CN102607805A - Device and method for testing divergence angle and uniformity of illumination laser by using CCD (Charge Coupled Device) - Google Patents

Device and method for testing divergence angle and uniformity of illumination laser by using CCD (Charge Coupled Device) Download PDF

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CN102607805A
CN102607805A CN2011104188177A CN201110418817A CN102607805A CN 102607805 A CN102607805 A CN 102607805A CN 2011104188177 A CN2011104188177 A CN 2011104188177A CN 201110418817 A CN201110418817 A CN 201110418817A CN 102607805 A CN102607805 A CN 102607805A
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laser
ccd detector
laser beam
ccd
focal distance
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连洁
王英顺
高尚
王晓
马峥
吴仕良
孙兆东
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Shandong University
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Shandong University
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Abstract

The invention discloses a device and a method for testing a divergence angle and uniformity of an illumination laser by using a CCD (Charge Coupled Device) and belongs to the technical field of optical measurement. The device comprises a laser beam expander, an attenuator, an optical filter, an optical zoom system, a CCD detector and a controlling and processing system, and the device is characterized in that the laser beam expander, the attenuator, the optical filter, the optical zoom system and the CCD detector are sequentially arranged to form a light path; and the output ends of the laser beam expander, the optical zoom system and the CCD detector are respectively connected with the controlling and processing system, and the controlling and processing system controls the beam expansion ratio of the laser beam expander, controls the focal length of the optical zoom system, and collects, calculates and processes output data of the CCD detector. The measuring method disclosed by the invention introduces the laser beam expander and the zoom system into a test of the illumination laser so as to enable the divergence angle and the light beam uniformity of the laser to be measured. The method has the advantages of being simple in structure, simple in operation, small in volume and high in measuring precision.

