CN102549468B - 光学元件的保持布置 - Google Patents

光学元件的保持布置 Download PDF

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Publication number
CN102549468B
CN102549468B CN201080044073.0A CN201080044073A CN102549468B CN 102549468 B CN102549468 B CN 102549468B CN 201080044073 A CN201080044073 A CN 201080044073A CN 102549468 B CN102549468 B CN 102549468B
Authority
CN
China
Prior art keywords
axis
holding arrangement
parallel
optical element
arrangement according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201080044073.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN102549468A (zh
Inventor
乌尔里克.韦伯
赫伯特.霍尔德尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Carl Zeiss Laser Optics GmbH
Original Assignee
Carl Zeiss SMT GmbH
Carl Zeiss Laser Optics GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH, Carl Zeiss Laser Optics GmbH filed Critical Carl Zeiss SMT GmbH
Publication of CN102549468A publication Critical patent/CN102549468A/zh
Application granted granted Critical
Publication of CN102549468B publication Critical patent/CN102549468B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/035—Aligning the laser beam
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/003—Alignment of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/022—Mountings, adjusting means, or light-tight connections, for optical elements for lenses lens and mount having complementary engagement means, e.g. screw/thread
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/023—Mountings, adjusting means, or light-tight connections, for optical elements for lenses permitting adjustment
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G02B7/028—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
CN201080044073.0A 2009-07-31 2010-07-23 光学元件的保持布置 Expired - Fee Related CN102549468B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102009037133A DE102009037133B4 (de) 2009-07-31 2009-07-31 Haltevorrichtung für ein optisches Element
DE102009037133.8 2009-07-31
PCT/EP2010/004514 WO2011012263A1 (en) 2009-07-31 2010-07-23 Holding arrangement for an optical element

Publications (2)

Publication Number Publication Date
CN102549468A CN102549468A (zh) 2012-07-04
CN102549468B true CN102549468B (zh) 2014-06-11

Family

ID=42668816

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080044073.0A Expired - Fee Related CN102549468B (zh) 2009-07-31 2010-07-23 光学元件的保持布置

Country Status (6)

Country Link
US (1) US8456771B2 (enExample)
JP (1) JP5710613B2 (enExample)
KR (1) KR20120052364A (enExample)
CN (1) CN102549468B (enExample)
DE (1) DE102009037133B4 (enExample)
WO (1) WO2011012263A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102012100784A1 (de) * 2012-01-31 2013-08-01 Jenoptik Optical Systems Gmbh Entkoppelt justierbare Fassungsbaugruppe für zwei optische Bauteile
US9108656B1 (en) * 2013-09-12 2015-08-18 Dragonfly Gear, LLC Collapsible wagon
US10077062B2 (en) 2014-07-29 2018-09-18 Veer Gear, Llc Wagon with adapter for installing child seat
US10081380B2 (en) 2015-07-16 2018-09-25 Radio Flyer Inc. Foldable wagon
WO2017156115A1 (en) 2016-03-08 2017-09-14 Dragonfly Gear, LLC Wagon with collapsible footwell and position-locking handle
US10678018B2 (en) * 2017-10-23 2020-06-09 Magna Electronics Inc. Camera for vehicle vision system with replaceable lens
DE102018106013B3 (de) 2018-03-15 2018-09-20 Jenoptik Optical Systems Gmbh Linsenfassung mit Manipulatormodul
DE102018131889B4 (de) 2018-09-27 2021-08-12 Scansonic Mi Gmbh Laserstrahljustiervorrichtung
US11590994B2 (en) 2019-08-15 2023-02-28 Radio Flyer Inc. Foldable beach wagon
MX2021014857A (es) 2019-08-30 2022-01-18 Radio Flyer Inc Carrito de empuje y arrastre.
CA3138766A1 (en) 2019-10-09 2021-04-15 Samantha Sturgeon Wagon with recline seatback
WO2021081182A1 (en) 2019-10-23 2021-04-29 Radio Flyer Inc. Handle release and locking mechanism
CN119289209A (zh) * 2024-11-28 2025-01-10 哈尔滨工业大学 一种用于传热管检修的爬行机器人

