CN102623548B - Method for reading and writing identification code on surface of solar cell - Google Patents
Method for reading and writing identification code on surface of solar cell Download PDFInfo
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- CN102623548B CN102623548B CN201110329217.3A CN201110329217A CN102623548B CN 102623548 B CN102623548 B CN 102623548B CN 201110329217 A CN201110329217 A CN 201110329217A CN 102623548 B CN102623548 B CN 102623548B
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- identification code
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- 238000000034 method Methods 0.000 title claims abstract description 49
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 239000011265 semifinished product Substances 0.000 claims abstract description 8
- 230000003287 optical effect Effects 0.000 claims abstract description 7
- 230000008859 change Effects 0.000 claims abstract description 4
- 210000004027 cell Anatomy 0.000 claims description 69
- 238000012360 testing method Methods 0.000 claims description 17
- 230000008033 biological extinction Effects 0.000 claims description 7
- 230000008569 process Effects 0.000 abstract description 11
- 238000006243 chemical reaction Methods 0.000 abstract description 8
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 230000031700 light absorption Effects 0.000 abstract 1
- 230000008901 benefit Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005424 photoluminescence Methods 0.000 description 2
- 229910017502 Nd:YVO4 Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- QWVYNEUUYROOSZ-UHFFFAOYSA-N trioxido(oxo)vanadium;yttrium(3+) Chemical compound [Y+3].[O-][V]([O-])([O-])=O QWVYNEUUYROOSZ-UHFFFAOYSA-N 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
The invention discloses a method for reading and writing an identification code on the surface of a solar cell, which comprises the following steps of firstly, providing a semi-finished product of a batch of solar cell substrates, wherein the semi-finished product refers to a finished part or all processes of the solar cell substrates; and writing an identification code of an identification wafer on the light absorption surface or the back surface of the solar cell substrate by laser, and performing heat treatment on the area where the identification code is located by the laser to change the optical property of the area where the identification code is located, wherein the identification code cannot be directly identified by naked eyes and can be identified by light sources other than visible light. The method of the invention can be integrated in the original process, and compared with the prior art, the method is easy to interpret and can not reduce the photoelectric conversion efficiency of the solar cell. Moreover, when the yield of the solar cell is reduced, a tester can analyze and search problems according to the process parameter data of each solar cell substrate, and timely adjust the process parameters to optimize the quality of the solar cell.
Description
Technical field
The present invention relates to a kind of in solar cell (solarcell) burning identification code (identification) method, refer to especially with the method for laser (laser) in solar cell surface burning identification code.
Background technology
In recent years, due to new line and the exhaustion gradually of other energy of environmental consciousness, countries in the world are made to start to pay attention to the utilization of the renewable energy resources.The renewable energy resources comprise: the sources such as solar energy, wind energy, hydraulic energy or raw mass-energy are without deficient resource.And in subtropical zone, enrich sunshine, therefore, utilizing solar cell (solarcell) as the exploitation of solar energy source, the photoelectric conversion efficiency of solar energy is improved, is the focus of each industrial research now.
In order to monitor the state of arts of each wafer, reach the object improving product yields further, in the technique of conventional semiconductors integrated circuit, by quite ripe for the technology of identification code burning on wafer.But in the technique of solar cell (solarcell), application is in this respect but not yet universal.One of them reason is, if by the front surface of identification code burning at solar cell, the effect of shading can be increased, and photoelectric conversion efficiency is reduced, Another reason is, for the cost of integrated artistic, this does not also meet economic benefit (output value of a slice integrated circuit (IC) wafer is even greater than solar cell wafer for several thousand times more than about hundreds of).
There is no identification code, in the process preparing solar cell, just have no way of following the trail of the technological parameter of each wafer.What is more, when solar cell yields occurs abnormal, is difficult to immediately to pinpoint the problems place from the data of production-line technique record, also just has no way of finding out corresponding Improving Measurements.Therefore, if each wafer can have respective identification code, contribute to doing optimized adjustment to technological parameter further.
Be in the U.S. patent application case of 20070163634 in publication number, only that the announcement solar cell of summary is after completing technique, identification code is printed on the concept of solar cell, the means of printing comprise and are printed on solar cell surface, the back side or side with laser, sandblasting or the ink with resist chemical.