Description

Throw light on laser divergence angle and inhomogeneity device and method with the CCD test
Technical field
The present invention relates to a kind of the test and throw light on, belong to field of optical measuring technologies with laser divergence angle and inhomogeneity device and method with CCD.
Background technology
Laser active illumination generally adopts infrared band laser irradiation target, has the advantage that operating distance is far away, resolution is high, penetration power is strong.The main infrared viewing device that cooperates, safety and protection monitoring, it can be widely used in fields such as security, military surveillance, open-air search and rescue, scientific research investigation.Usually distributed photometer is mainly adopted in the luminaire test.Distribution photometer is a kind of large-scale precision optics testing apparatus; Mainly contain structure (" light fixture distribution photometer As-Is analysis " author's Wang Jianpings such as rotating mirror formula distribution photometer, the reflective mirror distribution photometer of motion and rotating lamp formula distribution photometer; Electronic Testing, the 7th phase of July in 2008).The distributed photometer volume is big, and complex structure costs an arm and a leg, and is unfavorable for testing fast the quality of illuminating bundle.Adopt this device can very conveniently record the beam uniformity and the angle of divergence of laser illuminator device efficiently.
Summary of the invention
In order to overcome the shortcomings and deficiencies that prior art exists, the present invention proposes a kind of the test and throw light on laser divergence angle and inhomogeneity device and method with CCD.
Technical scheme of the present invention realizes by following mode:
A kind of test with CCD thrown light on laser divergence angle and inhomogeneity device; Comprise laser beam expanding lens, attenuator, optical filter, optical focal distance setting system, ccd detector and control processing system, it is characterized in that laser beam expanding lens, attenuator, optical filter, optical focal distance setting system, ccd detector place to form light path successively in order; The output terminal of laser beam expanding lens, optical focal distance setting system and ccd detector is connected with control processing system respectively, by control processing system the expansion beam ratio of laser beam expanding lens is controlled, the focal length of optical focal distance setting system is controlled, the output data of ccd detector is gathered, calculates, handled.
Described laser beam expanding lens is the magnification changeable laser bundle-enlarging mirror.
Described control processing system is single-chip microcomputer or PC.
The operation wavelength of described optical filter is corresponding to the operation wavelength of laser illuminator device to be tested.
Above-mentioned attenuator can be changed different attenuators according to different needs.
A kind of method of utilizing the said apparatus illumination to measure with the laser instrument homogeneity, step is following:
A. proving installation is placed, connect the power supply of control processing system, the testing laser device is placed before the beam expander mirror;
B. connect the testing laser device, make the testing laser device send laser, laser shines on the ccd detector through beam expander mirror, attenuator, optical filter, optical focal distance setting system.Utilization is as the expansion bundle multiplying power of the single-chip microcomputer of control system or PC adjustment laser beam expanding lens, makes on the complete surface that covers ccd detector of laser beam;
C. utilize as the single-chip microcomputer of control system or the focal length of PC change optical focal distance setting system, the last beam cross section of distance to be tested is imaged on the ccd detector;
D. the single-chip microcomputer or the expansion beam ratio of PC detection laser beam expander, the focal length of optical focal distance setting system receive the measured signal of ccd detector, and this signal is to throw light on the light distribution signal of laser instrument on testing distance, i.e. largest light intensity I MaxWith minimum intensity of light I Min, by formula Automatically calculate, handle the uniformity coefficient M that the uniformity index that obtains laser beam is a laser instrument through single-chip microcomputer or PC.
A kind of method of utilizing the said apparatus illumination to measure with the angle of divergence of laser instrument, step is following:
1) proving installation is placed, connect system power supply, the testing laser device is placed before the beam expander mirror;
2) focal length of adjusting optical focal distance setting system just in time is positioned on the back focal plane of optical focal distance setting system ccd detector;
3) regulate the expansion bundle multiplying power of beam expander mirror, make the complete laser beam of reception that ccd detector can be complete;
4) the expansion beam ratio x of single-chip microcomputer or PC detection laser beam expander, the focal distance f of optical focal distance setting system; The signal that the reception ccd detector is measured is also measured ccd detector and is counted m in diametric pixel interval delta and the pixel of hot spot on diametric(al), the above-mentioned signal parameter that records is brought in the formula
Figure BDA0000120111390000021
calculated, handle the angle of divergence θ that obtains laser beam.
The present invention utilizes said apparatus measurement illumination following with the principle of laser divergence angle: be the angle of divergence of illumination with laser instrument according to formula
Figure BDA0000120111390000022
θ; F is the optical focal distance setting system focal length, and d is a beam diameter.Illumination becomes the measurement of measuring light spot size with the divergence angle measurement of laser instrument.Infrared CCD detector according to system selects for use is different, and detector is spaced apart Δ at the pixel of a certain direction.Regulate optical focal distance setting system ccd detector just in time is on the back focal plane of optical focal distance setting system, the selective light spot size can obtain the pixel of hot spot on a certain direction and count m according to the actual requirements.Can obtain the angle of divergence of light beam after expanding bundle
