CN114030303B - Ink jet printing method, apparatus and storage medium - Google Patents
Ink jet printing method, apparatus and storage medium Download PDFInfo
- Publication number
- CN114030303B CN114030303B CN202011635751.2A CN202011635751A CN114030303B CN 114030303 B CN114030303 B CN 114030303B CN 202011635751 A CN202011635751 A CN 202011635751A CN 114030303 B CN114030303 B CN 114030303B
- Authority
- CN
- China
- Prior art keywords
- functional layer
- substrate
- film thickness
- pixel
- abnormal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41M—PRINTING, DUPLICATING, MARKING, OR COPYING PROCESSES; COLOUR PRINTING
- B41M5/00—Duplicating or marking methods; Sheet materials for use therein
- B41M5/0041—Digital printing on surfaces other than ordinary paper
- B41M5/0047—Digital printing on surfaces other than ordinary paper by ink-jet printing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
- H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The invention relates to an ink-jet printing method, equipment and a storage medium, wherein the method comprises the steps of pre-printing a functional layer on a first substrate, determining a film thickness abnormal functional layer on the first substrate and a film thickness abnormal pixel area thereof, wherein the film thickness abnormal functional layer is a first functional layer; printing a first amount of solvent in an area corresponding to a film thickness abnormal pixel area of the first substrate on the second substrate, and printing a first functional layer ink with a target volume in all printing areas to form a corrected first functional layer; obtaining a corrected first amount of solvent; until, printing a first correction amount of solvent in the area of the nth substrate corresponding to the film thickness abnormal pixel area of the first substrate, printing a target volume of first functional layer ink in all printing areas, and forming a correction first functional layer with the difference between the thickness of the first functional layer and the target thickness within an error range. Therefore, on the premise of not increasing the equipment cost of production and manufacturing and meeting the requirement of consumers on a narrow frame of a display screen, the mura problem at the edge of a light emitting area is improved.
Description
Technical Field
The present invention relates to the field of printing technology, and in particular, to an inkjet printing method, apparatus and storage medium.
Background
In recent years, the technology of ink jet printing for manufacturing electronic devices or display devices is mature and widely applied. An Organic Light Emitting Diode (OLED) display screen is produced by adopting an ink-jet printing technology, and the material utilization rate can reach 90%. In the aspect of equipment and consumable cost control, the cost of the OLED panel produced by adopting the ink-jet printing technology is lower than that of the OLED panel produced by adopting an evaporation mode, and the method is a research hotspot of the production process of the OLED panel at present.
However, there are still some problems to be solved in the current ink jet printing technology. Among them, the problem of film formation uniformity is important. Currently, there are a variety of process approaches to improve film formation uniformity. For example, one-dimensional solvent drying, mixing of high and low boiling point solvents, and improvement of the accuracy of the printing apparatus itself and control of the amount of ink discharged are adopted, but these methods have difficulty in overcoming the mura problem at the edge of the light emitting region. The mura problem refers to: the uneven brightness of the display causes various marks caused by the inconsistency of the ink drying environment in the edge area with the middle area.
For the mura problem of the light-emitting edge region, the existing technical solutions include the following two types:
printing ink in pixel pits, and immediately drying; also known as: printing and drying simultaneously;
manufacturing a solvent atmosphere in the light-emitting edge area.
The two methods either need to add new equipment and increase the production cost, or need to arrange a solution buffer area outside the substrate AA area, which is not in line with the trend of the narrow frame of the current display screen.
In summary, there is still a need for improvements in current ink jet printing methods.
Disclosure of Invention
Therefore, there is a need for an inkjet printing method that can improve mura at the edge of the light-emitting area without increasing the cost of manufacturing equipment and satisfying the requirement of the consumer for a "narrow frame" of the display screen.
An ink jet printing method comprising the steps of:
pre-printing a functional layer on a first substrate, and determining a film thickness abnormal functional layer on the first substrate and a film thickness abnormal pixel area corresponding to the film thickness abnormal functional layer according to a target thickness, wherein the film thickness abnormal functional layer is a first functional layer;
printing a first dosage of solvent in an area corresponding to a film thickness abnormal pixel area of a first substrate on a second substrate, and printing a first functional layer ink with a target volume in all printing areas of the second substrate to form a modified first functional layer;
correcting the first amount of the solvent according to the difference between the thickness of the corrected first functional layer and the target thickness to obtain a corrected first amount of the solvent;
repeating the steps of forming a corrected first functional layer and obtaining a corrected first dosage of the solvent until the corrected first dosage of the solvent is printed in a region of the nth substrate corresponding to the abnormal film thickness pixel region of the first substrate, a target volume of the first functional layer ink is printed in the whole printing region of the nth substrate, and the difference between the thickness of the formed corrected first functional layer and the target thickness is within an error range; n is an integer greater than or equal to 2;
the pixel arrangement structures of the first substrate, the second substrate and the nth substrate are the same.
