CN102592609B - 具有改进的稳定性的磁性元件 - Google Patents

具有改进的稳定性的磁性元件 Download PDF

Info

Publication number
CN102592609B
CN102592609B CN201110463134.3A CN201110463134A CN102592609B CN 102592609 B CN102592609 B CN 102592609B CN 201110463134 A CN201110463134 A CN 201110463134A CN 102592609 B CN102592609 B CN 102592609B
Authority
CN
China
Prior art keywords
layer
free layer
ferromagnetic free
magnetic
afm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201110463134.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN102592609A (zh
Inventor
宋电
M·W·科温顿
Q·何
D·V·季米特洛夫
田伟
丁元俊
S·B·甘歌帕德亚
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Seagate Technology LLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology LLC filed Critical Seagate Technology LLC
Publication of CN102592609A publication Critical patent/CN102592609A/zh
Application granted granted Critical
Publication of CN102592609B publication Critical patent/CN102592609B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/62Record carriers characterised by the selection of the material
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3912Arrangements in which the active read-out elements are transducing in association with active magnetic shields, e.g. magnetically coupled shields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
    • G11B5/3906Details related to the use of magnetic thin film layers or to their effects
    • G11B5/3909Arrangements using a magnetic tunnel junction
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B2005/3996Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects large or giant magnetoresistive effects [GMR], e.g. as generated in spin-valve [SV] devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Hall/Mr Elements (AREA)
  • Mram Or Spin Memory Techniques (AREA)
  • Magnetic Heads (AREA)
CN201110463134.3A 2010-11-30 2011-11-30 具有改进的稳定性的磁性元件 Expired - Fee Related CN102592609B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/956,752 2010-11-30
US12/956,752 US8553369B2 (en) 2010-11-30 2010-11-30 Magnetic element with improved stability and including at least one antiferromagnetic tab

Publications (2)

Publication Number Publication Date
CN102592609A CN102592609A (zh) 2012-07-18
CN102592609B true CN102592609B (zh) 2015-12-02

Family

ID=46126506

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110463134.3A Expired - Fee Related CN102592609B (zh) 2010-11-30 2011-11-30 具有改进的稳定性的磁性元件

Country Status (4)