Figure BDA0000120111390000023
Wherein f is the focal length of optical focal distance setting system, and m is the pixel number of hot spot on diametric(al), and Δ is that ccd detector is at diametric pixel interval, θ 1Be the beam divergence angle after the process laser beam expanding lens.Laser beam expanding lens has two effects: the 1) diameter of compression laser beam, 2) increased the angle of divergence of laser beam.The a branch of angle of divergence and inversely proportional variation of expansion beam ratio of being expanded the light beam of bundle.The multiplying power of laser beam expanding lens is the enlargement ratio of beam diameter, is approximately certain value from the beamwidth of the laser beam of laser instrument output is long-pending, and when waist radius reduced x times, its angle of divergence is corresponding expanded as original 1/x.During test, the expansion beam ratio of laser beam expanding lens is x.The angle of divergence that can record light beam so is
Figure BDA0000120111390000024
The present invention utilizes said apparatus measurement illumination following with the inhomogeneity principle of laser instrument: be commonly defined as for the light beam uniformity coefficient
Figure BDA0000120111390000025
I wherein Max, I MinBe respectively the largest light intensity and the minimum intensity of light of the measured laser beam of detector.Laser does not change through its homogeneity behind the laser beam expanding lens.The last beam cross section of distance to be tested is imaged in ccd detector, and the data of being accepted according to the formula manipulation ccd detector are the uniformity coefficient of illumination with laser instrument.
Beneficial effect of the present invention and advantage are: simple in structure, easy and simple to handle, can measure homogeneity and the angle of divergence of illumination in real time efficiently with laser instrument.
Description of drawings
Fig. 1 is the structural representation of measurement mechanism of the present invention.
Wherein: 1, testing laser device, 2, laser beam expanding lens, 3, attenuator, 4, optical filter, 5, optical focal distance setting system, 6, ccd detector, 7, control processing system.
Fig. 2 is the FB(flow block) that utilizes the method that the said apparatus illumination measures with the laser instrument homogeneity; Wherein a-d is its each step.
Fig. 3 is the FB(flow block) that utilizes the method that the said apparatus illumination measures with the angle of divergence of laser instrument; Wherein 1) be its each step-4).
Concrete real-time mode
Below in conjunction with accompanying drawing and embodiment the present invention is further specified, but be not limited thereto.
Embodiment 1:
The embodiment of the invention 1 is as shown in Figure 1; Comprise laser beam expanding lens 2, attenuator 3, optical filter 4, optical focal distance setting system 5, ccd detector 6 and control processing system 7, it is characterized in that laser beam expanding lens 2, attenuator 3, optical filter 4, optical focal distance setting system 5, ccd detector 6 place to form light path successively in order; The output terminal of laser beam expanding lens 2, optical focal distance setting system 5 and ccd detector 6 is connected with control processing system 7 respectively, is controlled, the focal length of optical focal distance setting system 5 is controlled, the output data of ccd detector 6 is gathered, calculates, handled by the expansion beam ratio of 7 pairs of laser beam expanding lens 2 of control processing system.
Described laser beam expanding lens 2 is magnification changeable laser bundle-enlarging mirrors.
Described control processing system 7 is single-chip microcomputer or PC.
The operation wavelength of described optical filter 4 is corresponding to the operation wavelength of laser illuminator device to be tested.
Above-mentioned attenuator can be changed different attenuators according to different needs.
Embodiment 2:
A kind of method of utilizing the said apparatus illumination to measure with the laser instrument homogeneity, as shown in Figure 2, step is following:
A. proving installation is placed, connect the power supply of control processing system, the testing laser device is placed before the beam expander mirror;
B. connect the testing laser device; Make the testing laser device send laser; Laser shines on the ccd detector through beam expander mirror, attenuator, optical filter, optical focal distance setting system, and the expansion bundle multiplying power of adjustment laser beam expanding lens makes on the complete surface that covers ccd detector of laser beam;
C. change the focal length of optical focal distance setting system, the last beam cross section of distance to be tested is imaged on the ccd detector;
D. the single-chip microcomputer or the expansion beam ratio of PC detection laser beam expander, the focal length of optical focal distance setting system receive the measured signal of ccd detector, and this signal is to throw light on the light distribution signal of laser instrument on testing distance, i.e. largest light intensity I MaxWith minimum intensity of light I Min, by formula
Figure BDA0000120111390000031
Automatically calculate, handle the uniformity coefficient M that the uniformity index that obtains laser beam is a laser instrument through single-chip microcomputer or PC.
A kind of method of utilizing the said apparatus illumination to measure with the angle of divergence of laser instrument, as shown in Figure 3, step is following:
1) proving installation is placed, connect system power supply, the testing laser device is placed before the beam expander mirror;
2) focal length of adjusting optical focal distance setting system just in time is positioned on the back focal plane of optical focal distance setting system ccd detector;
3) regulate the expansion bundle multiplying power of beam expander mirror, make the complete laser beam of reception that ccd detector can be complete;
4) the expansion beam ratio x of single-chip microcomputer or PC detection laser beam expander, the focal distance f of optical focal distance setting system; The signal that the reception ccd detector is measured is also measured ccd detector and is counted m in diametric pixel interval delta and the pixel of hot spot on diametric(al), the above-mentioned signal parameter that records is brought in the formula calculated, handle the angle of divergence θ that obtains laser beam.

