CN102620590B - Micro-channel heat sink and performance testing device thereof - Google Patents

Micro-channel heat sink and performance testing device thereof Download PDF

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CN102620590B
CN102620590B CN201210090080.5A CN201210090080A CN102620590B CN 102620590 B CN102620590 B CN 102620590B CN 201210090080 A CN201210090080 A CN 201210090080A CN 102620590 B CN102620590 B CN 102620590B
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heat sink
microchannel
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CN102620590A (en
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蔡军
淮秀兰
李勋锋
陶毓伽
郭江峰
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Institute of Engineering Thermophysics of CAS
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Abstract

The invention discloses a micro-channel heat sink for enhancing heat exchange by utilizing a hydrodynamic cavitation technology. The micro-channel heat sink mainly comprises a micro-channel flat plate, a sealing cover plate and a heating element, wherein a fluid inlet, an inlet pressure measuring port, cavitation generators, a main stream micro-channel, an outlet pressure measuring port and a fluid outlet are arranged on one flat surface of the micro-channel flat plate; the cavitation generators are arranged at intervals in the main stream micro-channel along the liquid flow direction; the width ratio between the cavitation generators and the main stream micro-channel is 0.1 to 0.6; the sealing cover plate is arranged on the flat surface of the micro-channel flat plate; a fluid inlet, an inlet pressure measuring port, an outlet pressure measuring port and a fluid outlet are arranged in the sealing cover plate and are respectively corresponding to the fluid inlet, the inlet pressure measuring port, the outlet pressure measuring port and the fluid outlet arranged in the micro-channel flat plate; and the heating element is arranged on the other flat surface of the micro-channel flat plate. The invention additionally discloses a performance testing device of the micro-channel heat sink.