And be 20,080 in another publication number, in the U.S. patent application case of 160,648, be then disclosed in and carry out before and after technique, record the photoluminescence image (photoluminescence) of wafer surface respectively.Yields once solar cell occurs abnormal, is used as the mode identified by the surface image of comparison different chips.But which wafer in this way pick out is, comparison will be not easy very much.Especially from same crystal bar, the wafer under the long brilliant characteristic of its column will make to cut, the surface image of adjacent two wafer can be closely similar, easily causes differentiation mistake.
In addition, the speed of current industry manufacture of solar cells has 120,000 at least every day, can infer, and being used for the database of store images needs very large capacity, let alone is than right.
Conveniently review the test data of technique record and solar cell, be necessary the technology developing a kind of burning identification code on the solar cell, make identification code imprinting when solar cell shadow surface, not only do not affect the photoelectric conversion efficiency of solar cell, again easily interpretation.
Summary of the invention
Because above-mentioned problem, an object of the present invention is to provide a kind of method in solar cell surface read-write identification code, comprise: the semi-finished product providing one batch of solar cell substrate, semi-finished product refer to that solar cell substrate has completed some or all technique; And with laser, solar cell substrate extinction face or back side write one are identified to the identification code of wafer, with laser needle, heat treatment is done to identification code region, to change the optical property of identification code region, wherein, identification code cannot with the direct identification of naked eyes, and the light source beyond visible ray could identification.
Light source beyond described visible ray, best wavelength is greater than 1100nm or is less than 400nm.Because identification code is not high for visible light reflectance, naked eyes are difficult to identification, therefore, during interpretation identification code, are read with a ultraviolet light charge coupled cell or a far red light charge coupled cell.Or be equipped with the white light reading device of visible filter to read with one.
Identification code is selected from group's one wherein that graphic sign, figure notation, word and combination in any thereof form, and graphic sign, figure notation or word represent the test data of solar cell substrate, technological parameter or wafer code name.Coordinate comparison list simultaneously, technological parameter and/or the test data of sheet solar cell out of the ordinary can be reviewed.Another embodiment of the present invention, is by technique resume all for solar cell substrate and test result, is integrated into a graphic sign.
Method of the present invention not only can be integrated in technique originally, compared to front case, except interpretation easily, can not reduce solar cell photoelectric conversion efficiency again.Further, when the yields of solar cell declines, testing staff can, according to the technological parameter data of every a slice solar cell substrate, carry out analyzing and searching problem, and in good time adjusting process parameter, make the performance optimal of solar cell.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide a further understanding of the present invention, forms a application's part, does not form limitation of the invention.In the accompanying drawings:
Figure 1A shows the solar cell substrate with identification code of the embodiment of the present invention;
Figure 1B show the face structuring of solar cell substrate extinction after light reflectivity to different wave length;
Fig. 2 A shows in the embodiment of the present invention, the identification code read with identification code reading device; And
Fig. 2 B shows the partial enlarged drawing of Fig. 2 A identification code.
Drawing reference numeral:
10: solar cell substrate 11: identification code
12: identification code reading device
Embodiment
Can become apparent for making above-mentioned purpose of the present invention, feature and advantage, hereafter according to the method for the present invention in solar cell (solarcell) surface read-write identification code, especially exemplified by preferred embodiment, and coordinate appended correlative type, be described in detail below, wherein identical element is illustrated with identical component symbol.
Please refer to Figure 1A, in the embodiment of the present invention, utilize laser on solar cell substrate 10, form the identification code 11 that identifies wafer.When to it should be noted that in the present invention with laser burning identification code 11, surface microstructure structure partial is burnt, and the optical property of identification code 11 region can change thereupon.
In solar battery process, one batch of solar cell substrate to I haven't seen you for ages sequentially through techniques such as clean, structuring (texturing), diffusion, insulation, coating anti reflection layer, wire mark electrode and sintering, and carries out testing electrical property.
And of the present invention with the step of laser burning identification code, can carry out after solar cell substrate completes the technique of structuring (texturing).Better selection carries out after solar cell substrate completes all technique and testing electrical property, test result to be integrated in identification code in the lump.
Another preferred embodiment is the solar cell for having selectivity emitter structure, after this batch of solar cell substrate forms the technique of selectivity emitter structure with laser assisted doping, carries out the step of burning identification code.In embodiments of the present invention, identification code can optionally burning in the extinction face of solar cell substrate or the back side.
In the embodiment of the present invention, use Nd-doped yttrium vanadate (Nd:YVO4) laser that optical wavelength is 532nm, the power used during burning identification code only has about 5 to 25W, the about 1k to 50kHz of pulse frequency, compared in general solar battery process, it is lower to be used for the laser pulse frequency (being greater than 100kHz) that patterning uses.
