid thing that is different from the liquid material that is called alternate material.Alternate material is as previously mentioned bright, is preferably the effect that has the dissolving of liquid material.Like this, liquid material filling operation covers with the described exit wound of bullet of absorption/flushing unit with inkjet head, and applies negative pressure and after aspirating the alternate material inkjet head in and discharging, similarly utilize suction action to carry out the printing ink filling again.That is, the maintaining method of the inkjet head of being implemented is with unit member the nozzle that inkjet head was had to be covered, and produces negative pressure and the maintaining method of pumping liquid; Wherein be provided with: unit member is produced the waste liquid tank that mechanism is connected with negative pressure; The low viscous liquid storage portion that is communicated with inkjet head; The ink containment portion that is communicated with inkjet head; And make inkjet head select the liquid switching mechanism that a ground is connected with low viscous liquid storage portion or ink containment portion; Low viscous liquid storage portion is connected with inkjet head, and makes unit member produce negative pressure, and fill low viscous liquid in inkjet head, the follow-up ink containment portion that makes is connected with inkjet head, and fills printing ink in inkjet head.

In inkjet head, fill to penetrate after the liquid material, the liquid material is penetrated other set position outside workpiece, and confirm whether to have certain ejaculation (virtual injection action).Particularly be provided with the situation of a plurality of exits wound of bullet, must confirm whether penetrate the liquid material from all exits wound of bullet when inkjet head.Confirm in the operation that at this do not penetrating under the situation of liquid material from all exits wound of bullet, then the liquid material that will be filled is all discharged, and fills once again in inkjet head.Implement with the method that alternate material is replaced with the liquid material.

After recharging, implement virtual injection action once again, and confirm whether penetrate the liquid material from all exits wound of bullet.If confirm to penetrate the liquid material from all exits wound of bullet, then make inkjet head and mounting have the platform of workpiece to relatively move, and inkjet head is disposed at coating position on the workpiece, implement to be coated with operation.

If set coating operation is finished, workpiece then is discharged from the workpiece accommodation device of common name unloader.During carrying out that this workpiece discharges, according to described main points, the liquid material of being filled in will the stream in ink-jet is discharged, and implements the operation of filling alternate material at inkjet head.By this operation, the liquid material in the stream of inkjet head is replaced by alternate material.When alternate material has situation with liquid material dissolution, even if in stream also residual a little liquid material, also can solidify so the liquid material can not take place in the stream of inkjet head owing to the alternate material that is dissolved in this filling.

The filling of alternate material is implemented static dissolving with the stream in the inkjet head and is cleaned.After the alternate material filling operation is finished, below inkjet head, implement cleaning.Be preferably, clean the gimmick of utilizing illustrated use detergent remover in described first technological thought and implement.If finished to nozzle cleaning, then the inkjet head internal-external is all cleaned, and becomes the clean state that the aneroid material adheres to.

To be cleaned finished after, attaching nozzle cap unit below nozzle unit, thus prevent the volatilization of alternate material.Each workpiece is repeated to implement above step.

(4) film build method

[i] problem

The existing one-tenth embrane method of ink-jet of using has following two problems.The problem of first short transverse (thickness), another is the problem of horizontal direction.The former is that the coffee stain phenomenon (coffee stain phenomenon) that rises on the ridge appears in the end periphery that can't solve film forming face, and causing film forming to be the problem of homogeneous film thickness.The latter is that diffusing situation is oozed in the end (edge) in film forming face, causes forming the problem of sharp edge line.

Disclosing in the patent documentation 4 has: form one for linking to each other between the solution drop and cause the alignment film thickness to form uneven problem, make substrate be set angle and tilt, still also do not have thoroughly to solve the problem of membrane thickness unevenness.

In addition, the coffee stain phenomenon is the phenomenon in the solution appearance of low-viscosity, becomes the fatal problem of alignment film of LCD assembly.Under the situation of alignment film,, principal component is difficult for dissolving because being polyimides, thus use gamma-butyrolacton, N-methylpyrrole pyridine ketone or the butyl match Lopa Nationality Soviet Union etc. of dissolved material in a large number, and spray coating with the low-viscosity execution, thereby the coffee stain phenomenon will take place easily.