Claims (6)

  1. One kind with CCD test illumination with laser divergence angle and inhomogeneity device; Comprise laser beam expanding lens, attenuator, optical filter, optical focal distance setting system, ccd detector and control processing system, it is characterized in that laser beam expanding lens, attenuator, optical filter, optical focal distance setting system, ccd detector place to form light path successively in order; The output terminal of laser beam expanding lens, optical focal distance setting system and ccd detector is connected with control processing system respectively, by control processing system the expansion beam ratio of laser beam expanding lens is controlled, the focal length of optical focal distance setting system is controlled, the output data of ccd detector is gathered, calculates, handled.
  2. 2. a kind of the test with CCD as claimed in claim 1 thrown light on laser divergence angle and inhomogeneity device, it is characterized in that described laser beam expanding lens is the magnification changeable laser bundle-enlarging mirror.
  3. 3. a kind of the test with CCD as claimed in claim 1 thrown light on laser divergence angle and inhomogeneity device, it is characterized in that described control processing system is single-chip microcomputer or PC.
  4. 4. a kind of the test with CCD as claimed in claim 1 thrown light on laser divergence angle and inhomogeneity device, it is characterized in that the operation wavelength of the operation wavelength of described optical filter corresponding to laser illuminator device to be tested.
  5. 5. method of utilizing the described device illumination of claim 1 to measure with the laser instrument homogeneity, step is following:
    A. proving installation is placed, connect the power supply of control processing system, the testing laser device is placed before the beam expander mirror;
    B. connect the testing laser device; Make the testing laser device send laser; Laser shines on the ccd detector through beam expander mirror, attenuator, optical filter, optical focal distance setting system, and the expansion bundle multiplying power of adjustment laser beam expanding lens makes on the complete surface that covers ccd detector of laser beam;
    C. change the focal length of optical focal distance setting system, the last beam cross section of distance to be tested is imaged on the ccd detector;
    D. the single-chip microcomputer or the expansion beam ratio of PC detection laser beam expander, the focal length of optical focal distance setting system receive the measured signal of ccd detector, and this signal is to throw light on the light distribution signal of laser instrument on testing distance, i.e. largest light intensity I MaxWith minimum intensity of light I Min, by formula
    Figure FDA0000120111380000011
    Automatically calculate, handle the uniformity coefficient M that the uniformity index that obtains laser beam is a laser instrument through single-chip microcomputer or PC.
  6. 6. method of utilizing the described device illumination of claim 1 to measure with the angle of divergence of laser instrument, step is following:
    1) proving installation is placed, connect system power supply, the testing laser device is placed before the beam expander mirror;
    2) focal length of adjusting optical focal distance setting system just in time is positioned on the back focal plane of optical focal distance setting system ccd detector;
    3) regulate the expansion bundle multiplying power of beam expander mirror, make the complete laser beam of reception that ccd detector can be complete;
    4) the expansion beam ratio x of single-chip microcomputer or PC detection laser beam expander, the focal distance f of optical focal distance setting system; The signal that the reception ccd detector is measured is also measured ccd detector and is counted m in diametric pixel interval delta and the pixel of hot spot on diametric(al), the above-mentioned signal parameter that records is brought in the formula
    Figure FDA0000120111380000012
    calculated, handle the angle of divergence θ that obtains laser beam.
CN2011104188177A 2011-12-14 2011-12-14 Device and method for testing divergence angle and uniformity of illumination laser by using CCD (Charge Coupled Device) Pending CN102607805A (en)

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Cited By (9)