Country Link
US (1) US8553369B2 (enExample)
JP (1) JP5710455B2 (enExample)
KR (1) KR101376207B1 (enExample)
CN (1) CN102592609B (enExample)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7990978B1 (en) * 2004-12-17 2011-08-02 Verizon Services Corp. Dynamic bandwidth queue allocation
US9207291B2 (en) 2007-11-16 2015-12-08 Infineon Technologies Ag XMR angle sensors
JP5570757B2 (ja) * 2009-05-26 2014-08-13 エイチジーエスティーネザーランドビーブイ 磁気抵抗効果ヘッド及び磁気記録再生装置
CN102456356B (zh) * 2010-10-26 2015-09-30 新科实业有限公司 磁阻传感器、磁头、磁头折片组合及硬盘驱动器
US8441756B1 (en) 2010-12-16 2013-05-14 Western Digital (Fremont), Llc Method and system for providing an antiferromagnetically coupled writer
US9123359B1 (en) 2010-12-22 2015-09-01 Western Digital (Fremont), Llc Magnetic recording transducer with sputtered antiferromagnetic coupling trilayer between plated ferromagnetic shields and method of fabrication
US8760819B1 (en) * 2010-12-23 2014-06-24 Western Digital (Fremont), Llc Magnetic recording sensor with sputtered antiferromagnetic coupling trilayer between plated ferromagnetic shields
US8400738B2 (en) 2011-04-25 2013-03-19 Seagate Technology Llc Magnetic element with dual magnetic moments
US8582249B2 (en) * 2011-04-26 2013-11-12 Seagate Technology Llc Magnetic element with reduced shield-to-shield spacing
US8884616B2 (en) * 2011-06-22 2014-11-11 Infineon Technologies Ag XMR angle sensors
US8675318B1 (en) * 2011-11-22 2014-03-18 Western Digital (Fremont), Llc Method and system for providing a read transducer having a reduced shield-to-shield spacing
US8879214B2 (en) * 2011-12-21 2014-11-04 HGST Netherlands B.V. Half metal trilayer TMR reader with negative interlayer coupling
US8837092B2 (en) * 2012-06-29 2014-09-16 Seagate Technology Llc Magnetic element with biasing structure distal the air bearing surface
US9269382B1 (en) 2012-06-29 2016-02-23 Western Digital (Fremont), Llc Method and system for providing a read transducer having improved pinning of the pinned layer at higher recording densities
US8780508B2 (en) 2012-06-29 2014-07-15 Seagate Technology Llc Magnetic element with biased side shield lamination
US8711528B1 (en) 2012-06-29 2014-04-29 Western Digital (Fremont), Llc Tunnel magnetoresistance read head with narrow shield-to-shield spacing
US8711526B2 (en) * 2012-06-29 2014-04-29 Seagate Technology Llc Magnetic element with top shield coupled side shield lamination
US8896971B2 (en) * 2012-08-21 2014-11-25 Seagate Technology Llc Aligned magnetic insulating feature
US8797692B1 (en) 2012-09-07 2014-08-05 Western Digital (Fremont), Llc Magnetic recording sensor with AFM exchange coupled shield stabilization
US8854773B2 (en) * 2012-11-28 2014-10-07 Seagate Technology Llc Side shield biasing layer separated from an air bearing surface
US8760822B1 (en) 2012-11-28 2014-06-24 Western Digital (Fremont), Llc Method and system for providing a read transducer having an extended pinned layer and soft magnetic bias structures with improved stability
US8780505B1 (en) 2013-03-12 2014-07-15 Western Digital (Fremont), Llc Method and system for providing a read transducer having an improved composite magnetic shield
US8842396B1 (en) * 2013-03-12 2014-09-23 Seagate Technology Llc Magnetic sensor with differing stripe heights
US9013836B1 (en) 2013-04-02 2015-04-21 Western Digital (Fremont), Llc Method and system for providing an antiferromagnetically coupled return pole
US9318130B1 (en) 2013-07-02 2016-04-19 Western Digital (Fremont), Llc Method to fabricate tunneling magnetic recording heads with extended pinned layer
US9305578B1 (en) * 2013-08-01 2016-04-05 Seagate Technology Llc Magnetic element with reduced shield-to-shield spacing
US9218826B1 (en) * 2013-08-16 2015-12-22 Seagate Technology Llc Tuned horizontally symmetric magnetic stack
US9202482B2 (en) * 2013-08-27 2015-12-01 HGST Netherlands B.V. Magnetic sensor having an extended pinned layer with stitched antiferromagnetic pinning layer
US9042062B2 (en) * 2013-08-27 2015-05-26 HGST Netherlands B.V. Magnetic sensor with recessed AFM shape enhanced pinning and soft magnetic bias
US20150092303A1 (en) 2013-10-01 2015-04-02 HGST Netherlands B.V. Graded side shield gap reader
US9214172B2 (en) * 2013-10-23 2015-12-15 Western Digital (Fremont), Llc Method of manufacturing a magnetic read head
US9099123B1 (en) 2014-02-11 2015-08-04 HGST Netherlands B.V. Magnetic sensor having optimal free layer back edge shape and extended pinned layer
US20150248907A1 (en) * 2014-02-28 2015-09-03 HGST Netherlands B.V. Recessed irmn reader sensor design with high hk applied to both reference and pin layers
US9076468B1 (en) * 2014-03-12 2015-07-07 HGST Netherlands B.V. Scissor magnetic read sensor with shape enhanced soft magnetic side shield for improved stability
US9007729B1 (en) * 2014-04-29 2015-04-14 HGST Netherlands B.V. Reader sensor having a recessed antiferromagnetic (AFM) pinning layer
US9331123B2 (en) * 2014-05-09 2016-05-03 Tower Semiconductor Ltd. Logic unit including magnetic tunnel junction elements having two different anti-ferromagnetic layers
US9330748B2 (en) 2014-05-09 2016-05-03 Tower Semiconductor Ltd. High-speed compare operation using magnetic tunnel junction elements including two different anti-ferromagnetic layers
US9007725B1 (en) 2014-10-07 2015-04-14 Western Digital (Fremont), Llc Sensor with positive coupling between dual ferromagnetic free layer laminates
CN104442055B (zh) * 2014-11-27 2017-07-21 惠州市华阳光学技术有限公司 一种磁定向图案的制备方法及其制备设备
US10074387B1 (en) 2014-12-21 2018-09-11 Western Digital (Fremont), Llc Method and system for providing a read transducer having symmetric antiferromagnetically coupled shields
US9269383B1 (en) * 2015-01-23 2016-02-23 HGST Netherlands B.V. Multi-sensor (MIMO) head having a back side antiferromagnetic middle shield
US9449621B1 (en) 2015-03-26 2016-09-20 Western Digital (Fremont), Llc Dual free layer magnetic reader having a rear bias structure having a high aspect ratio
US9478238B1 (en) * 2015-03-30 2016-10-25 Tdk Corporation Magneto-resistive effect element with recessed antiferromagnetic layer
US9147404B1 (en) 2015-03-31 2015-09-29 Western Digital (Fremont), Llc Method and system for providing a read transducer having a dual free layer
US9472216B1 (en) 2015-09-23 2016-10-18 Western Digital (Fremont), Llc Differential dual free layer magnetic reader
US9886974B2 (en) 2015-10-30 2018-02-06 Seagate Technology Llc Read head free layer having front and rear portions biased at different levels
US9747933B1 (en) * 2016-02-16 2017-08-29 Tdk Corporation Magneto-resistive effect element having side shield integrated with upper shield
US9767834B1 (en) * 2016-03-18 2017-09-19 Tdk Corporation Magnetic head comprising magneto-resistance effect element and side shields
US10249329B1 (en) * 2017-11-21 2019-04-02 Western Digital Technologies, Inc. Current-perpendicular-to-the-plane (CPP) magnetoresistive (MR) sensor with wedge shaped free layer
CN110426660B (zh) * 2019-09-11 2024-11-15 昆山市鸿运通多层电路板有限公司 Gmi传感器灵敏度改进结构及其操作方法
US11275130B2 (en) * 2020-06-25 2022-03-15 Western Digital Technologies, Inc. Magnetic sensor bridge using dual free layer
US11276423B1 (en) * 2020-07-02 2022-03-15 Seagate Technology Llc Reader with a compensating layer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1405754A (zh) * 2001-08-30 2003-03-26 索尼株式会社 使用磁阻效应的磁传感器和磁头,其制造方法与磁再现装置
CN101194320A (zh) * 2005-06-08 2008-06-04 弘世科技公司 利用自旋转移的快速磁性存储器件以及其中使用的磁性元件

