CN102556680A

CN102556680A - Silicon wafer feeding lifting table of charging and discharging system of plate-type PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment

Info

Publication number: CN102556680A
Application number: CN2011104587660A
Authority: CN
Inventors: 陈平; 陈世强
Original assignee: WUXI AMT TECHNOLOGY Co Ltd
Current assignee: WUXI AMT TECHNOLOGY Co Ltd
Priority date: 2011-12-31
Filing date: 2011-12-31
Publication date: 2012-07-11

Abstract

The invention provides a silicon wafer feeding lifting table of a charging and discharging system of plate-type PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment, wherein the silicon wafer feeding lifting table can drive a silicon wafer box to be lifted freely in a vertical direction so as to ensure that a wafer discharging mechanism can extract each silicon wafer accurately. The silicon wafer feeding lifting table is characterized by comprising a mounting support, a vertical lifting mechanism and a horizontal conveying mechanism, wherein the horizontal conveying mechanism is arranged on the lifting base plate which is arranged on the vertical lifting mechanism through a connecting plate, and the vertical lifting mechanism is fixed between a silicon wafer box conveying line and the wafer discharging mechanism of the automatic charging and discharging system through the mounting support.

Description

The silicon chip charging bay-lift of board-like PECVD equipment loading and unloading system

Technical field

The present invention relates to the silicon chip loading and unloading frock technical field of board-like PECVD equipment, be specially the charging bay-lift that is used for board-like PECVD equipment automatic loading and unloading system.

Background technology

Mostly the silicon chip material loading of board-like in the past PECVD equipment is artificial and directly from silicon box, will takes out without the silicon chip that PECVD handles; It is slow that it not only gets the sheet loading efficiency; And the fragment rate of silicon chip is high in the material loading process; In order to improve loading efficiency and to reduce fragment rate; Begin to adopt automatic loading and unloading system to replace pure in the past artificial loading and unloading at present, wherein when the silicon chip material loading, will fill the silicon chip of handling without PECVD and transport the material loading station to by advancing the box travel line, automatic sheet-fetching mechanism takes out silicon chip from the silicon box of material loading station piecewise; Treat that silicon chip all takes out the back and by going out the box travel line empty silicon box transported out of; Since go out the box travel line be positioned at box travel line into directly over, and since automatically slice mechanism can not move in vertical direction, therefore must guarantee that in vertical position slice mechanism can accurately take out each sheet silicon chip and guarantee not destroy silicon chip through the adjustment silicon box.

Summary of the invention

To the problems referred to above, the invention provides the silicon chip charging bay-lift of board-like PECVD equipment loading and unloading system, it can drive the free lifting of silicon box in vertical direction, thereby guarantees that slice mechanism can accurately extract each sheet silicon chip.

Its technical scheme is such; It is characterized in that: it comprises mounting bracket, vertical lifting mechanism and horizontal transport agency; Said horizontal transport agency is installed on the up-down base plate; Said up-down base plate is installed on said vertical lifting mechanism through connecting panel, and said vertical lifting mechanism is fixed between the silicon box lane of traffic and slice mechanism of automatic loading and unloading system through said mounting bracket.

It is further characterized in that: said vertical lifting mechanism comprises vertical lines module and servomotor, and said vertical lines module is fixed in said mounting bracket and connects said servomotor through coupler; Said up-down base plate is installed on said vertical lines module through connecting panel; Said horizontal conveyer comprises motor; Said motor is installed on said up-down base; Said motor output shaft connects the transmission synchronous pulley; Said transmission synchronous pulley is with synchronously with carrying synchronous pulley through transmission and is connected, and said conveying synchronous pulley is connected through carrying to be with synchronously with carrying driven pulley; Said connecting panel upper end is fixed with and compresses pneumatic slide unit, saidly compresses pneumatic slide unit external side end pinch device is installed; The silicon chip slice side of said up-down base plate is equipped with position block.

Adopt charging bay-lift of the present invention; Its beneficial effect is: the horizontal feed transmission that horizontal transport agency can guarantee loading bay and advance the box travel line, goes out silicon box between the box travel line; The dipping and heaving that its vertical lifting mechanism drive silicon box of while is done vertical direction both can have been accomplished silicon box and carry in the vertical transmission of advancing the box travel line and go out between the box travel line; Guaranteed that also each sheet silicon chip can accurately arrive the control position of film-discharging machine structure in the silicon box, thereby guaranteed the reliable slice of silicon chip.

Description of drawings

Fig. 1 is a silicon chip charging bay-lift structural representation of the present invention;

Fig. 2 is a silicon chip charging bay-lift system layout of the present invention.

