CN102543946B - 半导体器件封装及其制造方法 - Google Patents

半导体器件封装及其制造方法 Download PDF

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Publication number
CN102543946B
CN102543946B CN201110427046.8A CN201110427046A CN102543946B CN 102543946 B CN102543946 B CN 102543946B CN 201110427046 A CN201110427046 A CN 201110427046A CN 102543946 B CN102543946 B CN 102543946B
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China
Prior art keywords
semiconductor device
passivation layer
device package
dielectric
package
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CN201110427046.8A
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English (en)
Chinese (zh)
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CN102543946A (zh
Inventor
R·A·博普雷
P·A·麦康奈利
A·V·高达
T·B·戈尔茨卡
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General Electric Co
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General Electric Co
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/137—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations being directly on the semiconductor body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
    • H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
    • H10D62/117—Shapes of semiconductor bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H10W70/08—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers by depositing layers on the chip or wafer, e.g. "chip-first" RDLs
    • H10W70/09—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers by depositing layers on the chip or wafer, e.g. "chip-first" RDLs extending onto an encapsulation that laterally surrounds the chip or wafer, e.g. fan-out wafer level package [FOWLP] RDLs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/144—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations comprising foils
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/147—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations being multilayered
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
    • H10W70/01—Manufacture or treatment
    • H10W70/05—Manufacture or treatment of insulating or insulated package substrates, or of interposers, or of redistribution layers
    • H10W70/093—Connecting or disconnecting other interconnections thereto or therefrom, e.g. connecting bond wires or bumps
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/0711—Apparatus therefor
    • H10W72/07131—Means for applying material, e.g. for deposition or forming coatings
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00—Interconnections or connectors in packages
    • H10W72/071—Connecting or disconnecting
    • H10W72/073—Connecting or disconnecting of die-attach connectors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Light Receiving Elements (AREA)
  • Semiconductor Integrated Circuits (AREA)
CN201110427046.8A 2010-12-08 2011-12-08 半导体器件封装及其制造方法 Active CN102543946B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/962,761 US8310040B2 (en) 2010-12-08 2010-12-08 Semiconductor device package having high breakdown voltage and low parasitic inductance and method of manufacturing thereof
US12/962761 2010-12-08

Publications (2)

Publication Number Publication Date
CN102543946A CN102543946A (zh) 2012-07-04
CN102543946B true CN102543946B (zh) 2016-12-07

Family

ID=45002829

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201110427046.8A Active CN102543946B (zh) 2010-12-08 2011-12-08 半导体器件封装及其制造方法

Country Status (8)

Country Link
US (2) US8310040B2 (https=)
EP (1) EP2463901B1 (https=)
JP (1) JP5926547B2 (https=)
KR (1) KR101944477B1 (https=)
CN (1) CN102543946B (https=)
PH (1) PH12011000403A1 (https=)
SG (1) SG182076A1 (https=)
TW (1) TWI544590B (https=)

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US8431438B2 (en) * 2010-04-06 2013-04-30 Intel Corporation Forming in-situ micro-feature structures with coreless packages
US9209151B2 (en) 2013-09-26 2015-12-08 General Electric Company Embedded semiconductor device package and method of manufacturing thereof
US9806051B2 (en) 2014-03-04 2017-10-31 General Electric Company Ultra-thin embedded semiconductor device package and method of manufacturing thereof
WO2015174993A1 (en) * 2014-05-15 2015-11-19 Intel Corporation Molded composite enclosure for integrated circuit assembly
WO2015182581A1 (ja) * 2014-05-29 2015-12-03 アーゼット・エレクトロニック・マテリアルズ（ルクセンブルグ） ソシエテ・ア・レスポンサビリテ・リミテ 空隙形成用組成物、その組成物を用いて形成された空隙を具備した半導体装置、およびその組成物を用いた半導体装置の製造方法
EP3065164A1 (en) * 2015-03-04 2016-09-07 ABB Technology AG Power semiconductor arrangement and method of generating a power semiconductor arrangement
WO2020014499A1 (en) * 2018-07-13 2020-01-16 Array Photonics, Inc. Dual-depth via device and process for large back contact solar cells
DE102020135088A1 (de) * 2020-03-27 2021-09-30 Samsung Electronics Co., Ltd. Halbleitervorrichtung
US11699663B2 (en) 2020-04-27 2023-07-11 Taiwan Semiconductor Manufacturing Company, Ltd. Passivation scheme design for wafer singulation
CN113517205A (zh) * 2020-04-27 2021-10-19 台湾积体电路制造股份有限公司 半导体器件及其形成方法
CN115939222B (zh) * 2022-11-24 2025-10-17 湖南三安半导体有限责任公司 半导体器件及其制备方法
CN116936592A (zh) * 2023-07-24 2023-10-24 华天科技（昆山）电子有限公司 一种高可靠性的cis芯片封装结构及方法

