CN102677000B - 蒸镀用舟皿和使用该蒸镀用舟皿的成膜方法 - Google Patents
蒸镀用舟皿和使用该蒸镀用舟皿的成膜方法 Download PDFInfo
- Publication number
- CN102677000B CN102677000B CN201210073590.1A CN201210073590A CN102677000B CN 102677000 B CN102677000 B CN 102677000B CN 201210073590 A CN201210073590 A CN 201210073590A CN 102677000 B CN102677000 B CN 102677000B
- Authority
- CN
- China
- Prior art keywords
- evaporation
- sectional area
- rake
- supply unit
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011-052268 | 2011-03-10 | ||
JP2011052268A JP5611086B2 (ja) | 2011-03-10 | 2011-03-10 | 蒸着用ボートとこれを使用した成膜方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102677000A CN102677000A (zh) | 2012-09-19 |
CN102677000B true CN102677000B (zh) | 2015-11-25 |
Family
ID=46809536
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210073590.1A Expired - Fee Related CN102677000B (zh) | 2011-03-10 | 2012-03-09 | 蒸镀用舟皿和使用该蒸镀用舟皿的成膜方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5611086B2 (ja) |
CN (1) | CN102677000B (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2887416B1 (en) * | 2013-12-23 | 2018-02-21 | Novaled GmbH | N-doped semiconducting material comprising phosphine oxide matrix and metal dopant |
EP3767004B1 (en) * | 2019-07-17 | 2023-09-27 | 3M Innovative Properties Company | Evaporation boat for evaporation of metals |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100589937B1 (ko) * | 2004-02-20 | 2006-06-19 | 엘지전자 주식회사 | 금속 박막 형성용 증발원 |
EP1967604A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with directional evaporation |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5943873A (ja) * | 1982-09-04 | 1984-03-12 | Konishiroku Photo Ind Co Ltd | 蒸発材料収容器 |
DE4139792A1 (de) * | 1991-12-03 | 1993-06-09 | Leybold Ag, 6450 Hanau, De | Verdampferschiffchen fuer eine vorrichtung zur beschichtung von substraten |
JPH07207434A (ja) * | 1994-01-18 | 1995-08-08 | Shin Etsu Chem Co Ltd | 蒸着用ボート |
ATE392492T1 (de) * | 2005-08-03 | 2008-05-15 | Applied Materials Gmbh & Co Kg | Verdampfervorrichtung zum beschichten von substraten |
-
2011
- 2011-03-10 JP JP2011052268A patent/JP5611086B2/ja not_active Expired - Fee Related
-
2012
- 2012-03-09 CN CN201210073590.1A patent/CN102677000B/zh not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100589937B1 (ko) * | 2004-02-20 | 2006-06-19 | 엘지전자 주식회사 | 금속 박막 형성용 증발원 |
EP1967604A1 (en) * | 2007-03-08 | 2008-09-10 | Applied Materials, Inc. | Evaporation crucible and evaporation apparatus with directional evaporation |
Also Published As
Publication number | Publication date |
---|---|
JP2012188692A (ja) | 2012-10-04 |
CN102677000A (zh) | 2012-09-19 |
JP5611086B2 (ja) | 2014-10-22 |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20160121 Address after: Osaka Japan Patentee after: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT Co.,Ltd. Address before: Osaka Japan Patentee before: Matsushita Electric Industrial Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151125 Termination date: 20180309 |
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CF01 | Termination of patent right due to non-payment of annual fee |