According to the ink-jet printing method, the first substrate is pre-printed to determine the film thickness abnormal functional layer on the first substrate and the film thickness abnormal pixel area corresponding to the film thickness abnormal functional layer, the second substrate is pre-printed, the film thickness abnormal pixel area of the first functional layer is improved in a targeted mode through the step of adding solvent printing before printing ink, the modified first functional layer is formed, and the modification is carried out until the difference between the thickness of the formed modified first functional layer and the target thickness is within an error range. Therefore, the formation area of the mura is judged in advance in a preprinting mode, and the film thickness abnormal functional layer and the corresponding film thickness abnormal pixel area are intervened and improved in advance in a solvent printing and solvent dosage adjusting mode, so that the printing on the target substrate can be completed at one time, and the mura problem at the edge of the light emitting area is improved. In addition, the ink-jet printing method can be completed by adopting the existing printing equipment, and the mura problem at the edge of the luminous zone can be improved on the premise of not increasing the equipment cost of production and manufacturing and meeting the requirement of a consumer on a narrow frame of a display screen.
In some embodiments, a plurality of functional layers are sequentially stacked and preprinted on the first substrate, and the number of the first functional layers is x; x is an integer greater than or equal to 2;
laminating the preprinted functional layer on the second substrate to form a corrected first functional layer closest to the substrate, and repeating the steps of forming the corrected first functional layer and obtaining the corrected first dosage of the solvent until the difference between the thickness of the corrected first functional layer formed on the nth substrate and the target thickness is within an error range;
then, continuously laminating and printing the functional layers on the nth substrate until a next corrected first functional layer is formed, and repeating the steps of forming the corrected first functional layer and obtaining the corrected first dosage of the solvent until the difference between the thickness of the next corrected first functional layer formed on the nth + m substrate and the target thickness is within an error range; m is an integer greater than or equal to 1;
repeating the steps until the difference between the thickness of the xth modified first functional layer formed on the (n + m + p) th substrate and the target thickness is within an error range; p is an integer greater than or equal to 0;
wherein the pixel arrangement structures of the first to n + m + p-th substrates are the same.
In some embodiments, the step of determining the film thickness abnormality functional layer on the first substrate includes the steps of:
acquiring the actually measured pixel film thickness of the functional layer on the first substrate in each pixel area;
comparing the measured pixel film thickness of each pixel area of the functional layer with the target pixel film thickness of the functional layer, and determining whether the film thickness of each pixel area of the functional layer is abnormal or not;
and determining whether the functional layer is the functional layer with the abnormal film thickness or not according to the number of the abnormal thick film pixel areas of the functional layer and the total number of the pixel areas of the functional layer.
In some embodiments, the step of comparing the measured pixel film thickness of each pixel region of the functional layer with the target pixel film thickness of the functional layer and determining whether the film thickness of each pixel region of the functional layer is abnormal includes the following steps:
judging whether the film thickness of the actually measured pixel is within an acceptable range; if so, the film thickness of the pixel region of the functional layer is not abnormal; otherwise, the film thickness of the pixel region of the functional layer is abnormal.
In some embodiments, the step of determining whether the functional layer is the functional layer with abnormal film thickness according to the number of the pixel areas with abnormal thick film of the functional layer and the total number of the pixel areas of the functional layer includes the following steps:
judging whether the number of the abnormal thick film pixel areas of the functional layer is within an acceptable range; if not, the functional layer is a film thickness abnormal functional layer; otherwise, the thick film of the functional layer has no abnormity.
In some embodiments, the method further comprises the following steps:
and acquiring the target pixel film thickness of the functional layer according to the ink concentration and the ink volume corresponding to the printing of the functional layer.
In some embodiments, the step of preprinting a plurality of functional layers on the first substrate is performed by one of the following methods:
sequentially laminating and preprinting all functional layers on the first substrate; or alternatively
And respectively printing one layer of the functional layers on each first substrate, wherein the functional layers printed on the first substrates are different.
In some embodiments, the first amount of the solvent printed on the film-thickness abnormal pixel region is within 3 times of the target volume of the first functional layer ink printed on the film-thickness abnormal pixel region;
the target volume of the first functional layer ink printed on the film thickness abnormal pixel regions of the second to nth substrates or the (n + m + p) th substrates is the same as the volume of the first functional layer ink printed on the first substrate.
In some of these embodiments, the solvent is one or more of the solvents contained in the corresponding first functional layer ink; or
The solvent is different from the solvent contained in the corresponding first functional layer ink, and the boiling point of the solvent is +/-100 ℃ of that of the first functional layer ink.
In some embodiments, the step of correcting the first amount of the solvent according to the difference between the thickness of the corrected first functional layer and the target thickness to obtain the corrected first amount of the solvent comprises the steps of:
determining the film thickness change direction of the corrected first functional layer according to the difference between the thickness of the corrected first functional layer and the target thickness;
determining increase and decrease of the solvent in the first amount according to the film thickness change direction of the first functional layer;
and determining the corrected first dosage according to the first dosage and a preset increase and decrease range.
In some embodiments, the step of printing the first functional layer ink on all printing areas on the second to nth substrates or the to n + m + p th substrates includes the steps of:
printing the first functional layer ink at other printing positions except the film thickness abnormal pixel area; and then printing the first functional layer ink in the film thickness abnormal pixel area.
