CN102703964A - 铸锭单晶生产方法 - Google Patents
铸锭单晶生产方法 Download PDFInfo
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- CN102703964A CN102703964A CN2012101413731A CN201210141373A CN102703964A CN 102703964 A CN102703964 A CN 102703964A CN 2012101413731 A CN2012101413731 A CN 2012101413731A CN 201210141373 A CN201210141373 A CN 201210141373A CN 102703964 A CN102703964 A CN 102703964A
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- current sensor
- eddy current
- ingot
- ingot casting
- single crystal
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- 239000013078 crystal Substances 0.000 title claims abstract description 45
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 239000007788 liquid Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 32
- 238000005266 casting Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 239000002210 silicon-based material Substances 0.000 claims description 9
- 230000006698 induction Effects 0.000 claims description 6
- 230000004927 fusion Effects 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
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- 239000010453 quartz Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
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- 238000006243 chemical reaction Methods 0.000 description 4
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- 230000007547 defect Effects 0.000 description 2
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- 230000003287 optical effect Effects 0.000 description 2
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 210000002268 wool Anatomy 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 101100373011 Drosophila melanogaster wapl gene Proteins 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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- 229910052697 platinum Inorganic materials 0.000 description 1
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- 239000010948 rhodium Substances 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- -1 silicon nitrides Chemical class 0.000 description 1
- 238000004861 thermometry Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
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CN201210141373.1A CN102703964B (zh) | 2012-05-08 | 2012-05-08 | 铸锭单晶生产方法 |
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CN201210141373.1A CN102703964B (zh) | 2012-05-08 | 2012-05-08 | 铸锭单晶生产方法 |
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CN102703964A true CN102703964A (zh) | 2012-10-03 |
CN102703964B CN102703964B (zh) | 2015-05-06 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103361721A (zh) * | 2013-07-15 | 2013-10-23 | 江苏协鑫硅材料科技发展有限公司 | 铸锭晶种熔化高度控制方法及多晶硅铸锭炉 |
WO2014075578A1 (zh) * | 2012-11-14 | 2014-05-22 | 田立 | 多晶硅铸锭炉固液界面检测装置 |
CN104294357A (zh) * | 2014-10-23 | 2015-01-21 | 江西赛维Ldk太阳能高科技有限公司 | 一种多晶铸锭籽晶熔化控制方法及多晶硅铸锭炉 |
CN106048713A (zh) * | 2016-06-28 | 2016-10-26 | 山东天岳晶体材料有限公司 | 一种碳化硅溶液法中实时监测并调整固液界面高度的方法 |
CN110534590A (zh) * | 2019-08-16 | 2019-12-03 | 上海交通大学 | 一种提高太阳电池长波响应的氮化硅薄膜及其制备方法 |
CN114574963A (zh) * | 2022-03-28 | 2022-06-03 | 扬州晶樱光电科技有限公司 | 一种用于多晶铸锭炉的温度输出功率控制系统及控制方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2005066579A1 (en) * | 2003-12-30 | 2005-07-21 | Lam Research Corporation | Method and apparatus for measuring fillm thickness by means of coupled eddy sensors |
US20070103150A1 (en) * | 2003-10-20 | 2007-05-10 | Mitsuo Tada | Eddy current sensor |
CN101775642A (zh) * | 2010-03-04 | 2010-07-14 | 北京中联阳光科技有限公司 | 多晶硅铸锭炉用组合式电阻加热器及节能热场设计 |
CN101781795A (zh) * | 2010-03-04 | 2010-07-21 | 北京中联阳光科技有限公司 | 多晶硅铸锭炉或提纯炉用防漏硅装置 |
CN102289235A (zh) * | 2011-07-22 | 2011-12-21 | 宁波晶元太阳能有限公司 | 基于顶侧分开控制多晶硅铸锭炉的加热控制系统及方法 |
-
2012
- 2012-05-08 CN CN201210141373.1A patent/CN102703964B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070103150A1 (en) * | 2003-10-20 | 2007-05-10 | Mitsuo Tada | Eddy current sensor |
WO2005066579A1 (en) * | 2003-12-30 | 2005-07-21 | Lam Research Corporation | Method and apparatus for measuring fillm thickness by means of coupled eddy sensors |
CN101775642A (zh) * | 2010-03-04 | 2010-07-14 | 北京中联阳光科技有限公司 | 多晶硅铸锭炉用组合式电阻加热器及节能热场设计 |
CN101781795A (zh) * | 2010-03-04 | 2010-07-21 | 北京中联阳光科技有限公司 | 多晶硅铸锭炉或提纯炉用防漏硅装置 |
CN102289235A (zh) * | 2011-07-22 | 2011-12-21 | 宁波晶元太阳能有限公司 | 基于顶侧分开控制多晶硅铸锭炉的加热控制系统及方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014075578A1 (zh) * | 2012-11-14 | 2014-05-22 | 田立 | 多晶硅铸锭炉固液界面检测装置 |
CN103361721A (zh) * | 2013-07-15 | 2013-10-23 | 江苏协鑫硅材料科技发展有限公司 | 铸锭晶种熔化高度控制方法及多晶硅铸锭炉 |
CN104294357A (zh) * | 2014-10-23 | 2015-01-21 | 江西赛维Ldk太阳能高科技有限公司 | 一种多晶铸锭籽晶熔化控制方法及多晶硅铸锭炉 |
CN106048713A (zh) * | 2016-06-28 | 2016-10-26 | 山东天岳晶体材料有限公司 | 一种碳化硅溶液法中实时监测并调整固液界面高度的方法 |
CN106048713B (zh) * | 2016-06-28 | 2018-06-26 | 山东天岳晶体材料有限公司 | 一种碳化硅溶液法中实时监测并调整固液界面高度的方法 |
CN110534590A (zh) * | 2019-08-16 | 2019-12-03 | 上海交通大学 | 一种提高太阳电池长波响应的氮化硅薄膜及其制备方法 |
CN114574963A (zh) * | 2022-03-28 | 2022-06-03 | 扬州晶樱光电科技有限公司 | 一种用于多晶铸锭炉的温度输出功率控制系统及控制方法 |
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Address after: 213031, No. 2, Tianhe Road, Xinbei Industrial Park, Jiangsu, Changzhou Patentee after: trina solar Ltd. Address before: 213031, No. 2, Tianhe Road, Xinbei Industrial Park, Jiangsu, Changzhou Patentee before: CHANGZHOU TRINA SOLAR ENERGY Co.,Ltd. Address after: 213031, No. 2, Tianhe Road, Xinbei Industrial Park, Jiangsu, Changzhou Patentee after: TRINASOLAR Co.,Ltd. Address before: 213031, No. 2, Tianhe Road, Xinbei Industrial Park, Jiangsu, Changzhou Patentee before: trina solar Ltd. |