[ii] purport

If the inventor finds to implement coating in the mode that liquid flow can not take place, then can carry out the film forming of whole homogeneous film thickness; And if find to spue and to drip between a plurality of drops on the surface of the work to combine from inkjet head, the seepage situation will appear in edge line, create the 4th technological thought thus.

The 4th technological thought is characterised in that: utilize first of inkjet head to penetrate after action penetrates on workpiece, when the contact position of the liquid material drop that drips through this ejaculation or lap position are penetrated, the drop of wait on workpiece is the not drying regime of liquidity (comprising the partial desiccation state that material stops to move), just implements then and penetrates.

So, if after utilizing first to penetrate the drying of action first emitted drop on the workpiece, second penetrate action later also when the contact position of first drop or lap position are penetrated, second penetrates the later drop of action fluidity still can not occur in conjunction with situation on workpiece.Promptly, be drying regime because penetrate the emitted drop (first drop) of action by first, so can not occur penetrating the contact of emitted drop (second drop) after the action because of second, and take place between so-called drop in conjunction with and the fluid that forms a drop phenomenon in conjunction with situation.

On the other hand, when as have now under situation that fluidity combines appears in first drop and second drop because occur the coffee stain phenomenon more significantly, thereby than the thickness of centre, the thickness of film edge portion thickens.That is, than in conjunction with a preceding drop centre thickness, and edge's thickness between thickness difference, drop centre thickness that forms by combining between drop and the thickness difference between edge's thickness become bigger.But, when between drop, combine and form the situation of single drop, because because of flowing of liquid material forms the height homogenising, thereby after combination, impossible this contact area of visual identity or overlapping region.

At this point, in the present technique thought, since all dry and form film when penetrating action each time, so than the existing gimmick that produces the fluid combination, the integral thickness difference of face can be dwindled.

Figure 12 is the comparison diagram that has injection method and the inventive method during film forms now.Among Figure 12, the liquid material that last figure (a) expression is penetrated on the workpiece combines and is the same existing method, figure below (b) is illustrated on the workpiece each drop that penetrates the emitted first drop group by first, leave and dispose with other adjacent drop, and then the concrete film formation method example that penetrates in the mode of burying each drop gap.In figure below (b), the ejaculation position of implementing the relative first drop group is penetrated towards the right side second penetrates, the relative first drop group's ejaculation position is towards the 3rd penetrating of penetrating of downside, the relative first drop group's ejaculation position the 4th ejaculation that oblique downside penetrates towards the right side.Herein, penetrating second, the 3rd penetrate, the 4th penetrate in the later ejaculation, also is respectively after the state that is dried to the mobile downtrod degree that is penetrated the drop that forms by previous step certainly, just implements the ejaculation of next step.

And present technique thought also not only is confined to the illustrated ejaculation sequence of positions of Figure 12 certainly.Repeatedly penetrate step (injecting step) so long as utilize, the tool systematicness of implementing evenly coating on whole of workpiece penetrates the position and gets final product.Thus, the number of times of ejaculation step also can also can reach more than five times below three times.If increase the number of times that penetrates step, and reduce the coating weight that every single penetrates step, then can dwindle the concavo-convex of surface of the work.Reason be surface of the work concavo-convex, with coating weight have association.In addition, if reduce coating weight, the effect that shortens drying time is arranged also.

In addition,, penetrate by first and move between emitted a plurality of drops (the first drop group), on workpiece, drip, do not contact between drop in the position of leaving mutually when ink jet unit has the situation of a plurality of exits wound of bullet.In the case,, be not dried to and can just implement after the liquidity, can obtain same effect certainly yet the first drop group by the emitted a plurality of drops (the second drop group) of the second ejaculation action.

Droplet drying on the workpiece can be air dry, but rises by the platform temperature that makes the mounting workpiece, and is then can be more promptly in addition dry.

The temperature that makes droplet drying is suitably adjusted according to condition such as liquid assortment class, spacing, ejaculation amount, for example be set at from experimental situation temperature (for example 15～25 ℃) to 150 ℃ scope, be preferably in the scope of experimental situation temperature to 100 ℃, be more preferred from the scope of experimental situation temperature to 50 ℃.