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CN105092216A (en) * 2015-08-29 2015-11-25 中国科学院光电研究院 Laser diode area array pumped uniformity detection apparatus
CN105606039A (en) * 2015-12-22 2016-05-25 中国科学院长春光学精密机械与物理研究所 Method and device for precisely measuring light source parallelism
CN104374551B (en) * 2014-11-24 2017-05-10 深圳科瑞技术股份有限公司 LED luminance uniformity detection method and system thereof
CN107389320A (en) * 2017-09-08 2017-11-24 北京奥博泰科技有限公司 A kind of detection means and its application method of large-caliber laser hot spot uniformity
CN108204890A (en) * 2017-12-27 2018-06-26 四川大学 The test method and its detection device of lighting system light field uniformity
CN108287060A (en) * 2018-01-18 2018-07-17 西安应用光学研究所 A kind of measuring device and method of laser beam divergence
CN109556836A (en) * 2018-11-02 2019-04-02 深圳市先地图像科技有限公司 A kind of High Precision Automatic device and its application method for seeking burnt detection of mode of laser group
CN111073960A (en) * 2018-10-22 2020-04-28 武汉华大医学检验所有限公司 Debugging method and device for sequencer laser beam expander
CN112213732A (en) * 2020-10-09 2021-01-12 中国人民解放军陆军工程大学 Day and night reconnaissance ranging device based on InGaAs focal plane detection

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CN101435700A (en) * 2008-12-10 2009-05-20 中国电子科技集团公司第四十一研究所 Method and device for testing infrared laser lighting source diverging angle
CN101502916A (en) * 2009-03-04 2009-08-12 天津大学 Laser multi-point automatic welding and sealing method as well as welding device of metallized fiber optic sensor
CN201483155U (en) * 2009-07-29 2010-05-26 比亚迪股份有限公司 Laser machining device
CN202351020U (en) * 2011-12-14 2012-07-25 山东大学 Device using CCD (charge coupled device) to test divergence angle and uniformity of lighting laser device

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CN101013030A (en) * 2007-01-15 2007-08-08 哈尔滨工业大学 Microlen array based laser beam divegence angle testing method
CN101435700A (en) * 2008-12-10 2009-05-20 中国电子科技集团公司第四十一研究所 Method and device for testing infrared laser lighting source diverging angle
CN101502916A (en) * 2009-03-04 2009-08-12 天津大学 Laser multi-point automatic welding and sealing method as well as welding device of metallized fiber optic sensor
CN201483155U (en) * 2009-07-29 2010-05-26 比亚迪股份有限公司 Laser machining device
CN202351020U (en) * 2011-12-14 2012-07-25 山东大学 Device using CCD (charge coupled device) to test divergence angle and uniformity of lighting laser device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104374551B (en) * 2014-11-24 2017-05-10 深圳科瑞技术股份有限公司 LED luminance uniformity detection method and system thereof
CN105092216A (en) * 2015-08-29 2015-11-25 中国科学院光电研究院 Laser diode area array pumped uniformity detection apparatus
CN105092216B (en) * 2015-08-29 2020-08-07 中国科学院光电研究院 Laser diode area array pumping uniformity detection device
CN105606039B (en) * 2015-12-22 2018-10-16 中国科学院长春光学精密机械与物理研究所 A kind of method and device of precise measuring source collimation
CN105606039A (en) * 2015-12-22 2016-05-25 中国科学院长春光学精密机械与物理研究所 Method and device for precisely measuring light source parallelism
CN107389320A (en) * 2017-09-08 2017-11-24 北京奥博泰科技有限公司 A kind of detection means and its application method of large-caliber laser hot spot uniformity
CN108204890A (en) * 2017-12-27 2018-06-26 四川大学 The test method and its detection device of lighting system light field uniformity
CN108287060A (en) * 2018-01-18 2018-07-17 西安应用光学研究所 A kind of measuring device and method of laser beam divergence
CN111073960A (en) * 2018-10-22 2020-04-28 武汉华大医学检验所有限公司 Debugging method and device for sequencer laser beam expander
CN111073960B (en) * 2018-10-22 2024-01-12 武汉华大医学检验所有限公司 Debugging method and device for laser beam expander of sequencer
CN109556836A (en) * 2018-11-02 2019-04-02 深圳市先地图像科技有限公司 A kind of High Precision Automatic device and its application method for seeking burnt detection of mode of laser group
CN112213732A (en) * 2020-10-09 2021-01-12 中国人民解放军陆军工程大学 Day and night reconnaissance ranging device based on InGaAs focal plane detection
CN112213732B (en) * 2020-10-09 2023-07-18 中国人民解放军陆军工程大学 Day and night reconnaissance range unit based on InGaAs focal plane detection

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Application publication date: 20120725