Citations (2)

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US4198444A (en) * 1975-08-04 1980-04-15 General Electric Company Method for providing substantially hermetic sealing means for electronic components
US6329708B1 (en) * 1999-04-26 2001-12-11 Oki Electric Industry Co. Ltd. Micro ball grid array semiconductor device and semiconductor module

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US4249299A (en) * 1979-03-05 1981-02-10 Hughes Aircraft Company Edge-around leads for backside connections to silicon circuit die
US5161093A (en) 1990-07-02 1992-11-03 General Electric Company Multiple lamination high density interconnect process and structure employing a variable crosslinking adhesive
DE69738783D1 (de) * 1996-10-08 2008-07-31 Hitachi Chemical Co Ltd Halbleiteranordnung, halbleiterchipträgersubstrat, herstellungsverfahren für anordnung und substrat, klebstoff und doppelseitiges haftklebeband
EP0926729A3 (en) * 1997-12-10 1999-12-08 Mitsubishi Gas Chemical Company, Inc. Semiconductor plastic package and process for the production thereof
US6239980B1 (en) 1998-08-31 2001-05-29 General Electric Company Multimodule interconnect structure and process
US6306680B1 (en) 1999-02-22 2001-10-23 General Electric Company Power overlay chip scale packages for discrete power devices
US6232151B1 (en) 1999-11-01 2001-05-15 General Electric Company Power electronic module packaging
JP4454814B2 (ja) * 2000-08-29 2010-04-21 Ｎｅｃエレクトロニクス株式会社 樹脂封止型半導体装置及びその製造方法
US7633765B1 (en) * 2004-03-23 2009-12-15 Amkor Technology, Inc. Semiconductor package including a top-surface metal layer for implementing circuit features
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JP5033682B2 (ja) * 2008-03-12 2012-09-26 株式会社テラミクロス 半導体素子およびその製造方法並びに半導体装置およびその製造方法
CN102077341B (zh) * 2008-06-26 2014-04-23 Nxp股份有限公司 封装半导体产品及其制造方法
TW201101547A (en) * 2009-06-23 2011-01-01 Univ Kun Shan Packaging structure of light emitting diode

Patent Citations (2)

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US4198444A (en) * 1975-08-04 1980-04-15 General Electric Company Method for providing substantially hermetic sealing means for electronic components
US6329708B1 (en) * 1999-04-26 2001-12-11 Oki Electric Industry Co. Ltd. Micro ball grid array semiconductor device and semiconductor module

Also Published As

Publication number Publication date
EP2463901B1 (en) 2018-06-13
TW201246475A (en) 2012-11-16
JP2012124486A (ja) 2012-06-28
US20120329207A1 (en) 2012-12-27
US8586421B2 (en) 2013-11-19
SG182076A1 (en) 2012-07-30
EP2463901A2 (en) 2012-06-13
US20120146234A1 (en) 2012-06-14
KR20120089993A (ko) 2012-08-16
CN102543946A (zh) 2012-07-04
US8310040B2 (en) 2012-11-13
PH12011000403A1 (en) 2014-07-23
TWI544590B (zh) 2016-08-01
JP5926547B2 (ja) 2016-05-25
EP2463901A3 (en) 2012-08-29
KR101944477B1 (ko) 2019-01-31

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