CN102641798B - 缝式喷嘴系统 - Google Patents

缝式喷嘴系统 Download PDF

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Publication number
CN102641798B
CN102641798B CN201110320356.XA CN201110320356A CN102641798B CN 102641798 B CN102641798 B CN 102641798B CN 201110320356 A CN201110320356 A CN 201110320356A CN 102641798 B CN102641798 B CN 102641798B
Authority
CN
China
Prior art keywords
pipe
slot nozzle
chamber
clean solution
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110320356.XA
Other languages
English (en)
Chinese (zh)
Other versions
CN102641798A (zh
Inventor
李亨鲁
李虎燮
金晋弘
尹淳琨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung SDI Co Ltd
Original Assignee
Samsung SDI Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung SDI Co Ltd filed Critical Samsung SDI Co Ltd
Publication of CN102641798A publication Critical patent/CN102641798A/zh
Application granted granted Critical
Publication of CN102641798B publication Critical patent/CN102641798B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/1002—Means for controlling supply, i.e. flow or pressure, of liquid or other fluent material to the applying apparatus, e.g. valves
    • B05C11/1026—Valves

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Nozzles (AREA)
  • Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
CN201110320356.XA 2011-02-21 2011-10-20 缝式喷嘴系统 Expired - Fee Related CN102641798B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2011-0015002 2011-02-21
KR1020110015002A KR101264507B1 (ko) 2011-02-21 2011-02-21 슬롯 노즐 시스템

Publications (2)

Publication Number Publication Date
CN102641798A CN102641798A (zh) 2012-08-22
CN102641798B true CN102641798B (zh) 2016-05-11

Family

ID=46655024

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110320356.XA Expired - Fee Related CN102641798B (zh) 2011-02-21 2011-10-20 缝式喷嘴系统

Country Status (2)

Country Link
KR (1) KR101264507B1 (ko)
CN (1) CN102641798B (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102590983B1 (ko) * 2016-07-12 2023-10-19 삼성에스디아이 주식회사 슬러리 제조용 믹서 냉각장치
JP6425776B1 (ja) * 2017-08-10 2018-11-21 東レエンジニアリング株式会社 塗工装置及び塗工方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200802677A (en) * 2006-03-24 2008-01-01 Tokyo Ohka Kogyo Co Ltd Method of washing slit nozzle
KR20090015413A (ko) * 2007-08-08 2009-02-12 세메스 주식회사 평판표시장치 제조용 슬릿 노즐의 세정 장치
JP2010250157A (ja) * 2009-04-17 2010-11-04 Toppan Printing Co Ltd スリットコータ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100926308B1 (ko) * 2003-04-23 2009-11-12 삼성전자주식회사 세정 유닛, 이를 갖는 코팅 장치 및 방법
JP5363204B2 (ja) 2009-06-11 2013-12-11 エア・ウォーター株式会社 塗布装置のスリットノズルの洗浄方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200802677A (en) * 2006-03-24 2008-01-01 Tokyo Ohka Kogyo Co Ltd Method of washing slit nozzle
KR20090015413A (ko) * 2007-08-08 2009-02-12 세메스 주식회사 평판표시장치 제조용 슬릿 노즐의 세정 장치
JP2010250157A (ja) * 2009-04-17 2010-11-04 Toppan Printing Co Ltd スリットコータ

Also Published As

Publication number Publication date
KR20120095589A (ko) 2012-08-29
CN102641798A (zh) 2012-08-22
KR101264507B1 (ko) 2013-05-14

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160511

Termination date: 20211020

CF01 Termination of patent right due to non-payment of annual fee