Description

A kind of micro-channel heat sink and micro-channel heat sink performance testing device
Technical field
The invention belongs to high efficiency cooling technical field, relate to particularly a kind of micro-channel heat sink that utilizes Hydrodynamic cavitation enhanced heat exchange.
The invention still further relates to a kind of device of testing above-mentioned micro-channel heat sink performance.
Background technology
Micro-channel heat sink concept is proposed the eighties in last century by American scholar T uckerman and Pease the earliest.Micro-channel heat sink volume is little, compact conformation, and its channel size can reach tens magnitudes of several microns even, therefore can directly act on the heat source position in small space.Micro-channel heat sink, with its efficient cooling capacity, simple cooling structure and good compatibility, has become the most potential high efficiency cooling mode of microelectronic component industry.Yet along with the rapid raising of high-performance integrated device operating frequency, its power density sharply rises.At present, high-performance CPU has approached the power density of nucleon reaction heap, and the power density of the devices such as high power device (as IGBT) and laser diode (DL) array has also reached hundreds of watts, kilowatt magnitude even.Under normal operation, the hear rate in these devices accounts for the more than 50% of general power, in order to guarantee the performance of device, must in time this part heat be taken away.In the face of high heat flow density like this, the cooling capacity of tradition micro-channel heat sink can not adapt to the demand for development of high-performance electronic components and parts, in the confined space, the timely used heat transforming because of power dissipation of eliminating has become the Main Bottleneck that restricts high-power integrated circuit technology and Development of Laser Technology, in the urgent need to developing and develop novel cooling technology and the method with high density heat-sinking capability.
Cavitation refers to when liquid internal local pressure reduces, the formation of steam or gas cavities in liquid or in liquid-solid boundary, the process of growing and crumbling and fall.Hydrodynamic cavitation, as the term suggests be to realize the cavitation of liquid by certain hydraulic structure, when fluid is flowed through hydraulic structure, metering function due to hydraulic structure, its flow velocity sharply rises, as its pressure of cost, sharply decline, when pressure decreased will produce cavitation phenomenon during to the saturated vapour pressure of liquid under operating temperature.There are some researches show, when cavitation bubble is crumbled and fall, can form 1~10 18kw/m 3high density energy, can be used as the energy input of physical/chemical process, to reach the object of strengthening process.At present, Hydrodynamic Cavitation Technology is widely applied in fields such as chemical industry, drinking water disinfection and wastewater treatments.
Cavitation bubble is crumbled and fall moment, can form intense impact ripple and high-speed micro-jet, not only can form disturbance to liquid flow, and can also cause the transformation of liquid flow pattern, thereby arrive the object of augmentation of heat transfer, therefore Hydrodynamic cavitation is introduced to micro-channel heat sink structure, can increase substantially the cooling capacity of micro-channel heat sink, to meet the requirement of high-power integrated circuit technology and laser technology fast development.
Summary of the invention
The object of the present invention is to provide a kind of micro-channel heat sink that utilizes Hydrodynamic cavitation enhanced heat exchange.
Another object of the present invention is to provide a kind of device that above-mentioned micro-channel heat sink performance is tested.
For achieving the above object, the micro-channel heat sink that utilizes Hydrodynamic cavitation enhanced heat exchange provided by the invention, mainly comprises:
One microchannel is dull and stereotyped, offers fluid intake, inlet pressure measurement port, cavitation generator, main flow microchannel, outlet pressure measurement port and fluid issuing in a plane of this microchannel flat board;
In main flow microchannel, along liquid flow direction compartment of terrain, (equidistant or unequal-interval) is provided with cavitation generator, and the width ratio between cavitation generator and main flow microchannel is 0.1~0.6;
One seal cover board, be located in the plane of this microchannel flat board, seal cover board is provided with fluid intake, inlet pressure measurement port, outlet pressure measurement port and fluid issuing, corresponding microchannel flat board is offered respectively fluid intake, inlet pressure measurement port, outlet pressure measurement port and fluid issuing;
One heater element, is located at another plane of microchannel flat board.
Described micro-channel heat sink, wherein, the material of microchannel flat board is silicon, stainless steel, copper or other metal alloy.
Described micro-channel heat sink, wherein, the material of seal cover board is silicon, stainless steel, copper or heatproof clear glass.
Described micro-channel heat sink, wherein, has a flow distribution cavity between the fluid intake of microchannel flat board and main flow microchannel, have a fluid collection chamber between main flow microchannel and fluid issuing.
Described micro-channel heat sink, wherein, the cavitation generator in the flat board of microchannel and the cross section of main flow microchannel are square, circular, triangle, trapezoidal or polygon, the equivalent diameter ratio of cavitation generator and main flow microchannel is 0.2~0.7.
Described micro-channel heat sink, wherein, the number of main flow microchannel is determined according to the heating area of heater element.
The device of the above-mentioned micro-channel heat sink performance of measurement provided by the invention, comprising:
The fluid intake of micro-channel heat sink connects a reservoir by a kinetic pump, and the fluid issuing of micro-channel heat sink is connected to cooler by a flowmeter, and this cooler connects reservoir, makes the liquid in reservoir form circulation;
The fluid intake of micro-channel heat sink is respectively connected respectively a thermocouple with fluid issuing, measures respectively the fluid temperature of micro-channel heat sink fluid intake and fluid issuing;
The heater element of microchannel flat board connects a thermocouple, measures heating wall temperature;
The inlet pressure measurement port of micro-channel heat sink and outlet pressure measurement port are respectively connected with respectively pressure sensor, measure inlet pressure and the outlet pressure of micro-channel heat sink.
Described device, wherein, between the fluid intake and reservoir of micro-channel heat sink, and valve is respectively installed between the fluid issuing of micro-channel heat sink and flowmeter, to regulate the fluid intake of micro-channel heat sink and the pressure of fluid issuing, reach the condition of liquid cavitation.
Described device, wherein, flowmeter, thermocouple and pressure sensor are all connected to data collecting system, and are processed and analyzed by computer.
The present invention, by Hydrodynamic cavitation phenomenon is introduced to micro-channel heat sink, can significantly improve the cooling capacity of micro-channel heat sink in the situation that not increasing miscellaneous equipment.
Accompanying drawing explanation
Fig. 1 is the micro-channel heat sink schematic three dimensional views that the embodiment of the present invention adopts.
