CN102601074B - Tft-lcd玻璃基板清洗方法 - Google Patents
Tft-lcd玻璃基板清洗方法 Download PDFInfo
- Publication number
- CN102601074B CN102601074B CN201210072893.1A CN201210072893A CN102601074B CN 102601074 B CN102601074 B CN 102601074B CN 201210072893 A CN201210072893 A CN 201210072893A CN 102601074 B CN102601074 B CN 102601074B
- Authority
- CN
- China
- Prior art keywords
- glass substrate
- frequency generator
- ultrasonic frequency
- rinse bath
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
- C03C23/0075—Cleaning of glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67057—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing with the semiconductor substrates being dipped in baths or vessels
Landscapes
- Engineering & Computer Science (AREA)
- Liquid Crystal (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
Abstract
Description
Claims (2)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210072893.1A CN102601074B (zh) | 2012-03-19 | 2012-03-19 | Tft-lcd玻璃基板清洗方法 |
PCT/CN2012/073161 WO2013139047A1 (zh) | 2012-03-19 | 2012-03-28 | Tft-lcd玻璃基板清洗方法 |
US13/508,983 US8945311B2 (en) | 2012-03-19 | 2012-03-28 | Method for cleansing glass substrate of TFT-LCD |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201210072893.1A CN102601074B (zh) | 2012-03-19 | 2012-03-19 | Tft-lcd玻璃基板清洗方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102601074A CN102601074A (zh) | 2012-07-25 |
CN102601074B true CN102601074B (zh) | 2015-08-12 |
Family
ID=46519059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201210072893.1A Expired - Fee Related CN102601074B (zh) | 2012-03-19 | 2012-03-19 | Tft-lcd玻璃基板清洗方法 |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN102601074B (zh) |
WO (1) | WO2013139047A1 (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102896109B (zh) * | 2012-11-01 | 2015-11-04 | 江南大学 | 一种超声波洗毛装置及其应用 |
CN102989715A (zh) * | 2012-12-06 | 2013-03-27 | 中国科学院长春光学精密机械与物理研究所 | 一种深紫外光学薄膜基底的处理方法 |
CN104096693B (zh) * | 2013-04-01 | 2016-12-28 | 莆田市嘉辉光电有限公司 | 液晶玻璃基板的清洗设备 |
CN103611701B (zh) * | 2013-09-07 | 2016-01-06 | 国家电网公司 | 带有在线电导控制的组合式超声波清洗装置及其使用方法 |
CN103611704B (zh) * | 2013-09-07 | 2016-01-06 | 国家电网公司 | 带有智能变频控制的组合式超声波清洗装置及其使用方法 |
CN105710070A (zh) * | 2014-12-05 | 2016-06-29 | 王丽香 | 一种液晶屏清洗方法 |
CN106093006B (zh) * | 2016-06-08 | 2018-11-02 | 华南理工大学 | 一种蔬菜清洗过程农残的拉曼循环监测装置及方法 |
CN107096782A (zh) * | 2017-05-20 | 2017-08-29 | 合肥市惠科精密模具有限公司 | 一种MicroLED玻璃基板超声波清洗方法 |
CN115351002A (zh) * | 2022-08-01 | 2022-11-18 | 中船重工汉光科技股份有限公司 | 一种有机光导鼓鼓基的清洗工艺 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5076854A (en) * | 1988-11-22 | 1991-12-31 | Honda Electronics Co., Ltd. | Multi-frequency ultrasonic cleaning method and apparatus |
CN101052478A (zh) * | 2004-10-12 | 2007-10-10 | 株式会社日立工业设备技术 | 超声波清洗装置 |
CN101143363A (zh) * | 2007-09-25 | 2008-03-19 | 鄞云光 | 超声波多频清洗机 |
CN101884986A (zh) * | 2010-07-16 | 2010-11-17 | 上海集成电路研发中心有限公司 | 半导体器件清洗装置及方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09199464A (ja) * | 1996-01-17 | 1997-07-31 | Shibaura Eng Works Co Ltd | 超音波洗浄装置 |
JPH10277508A (ja) * | 1997-04-08 | 1998-10-20 | Toppan Printing Co Ltd | 超音波洗浄装置 |
US5865199A (en) * | 1997-10-31 | 1999-02-02 | Pedziwiatr; Michael P. | Ultrasonic cleaning apparatus |
US6890390B2 (en) * | 2003-05-22 | 2005-05-10 | Lawrence Azar | Method for ultrasonic cleaning using phased transducer arrays |
WO2004112093A2 (en) * | 2003-06-06 | 2004-12-23 | P.C.T. Systems, Inc. | Method and apparatus to process substrates with megasonic energy |
US9108232B2 (en) * | 2009-10-28 | 2015-08-18 | Megasonic Sweeping, Incorporated | Megasonic multifrequency apparatus with matched transducers and mounting plate |
-
2012
- 2012-03-19 CN CN201210072893.1A patent/CN102601074B/zh not_active Expired - Fee Related
- 2012-03-28 WO PCT/CN2012/073161 patent/WO2013139047A1/zh active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5076854A (en) * | 1988-11-22 | 1991-12-31 | Honda Electronics Co., Ltd. | Multi-frequency ultrasonic cleaning method and apparatus |
CN101052478A (zh) * | 2004-10-12 | 2007-10-10 | 株式会社日立工业设备技术 | 超声波清洗装置 |
CN101143363A (zh) * | 2007-09-25 | 2008-03-19 | 鄞云光 | 超声波多频清洗机 |
CN101884986A (zh) * | 2010-07-16 | 2010-11-17 | 上海集成电路研发中心有限公司 | 半导体器件清洗装置及方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2013139047A1 (zh) | 2013-09-26 |
CN102601074A (zh) | 2012-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Method for cleaning TFT-LCD (thin film transistor liquid crystal display) glass substrate Effective date of registration: 20190426 Granted publication date: 20150812 Pledgee: Bank of Beijing Limited by Share Ltd Shenzhen branch Pledgor: Shenzhen Huaxing Optoelectronic Technology Co., Ltd. Registration number: 2019440020032 |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PC01 | Cancellation of the registration of the contract for pledge of patent right |
Date of cancellation: 20201016 Granted publication date: 20150812 Pledgee: Bank of Beijing Limited by Share Ltd. Shenzhen branch Pledgor: Shenzhen China Star Optoelectronics Technology Co.,Ltd. Registration number: 2019440020032 |
|
PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150812 Termination date: 20210319 |
|
CF01 | Termination of patent right due to non-payment of annual fee |