In addition, about making droplet drying, also be suitably to adjust according to condition such as platform temperature, liquid assortment class, spacing, ejaculation amount to drying time that can not liquidity, for example preferably be set at from drippage about 20～100 seconds.

Film build method of the present invention as described above is than existing film build method, because can reduce the seepage discharge of edge part, so applicable to the various uses such as alignment film formation such as LCD assembly.Film build method of the present invention also is applicable to and forms the fine pitch wirings pattern as shown in figure 13 on substrate.That is, existing film build method probably will cause the situation that is connected occurring between wiring because seepage discharge is more, thus can't high density form fine pattern, but according to film build method of the present invention, then can highdensity formation fine pitch wirings.Reason is that film build method of the present invention can significantly reduce the laterally diffusing capacity of (horizontal direction) (among the aftermentioned embodiment 3, diffusing capacity is about 1/10 of existing film build method).Film build method of the present invention is specially adapted to the film formation of thickness for number nm～tens of μ m.

In addition, film build method of the present invention also can be controlled thickness easily.In the existing film build method, the liquid material behind drippage combines with the liquid material that penetrates next time, and forms the same drop, and towards laterally (horizontal direction) diffusion, so difficult control thickness.Put, film build method of the present invention is to being the not liquid material of flow regime behind drippage, penetrating next liquid material and pile up, increase thickness thus at this point, and therefore piling up number of times by control just can control thickness easily.

Below, utilize embodiment to describe at detailed content of the present invention, but the present invention is not subjected to any restriction of embodiment.

[embodiment 1]

The wiper mechanism of present embodiment possesses clean portion 2 is arranged, and this clean portion 2 has the function that inkjet head 1 is ejected the function of detergent remover 12 and ejects air.

Fig. 1 a is the whole approximate vertical view that expression possesses the device of present embodiment wiper mechanism, and Fig. 1 b is the whole summary side elevation of this device of expression.

The device of present embodiment is to make inkjet head 10, implement the ink-jet coating apparatus that is coated with when relatively moving with the work piece platform 14 that is positioned at its below.

Inkjet head 10 is installed on crossbeam 110 via Z axle travel mechanism 123 with H θ axle rotating mechanism 125.

Work piece platform 14 is vacuum adsorption type work piece platform.Also can add temperature in work piece platform 14 and transfer control device.

Relatively moving and the action controls such as cleaning of inkjet head 10 of inkjet head 10 and work piece platform 14 can be carried out by the personal computer (PC) 15 on the set operation table 16 in apparatus for coating next door.

Fig. 2 is the summary description figure of expression present embodiment wiper mechanism one form.

Among Fig. 2, element numbers 42 is the compressed air from CDA (clean dry air), and element numbers 43 is that the CDA suction inlet opens and closes ball valve, and element numbers 44 is that evacuating air opens and closes ball valve, and element numbers 45 is discharge filter (control devices).

Fig. 3 is the summary structural map of another form of expression present embodiment wiper mechanism.

Cleaning unit 20 is in order to when inkjet head 10 is cleaned, and prevents that detergent remover from dispersing in the part of periphery usefulness.Cleaning unit 20 is nozzle face and the peripheral shapes such as opening box that cover from the below thereof that constitute inkjet head 10.Clean unit 20, owing to must use chemical sproof materials such as considering detergent remover, thereby use for example stainless steel, Teflon formations such as (registration marks).

Detergent remover is used for nozzle face and its peripheral accompanying printing ink at inkjet head 10 are rinsed out fully, thereby uses the colourless solvent (making the solvent of the principal component of printing ink dissolving) that possesses the factor of printing ink dissolving.

Fig. 4 a is the structure vertical view that unit 20 is cleaned in expression, and Fig. 4 b is the general structure side sectional view that unit 20 is cleaned in expression.

Clean unit 20, opening 28 is set in cleaning lip 23 centre that are connected to inkjet head 10, and in the edge portion on long limit that a plurality of detergent remover supply openings 25 are relative to setting with a plurality of detergent removers recovery mouth 26.

Key diagram when (a) of Fig. 5 is cleaning.As shown in the drawing, to clean unit 20 and be connected to inkjet head 10, detergent remover sprays near the outer circumference end below 10 from detergent remover supply opening 25 towards inkjet head, and reclaims mouth 26 and reclaimed by liquid portion 21 from detergent remover, implements thus and cleans.