In some of these embodiments, the functional layer is one of a hole injection layer, a hole transport layer, an electron blocking layer, a light emitting layer, a hole blocking layer, an electron transport layer, and an electron injection layer.
A computer device comprising a memory storing a computer program and a processor implementing the steps of the inkjet printing method of any one of the above when the computer program is executed.
A computer-readable storage medium, on which a computer program is stored which, when being executed by a processor, carries out the steps of the method of any of the above.
Drawings
FIG. 1 is a schematic diagram of a closed loop area of a pixel region of a substrate;
FIG. 2 is a schematic view of a pixel arrangement of a substrate;
FIG. 3 is a graph showing data on film thickness in the HIL layer imposition pixels in step 1) in example 1 of the present invention;
FIG. 4 is a distribution diagram of the regions where mura occurs in the HIL layer in step 1) according to example 1 of the present invention;
FIG. 5 is a data graph showing the volume of printing solvent in each pixel in the S1 area of the HIL layer in step 2) in example 1 of the present invention;
fig. 6 is a data map of a printed HIL ink volume of a region other than S1 of the HIL layer in step 3) in example 1 of the present invention;
fig. 7 is a data diagram of a printed HIL ink volume of the S1 area of the HIL layer in step 4) in example 1 of the present invention;
FIG. 8 is a data graph of the increase and decrease of the volume of the solvent in the region S1 of the HIL layer in step 5) in example 1 of the present invention;
fig. 9 is a graph showing film thickness data of the HIL layer printed and formed in step 6) in example 1 of the present invention.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items.
An embodiment of the present invention provides an inkjet printing method including the following steps S10 to S40.
Step S10: the method comprises the steps of pre-printing a functional layer on a first substrate, and determining a film thickness abnormal functional layer on the first substrate and a film thickness abnormal pixel area corresponding to the film thickness abnormal functional layer according to a target thickness. The film thickness abnormal functional layer is a first functional layer.
Step S20: and printing a first dosage of solvent on the area of the second substrate corresponding to the film thickness abnormal pixel area of the first substrate, and printing a first functional layer ink with a target volume on the whole printing area of the second substrate to form a modified first functional layer.
Step S30: the first amount of solvent is corrected based on the difference between the corrected thickness of the first functional layer and the target thickness to obtain a corrected first amount of solvent.
Step S40: repeatedly performing the steps of forming a corrected first functional layer and acquiring a corrected first dosage of the solvent until the corrected first dosage of the solvent is printed in a region of the nth substrate corresponding to the pixel region with abnormal film thickness of the first substrate, printing a target volume of the first functional layer ink in all the printed region of the nth substrate, and forming a corrected first functional layer with a difference between the thickness of the first functional layer and the target thickness within an error range; n is an integer greater than or equal to 2.
The pixel arrangement structures of the first substrate, the second substrate and the nth substrate are the same. It is understood that in other examples, the first to nth substrates are not only identical in pixel arrangement, but also identical in size, i.e., the first to nth substrates are identical.
Wherein the pixel areas are also referred to as pixels.
It is understood that the mura problem refers to: the uneven brightness of the display causes various marks caused by the inconsistency of the ink drying environment in the edge area with the middle area. Therefore, the film thickness of the functional layer in the pixel area is used as a key index for judging whether mura is formed or not.
According to the ink-jet printing method, the first substrate is pre-printed to determine the film thickness abnormal functional layer on the first substrate and the film thickness abnormal pixel area corresponding to the film thickness abnormal functional layer, the second substrate is pre-printed, the film thickness abnormal pixel area of the first functional layer is improved in a targeted mode through the step of adding solvent printing before ink printing, the first functional layer is formed and corrected, and the correction is carried out until the difference between the thickness of the formed corrected first functional layer and the target thickness is within an error range. Therefore, the formation area of the mura is judged in advance in a preprinting mode, the film thickness abnormal functional layer and the corresponding film thickness abnormal pixel area are intervened and improved in advance in a solvent printing and solvent dosage adjusting mode, and the mura problem at the edge of the light emitting area is improved. In addition, the ink-jet printing method can be completed by adopting the existing printing equipment, and the mura problem at the edge of the luminous zone can be improved on the premise of not increasing the equipment cost of production and manufacturing and meeting the requirement of a consumer on a narrow frame of a display screen.
It is understood that the substrate formed to correct the difference between the thickness of the first functional layer and the target thickness within the error range may be regarded as the target substrate.
It can be understood that when there are a plurality of functional layers printed on the first substrate, that is, when there are other functional layers, for example, the second functional layer and the third functional layer, on the first substrate in addition to the first functional layer, the film thicknesses of the other functional layers are all not abnormal, that is, the film thickness is abnormal by only 1 functional layer, that is, the number of first functional layers is 1. Then, forming a corrected first functional layer by adopting the steps when printing the first functional layer until the difference between the thickness of the formed corrected first functional layer and the target thickness is within an error range; and printing other second functional layers and third functional layers according to the normal printing sequence and the printing parameters.