Fig. 2 is the three-dimension packaging schematic diagram of micro-channel heat sink shown in Fig. 1.
Fig. 3 is the dull and stereotyped schematic three dimensional views in microchannel.
Fig. 4 is the schematic diagram of micro-channel heat sink performance testing device of the present invention.
The specific embodiment
Micro-channel heat sink of the present invention comprises: heater element 1, microchannel dull and stereotyped 2 and seal cover board 3.
In micro-channel heat sink of the present invention, the material of microchannel flat board 2 can be silicon, stainless steel, copper or other metal alloy.
In micro-channel heat sink of the present invention, microchannel flat board 2 comprises: fluid intake 4, inlet pressure measurement port 5, cavitation generator 6, main flow microchannel 7, outlet pressure measurement port 8 and fluid issuing 9.
In micro-channel heat sink of the present invention, between fluid intake 4 and main flow microchannel 7, there is a flow distribution cavity A, between main flow microchannel 7 and fluid issuing 9, have a fluid collection chamber B.
In micro-channel heat sink of the present invention, in main flow microchannel, along liquid flow direction compartment of terrain, being provided with cavitation generator 6, can be equally spaced spread configuration between cavitation generator 6, or the spread configuration of unequal-interval (irregular).Width ratio (h/H) scope between cavitation generator 6 and main flow microchannel 7 is 0.1~0.6.
In micro-channel heat sink of the present invention, the cross section of cavitation generator 6 and main flow microchannel 7 can be square, circular, triangle, trapezoidal or polygon, and both equivalent diameter ratio ranges are 0.2~0.7.
In micro-channel heat sink of the present invention, seal cover board 3 is comprised of fluid intake 4, inlet pressure measurement port 5, outlet pressure measurement port 8 and fluid issuing 9, and its material can be silicon, stainless steel, copper or heatproof clear glass.
Micro-channel heat sink performance testing device of the present invention comprises: micro-channel heat sink, reservoir 10, kinetic pump 11, valve 12 and 18, thermocouple 13,15 and 17, pressure measurement sensor 14 and 16, flowmeter 19, cooler 20, data collecting system 21 and computer 22.
In testing arrangement of the present invention, thermocouple 13 and 17 is arranged on fluid intake and the fluid issuing of micro-channel heat sink, measures respectively the temperature of micro-channel heat sink entrance and exit place fluid; Thermocouple 15 is arranged on the heating element heater surface at dull and stereotyped 2 backs, microchannel, is used for measuring heating wall temperature.
In testing arrangement of the present invention, pressure sensor 14 is arranged in the inlet pressure measurement port 5 of micro-channel heat sink, and pressure sensor 16 is arranged in micro-channel heat sink outlet pressure measurement port 8.
In testing arrangement of the present invention, valve 12 is arranged between kinetic pump 11 and the fluid intake of micro-channel heat sink, valve 18 is arranged on the downstream of the fluid issuing of micro-channel heat sink, by coordinating control valve 12 and 18, can regulate the fluid intake of micro-channel heat sink and the pressure of outlet, to reach the condition of liquid cavitation.
In testing arrangement of the present invention, cooler 20 is arranged on the downstream of micro-channel heat sink, to keep entering fluid temperature (F.T.) constant of micro-channel heat sink.
In testing arrangement of the present invention, all temperature signals, pressure signal and flow signal all collect computer 22 by data collecting system 21 and process and analyze.
Below in conjunction with accompanying drawing, the present invention is elaborated.
Refer to shown in Fig. 1~Fig. 3, cooling liquid medium enters in the flat board of microchannel by fluid intake 4, and by assignment of traffic chamber A by cooling liquid mean allocation in each main flow microchannel 7, in micro-channel heat sink of the present invention, the number of main flow microchannel 7 can be determined according to the heating area of heater element 1, be not limited to the numerical value shown in figure.
In main flow microchannel 7, along liquid flow direction, every a segment distance, cavitation generator 6 is set, because the cross section of cavitation generator 6 is more much smaller than the cross section of main flow microchannel 7, liquid is when flowing through cavitation generator 6, its flow velocity sharply rises, as its pressure of cost, sharply decline, thereby produce cavitation bubble.When liquid flows out cavitation generator 6, while reentering main flow microchannel 7, fluid pressure starts to recover, and cavitation bubble starts to crumble and fall, and forms high-speed micro-jet, impacts bottom and the two side walls of main flow microchannel 7, thereby plays the effect of augmentation of heat transfer.Owing to being provided with a plurality of cavitation generators on the flow direction in main flow microchannel 7, so cavitation bubble constantly forms and crumbles and fall, and the heat-transfer capability of whole cooling wall is greatly improved.Liquid is flowed through behind cooling duct, in the B of fluid collection chamber, collects, and then by fluid issuing 9, flows out, and completes the cooling of heater element.
As shown in Figure 4, micro-channel heat sink performance testing device of the present invention is comprised of micro-channel heat sink, reservoir 10, kinetic pump 11, valve 12 and 18, thermocouple 13,15 and 17, pressure measurement sensor 14 and 16, flowmeter 19, cooler 20, data collecting system 21 and computer 22.The circulation power of cooling liquid medium is provided by kinetic pump 11, cooling liquid from reservoir 10 out, through by-pass valve control 12, then through fluid intake 4, enter and in micro-channel heat sink, heater element is carried out coolingly, complete after cooling and flow out micro-channel heat sinks from fluid issuing 9.For the heat-transfer capability of Measurement accuracy micro-channel heat sink, must guarantee that the fluid temperature of micro-channel heat sink fluid intake is constant, therefore, complete cooled liquid and must to it, carry out by cooler 20 coolingly, then reenter reservoir 10.By the pressure sensor 14 and 16 being arranged in inlet pressure measurement port 5 and outlet pressure measurement port 8, can measure the fluid pressure of micro-channel heat sink entrance and exit, thereby judge the liquid cavitation situation in micro-channel heat sink.The control of micro-channel heat sink entrance and exit fluid pressure can be by coordinating control valve 12 and 18 to realize.By being arranged on the fluid intake of micro-channel heat sink and the thermocouple of fluid issuing and heating wall 13,15 and 17, can measure the temperature of fluid temperature and the heating wall of micro-channel heat sink.In closed circuit, the flow of cooling liquid is measured by flowmeter 19.All temperature signals, pressure signal and flow signal all collect computer 22 by data collecting system 21 and process and analyze.The average heat transfer coefficient h of micro-channel heat sink obtains by following formula:
h ‾ = q A · Δt = c p ρQ ( t f 2 - t f 1 ) A · ( t w - t f 1 + t f 2 2 )
In above formula, q is heat flow density, and Δ t is mean temperature difference, c pfor cooling liquid specific heat at constant pressure, ρ is cooling liquid density, and Q is cooling liquid circular flow, and A is heat exchange area, t wfor wall surface temperature, t f1for the fluid intake fluid temperature of micro-channel heat sink, t f2fluid issuing fluid temperature for micro-channel heat sink.

