CN102677170B - 一种控制蓝宝石生长尺寸的方法及系统 - Google Patents
一种控制蓝宝石生长尺寸的方法及系统 Download PDFInfo
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- CN102677170B CN102677170B CN201210172028.4A CN201210172028A CN102677170B CN 102677170 B CN102677170 B CN 102677170B CN 201210172028 A CN201210172028 A CN 201210172028A CN 102677170 B CN102677170 B CN 102677170B
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- 229910052594 sapphire Inorganic materials 0.000 title claims abstract description 77
- 239000010980 sapphire Substances 0.000 title claims abstract description 77
- 238000000034 method Methods 0.000 title claims abstract description 54
- 239000013078 crystal Substances 0.000 claims abstract description 75
- 238000012544 monitoring process Methods 0.000 claims abstract description 16
- 230000005499 meniscus Effects 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 10
- 238000002844 melting Methods 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 6
- 238000010521 absorption reaction Methods 0.000 claims description 3
- 238000000137 annealing Methods 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 3
- 239000000843 powder Substances 0.000 claims description 3
- 238000010583 slow cooling Methods 0.000 claims description 3
- 238000010792 warming Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 238000005231 Edge Defined Film Fed Growth Methods 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- 229910002601 GaN Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000007493 shaping process Methods 0.000 description 2
- 241001062009 Indigofera Species 0.000 description 1
- 241001025261 Neoraja caerulea Species 0.000 description 1
- 230000005679 Peltier effect Effects 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000002050 diffraction method Methods 0.000 description 1
- 238000000407 epitaxy Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
Description
Claims (2)
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CN201210172028.4A CN102677170B (zh) | 2012-05-29 | 2012-05-29 | 一种控制蓝宝石生长尺寸的方法及系统 |
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CN201210172028.4A CN102677170B (zh) | 2012-05-29 | 2012-05-29 | 一种控制蓝宝石生长尺寸的方法及系统 |
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CN102677170A CN102677170A (zh) | 2012-09-19 |
CN102677170B true CN102677170B (zh) | 2015-09-02 |
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CN201210172028.4A Expired - Fee Related CN102677170B (zh) | 2012-05-29 | 2012-05-29 | 一种控制蓝宝石生长尺寸的方法及系统 |
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CN (1) | CN102677170B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104088014B (zh) * | 2014-07-11 | 2016-08-17 | 江苏中电振华晶体技术有限公司 | 一种棒状蓝宝石晶体生长设备及其生长方法 |
CN106801250B (zh) * | 2017-01-13 | 2019-05-07 | 中山大学 | 反馈晶体生长状态的方法、晶体生长控制方法及控制系统 |
CN112410870B (zh) * | 2020-11-20 | 2022-02-01 | 中电化合物半导体有限公司 | 基于液相外延法生长碳化硅晶体的生长控制方法及系统 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD145407A1 (de) * | 1979-08-02 | 1980-12-10 | Manfred Reiche | Verfahren zur automatischen kontrolle und regelung des kristalldurchmessers |
CN101580963A (zh) * | 2009-06-26 | 2009-11-18 | 哈尔滨工大奥瑞德光电技术有限公司 | 300mm以上蓝宝石单晶的冷心放肩微量提拉制备法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6487592A (en) * | 1987-09-30 | 1989-03-31 | Nec Corp | Single crystal growing device |
JPH05124890A (ja) * | 1991-11-01 | 1993-05-21 | Komatsu Electron Metals Co Ltd | 半導体単結晶成長装置 |
CN1131342C (zh) * | 2000-11-17 | 2003-12-17 | 中国科学院物理研究所 | 一种利用帕尔贴效应实现单晶生长控制的方法 |
JP2004345907A (ja) * | 2003-05-22 | 2004-12-09 | Toshiba Ceramics Co Ltd | 半導体単結晶成長装置 |
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2012
- 2012-05-29 CN CN201210172028.4A patent/CN102677170B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD145407A1 (de) * | 1979-08-02 | 1980-12-10 | Manfred Reiche | Verfahren zur automatischen kontrolle und regelung des kristalldurchmessers |
CN101580963A (zh) * | 2009-06-26 | 2009-11-18 | 哈尔滨工大奥瑞德光电技术有限公司 | 300mm以上蓝宝石单晶的冷心放肩微量提拉制备法 |
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Owner name: JIANGSU CEC ZHENHUA CRYSTAL TECHNOLOGY CO., LTD. Free format text: FORMER OWNER: SHANGHAI CEC ZHENHUA CRYSTAL TECHNOLOGY CO., LTD. Effective date: 20150729 |
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Effective date of registration: 20150729 Address after: 226500, Jiangsu City, Rugao Province, such as the town of South Ocean Road (South extension) 1 Applicant after: Jiangsu CEC Zhenhua Crystal Technology Co., Ltd. Address before: 201210, 108, No. 725, South six road, Xuan Qiao Town, Shanghai, Pudong New Area, -8 Applicant before: Shanghai CEC Zhenhua Crystal Technology Co.,Ltd. |
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