CN102680737B - 加速度检测器或装置、倾斜传感器或检测装置、电子设备 - Google Patents

加速度检测器或装置、倾斜传感器或检测装置、电子设备 Download PDF

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Publication number
CN102680737B
CN102680737B CN201210063622.XA CN201210063622A CN102680737B CN 102680737 B CN102680737 B CN 102680737B CN 201210063622 A CN201210063622 A CN 201210063622A CN 102680737 B CN102680737 B CN 102680737B
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acceleration
movable
base
acceleration detector
acceleration detection
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CN102680737A (zh
Inventor
渡边润
中仙道和之
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Seiko Epson Corp
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Seiko Epson Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C9/00—Measuring inclination, e.g. by clinometers, by levels
    • G01C9/02—Details
    • G01C9/06—Electric or photoelectric indication or reading means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Pressure Sensors (AREA)
CN201210063622.XA 2011-03-11 2012-03-12 加速度检测器或装置、倾斜传感器或检测装置、电子设备 Active CN102680737B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-054013 2011-03-11
JP2011054013A JP5678741B2 (ja) 2011-03-11 2011-03-11 加速度検出器、加速度検出デバイス及び電子機器

Publications (2)

Publication Number Publication Date
CN102680737A CN102680737A (zh) 2012-09-19
CN102680737B true CN102680737B (zh) 2016-12-14

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CN201220091421.6U Expired - Fee Related CN202693614U (zh) 2011-03-11 2012-03-12 加速度检测器或装置、倾斜传感器或检测装置、电子设备
CN201210063622.XA Active CN102680737B (zh) 2011-03-11 2012-03-12 加速度检测器或装置、倾斜传感器或检测装置、电子设备

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CN201220091421.6U Expired - Fee Related CN202693614U (zh) 2011-03-11 2012-03-12 加速度检测器或装置、倾斜传感器或检测装置、电子设备

Country Status (3)

Country Link
US (1) US8714013B2 (enExample)
JP (1) JP5678741B2 (enExample)
CN (2) CN202693614U (enExample)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5678741B2 (ja) * 2011-03-11 2015-03-04 セイコーエプソン株式会社 加速度検出器、加速度検出デバイス及び電子機器
NO335565B1 (no) 2012-12-21 2014-12-29 Cggveritas Services Norway As Geofysisk akselerasjonssensor med justerbar støtbeskyttelse og fremgangsmåte
US8914986B1 (en) * 2013-01-16 2014-12-23 The Boeing Company Inclinometer device and method of manufacture
US9400337B2 (en) 2013-03-15 2016-07-26 L-3 Communications Corporation Beam accelerometer
US9623285B1 (en) * 2013-08-09 2017-04-18 Mariano M Ruiz Barbell level indicator
CN105429607B (zh) * 2014-09-16 2020-12-29 精工爱普生株式会社 振动装置、电子设备以及移动体
US20170097278A1 (en) * 2015-10-02 2017-04-06 Seiko Epson Corporation Measurement instrument, measurement method, measurement system, and program
JP6705168B2 (ja) 2015-12-28 2020-06-03 セイコーエプソン株式会社 センサー用基板、物理量検出センサー、加速度センサー、電子機器、および移動体
JP6604200B2 (ja) * 2015-12-28 2019-11-13 セイコーエプソン株式会社 加速度センサー、計測システム、および計測装置
JP6627501B2 (ja) * 2015-12-28 2020-01-08 セイコーエプソン株式会社 計測装置、減衰特性算出方法、プログラム、および計測システム
US10060943B2 (en) 2016-03-18 2018-08-28 Rosemount Aerospace Inc. Symmetric MEMS piezoelectric accelerometer for lateral noise
JP6840960B2 (ja) 2016-09-07 2021-03-10 セイコーエプソン株式会社 センサー用基板、物理量検出センサー、加速度センサー、電子機器、移動体、およびセンサー用基板の製造方法
JP6897187B2 (ja) * 2017-03-16 2021-06-30 セイコーエプソン株式会社 物理量検出器、物理量検出デバイス、電子機器および移動体
JP7087479B2 (ja) 2018-03-09 2022-06-21 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、物理量センサーデバイスを用いた傾斜計、慣性計測装置、構造物監視装置、及び移動体
CN110243343B (zh) * 2018-03-09 2022-07-29 精工爱普生株式会社 传感器模块、倾斜仪以及结构物监视装置
CN109158753A (zh) * 2018-07-24 2019-01-08 中国航空工业集团公司西安飞行自动控制研究所 一种单晶硅挠性加速度计的密封方法
JP2020134391A (ja) * 2019-02-22 2020-08-31 セイコーエプソン株式会社 センサーモジュール、センサーシステム及び慣性センサーの異常判定方法
JP7188311B2 (ja) * 2019-07-31 2022-12-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
JP1731151S (ja) * 2022-02-21 2022-12-01 測定器用センサーカバー