Claims (6)

1. a micro-channel heat sink that utilizes Hydrodynamic cavitation enhanced heat exchange, mainly comprises:
One microchannel is dull and stereotyped, offers fluid intake, inlet pressure measurement port, cavitation generator, main flow microchannel, outlet pressure measurement port and fluid issuing in a plane of this microchannel flat board;
In main flow microchannel, along liquid flow direction, be provided with equally spacedly cavitation generator, the width ratio between cavitation generator and main flow microchannel is 0.1-0.6, and the equivalent diameter ratio of cavitation generator and main flow microchannel is 0.2-0.7;
One seal cover board, be located in the plane of this microchannel flat board, seal cover board is provided with fluid intake, inlet pressure measurement port, outlet pressure measurement port and fluid issuing, corresponding microchannel flat board is offered respectively fluid intake, inlet pressure measurement port, outlet pressure measurement port and fluid issuing;
One heater element, is located at another plane of microchannel flat board.
2. micro-channel heat sink as claimed in claim 1, wherein, the material of microchannel flat board is silicon, stainless steel, copper or other metal alloy.
3. micro-channel heat sink as claimed in claim 1, wherein, the material of seal cover board is silicon, stainless steel, copper or heatproof clear glass.
4. micro-channel heat sink as claimed in claim 1, wherein, has a flow distribution cavity between the fluid intake of microchannel flat board and main flow microchannel, has a fluid collection chamber between main flow microchannel and fluid issuing.
5. micro-channel heat sink as claimed in claim 1, wherein, the cavitation generator in the flat board of microchannel and the cross section of main flow microchannel are square, circular, triangles, trapezoidal or do not belong to the polygon of above-mentioned shape.
6. the micro-channel heat sink as described in claim 1,4 or 5, wherein, the number of main flow microchannel is determined according to the heating area of heater element.
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