If the film thickness abnormity function layer has a plurality of, namely the first function layer is a plurality of, correcting each first function layer in sequence. In some embodiments, a plurality of functional layers are sequentially laminated and preprinted on the first substrate, and the number of the first functional layers is x; x is an integer greater than or equal to 2;
laminating the preprinted functional layer on the second substrate to form a corrected first functional layer closest to the substrate, and repeating the steps of forming the corrected first functional layer and obtaining the corrected first dosage of the solvent until the difference between the thickness of the corrected first functional layer formed on the nth substrate and the target thickness is within the error range;
then, continuously laminating and printing the functional layer on the nth substrate until a next corrected first functional layer is formed, and repeatedly performing the steps of forming the corrected first functional layer and obtaining the corrected first dosage of the solvent until the difference between the thickness of the next corrected first functional layer formed on the nth + m substrate and the target thickness is within an error range; m is an integer greater than or equal to 1;
repeating the steps until the difference between the thickness of the xth corrected first functional layer formed on the (n + m + p) th substrate and the target thickness is within the error range; p is an integer greater than or equal to 0;
the pixel arrangement structures of the first to n + m + p substrates are the same.
In some embodiments, the step of determining the film thickness abnormality functional layer on the first substrate in the step S10 includes the following steps S12 to S16:
step S12: acquiring the actually measured pixel film thickness of the functional layer on the first substrate in each pixel area;
step S14: comparing the actual pixel film thickness of each pixel area of the functional layer with the target pixel film thickness of the functional layer, and determining whether the film thickness of each pixel area of the functional layer is abnormal or not;
step S16: and determining whether the functional layer is the functional layer with the abnormal film thickness or not according to the number of the abnormal thick film pixel areas of the functional layer and the total number of the pixel areas of the functional layer.
Further, step S14 includes the following steps:
judging whether the film thickness of the actually measured pixel is within an acceptable range; if so, the film thickness of the pixel area of the functional layer is not abnormal; otherwise, the film thickness of the pixel region of the functional layer is abnormal.
Wherein in some examples the acceptable range of pixel film thickness is target pixel film thickness x (1 ± 10%). It is understood that in other examples, the acceptable range of the pixel film thickness may also be the target pixel film thickness x (1 ± 8%), the target pixel film thickness x (1 ± 5%), or the target pixel film thickness x (1 ± 4%), depending on the requirements.
Further, step S16 includes the following steps: judging whether the number of the abnormal pixel areas of the thick film of the functional layer is within an acceptable range; if not, the functional layer is a film thickness abnormal functional layer; otherwise, the thick film of the functional layer has no abnormity.
In a specific example, the acceptable range of the number of pixel regions of the thick film anomaly of the functional layer in step S16 may be: the number of thick film anomalous pixel regions of the functional layer is within one millionth of the total number of pixels of the functional layer. And if the number of the abnormal pixel areas of the thick film of the functional layer is less than one millionth of the total number of the pixels of the functional layer, the thick film of the functional layer has no abnormality.
Further, the step of determining the film thickness abnormality functional layer on the first substrate in step S10 further includes the following step S13:
and acquiring the target pixel film thickness of the functional layer according to the ink concentration and the ink volume corresponding to the printing functional layer.
It is understood that step S13 is performed before step S14, and it is understood that there is no fixed order of precedence between step S13 and step S12.
In some embodiments, the step of pre-printing the plurality of functional layers on the first substrate in step S10 is performed by one of the following methods:
sequentially laminating and preprinting all functional layers on the first substrate; or printing one layer of the functional layers on each first substrate separately, wherein the functional layers printed on the first substrates are different.
Preferably, the mutual influence between adjacent functional layers is considered as much as possible, and it is preferable to perform a method of laminating the functional layers on the first substrate in order to be printed.
In some of these embodiments, when the functional layer printed on the second substrate is plural; the step of forming the modified first functional layer on the second substrate in step S20 is performed by one of the following methods:
sequentially laminating and preprinting all functional layers on a second substrate, printing the functional layers to a first functional layer farthest from the substrate, and finishing printing; or
And sequentially laminating and preprinting all the functional layers on the second substrate, printing at least to the next functional layer of the first functional layer farthest from the substrate, and finishing printing.
It can be understood that step S20 is mainly to form the solvent amount required to be printed to correct the difference between the thickness of the first functional layer and the target thickness within the error range, so that other non-abnormal functional layers on the first functional layer farthest from the substrate on the second substrate do not need to be printed. Preferably, taking into account as much as possible the mutual influence between adjacent functional layers, it is preferable to print at least one more layer, i.e. at least to the next functional layer of the first functional layer furthest from the substrate, ending the printing. It is understood that all functional layers may also be printed.
In some embodiments, in step S20, the first amount of solvent printed on the film-thickness abnormal pixel area is within 3 times of the target volume of the first functional layer ink printed on the film-thickness abnormal pixel area. It is understood that the first amount corresponds to the initial amount of solvent.
In one example, it may be preferable that the first amount of solvent printed on the film-thickness abnormal pixel region is 1 times the target volume of the first functional layer ink printed on the film-thickness abnormal pixel region; namely, the target volume of the ink in the first functional layer is controlled to be equal to the target volume of the ink in the first functional layer, and then the increase and decrease adjustment is carried out on the basis.