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030051331A1 (en) * 1999-06-21 2003-03-20 The 14Th And Constitution, National Institute Of Standards And Technology Positioning stage actuation
CN1560660A (zh) * 2004-02-16 2005-01-05 �й���ѧԺ�Ϻ���ѧ���ܻ�е�о��� 大口径标准平板精密调整架
WO2006066706A2 (en) * 2004-12-22 2006-06-29 Carl Zeiss Laser Optics Gmbh Optical illumination system for creating a line beam
US20080144199A1 (en) * 2005-07-01 2008-06-19 Carl Zeiss Smt Ag Arrangement for mounting an optical component
CN101487697A (zh) * 2008-01-02 2009-07-22 布其蒙国际公司 检测光学透镜支架的设备及相关方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3291431A (en) * 1965-07-02 1966-12-13 Jr James A Daniel Straight line carrier device
ATE47218T1 (de) * 1985-05-13 1989-10-15 Contraves Ag Tragvorrichtung fuer ein optisches beobachtungsgeraet.
US5220460A (en) * 1991-09-24 1993-06-15 Eastman Kodak Company Adjustable mount for cylindrical lens with torque applied directly to lens
DE20012046U1 (de) * 2000-07-12 2000-09-14 Fa. Carl Zeiss, 89518 Heidenheim Vorrichtung zum Justieren einer Fläche eines Justierteiles
JP4665759B2 (ja) * 2003-06-06 2011-04-06 株式会社ニコン 光学素子保持装置、鏡筒、露光装置、及びデバイスの製造方法
US7697222B2 (en) * 2003-12-25 2010-04-13 Nikon Corporation Apparatus for holding optical element, barrel, exposure apparatus, and device producing method
EP1577693B1 (de) * 2004-02-26 2011-07-13 Carl Zeiss SMT GmbH Objektiv mit wenigstens einem optischen Element
WO2006000352A1 (de) * 2004-06-29 2006-01-05 Carl Zeiss Smt Ag Positioniereinheit und vorrichtung zur justage für ein optisches element
JP5199068B2 (ja) * 2005-05-09 2013-05-15 カール・ツァイス・エスエムティー・ゲーエムベーハー 光学エレメント調整組立体
JP4467598B2 (ja) * 2007-04-12 2010-05-26 三菱電機株式会社 投写型画像表示装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030051331A1 (en) * 1999-06-21 2003-03-20 The 14Th And Constitution, National Institute Of Standards And Technology Positioning stage actuation
CN1560660A (zh) * 2004-02-16 2005-01-05 �й���ѧԺ�Ϻ���ѧ���ܻ�е�о��� 大口径标准平板精密调整架
WO2006066706A2 (en) * 2004-12-22 2006-06-29 Carl Zeiss Laser Optics Gmbh Optical illumination system for creating a line beam
US20080144199A1 (en) * 2005-07-01 2008-06-19 Carl Zeiss Smt Ag Arrangement for mounting an optical component
CN101487697A (zh) * 2008-01-02 2009-07-22 布其蒙国际公司 检测光学透镜支架的设备及相关方法

Also Published As

Publication number Publication date
US20120140341A1 (en) 2012-06-07
US8456771B2 (en) 2013-06-04
CN102549468A (zh) 2012-07-04
JP2013501249A (ja) 2013-01-10
KR20120052364A (ko) 2012-05-23
WO2011012263A1 (en) 2011-02-03
JP5710613B2 (ja) 2015-04-30
DE102009037133A1 (de) 2011-02-03
DE102009037133B4 (de) 2013-01-31

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140611

Termination date: 20160723

CF01 Termination of patent right due to non-payment of annual fee