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5408377A (en) 1993-10-15 1995-04-18 International Business Machines Corporation Magnetoresistive sensor with improved ferromagnetic sensing layer and magnetic recording system using the sensor
US5576914A (en) 1994-11-14 1996-11-19 Read-Rite Corporation Compact read/write head having biased GMR element
US6040961A (en) * 1997-10-27 2000-03-21 International Business Machines Corporation Current-pinned, current resettable soft AP-pinned spin valve sensor
US6469878B1 (en) * 1999-02-11 2002-10-22 Seagate Technology Llc Data head and method using a single antiferromagnetic material to pin multiple magnetic layers with differing orientation
WO2001003130A1 (en) * 1999-07-05 2001-01-11 Fujitsu Limited Spin-valve magnetoresistance effect head, composite magnetic head comprising the same, and magnetoresistance recorded medium drive
US6204071B1 (en) 1999-09-30 2001-03-20 Headway Technologies, Inc. Method of fabrication of striped magnetoresistive (SMR) and dual stripe magnetoresistive (DSMR) heads with anti-parallel exchange configuration
US6667862B2 (en) * 2001-02-20 2003-12-23 Carnegie Mellon University Magnetoresistive read head having permanent magnet on top of magnetoresistive element
US20020131215A1 (en) * 2001-03-14 2002-09-19 Beach Robert S. Tunnel junction and charge perpendicular-to-plane magnetic recording sensors and method of manufacture
JP4024499B2 (ja) * 2001-08-15 2007-12-19 株式会社東芝 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置
KR100448990B1 (ko) * 2001-10-10 2004-09-18 한국과학기술연구원 열적 특성이 우수한 듀얼 스핀밸브 자기저항 박막 및 그제조방법
US7035062B1 (en) 2001-11-29 2006-04-25 Seagate Technology Llc Structure to achieve sensitivity and linear density in tunneling GMR heads using orthogonal magnetic alignments
US6958892B2 (en) * 2002-12-06 2005-10-25 Hitachi Global Storage Technologies Netherlands B.V. Magnetoresistive sensor with a thin antiferromagnetic layer for pinning antiparallel coupled tabs
US6967825B2 (en) * 2003-04-17 2005-11-22 Hitachi Global Storage Technologies Netherlands B.V. GMR read sensor with an antiparallel (AP) coupled free layer structure and antiparallel (AP) tab ends utilizing a process stop layer to protect the bias layer
US6943997B2 (en) * 2003-09-09 2005-09-13 Hitachi Global Storage Technologies Netherlands B.V. Sensor with improved stabilization and track definition
US7061725B2 (en) 2003-12-01 2006-06-13 Seagate Technology Llc Magnetic read sensor with stripe width and stripe height control
JP4002909B2 (ja) * 2004-06-04 2007-11-07 アルプス電気株式会社 Cpp型巨大磁気抵抗効果ヘッド
US7382589B2 (en) 2004-11-18 2008-06-03 Headway Technologies, Inc. CPP with elongated pinned layer
US7616411B2 (en) * 2006-03-28 2009-11-10 Hitachi Global Storage Technologies Netherlands B.V. Current perpendicular to plane (CPP) magnetoresistive sensor having a flux guide structure and synthetic free layer
JP2008299995A (ja) * 2007-06-01 2008-12-11 Sharp Corp 磁気再生素子
US7961440B2 (en) * 2007-09-27 2011-06-14 Hitachi Global Storage Technologies Netherlands B.V. Current perpendicular to plane magnetoresistive sensor with reduced read gap
US8653615B2 (en) * 2008-11-19 2014-02-18 Headway Technologies, Inc. MR device with synthetic free layer structure