(b) key diagram when being drying of Fig. 5.As shown in the drawing, after the end to be cleaned, make inkjet head 10 and clean unit 20 a little (for example 3mm) leave, utilize the atmosphere that in these gaps, flows, will be on inkjet head 10 accompanying detergent remover blow and fly, and make inkjet head 10 and clean unit 20 dryings.Clean unit 20 and be provided with bottom pump orifice 24, and the waste liquid that is aspirated is stored in the waste liquid tank 40.

The clean step of the present embodiment inkjet head 10 of above institute diagrammatic illustration and the flow chart of drying steps, as shown in Figure 6.

But when producing negative pressure condition in making clean unit 20, the connecting airtight property that inkjet head 10 following (shower nozzle face) and clean unit are 20 is just very important.When the inclination of cleaning the 20 pairs of shower nozzle faces in unit is bigger, the problem that produces the gap is arranged then herein.Therefore, in the present embodiment,, can guarantee to clean the connecting airtight property and the sealing of unit 20 by the structure of traceable shower nozzle face tilt.That is, constitute with softening elastomer, just have the free degree of traceable shower nozzle face tilt, can keep sealing by supporting the supporting member of cleaning unit 20.

In addition, clean unit 20 and be provided with the switching mechanism that makes its butt or be not connected to inkjet head 10.Switching mechanism can adopt general use as lifting use such as mobile platforms such as hand, ball bearing screw type, linear formulas and constitute, there are SURUGA SEIKI corporate system, THK corporate system in for example known mobile platform manufacturer.

(nozzle check mechanism)

The nozzle check mechanism of present embodiment constitutes as shown in Figure 7.

At first, inkjet head 10 is moved with the inspection area of film towards configuration inspection.In the inspection area, each inkjet nozzle state that inkjet head 10 is had is checked.

In the inspection area, the diaphany that the mode with crosscut inkjet head 10 belows that is provided with moves is with film 72.Check with film 72 it is to the deliquescent film of formal liquid 71 tools.Check with film 72 it is to batch in the form of a roll,, can often new inspection be used for inspection with film 72 by batching with the batching of roller by presenting with roller.

Drippage drop from inkjet head 10 is made a video recording by camera head 74.Camera head 74 can be made of general existing C CD camera etc.The mode that (a) expression camera head of Fig. 7 is made of two image identification cameras (area sensor), the mode that (b) expression camera head 74 of Fig. 7 is made of line sensor.In Fig. 7 (b), use indirect illumination 75 and transillumination 76 to improve identification by merging.Which kind of, decide according to key elements such as checking width with film 72, accuracy of detection no matter select mode all to belong to the design item.

Check that with in the film 72 depart from the situation of the drippage that does not have formal liquid 71 or drippage position under the situation of both allocations, nozzle check mechanism then is considered as occurring faults such as spray nozzle clogging, and demonstrates error message.

Fig. 9 is the simplification notion structural map of the action specification of expression inkjet head 10.As shown in Figure 9, inkjet head 10 can optionally be communicated with formal liquid (the liquid material of ejaculation) and detergent remover via liquid material switch unit 105.

Three unit of inboard configuration in the work piece platform side.Three unit that disposed replace with the liquid material in the inkjet head stream alternate material in regular turn or produce in order to alternate material is replaced with the liquid material with the absorption/flushing unit 102 of negative pressure, clean unit 20 that execution below the nozzle is clean, with the nozzle cap unit 103 that carries out capping below the nozzle from the left side towards the right side in Fig. 9.

Figure 10 is the pre-treatment action specification figure of Fig. 9 inkjet head 10 of constructing.Describe at six components shown in Figure 10.And in the switch unit 105, solid line is represented connected state, and dotted line is represented blocking state.

[10-1] is illustrated in and nozzle cap unit 103 is installed below the inkjet head 10, and utilizes be connected with the detergent remover figure of state of switch unit.Belong to the state that coating operation etc. is bide one's time.

[10-2] is expressed as and is coated with operation, and from the figure of inkjet head 10 with the state of nozzle cap unit 103 disengagings.Switch unit 105 is positioned at the position that inkjet head 10 is connected with detergent remover.

[10-3] expression inkjet head 10 is placed in the figure of the state of absorption/flushing unit 102.

[10-4] is placed in inkjet head 10 after absorption/flushing unit 102, utilizes switch unit 105 to switch to the position that the liquid material is connected with inkjet head 10.Then, by to absorption/flushing unit 102 effect negative pressure, replace action (filling action) and carry out inkjet head 10 interior liquid.

After [10-5] expression is filled in the liquid material in inkjet head 10 streams, on absorption/flushing unit 102, implement the figure of virtual injection action.This virtual injection is not utilization such as camera head or sensing apparatus, and whether confirm has the operation of penetrating the liquid material from inkjet head 10 really, but the preparation mobile operational process of before the liquid material in inkjet head 10 streams is formally penetrated operation, being implemented.When execution is taken industry as really in order to carry out nozzle check, be preferably prior execution preparation mobile operational process.Certainly, by confirming the ejaculation in the operation, also can have the preparation mobile operational process concurrently.

[10-6] is illustrated in and makes under the situation that inkjet head 10 moves, and implements the figure of the state of coating operation.

Figure 11 is the post processing action specification figure of Fig. 9 inkjet head 10 of constructing.Describe at six components shown in Figure 11.

Inkjet head 10 moves to the figure of the state on absorption/flushing unit 102 after [11-1] expression end of job to be coated.

[11-2] expression is placed in absorption/flushing unit 102 with inkjet head 10, and liquid material switch unit 105 switches to be connected with the detergent remover figure of state of position of inkjet head 10.

The liquid replacement end of job in the ink-jet shower nozzle 10 is treated in [11-3] expression, and inkjet head 10 breaks away from the figure of the state of absorption/flushing unit 102.

[11-4] expression is placed in inkjet head 10 and cleans unit 20, and implements the figure that cleans operation.Liquid material switch unit 105 remains in the position that inkjet head 10 is connected with detergent remover.

After [11-5] was illustrated in and cleans step, inkjet head 10 moved to the figure on the nozzle cap unit 103.

[11-6] is illustrated in the figure that inkjet head 10 following attachings have nozzle cap unit 103.By the attaching of nozzle cap unit 103, it is clean that exit wound of bullet keeps, and can prevent the unnecessary evaporation of alternate material generation of being filled in the stream inkjet head 10 in.

[embodiment 2]

Figure 14 represents the maintenance mechanism structural map of present embodiment ink-jet coating apparatus.

Inkjet head 10 has a plurality of nozzles 6, and stored printing ink 2 spues and implements printing etc. in will be communicated with by communication member 9 first jar 12.The maintenance of inkjet head 10 is to utilize absorptions/flushing unit 102 to cover at nozzle 6, and makes absorption/flushing unit 102 interior generation negative pressure, and with the printing ink that aspirated etc., is thrown into by in communication member 9 and the waste liquid tank 40 that absorption/flushing unit 102 is communicated with.The butt that absorption/flushing unit 102 and inkjet head are 10 is automatically implemented by switching mechanism 7.Switching mechanism 7 can be that inkjet head 10 is relatively moved, and also can be absorption/flushing unit 102 is relatively moved.In addition, according to industrial field, also can constitute manually to draw/to wash unit 102 switchings.

The maintenance mechanism of present embodiment appends at described existing structure, utilizes second jar 13 that communication member 9 is connected with inkjet head 10 and select a ground to switch inkjet head 10 and first jar 12 or second jars 13 the liquid switch unit 105 that is communicated with.In second jar 13, store the detergent remover 3 of the low viscous liquid that when beginning to safeguard, flows at first.In the present embodiment, the solvent that detergent remover 3 uses printing ink 2 dissolvings.Thus, even also solubilized of the situation of solidifying appears in printing ink 2 in stream.

In addition, as shown in figure 15, the absorption of present embodiment/flushing unit 102 formations have the free degree of traceable shower nozzle face tilt.

Being connected to the abutting member 21 of shower nozzle face, is that the rubber by the elastomeric Xiao Shi A hardness of sclerosis 40～80 degree (being preferably 50～70 degree) (JIS K6253 specification) constitutes, and utilizes modes such as gluing or spiral shell be solid to be secured to above the framework 62.