In other examples, the personalized initial usage amount can be obtained according to the difference between the film thicknesses of the film thickness abnormal pixel region and the target pixel region, and the steps of subsequent adjustment are reduced. The first amount of the solvent may be the same or different for each film thickness abnormal pixel region.
Further, the target volume of the first functional layer ink printed on the film thickness abnormal pixel regions of the second to nth substrates or the to n + m + p th substrates is the same as the volume of the first functional layer ink printed on the first substrate.
It can be understood that the volume of the first functional layer ink printed on the first substrate can be obtained from the target pixel film thickness. Specifically, under the condition that the ink concentration w% is constant, a linear relation exists between the ink printing volume v (pl) and the target pixel film thickness t (nm): t ═ a × V + b; wherein a and b are both determinable constants.
It is understood that in some examples, the volume of the first functional layer ink printed on each pixel region of the same functional layer may be the same or different; preferably the same.
In some of these embodiments, the solvent is one or more of the solvents contained in the corresponding first functional layer ink; or the solvent is different from the solvent contained in the corresponding first functional layer ink, and the boiling point of the solvent is +/-100 ℃ of that of the first functional layer ink.
Further, the step of correcting the first amount of the solvent according to the difference between the thickness of the first functional layer and the target thickness to obtain the corrected first amount of the solvent in step S30 includes steps S31 to S33:
step S31: and determining the film thickness change direction of the first functional layer according to the difference between the thickness of the first functional layer and the target thickness.
Step S32: an increase or decrease in the first amount of the solvent is determined based on the corrected direction of change in the film thickness of the first functional layer.
Step S32: and determining and correcting the first dosage according to the first dosage and a preset increase and decrease range.
Understandably, the thickness of the first functional layer is corrected to be the thickness of the actually measured pixel film; the target thickness in step S31 is the target pixel film thickness. For example, in step S31, if the measured pixel film thickness of the corrected first functional layer is smaller than the target pixel film thickness x (1-10%), and the film thickness of the corrected first functional layer is larger than the target pixel film thickness x (1+ 10%), it is determined that the direction of change in the film thickness of the corrected first functional layer is increasing. However, since the adjustment is excessive, it is determined in step S32 that the solvent needs to be decreased in the first amount. Step S33 may preset the increase or decrease, for example, 1% to 80%, such as 1%, 5%, 10%, 15%, 20%, 30%, 40%, 50%, 60%, 70%, 80%, etc. Furthermore, the preset increase and decrease amplitude is a positive value and represents increment; a negative value indicates a decrement. Specifically, the preset increase/decrease width may be specifically determined according to a difference between the measured pixel film thickness and the target pixel film thickness. For example, the volume of the ink printed in the pixel area without abnormal film thickness is 25pL, and the measured pixel film thickness is 100 nm; the volume of ink printed in the pixel area with the abnormal film thickness is 25pL, the thickness of the actually measured pixel film is 90nm, and the preset increase and decrease amplitude is-60%; the adjusted amount of solvent is 25pL × (1-60%) to 10 pL. The volume of ink printed in the other pixel area with the abnormal film thickness is 25pL, the actual measured film thickness of the pixel is 95nm, and the preset increase and decrease range is-80%; the adjusted amount of solvent is 25pL x (1-80%) to 5 pL.
It is understood that the adjusted amount of the solvent used in the abnormal pixel regions with different film thicknesses of the same functional layer may be different. Further, if the modified first functional layer is formed again by using the modified dose and the film thickness of the modified first functional layer is not abnormal, the modified dose is the third dose. If the film thickness of the first functional layer is still abnormal, the adjustment is continued until the film thickness of the first functional layer is corrected to be abnormal.
In some embodiments, the step of printing the ink of the modified first functional layer on all printing areas of the second to nth substrates or the to n + m + p substrates includes the steps of:
printing ink of a first functional layer at other printing positions except for a film thickness abnormal pixel area; and then printing the first functional layer ink in the film thickness abnormal pixel area.
Further, the functional layer is one of a hole injection layer, a hole transport layer, an electron blocking layer, a light emitting layer, a hole blocking layer, an electron transport layer, and an electron injection layer. Further, the number of the functional layers to be printed is two or more, and the printing layers are different. In some specific examples, each functional layer includes a hole injection layer, a hole transport layer, a light emitting layer, a hole blocking layer, and an electron transport layer, which are sequentially stacked on a substrate.
It should be noted that the film thickness of the pixel region herein is an average of film thicknesses of closed-loop regions surrounding a center point of symmetry of the pixel region within the pixel region. The area of the closed-loop area accounts for 20% -60% of the total area of the pixel area so as to avoid the influence of the film thickness at the edge of the pixel area. In addition, when the film thickness is detected, the film thickness and the profile data of the pixel region of the whole version of each functional layer can be acquired by using a detection instrument such as a step profiler.
As shown in fig. 1, a schematic diagram of a closed-loop area of a pixel area (pixel) is shown, wherein the shape of the pixel is a rounded square, and 4 rounded corners are A, B, C and D, respectively. The symmetric center point of the pixel area is an intersection point P of an AD connecting line and a BC connecting line, and the closed-loop area is E.