The specific embodiment

See Fig. 1 and Fig. 2; The present invention includes mounting bracket 3, vertical lifting mechanism and horizontal transport agency; Horizontal transport agency is installed on up-down base plate 5; Up-down base plate 5 is installed on vertical lifting mechanism through connecting panel 4, and vertical lifting mechanism is fixed between the silicon box lane of traffic and slice mechanism of automatic loading and unloading system through mounting bracket 3.Vertical lifting mechanism comprises vertical lines module 2 and servomotor 1, and vertical lines module 2 is fixed in mounting bracket 3, also connects servomotor 1 through coupler; Up-down base plate 5 is installed on vertical lines module 2 through connecting panel 4; Horizontal transport agency comprises motor 8; Motor 8 is installed on up-down base plate 5 bottoms; Motor output shaft connects transmission synchronous pulley 7, and transmission synchronous pulley 7 is with 6 to be connected with carrying synchronous pulley 9 through transmission synchronously, carries synchronous pulley 9 to be with 10 to be connected with conveying driven pulley 12 synchronously through conveying; Connecting panel 4 upper ends are fixed with and compress pneumatic slide unit 14, compress pneumatic slide unit 14 external side ends pinch device 13 is installed; The silicon chip slice side of up-down base plate 5 is equipped with position block 11.Among Fig. 2,15 for the silicon chip lane of traffic advance the box travel line, 16 for the silicon chip lane of traffic go out the box travel line, 17 are charging bay-lift of the present invention.

Specifically describe working process of the present invention below: servomotor 1 rotates; Connecting panel 4 drive under the effect of vertical lines module 2 that horizontal transport agency on the pinch device 13 be mounted thereon, up-down base plate 5, the up-down base plate 5 descends together, servomotor 1 quit work when the synchronous band that advances box travel line 15 of horizontal transport agency on up-down base plate 5 and silicon box lane of traffic was in same level attitude; Motor 8 rotates through transmission is with 6 to drive 9 rotations of conveying synchronous pulley synchronously; Thereby realize to carry synchronously parallel motion with 10; The silicon box of filling without PECVD processing silicon chip promptly is delivered to being with synchronously on 10 of charging bay-lift by advancing box travel line 15; This moment, motor 8 quit work; Silicon box receives stopping of position block 11 to rest on conveying and is with 10 surfaces synchronously; Compress pneumatic slide unit 14 action drive pinch devices 13 subsequently and compress silicon box downwards, servomotor 1 works on vertical lines module 2, silicon box is upwards promoted, and the height of undermost silicon chip arrives and is scheduled to the slice position in silicon box; Slice mechanism takes out the silicon chip in the silicon box from bottom to top one by one; Silicon chip of every taking-up, servomotor 1 control vertical lines module 2 drives silicon box decline one deck silicon chip height, after the silicon chip in silicon box is got sky; Servomotor 1 control vertical lines module 2 drives the height that goes out box travel line 16 that empty silicon box rises to the silicon box lane of traffic; Motor 8 rotates, be with 6 to drive and carry synchronous pulleys 9 to rotate synchronously through transmission synchronous pulley 7 and transmission, thus make conveying synchronously with 10 drive that empty silicon box parallel motion of placing its surface gets into the silicon box lane of traffic go out box travel line 16, by going out box travel line 16 empty silicon box is transported out of.

Claims

1. the silicon chip charging bay-lift of board-like PECVD equipment loading and unloading system; It is characterized in that: it comprises mounting bracket, vertical lifting mechanism and horizontal transport agency; Said horizontal transport agency is installed on the up-down base plate; Said up-down base plate is installed on said vertical lifting mechanism through connecting panel, and said vertical lifting mechanism is fixed between the silicon box lane of traffic and slice mechanism of automatic loading and unloading system through said mounting bracket.

2. the silicon chip charging bay-lift of board-like PECVD equipment loading and unloading system according to claim 1; It is characterized in that: said vertical lifting mechanism comprises vertical lines module and servomotor, and said vertical lines module is fixed in said mounting bracket, also connects servomotor through coupler.

3. the silicon chip charging bay-lift of board-like PECVD equipment loading and unloading system according to claim 2 is characterized in that: said up-down base plate is installed on said vertical lines module through connecting panel.

4. the silicon chip charging bay-lift of board-like PECVD equipment loading and unloading system according to claim 3; It is characterized in that: said horizontal conveyer comprises motor; Said motor is installed on the up-down base; Said motor output shaft connects the transmission synchronous pulley, and said transmission synchronous pulley is with synchronously with carrying synchronous pulley through transmission and is connected, and said conveying synchronous pulley is connected through carrying to be with synchronously with carrying driven pulley.

5. the silicon chip charging bay-lift of board-like PECVD equipment loading and unloading system according to claim 4 is characterized in that: said connecting panel upper end is fixed with and compresses pneumatic slide unit, saidly compresses pneumatic slide unit external side end pinch device is installed.

6. the silicon chip charging bay-lift of board-like PECVD equipment loading and unloading system according to claim 5 is characterized in that: the silicon chip slice side of said up-down base plate is equipped with position block.