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US4939935A (en) * 1988-02-22 1990-07-10 Societe D'applications Generales D'electricite Et De Mecanique Pendular non-servoed tuning beam accelerometer
CN202693614U (zh) * 2011-03-11 2013-01-23 精工爱普生株式会社 加速度检测器或装置、倾斜传感器或检测装置、电子设备

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JPS6317428U (enExample) * 1986-07-18 1988-02-05
FR2640045B1 (fr) 1988-12-02 1991-03-08 Sagem Transducteur force-frequence a poutres vibrantes et accelerometre pendulaire en comportant application
US4881408A (en) 1989-02-16 1989-11-21 Sundstrand Data Control, Inc. Low profile accelerometer
JP2600393B2 (ja) * 1989-09-25 1997-04-16 日産自動車株式会社 半導体加速度センサの製造方法
FR2666887A1 (fr) * 1990-09-17 1992-03-20 Asulab Sa Capteur de mesure d'une grandeur physique.
US5239871A (en) * 1990-12-17 1993-08-31 Texas Instruments Incorporated Capacitive accelerometer
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5241861A (en) * 1991-02-08 1993-09-07 Sundstrand Corporation Micromachined rate and acceleration sensor
DE69509312T2 (de) * 1994-06-29 1999-11-04 New Sd, Inc. Beschleunigungsmesser sowie Verfahren zu seiner Herstellung
JPH08297139A (ja) * 1995-04-26 1996-11-12 Mitsubishi Electric Corp 半導体加速度センサ
JPH0943269A (ja) * 1995-07-28 1997-02-14 Omron Corp 加速度トランスデューサ
JP2000206141A (ja) * 1999-01-20 2000-07-28 Miyota Kk 運動量センサ
US6263736B1 (en) * 1999-09-24 2001-07-24 Ut-Battelle, Llc Electrostatically tunable resonance frequency beam utilizing a stress-sensitive film
DE60213981T2 (de) * 2001-05-15 2007-08-30 Honeywell International Inc. Element zur spannungsentlastung für einen beschleunigungssensor
US7802475B2 (en) * 2006-10-13 2010-09-28 Seiko Epson Corporation Acceleration sensor
JP2011064652A (ja) 2009-09-18 2011-03-31 Seiko Epson Corp 加速度検出器
JP5375624B2 (ja) * 2010-01-18 2013-12-25 セイコーエプソン株式会社 加速度センサー、及び加速度検出装置
JP5824876B2 (ja) * 2011-05-30 2015-12-02 セイコーエプソン株式会社 物理量検出器の製造方法
JP2013050321A (ja) * 2011-08-30 2013-03-14 Seiko Epson Corp 物理量検出器及び電子機器
JP5896114B2 (ja) * 2011-10-31 2016-03-30 セイコーエプソン株式会社 物理量検出デバイス、物理量検出器、および電子機器
JP2013217667A (ja) * 2012-04-04 2013-10-24 Seiko Epson Corp 物理量検出デバイス、物理量検出器、および電子機器、並びに物理量検出デバイスの製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4939935A (en) * 1988-02-22 1990-07-10 Societe D'applications Generales D'electricite Et De Mecanique Pendular non-servoed tuning beam accelerometer
CN202693614U (zh) * 2011-03-11 2013-01-23 精工爱普生株式会社 加速度检测器或装置、倾斜传感器或检测装置、电子设备

Also Published As

Publication number Publication date
CN202693614U (zh) 2013-01-23
CN102680737A (zh) 2012-09-19
US20120227274A1 (en) 2012-09-13
JP2012189480A (ja) 2012-10-04
JP5678741B2 (ja) 2015-03-04
US8714013B2 (en) 2014-05-06

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