The following is specific example 1.
The pixel arrangement structures of the first substrate, the second substrate and the target substrate are shown in fig. 2, the number of pixels of the substrate is 6 × 6, and the numbers of the pixels are 1-36. The structure of the device to be printed is Anode/HIL (100nm)/HTL (100nm)/EML (50nm)/ETL (30 nm)/Cathodode.
1) Printed on the first substrate, the structure of the device is Anode/HIL (100nm)/HTL (100nm)/EML (50nm)/ETL (30 nm)/Cathode. Detecting to find that the functional layer with abnormal film thickness is HIL; the film thicknesses of the HTL, EML and ETL were not abnormal.
In the step 1), when the concentration w% of the HIL ink is constant, according to a linear relation between the printing volume V (pL) of the HIL ink and the average thickness T (nm) of the actually measured film layer of the dried HIL:when printing the HIL, initially determining the volume V of ink to be printed in each pixel 1 It was 25 pL.
And after printing the HIL on the first substrate, drying, and acquiring film thickness and appearance data in the HIL imposition pixels by using a detection instrument. Printing the HIL ink in the pixels due to the inconsistent solvent atmosphere of each pixel, and drying to obtain the HIL with the actually measured film thickness T n ,T n =T HIL +ΔT,T HIL =100nm。
In this particular example, according to T n Whether or not at T HIL The film thickness data in the HIL imposition pixels within x (1. + -. 4%) are shown in FIG. 3; wherein the upper left corner is the measured film thickness (nm) of the HIL, and the lower right corner is the pixel number. Further, HIL was determined as a functional layer in which mura occurred, and the area in which mura occurred was S1 (gray area), as shown in fig. 4.
2) According to the above information, the layers printed on another identical substrate (second substrate) have HIL (100nm), HTL (100nm), EML (50 nm). In the step of printing the solvent, the solvent is printed in the area S1 of the printed HIL, the printed solvent is the same as the solvent contained in the HIL ink, and the printing solvent volume vs (pl) in each pixel of the area S1 is determined, as shown in fig. 5.
3) Printing HIL ink in non-S1 area of the substrate, printing HIL ink volume of each pixel, and printing ink volume V in step 1) 1 Consistently 25pL, as shown in FIG. 6.
4) The HIL ink was then printed in the region S1 of the substrate, the volume of HIL ink printed in each pixel, also 25pL, as shown in FIG. 7. And after printing is finished, drying the substrate.
5) Acquiring the film thickness and the appearance data in the full-page pixels of each functional layer printed in the step 4) again by using a detection instrument, and checking the improvement condition of mura; calculating the pixel in the area of S1 requires increasing or decreasing the volume of the solvent Δ v (pl), as shown in fig. 8, fig. 8 is an ideal case, and just needs no adjustment.
6) Finally, printing a device on the target substrate, wherein the structure of the device is as follows: Antode/HIL (100nm)/HTL (100nm)/EML (50nm)/ETL (30 nm)/Cathio. When the HIL functional layer with mura is printed and determined to occur, the printing steps shown in the figures 5-7 are carried out according to the parameters of the steps 2) -4). Specifically, the volume of solvent required to print once per pixel in the region of S1 is the same as in fig. 5, followed by a printed HIL ink volume 25pL for each pixel in the non-S1 region of the substrate; the HIL ink volume 25pL was then printed within each pixel of the substrate in the S1 region. And after printing is finished, drying the substrate. The film thickness of the resulting HIL is shown in FIG. 9.
An embodiment of the present invention further provides a computer device, which includes a memory and a processor, where the memory stores a computer program, and the processor implements the steps of any one of the above methods when executing the computer program.
In some of these embodiments, the computer device may be a terminal. The computer device includes a processor, a memory, a network interface, a display screen, and an input device connected by a system bus. Wherein the processor of the computer device is configured to provide computing and control capabilities. The memory of the computer device comprises a nonvolatile storage medium and an internal memory. The non-volatile storage medium stores an operating system and a computer program. The internal memory provides an environment for the operation of an operating system and computer programs in the non-volatile storage medium. The network interface of the computer device is used for communicating with an external terminal through a network connection. The computer program is executed by a processor to implement any of the above-described inkjet printing methods. The display screen of the computer equipment can be a liquid crystal display screen or an electronic ink display screen, and the input device of the computer equipment can be a touch layer covered on the display screen, a key, a track ball or a touch pad arranged on a shell of the computer equipment, an external keyboard, a touch pad or a mouse and the like.
An embodiment of the invention also provides a computer-readable storage medium, on which a computer program is stored, which, when being executed by a processor, carries out the steps of the method of any one of the preceding claims.