Please refer to Figure 1B, for solar cell extinction face is after roughening, for the reflectivity that Different lightwave is long.As can be seen from Figure, solar cell extinction regards to visible ray and infrared ray (about 400 to the 1050nm of wavelength), reflectivity only has about 10% to 18%, 1100nm is greater than to optical wavelength or be less than 400nm (in Figure 1B by circle choosing region) reflectivity be at least greater than 25%.
That is, in identification code 11 region, although the structure of surface microstructure changes, under visible light, be difficult to observe directly difference place.Under light source beyond visible ray, best wavelength is greater than 1100nm or is less than 400nm, more could know identification surface nature reformed region.In other words, in the present invention, identification code with the direct interpretation of naked eyes, cannot need coordinate an identification code reading device 12.Fig. 2 A is in embodiments of the present invention, reads the result of identification code with identification code reading device 12.And Fig. 2 B is the partial enlarged drawing of Fig. 2 A, by getting final product clear view in Fig. 2 B to after LASER HEAT TREATMENT, the region that grainiess changes.Described identification code reading device 12 is a ultraviolet light charge coupled cell or a far red light charge coupled cell, also can be the white light reading device of outfit one visible filter.In this way identification code is embedded in the extinction face of solar cell substrate, for the photoelectric conversion efficiency of solar cell almost without any impact.
Identification code is selected from group's one wherein that graphic sign, figure notation, word and combination in any thereof form.And graphic sign, figure notation or word can represent the test data of solar cell substrate, technological parameter or wafer code name.
In the embodiment of the present invention, more comprise and set up comparison list (look-uptable), comprise the information corresponding to identification code figure, figure notation or word.Such as: the numbering representing individual platelet sheet with figure notation, with the exception in star symbolic representations technical process, or with English alphabet A ~ D to this sheet solar cell test result classification etc.Generally speaking, the information that this sheet solar cell substrate is noted down, can design according to actual process demand.
Present pre-ferred embodiments is for the identification code of Fig. 2 A, and the identification code 11 in Fig. 2 A is a figure passing through design, and the zones of different of figure can represent the situations such as wafer number, test data, technological parameter respectively.That is, the technique resume of this sheet solar cell and test result are all integrated in an identification code figure, as long as decode for this figure, the state of arts of this sheet solar cell can be reviewed.
In sum, the method in solar cell substrate burning identification code provided by the present invention, has following advantages:
(1) technological parameter correction is easier.Because every a slice solar cell substrate all has respective identification code, the parameter of every a slice solar cell substrate in preparation process can be recorded and file.When the yields of solar cell declines, testing staff can, according to the technological parameter data of every a slice solar cell substrate, carry out analyzing and searching problem, and in good time adjusting process parameter, make the performance optimal of solar cell.
(2) photoelectric conversion efficiency is not affected.Because identification code region is very low to visible light reflectance, therefore, this region still can absorb sunlight to produce carrier, for overall photoelectric conversion efficiency, there is no too large impact.
(3) interpretation is easy, does not cause system burden again.In the present invention, as long as use a ultraviolet or far infrared electric charge coupling element, namely can read identification code, do not need the surface image of comparison wafer as prior art, carry out identification wafer, very convenient.In addition, do not need in database to store a large amount of picture, only need to store the table of comparisons, therefore, the burden that system is excessive can not be caused.
Though the present invention illustrates as above with preferred embodiments, so itself and be not used to limit the present invention spirit with invention entity only terminate in above-described embodiment.All those skilled in the art, when can understanding easily and utilizing other element or mode to produce identical effect.Therefore not departing from the amendment done in spirit of the present invention and category, all should be included in right.
Claims (9)
1., in a method for solar cell surface read-write identification code, it is characterized in that, comprising:
There is provided the semi-finished product of one batch of solar cell substrate, described semi-finished product refer to that described solar cell substrate has completed some or all technique; And
With laser, described solar cell substrate extinction face or back side burning one are identified to the identification code of wafer, do local with the surface microstructure of laser needle to described identification code region to burn, to change the optical property of described identification code region, wherein, described identification code is not suitable for using visible ray as debating knowledge light source, and it is that optical source wavelength is between 1100nm-1200nm or 300nm ~ 400nm that light source is known in best debating.