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1405754A (zh) * 2001-08-30 2003-03-26 索尼株式会社 使用磁阻效应的磁传感器和磁头,其制造方法与磁再现装置
CN101194320A (zh) * 2005-06-08 2008-06-04 弘世科技公司 利用自旋转移的快速磁性存储器件以及其中使用的磁性元件

Also Published As

Publication number Publication date
US20120134057A1 (en) 2012-05-31
KR20120059433A (ko) 2012-06-08
JP2012119053A (ja) 2012-06-21
JP5710455B2 (ja) 2015-04-30
US8553369B2 (en) 2013-10-08
KR101376207B1 (ko) 2014-03-21
CN102592609A (zh) 2012-07-18

Similar Documents

Publication Publication Date Title
CN102592609B (zh) 具有改进的稳定性的磁性元件
CN105096967B (zh) 传感器叠层结构
TWI462090B (zh) 帶有磁性層和非磁性層之磁感測器種子層的磁感測器及其製法
CN103280235B (zh) 具有单独读取和写入路径的磁性隧道结装置
JP5840739B2 (ja) スピントロニクス素子およびその製造方法、ならびに磁気読み取りヘッドおよびその製造方法
CN100576344C (zh) 用于高密度mram应用的合成铁氧磁材料传感层
JP5448438B2 (ja) 磁気リード・ヘッド
US20120250404A1 (en) Magnetic tunnel junction with free layer having exchange coupled magnetic elements
JP4658659B2 (ja) Cpp構造の磁気抵抗効果素子およびその形成方法
CN101958123A (zh) 具有垂直各向异性自由层和侧向屏蔽构件的磁传感器
US20080062585A1 (en) Method to achieve both narrow track width and effective longitudinal stabilization in a CPP GMR read head
CN102810318A (zh) 磁阻屏蔽体
US9082872B2 (en) Magnetic read head with MR enhancements
CN106098083A (zh) 隧穿磁阻器件和隧穿磁阻读头
KR20130015928A (ko) 자기 메모리 소자 및 그 제조 방법
CN104103753B (zh) 磁阻膜层结构以及使用此磁阻膜层结构的磁场传感器
US20090257153A1 (en) Binary output reader structure (BORS) with high utilization rate
JP2010146650A5 (enExample)
US20090080125A1 (en) Magnetic head
US20070278603A1 (en) Magnetic memory device and method for fabricating the same
CN104252867B (zh) 磁阻传感器
JP2005109240A (ja) 磁気抵抗効果素子及び磁気ヘッド
US8675316B2 (en) Magnetoresistive sensor with sub-layering of pinned layers
JP5128751B2 (ja) 巨大磁気抵抗センサおよびその製造方法
US7817381B2 (en) Thin film magnetic head which suppresses inflow of magnetic generated by bias-applying layers into a free layer from a layering direction

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20151202

Termination date: 20211130