It will be understood by those skilled in the art that all or part of the processes of the methods of the embodiments described above can be implemented by hardware related to instructions of a computer program, which can be stored in a non-volatile computer-readable storage medium, and when executed, the computer program can include the processes of the embodiments of the methods described above. Any reference to memory, storage, databases, or other media used in embodiments provided herein may include non-volatile and/or volatile memory. Non-volatile memory can include read-only memory (ROM), Programmable ROM (PROM), Electrically Programmable ROM (EPROM), Electrically Erasable Programmable ROM (EEPROM), or flash memory. Volatile memory can include Random Access Memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in a variety of forms such as Static RAM (SRAM), Dynamic RAM (DRAM), Synchronous DRAM (SDRAM), Double Data Rate SDRAM (DDRSDRAM), Enhanced SDRAM (ESDRAM), Synchronous Link DRAM (SLDRAM), Rambus Direct RAM (RDRAM), direct bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM).
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is specific and detailed, but not to be understood as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent should be subject to the appended claims.
Claims (14)
1. A method of inkjet printing comprising the steps of:
pre-printing a functional layer on a first substrate, and determining a film thickness abnormal functional layer on the first substrate and a film thickness abnormal pixel area corresponding to the film thickness abnormal functional layer according to a target thickness, wherein the film thickness abnormal functional layer is a first functional layer;
printing a first dosage of solvent in an area corresponding to a film thickness abnormal pixel area of a first substrate on a second substrate, and printing a first functional layer ink with a target volume in all printing areas of the second substrate to form a modified first functional layer;
correcting the first amount of the solvent according to the difference between the thickness of the corrected first functional layer and the target thickness to obtain a corrected first amount of the solvent;
repeating the steps of forming a corrected first functional layer and obtaining a corrected first dosage of the solvent until the corrected first dosage of the solvent is printed in a region of the nth substrate corresponding to the abnormal film thickness pixel region of the first substrate, a target volume of the first functional layer ink is printed in the whole printing region of the nth substrate, and the difference between the thickness of the formed corrected first functional layer and the target thickness is within an error range; n is an integer greater than or equal to 2;
the pixel arrangement structures of the first substrate, the second substrate and the nth substrate are the same.
2. The inkjet printing method according to claim 1, wherein a plurality of functional layers are previously printed in a stacked state in order on the first substrate, and the number of the first functional layers is x; x is an integer greater than or equal to 2;
laminating a preprinted functional layer on a second substrate to form a modified first functional layer closest to the substrate, and repeating the steps of forming the modified first functional layer and obtaining a modified first dosage of the solvent until the difference between the thickness of the modified first functional layer formed on the nth substrate and the target thickness is within an error range;
then, continuously laminating and printing the functional layer on the nth substrate until a next corrected first functional layer is formed, and repeating the steps of forming the corrected first functional layer and obtaining the corrected first dosage of the solvent until the difference between the thickness of the next corrected first functional layer formed on the nth + m substrate and the target thickness is within an error range; m is an integer greater than or equal to 1;
repeating the steps until the difference between the thickness of the xth modified first functional layer formed on the (n + m + p) th substrate and the target thickness is within an error range; p is an integer greater than or equal to 0;
wherein the pixel arrangement structures of the first to n + m + p-th substrates are the same.
3. The inkjet printing method according to claim 1, wherein the step of determining the film thickness abnormality functional layer on the first substrate includes the steps of:
acquiring the actually measured pixel film thickness of the functional layer on the first substrate in each pixel area;
comparing the measured pixel film thickness of each pixel area of the functional layer with the target pixel film thickness of the functional layer, and determining whether the film thickness of each pixel area of the functional layer is abnormal or not;
and determining whether the functional layer is the functional layer with the abnormal film thickness or not according to the number of the abnormal thick film pixel areas of the functional layer and the total number of the pixel areas of the functional layer.
4. The inkjet printing method according to claim 3, wherein the step of comparing the measured pixel film thickness of each pixel region of the functional layer with the target pixel film thickness of the functional layer to determine whether the film thickness of each pixel region of the functional layer is abnormal comprises the steps of:
judging whether the film thickness of the actually measured pixel is within an acceptable range; if so, the film thickness of the pixel region of the functional layer is not abnormal; otherwise, the film thickness of the pixel region of the functional layer is abnormal.
5. The inkjet printing method as claimed in claim 3, wherein the step of determining whether said functional layer is an anomalous film thickness functional layer based on the number of anomalous thick film pixel areas of said functional layer and the total number of anomalous thick film pixel areas of said functional layer comprises the steps of:
judging whether the number of the abnormal thick film pixel areas of the functional layer is within an acceptable range; if not, the functional layer is a film thickness abnormal functional layer; otherwise, the thick film of the functional layer has no abnormity.
6. The method of inkjet printing according to claim 3 further comprising the steps of:
and acquiring the target pixel film thickness of the functional layer according to the ink concentration and the ink volume corresponding to the printing of the functional layer.
7. The inkjet printing method according to any one of claims 2 to 6, wherein the step of preprinting a plurality of functional layers on the first substrate is performed by one of:
sequentially laminating and preprinting all functional layers on the first substrate; or
And respectively printing one layer of the functional layers on each first substrate, wherein the functional layers printed on the first substrates are different.