Framework 62 is by affixed in modes such as gluing or spiral shell are solid and support with the supporting member 63 that softening elastic component (for example rubber or spring) constitutes.Supporting member 63 is for the nozzle face alignment error (three-dimensional inclination) of traceable inkjet head 1, and the also penetrable degree of depth reaches 40～80 (preferable 50～70 degree).Supporting member 63 is fixed in tabular installation component 64.Setting in the bottom surface sections of framework 62 can be with more than one at least suction with through hole i.e. bottom pump orifice 24, the joint 66 that is connected with communication member 9.

According to the described present embodiment absorption/flushing unit 102 that constitutes, can not be subjected under the nozzle face obliquity effects, guarantee connecting airtight property and sealing completely.

The negative pressure of present embodiment produce mechanism by signal generation device 8, pressure transfer pump 19, adjuster 38, and injector 37 constitute, and be communicated in absorption/flushing unit 102 via waste liquid tank 40.In addition, negative pressure produces in the mechanism and also can add the muffler that can absorb air-borne sound.

A plurality of pattern times and waveform voltage signal can be set and login to signal generation device 8, and only select, export arbitrary pattern from the pattern of a plurality of logins.But the signal waveform voltage of adjuster 38 respective signal generation devices 8 carries out the pressure supply.Signal generation device 8 also can be made of for example pulse generator, PC etc.

The pressure that injector 37 can corresponding be supplied from adjuster 38 produces negative pressure.Adjuster 38 can be made of commercially available pneumatics machine with injector 37.

Even not to controlling by adjuster 38 and the negative pressure that is produced by injector 37, also can be to keep under the situation of certain pressure from adjuster 38, by the amount of restriction at the set choke valve of waste side of injector 37 is adjusted, carry out the control of negative pressure.

The negative pressure of present embodiment produces mechanism, is characterised in that to make the negative pressure that is produced in absorption/flushing unit 102 return back to atmospheric pressure lenitively.That is, the signal generation device 8 of present embodiment by sending the preset signals waveform changes the negative pressure in absorption/flushing unit 102 lenitively, can prevent sneaking into again of bubble thus.

Under the prerequisite of the negative pressure moderate change of signal waveform in making absorption/flushing unit 102 of setting, can be linearity, also can be curve, also can be the signal waveform of trickle phasic Chang.The curve waveform has Sin waveform as shown in figure 16.Shown in Figure 16 (a), if will be made as the Sin waveform from the signal waveform that signal generation device 8 is exported, then the pressure of being supplied from adjuster 38 changes shown in Figure 16 (b), and the negative pressure of injector 37 is shown in Figure 16 (c), can prevent from the meniscus of nozzle 6 front ends of inkjet head 10 is applied vibration.

The coating control method of present embodiment is implemented according to the order shown in the left map flow chart among Fig. 8.At first, with the electric power starting (beginning) of liquid material apparatus for coating, liquid material apparatus for coating is carried out Initiation action (initial stage action).Then, set the relevant apparatus parameter (data setting) of the product of producing (kind).This device parameter is such as workpiece size, dispensing area, ejaculation condition etc.If these settings are finished, then finish and carry out the preparation of producing.

Then, workpiece from the workpiece feeding mechanism of common name loading machine, is supplied in the platform of liquid material apparatus for coating.The workpiece of institute's mounting on platform after being positioned on the platform, is confirmed the coating position on the workpiece, and the relative position deviation of the coating position on liquid material apparatus for coating and the workpiece is proofreaied and correct (aligning).This correction is to implement, and the location of workpiece is utilized camera head such as CCD camera, and captured image is implemented image processing.At this moment, except that the physical correction that the platform rotation is moved, also carry out the correction to program that robot moves the coordinate position correction of relative program.By implementing processing so far, just finished for the set coating correct position ground on oriented workpiece on the apparatus platform being implemented the preparation of coating.If above correction processing finishes, then begin to be coated with operation.

[embodiment 3]

The film build method of present embodiment is, drying just penetrates next drop to the drop that is dripped not after the liquidity, and by dripping the ink-jet application method that forms film.The liquid material uses polyimide solution, and substrate uses glass substrate.

Polyimide solution is in order to form semiconducting insulation layer, liquid crystal panel dielectric film.Glass substrate extremely can liquidity for the dry institute liquid material that drip, and mounting is on the platform that can carry out the temperature adjustment.

[comparative example]

Utilize existing ink-jet application method,, drip, after 70 micron pitch implement coating, following situation occurs with 30pl/ to the dispensing area at 25mm angle.

(A) horizontal (horizontal direction): with respect to the dispensing area of regulation, peripheral diffusion 0.5～1.0mm degree.

(B) vertical (short transverse): the dispensing area central portion is 80～85nm, and edge part then is the height about 1000nm.

[embodiment 3]

By the ink-jet application method of present embodiment,, drip, spray for four times, after 70 micron pitch implement coating, occur as following situation with 8pl/ similarly to the dispensing area of 25mm square.

(A) horizontal (horizontal direction): with respect to the dispensing area of regulation, peripheral diffusion 0.05～0.1mm degree.

(B) vertical (short transverse): the dispensing area central portion is 80nm～100nm, and edge part then is the height about 80nm～100nm.

As mentioned above, the film build method that can confirm present embodiment is realized useful effect than existing film build method shown in the comparative example.More specifically, the method that can confirm present embodiment can realize reducing formed concavo-convex on film, reduces the difference of height of whole of film, also realizes the effect that the edge part seepage discharge also reduces.

(utilizability on the industry)

The present invention also not only is confined to ink-jet printer, also applicable to precision spraying/injection device The various ink mist recordings such as (comprising apparatus for coating), precision coating device. Also applicable to ink-jet Formula patterning, for example printing of organic EL display panel, large colour panel, industrial mark Apparatus for coating/the drawing apparatus of the purposes such as figure/printing equipment.

No matter also be the mechanical switch mode such as piezoelectric type or resistance heat spray about ink jet recording method It is all applicable to penetrate the Bubble formation modes such as formula.

In addition, also can be used in lens coloring step or the large-sized print product that lens are made industry Placard and the building materials and ornaments aspect of industry.

Claims (10)

1, a kind of ink-jet head cleaning method, it is characterized in that, utilization has the purification zone of the unit member covering inkjet head of detergent remover supply opening and pump orifice, and by from pump orifice effect suction force, and from relative with pump orifice to the detergent remover supply opening spray detergent remover towards purification zone and cleaned.

2, ink-jet head cleaning method according to claim 1 wherein, after described cleaning, only leaves inkjet head and unit member a little, by to unit member effect suction force, makes the purification zone drying of inkjet head.

3, ink-jet head cleaning method according to claim 1 and 2, wherein, detergent remover uses by the liquid that solvent constituted with the factor that makes the dissolving of liquid material.

4, a kind of inspection method of inkjet head makes the liquid material that nozzle ejected that has from inkjet head, drips in checking to use member, and checks the unusual of described nozzle according to the droplet patterns of drippage; The inspection method of described inkjet head is characterised in that,

Described inspection member is made of the liquid material drippage place material different with the reflectivity at non-drippage place.

5, the inspection method of inkjet head according to claim 4, wherein, described inspection member is the film that the drippage owing to the liquid material dissolves.

6, a kind of ink-jet application control method, it is characterized in that after the operation that spues of inkjet head, spuing of will the stream in inkjet head filling replaces with the low volatility alternate material with the liquid material, and before the operation that just will begin to spue, alternate material replaced with to spue once more use the liquid material.

7, ink-jet application control method according to claim 6, wherein, alternate material is to use by the liquid that solvent constituted that possesses the factor that makes the dissolving of liquid material.

8, a kind of ink-jet film-forming method is implemented the system film by a plurality of injecting steps; It is characterized in that,

Wait on the workpiece that previous step sprays droplet drying to the liquidity not, the liquid material is sprayed to contacting or partly overlapping position with liquid material drop that previous step is dripped.

9, ink-jet film-forming method according to claim 8 wherein, increases the number of times of injecting step, and reduces emitted dose each time.

10, according to Claim 8 or 9 described ink-jet film-forming methods, wherein, form wiring pattern by film.

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