2. the method for claim 1, it is characterized in that, described identification code is selected from group's one wherein that graphic sign, figure notation, word and combination in any thereof form, and described graphic sign, figure notation or word represent the test data of described solar cell substrate, technological parameter or wafer code name.
3. method as claimed in claim 2, it is characterized in that, described identification code is a graphic sign, and described graphic sign integrates all technique resume of described solar cell substrate and test result.
4. the method for claim 1, is characterized in that, described in interpretation during identification code, reads with a ultraviolet light charge coupled cell or a far red light charge coupled cell.
5. the method for claim 1, is characterized in that, described in interpretation during identification code, is equipped with the white light reading device of visible filter to read with one.
6. the method for claim 1, is characterized in that, more comprises and sets up comparison list, and the described table of comparisons comprises the information representated by described identification code.
7. the method for claim 1, is characterized in that, described semi-finished product have completed structurized technique, then with identification code described in laser burning.
8. the method for claim 1, is characterized in that, the step of identification code described in burning, is integrated in described batch solar cell substrate and is formed in the step of selectivity emitter structure with laser assisted doping.
9. the method for claim 1, it is characterized in that, described semi-finished product have completed all technique, before identification code described in laser burning, more comprise the step of batch solar cell substrate described in a test, in the lump test result can be integrated in described identification code afterwards.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100103799A TWI484655B (en) | 2011-01-31 | 2011-01-31 | Method for scribing and reading id on solar cell |
| TW100103799 | 2011-01-31 |
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| Publication Number | Publication Date |
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| CN102623548A CN102623548A (en) | 2012-08-01 |
| CN102623548B true CN102623548B (en) | 2016-01-06 |
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| CN201110329217.3A Expired - Fee Related CN102623548B (en) | 2011-01-31 | 2011-10-26 | Method for reading and writing identification code on surface of solar cell |
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| CN (1) | CN102623548B (en) |
| TW (1) | TWI484655B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101602782B1 (en) * | 2014-07-03 | 2016-03-11 | 주식회사 이오테크닉스 | Method for marking wafer |
| CN105374898A (en) * | 2014-08-22 | 2016-03-02 | 新日光能源科技股份有限公司 | Solar cell marking method |
| CN108538757B (en) * | 2018-03-27 | 2020-12-01 | 韩华新能源（启东）有限公司 | Solar cell manufacturing process tracing method |
| CN108538961B (en) * | 2018-04-23 | 2020-01-14 | 华丰源（成都）新能源科技有限公司 | Method for positioning and marking crystalline silicon-based solar cell wafer |
| CN110346956B (en) * | 2019-06-26 | 2020-10-16 | 深圳市华星光电技术有限公司 | Liquid crystal display panel with ultra-narrow frame side coding structure and side coding method thereof |
| CN112185937B (en) * | 2020-09-29 | 2023-12-12 | 晶科能源(海宁)有限公司 | Semiconductor sheet for manufacturing solar cell and manufacturing method thereof |
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| CN1983645A (en) * | 2005-12-13 | 2007-06-20 | 上海太阳能科技有限公司 | Production of polycrystalline silicon solar battery suede |
| CN101022140A (en) * | 2007-03-02 | 2007-08-22 | 江苏艾德太阳能科技有限公司 | Method for realizing crystal silicon solar cell selective emitter region |
| CN101166601A (en) * | 2005-04-29 | 2008-04-23 | 杰斯集团公司 | System and method for inspecting wafers in a laser marking system |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6914006B2 (en) * | 2001-10-30 | 2005-07-05 | Freescale Semiconductor, Inc. | Wafer scribing method and wafer scribing device |
| US20070163634A1 (en) * | 2005-07-14 | 2007-07-19 | Kyocera Corporation | Solar cell, manufacturing method and manufacturing management system thereof, and solar cell module |
-
2011
- 2011-01-31 TW TW100103799A patent/TWI484655B/en not_active IP Right Cessation
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101166601A (en) * | 2005-04-29 | 2008-04-23 | 杰斯集团公司 | System and method for inspecting wafers in a laser marking system |
| CN1983645A (en) * | 2005-12-13 | 2007-06-20 | 上海太阳能科技有限公司 | Production of polycrystalline silicon solar battery suede |
| CN101022140A (en) * | 2007-03-02 | 2007-08-22 | 江苏艾德太阳能科技有限公司 | Method for realizing crystal silicon solar cell selective emitter region |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102623548A (en) | 2012-08-01 |
| TW201232804A (en) | 2012-08-01 |
| TWI484655B (en) | 2015-05-11 |
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