8. The inkjet printing method according to any one of claims 1 to 6, wherein a first amount of the solvent printed on the film-thickness-abnormal pixel region is within 3 times a target volume of the first functional layer ink printed on the film-thickness-abnormal pixel region;
the target volume of the first functional layer ink printed on the film thickness abnormal pixel regions of the second to nth substrates or the (n + m + p) th substrates is the same as the volume of the first functional layer ink printed on the first substrate.
9. The inkjet printing method according to any one of claims 1 to 6, wherein the solvent is one or more of solvents contained in the corresponding first functional layer ink; or
The solvent is different from the solvent contained in the corresponding first functional layer ink, and the boiling point of the solvent is +/-100 ℃ of that of the first functional layer ink.
10. The method of inkjet printing according to any of claims 1 to 6 wherein said step of correcting said first amount of solvent based on a difference between said corrected first functional layer thickness and said target thickness to obtain a corrected first amount of solvent comprises the steps of:
determining the film thickness change direction of the corrected first functional layer according to the difference between the thickness of the corrected first functional layer and the target thickness;
determining increase and decrease of the solvent in the first amount according to the film thickness change direction of the modified first functional layer;
and determining the corrected first dosage according to the first dosage and a preset increase and decrease amplitude.
11. The inkjet printing method according to any one of claims 1 to 6, wherein the step of printing the first functional layer ink on all printing areas on the second to nth substrates or the to n + m + p substrates comprises the steps of:
printing the first functional layer ink at other printing positions except the film thickness abnormal pixel area; and then printing the first functional layer ink in the film thickness abnormal pixel area.
12. The inkjet printing method according to any one of claims 1 to 6, wherein the functional layer is one of a hole injection layer, a hole transport layer, an electron blocking layer, a light emitting layer, a hole blocking layer, an electron transport layer, and an electron injection layer.
13. A computer device comprising a memory and a processor, the memory storing a computer program, characterized in that the processor, when executing the computer program, implements the steps of the inkjet printing method according to any one of claims 1 to 12.
14. A computer-readable storage medium, on which a computer program is stored, which, when being executed by a processor, carries out the steps of the method of any one of claims 1 to 12.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011635751.2A CN114030303B (en) | 2020-12-31 | 2020-12-31 | Ink jet printing method, apparatus and storage medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011635751.2A CN114030303B (en) | 2020-12-31 | 2020-12-31 | Ink jet printing method, apparatus and storage medium |
Publications (2)
Publication Number | Publication Date |
---|---|
CN114030303A CN114030303A (en) | 2022-02-11 |
CN114030303B true CN114030303B (en) | 2022-09-09 |
Family
ID=80139668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202011635751.2A Active CN114030303B (en) | 2020-12-31 | 2020-12-31 | Ink jet printing method, apparatus and storage medium |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN114030303B (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002318380A (en) * | 2001-04-20 | 2002-10-31 | Canon Inc | Ink for color filter substrate and method for manufacturing color filter substrate using the same |
KR101411450B1 (en) * | 2007-02-21 | 2014-06-24 | 무사시 엔지니어링 가부시키가이샤 | A method for cleaning ink-jet head |
US20090251504A1 (en) * | 2008-03-31 | 2009-10-08 | Applied Materials, Inc. | Systems and methods for wet in-situ calibration using measurement of light transmittance through ink deposited on a substrate |
CN110611053B (en) * | 2019-08-20 | 2020-11-24 | 武汉华星光电半导体显示技术有限公司 | Preparation method of display panel and preparation method of functional layer of display panel |
-
2020
- 2020-12-31 CN CN202011635751.2A patent/CN114030303B/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN114030303A (en) | 2022-02-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11088035B2 (en) | Fabrication of thin-film encapsulation layer for light emitting device | |
CN108944045B (en) | Ink jet printing method, ink jet printing apparatus, storage medium, and computer device | |
US9748317B2 (en) | Organic light emitting display device, organic light emitting display panel and method of manufacturing the same | |
CN114670547B (en) | Method for controlling patterning film thickness of inkjet printing TFE | |
US20170098798A1 (en) | Display apparatus and method of manufacturing the same | |
CN107994117A (en) | Prepare method, OLED display device and the OLED display devices of OLED display device | |
US20110057561A1 (en) | Organic electroluminescent device and method for manufacturing the same | |
CN114030303B (en) | Ink jet printing method, apparatus and storage medium | |
CN110091618A (en) | Alarm method, ink-jet controlling terminal and ink jet printing device | |
CN114030301A (en) | Ink jet printing control method, control device and ink jet printing system | |
US11005015B2 (en) | Method and apparatus for detecting electromagnetic touch | |
CN111242885B (en) | Abnormal nozzle detection method and device | |
CN115366547B (en) | Compensation solvent volume determination method, inkjet printing control method and system | |
US8550584B2 (en) | Method of inkjet printing pixels | |
US6878495B1 (en) | Producing an image data to be used by a laser thermal transfer apparatus for use in making color emissive sites | |
CN109624538B (en) | Method and device for printing ink, computer storage medium and terminal | |
Wang et al. | A high-flexible multi-objective stochastic planning system based on nozzle-combined printing in display manufacturing | |
CN116039265A (en) | Nozzle adjusting method and nozzle adjusting system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |