CN102540350A - Temperature-insensitive arrayed waveguide grating for realizing double linear temperature compensation - Google Patents

Abstract

The invention discloses a temperature-insensitive arrayed waveguide grating for realizing double linear temperature compensation. The arrayed waveguide grating comprises a temperature compensation device (101), an input device (106), an input plane waveguide (102), an array grating (103), an output plane waveguide (104), an output waveguide (105) and a substrate (107), wherein the temperature compensation device (101) comprises a temperature compensation rod (201) and a first glass block (202) and a second glass block (203) which are arranged at two ends of the temperature compensation rod (201); the first glass block (202) and the second glass block (203) are fixed with the substrate (107); the middle part of the temperature compensation rod (201) is provided with an open pore (204) through which the input device (106) penetrates; the temperature compensation rod (201) is partitioned into an elastic area (213) and a telescopic area (205) by the open pore (204); a spring area (207) is arranged in the telescopic area (205); and one side of the spring area (207) is fixed with one side of the telescopic area (205) matched with the spring area (207), and the other side of the spring area (207) is not fixed but tightly jointed with the other side of the telescopic area (205). The arrayed waveguide grating can reduce the variable value of the wavelength together with the temperature.

Description

A kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation

Technical field

The present invention relates to a kind of temperature insensitive arrayed waveguide grating (temperature insensitive arrayed waveguide grating, Athermal Arrayed Waveguide Grating are called for short AAWG) of realizing the bilinearity temperature compensation, belong to the communications field.

Background technology

AWG (Arrayed Waveguide Grating, array waveguide grating) is a kind of plane waveguiding device, is the array waveguide grating that utilizes PLC (Planar Lightwave Circuit, planar lightwave circuit) technology on chip substrate, to make.Compare with FBG (Fiber Bragg Grating, Fiber Bragg Grating FBG) and TFF (Thin Film Filter, Thin Film Filter), AWG has the integrated level height, number of active lanes is many, the insertion loss is little, is easy to advantages such as batch automatic production.But; Because traditional silica-based AWG chip is relatively more responsive to temperature; General centre wavelength is 0.0118nm/ ℃ with the drift of temperature; Therefore need serviceability temperature controller and temperature-control circuit to come the stable center output wavelength to traditional thermo-responsive AWG (Thermal AWG), the corresponding cost that increases AWG, size and the range of application that has limited it.Thereby domestic and international many major companies have released the AAWG product.

AAWG has opened up two new markets.One is can not supply power or be inconvenient to provide additional power supply to carry out temperature controlled the time in frame; AAWG can replace Thin Film Filter TFF to be used for the multiplexer/demultiplexer module of DWDM (Dense Wavelength Division Multiplexing, dense wave division multipurpose) system.Another market that more is rich in potentiality is emerging WDM-PON (Wavelength Division Multiplex_Passive Optical Network; Wavelength-division multiplex-passive light networking) system; Because the WDM-PON system requirements can normally move in 70 ℃ temperature range at outdoor-30 ℃; And the temperature of TFF is floated greatly, does not meet the application requirements of outdoor WDM-PON system, thus system may use a large amount of AAWG with provide surpass 100,000,000 Fiber to the home professional.

Common AAWG adopts the technology of temperature compensation to keep the stable of wavelength, as connecting input waveguide with the metal temperature compensation bar, under the driving that temperature compensation rod expands with heat and contract with cold, makes input waveguide move the drift of compensated wave personal attendant temperature.But all there is following problem in existing various schemes at present: these compensation methodes all are that the temperature characterisitic of wavelength is carried out linear compensation.But actual AWG wavelength-temperature curve is not linear, so these compensation methodes can only keep the stability of wavelength in limited temperature range, for outdoor grade greatly the application of range of temperature then be difficult to satisfy.

The displacement of input waveguide is linear to the derivative of temperature with variation of temperature rate and refractive index, and this conclusion is represented referring to formula.

The diffraction equation of AWG: dn _sSin θ _i+ dn _sSin θ _o+ n _cΔ L=m λ (1)

N wherein _sAnd n _cBe respectively input plane waveguide, the output plane waveguide of AWG, also be the effective refractive index of Rowland circle and the effective refractive index of Waveguide array, d is the spacing of adjacent array waveguide on the rowland circumference, θ _iAnd θ _oBe the angle of diffraction of input and output slab guide, Δ L is the length difference of adjacent array waveguide.M is that the order of diffraction is inferior.λ is a vacuum wavelength.

The centre wavelength of AWG satisfies: m λ=n _cΔ L (2)

(θ under the paraxonic approximate condition _i＜＜1, θ _o＜＜1), formula (1) both sides differential gets the angular dispersion formula:

$\frac{\mathrm{d\θ}}{\mathrm{d\λ}}=\frac{m}{n_{s}d}\frac{n_g}{n_c}---\left(3\right)$

Wherein θ is the input angle of diffraction, n _gBe group index, and

$n_g=n_c-\mathrm{\λ}\frac{d{n}_c}{\mathrm{d\λ}}---\left(4\right)$

If the Rowland circle focal length is R, keep centre wavelength constant through laterally moving input waveguide, then the approximate transversal displacement of input waveguide down of paraxonic

x＝Rθ(5)

Its displacement chromatic dispersion is: $\frac{\mathrm{Dx}}{\mathrm{D\λ}}=R\frac{m}{n_{s}d}\frac{n_g}{n_c}---\left(6\right)$

Displacement is to the differential formulas of temperature: $\frac{\mathrm{Dx}}{\mathrm{DT}}=\frac{\mathrm{Dx}}{\mathrm{D\λ}}\frac{\mathrm{D\λ}}{\mathrm{DT}}=R\frac{m}{n_{s}d}\frac{n_g}{n_c}\frac{\mathrm{D\λ}}{\mathrm{DT}}=R\frac{\mathrm{\Δ\; L}}{n_{s}d}\frac{n_g}{n_c}\frac{d{n}_c}{\mathrm{DT}}---\left(7\right)$

Based on formula (7), existing linear compensation patent " optical couping device, publication number CN1375068A; " proposed a kind of linear temperature collocation structure that adopts Metallic rod to do, Figure 11 a has provided the principle schematic of this linear compensation structure to an open day 2002-10-16, and effective compensated part 901 length of establishing the linear compensation structure are 1; Rigidity is k1, and linear expansion coefficient is α, the rigidity k2 of Hookean spring part 903; And k1＞＞k2; If temperature variation is Δ t, input optical fibre contact pin 902 is Δ x along the displacement in input plane waveguide forward position, so obtain input optical fibre contact pin 902 along the displacement in input plane waveguide forward position with variation of temperature is:

$\frac{\mathrm{\&Delta;x}}{\mathrm{\&Delta;t}}=\frac{k_1}{{\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="120321101327.png"\; state="\{\{state\}\}">k</figure-callout>}}_1+k_2}\&times;l\&times;\mathrm{\&alpha;}---\left(8\right)$

Yet for the AWG chip of earth silicon material, its refractive index not exclusively is a linear relationship also with variation of temperature, and therefore more aforesaid linear compensation schemes can not full remuneration wavelength-temperature drift.When the wavelength-temperature curve of AWG chip receives accurate once linear compensation; Curve becomes parabola shaped that an opening makes progress; Shown in Figure 10 symmetrical compensation curve 801, promptly increase progressively the AAWG of common linear compensation toward two ends by the center; Under the situation of complete symmetrical compensation, wavelength with temperature variation 50pm about.When the wavelength-temperature curve of AWG chip can not fine compensation the time; Be divided into two kinds of situation, like under-compensation curve among Figure 10 802 and over-compensation curve 803, para-curve summit off-center working temperature point; AAWG centre wavelength is in operating temperature range, and wavelength change reaches near 130pm.And; When

value is suitable; The AWG temperature characterisitic shows as the linear symmetric compensation, and the wavelength variable quantity from normal temperature to high temperature and from normal temperature to low temperature is similar; When value is bigger than normal as

; The AWG temperature characterisitic shows as linear over-compensation; Wavelength change from normal temperature to high temperature is smaller, and the wavelength change during still from normal temperature to high temperature is bigger; When value is less than normal as

; The AWG temperature characterisitic shows as linear under-compensation; Wavelength change from normal temperature to low temperature is smaller, and the wavelength change during still from normal temperature to high temperature is bigger.

Summary of the invention

The object of the invention overcomes the technological deficiency that prior art exists, and a kind of temperature insensitive arrayed waveguide grating that can realize the bilinearity temperature compensation based on temperature compensation means is provided.

The principle and the implementation method of the bilinearity temperature compensation structure that the array waveguide grating of bilinearity temperature compensation of the present invention is related are following:

Shown in Figure 11 b, introduce bilinearity spring section 904 in effective compensated part of linear collocation structure, bilinearity spring section 904 is divided into two parts to effective compensated part; Length is L1 and L2, L1+L2=1, and bilinearity spring section 904 has following characteristic; If its rigidity is k3, then:

So obtain the temperature variant displacement of input waveguide be:

$\frac{\mathrm{\&Delta;x}}{\mathrm{\&Delta;t}}=\left\{\begin{array}{cc}\frac{k_1}{{\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="120321101327.png"\; state="\{\{state\}\}">k</figure-callout>}}_1+k_2}\&times;l\&times;\mathrm{\&alpha;}& (t>0)---\left(10A\right)\\ \frac{{\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="120321101327.png"\; state="\{\{state\}\}">k</figure-callout>}}_1\&times;k}{({\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="120321101327.png"\; state="\{\{state\}\}">k</figure-callout>}}_1+k_2)\&times;k+{\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="120321101327.png"\; state="\{\{state\}\}">k</figure-callout>}}_1\&times;k_2}\&times;l\&times;\mathrm{\&alpha;}& (\mathrm{\&Delta;t}<0)---\left(10B\right)\end{array}\right.$

Obviously $(\frac{k_1}{{\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="120321101327.png"\; state="\{\{state\}\}">k</figure-callout>}}_1+k_2}\&times;l\&times;\mathrm{\&alpha;})>(\frac{{\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="120321101327.png"\; state="\{\{state\}\}">k</figure-callout>}}_1\&times;k}{({\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="120321101327.png"\; state="\{\{state\}\}">k</figure-callout>}}_1+k_2)\&times;k+{\mathrm{<figure-callout\; id="1"\; label="k"\; filenames="120321101327.png"\; state="\{\{state\}\}">k</figure-callout>}}_1\&times;k_2}\&times;l\&times;\mathrm{\&alpha;})$

From (10A) (10B) formula can find out; After effective compensated part of collocation structure is introduced bilinearity spring section 904; Input waveguide is bilinear along the displacement x in input plane waveguide forward position with temperature variation Δ t; Thereby realized from normal temperature to high temperature, AWG being carried out linear over-compensation, from normal temperature to low temperature, AWG has been carried out linear under-compensation.

The technical scheme that the present invention adopted is:

A kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation; Comprise temperature compensation means, input media, input plane waveguide, array grating, output plane waveguide, output waveguide, substrate; Said temperature compensation means comprises temperature compensation rod and first glass blocks at its two ends, second glass blocks is set that first glass blocks and second glass blocks are fixed with substrate, are provided with the perforate that a confession input media runs through in the middle part of the temperature compensation rod; Perforate is separated into elastic region and breathing zone with temperature compensation rod; In breathing zone, be provided with spring region, spring region keeps a side to fix with the breathing zone that is mated, and opposite side is not fixed and fitted tightly.

Said input media is the grinding and polishing face with input plane waveguide and first glass blocks, second glass blocks with the substrate end face that contacts, and three surface of contact all keep same plane.

Said spring region is made up of one or more square groove and the cushion block that is complementary with it, and a side plane of said square groove and cushion block coupling is fixed, and the opposite side plane is fixing and fit tightly.

The thermal expansivity of the synthermal compensation bar of thermal expansivity of said cushion block is identical or close.

Said spring region comprises one or more ladder blocks, and side plane of the breathing zone that said ladder block is complementary with it is fixed, and the opposite side plane is not fixed and fitted tightly.

Said elastic region is staggered relatively a plurality of grooves up and down, the elastic region along the rigidity k2 of temperature compensation rod length direction less than the breathing zone of temperature compensation rod along temperature compensation rod length direction rigidity k1.

Said input media can be the fine glass capillary of magnetic tape trailer or the input waveguide of optical fiber contact pins or AWG waveguide.

Said input media with the input plane waveguide near and the distance remain the 8-15 micron, apart from being filled with the silicon gel in the gap.

Said first glass blocks and second glass blocks can be high-boron-silicon glass.

The present invention has following advantage:

1, the bilinearity temperature compensation means of the present invention's employing can be divided into two sections with whole operating temperature range, high temperature section and low-temperature zone; In high temperature section; Collocation structure is realized over-compensation, and low-temperature zone realizes under-compensation, thereby realizes bilinearity compensation in the whole temperature range; Adopt the present invention to reduce wavelength greatly with temperature change value, the wavelength change of 50pm is dropped to about 15pm;

2, the present invention has low, the advantage of simple technology of cost.

Description of drawings

The structure wiring layout of Fig. 1, AAWG of the present invention;

The front view of Fig. 2, first kind of structure temperature compensation system of the present invention;

The synoptic diagram that deforms after Fig. 3, first kind of structure temperature compensation bar cooling of the present invention;

The front view of Fig. 4, second kind of structure temperature compensation system of the present invention;

The synoptic diagram that deforms after Fig. 5, second kind of structure temperature compensation system cooling of the present invention;

Front view before Fig. 6, the third structure temperature compensation system assembling of the present invention;

Fig. 7, the third structure temperature compensation system assembling back synoptic diagram of the present invention;

The synoptic diagram that deforms after Fig. 8, the third structure temperature compensation system cooling of the present invention;

Fig. 9, bilinearity temperature compensation rod displacement curve of the present invention;

Heatless AWG temperature characterisitic after Figure 10, the compensation;

Figure 11 a, linear compensation structural principle synoptic diagram;

Figure 11 b, bilinearity temperature compensation structure principle schematic.

Wherein:

101, temperature compensation means; 106, input media;

102, input plane waveguide; 103, array grating;

104, output plane waveguide; 105, output waveguide;

107, substrate; 201, temperature compensation rod;

202, first glass blocks; 203, second glass blocks;

213, elastic region; 205, breathing zone;

207, spring region; 208, cushion block;

204, perforate; 206, groove;

901, effective compensated part; 904, bilinearity spring section;

902, input waveguide;

801, the symmetrical compensation curve of prior art; 802, the under-compensation curve of prior art;

803, the over-compensation curve of prior art; 804, bilinearity compensated curve of the present invention;

701, ladder block; 228, square groove;

Each surface of contact that 209-216, square groove cooperate with cushion block, eight planes, first plane to the;

Each surface of contact that 220-227, the synthermal compensation bar of ladder block cooperate, 17 planes, the 9th plane to the.

Embodiment

Below in conjunction with embodiment and accompanying drawing the present invention is described further.

A kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation of the present invention is specifically referring to Fig. 1; Comprise temperature compensation means 101, input media 106, substrate 107, AWG chip, output waveguide 105; Wherein the AWG chip comprises input plane waveguide 102; Array grating 103, output plane waveguide 104.Input media 106, input plane waveguide 102, array grating 103, output plane waveguide 104, output waveguide 105 are arranged in order.Input plane waveguide 102; Array grating 103; Output plane waveguide 104, output waveguide 105 are adhesively fixed on the substrate 107, and input media 106 passes temperature compensation means 101 near AWG chip one side plane, and temperature compensation means 101 is adhesively fixed with substrate 107.Input media 106 with input plane waveguide 102 each other near; Two plan ranges are controlled in the 8-15 micrometer range; Middle silicon gel of filling refractive index match; Require the stable performance in the total temperature scope of silicon gel, non-resistance when making at input media 106 with temperature change along the translation of input plane Waveguide end face.

Temperature compensation means 101 structures are concrete like Fig. 2; Include the temperature compensation rod 201 of higher thermal expansion coefficient; And first glass blocks 202, second glass blocks 203 that are arranged at temperature compensation rod 201 two ends; Temperature compensation rod 201 middle parts are penetrated with a perforate 204, and the size of this perforate 204 and position are complementary with the size and the position of input media 106.Perforate 204 is divided into two parts with temperature compensation rod 201, i.e. elastic region 213 and breathing zone 205; The breathing zone 205 of temperature compensation rod 201 is provided with a spring region 207, and this spring region 207 can be combined by square groove 228 and pad 208.Square groove 228 runs through breathing zone 205 along the direction of vertical open pores 204, but square groove 228 does not run through breathing zone 205 along parallel perforate 204 directions.Square groove is filled with the cushion block 208 that is complementary with the square groove size for 228 li; Cushion block 208 adopts the identical material of synthermal compensation bar 201; Because the width along the temperature compensation rod length direction of square groove 228 is smaller, so cushion block 208 also can adopt other material identical or close with the thermal expansivity of temperature compensation rod 201.Two planes of square groove 228 both sides i.e. first plane 209 promptly fit tightly with Siping City's face 212 on the 3rd plane 211 with two planes, both sides of cushion block 208 respectively with second plane 210 mutually.The wherein a pair of side that cushion block 208 is fitted with square groove 228 carry out bonding or welding fixing; A pair of in addition side just fits tightly; That is: can first plane 209 and the 3rd plane 211 fixed bondings be integral, second plane 210 and Siping City's face 212 fit tightly; Perhaps second plane 210 and Siping City's face 212 fixed bondings are integral, first plane 209 and the 3rd plane 211 fit tightly.Input media 106 is through temperature compensation rod perforate 204; Input media 106 can use the fine glass capillary of magnetic tape trailer as input end; Also can be the independent special waveguide of making of satisfying the AWG requirement, also can be optical fiber contact pins, or the input waveguide of AWG waveguide.Input media 106 can adopt optical fiber contact pins usually, thus this moment optical fiber contact pins through with perforate 204 bonding being fixed on the temperature compensation means 101, first glass blocks 202 in the temperature compensation means 101, second glass blocks 203 are adhesively fixed with substrate 107.

As shown in Figure 2; The opposite side of perforate 204 is provided with elastic region 213 on the temperature compensation rod 201; Spring structure is adopted in elastic region 213; As shown in Figure 2, the direction that 213 zones, elastic region of temperature compensation rod is parallel to spring region 207 processes staggered relatively up and down a plurality of grooves 206, and the quantity of groove 206 is even number.It is in temperature changing process that elastic region 213 fundamental purposes are set; Input media 106 is when the input plane Waveguide end face moves; Has only the displacement of one dimension direction; Promptly be parallel to plane, input plane waveguide 102 place, move, avoid input media 106 displacement and the shake of other both directions to occur along input plane waveguide 102 end faces.Expanding with heat and contract with cold of the 213 pairs of breathing zones 205 in elastic region has certain inhibition; The breathing zone 205 of temperature compensation rod is k1 along the rigidity of temperature compensation rod length direction; Elastic region 213 is k2 along the rigidity of temperature compensation rod length direction; Be warming up to the pyroprocess from normal temperature; The factor

that the size of its inhibition is embodied among the formula 10A is to reduce the inhibition of elastic region, requires rigidity k2 much smaller than rigidity k1.As k1 and k2, and needed effect temperature compensation

After confirming,, just obtain the length of the needed breathing zone 205 of temperature compensation, promptly with reference to formula 10A $l=\frac{\mathrm{\&Delta;\; x}}{\mathrm{\&Delta;\; t}}\&times;\frac{k_1+k_2}{k_1}\&times;\frac{1}{\mathrm{\&alpha;}}.$

Embedded spring region can be a square groove on the breathing zone of temperature compensation rod, also can be a plurality of square grooves.Shown in Figure 4 is the situation that contains the spring region of two square grooves; Its manufacturing process is following: on temperature compensation rod breathing zone 205, open measure-alike up and down, relatively and to two square grooves; The opposite face of two square grooves is respectively first plane 209, second plane 210 and the 5th plane 213, the 6th plane 214; In two square grooves, embed size and the measure-alike cushion block of square groove respectively, the material of cushion block is identical with temperature compensation rod or be the thermal expansivity material identical or close with temperature compensation rod.The plane that cushion block matches with square groove is respectively the 3rd plane 211, Siping City's face 212 and the 7th plane 215, the 8th plane 216; The assembly relation of cushion block and square groove is following: first plane 209 and the 3rd plane 211 are first group; Second plane 210 and Siping City's face 212 are second group; From first group and second group, select any one group of plane to be bonded together, other one group of plane fits tightly; The 5th plane 213 and the 7th plane 215 are the 3rd group, and the 6th plane 214 and the 8th plane 216 are the 4th group, from the 3rd group and the 4th group, select one group of plane to be bonded together arbitrarily, and other one group of plane fits tightly.These two groups of faces that fit tightly in the temperature-rise period from normal temperature to high temperature since thermal expansion extruding still fit tightly together, in the temperature-fall period from normal temperature to low temperature owing to certain distance is opened in shrinkage.Illustrate the distortion situation of temperature compensation means in the temperature-fall period from normal temperature to low temperature of this structure like Fig. 5.

It is other version that the embedded spring region of the breathing zone of temperature compensation rod also can adopt.As shown in Figure 6; In breathing zone, cut out a ladder block 701; This ladder block 701 cuts into three parts with breathing zone 205; These ladder block 701 synthermal compensation bar breathing zone 205 surface of contact have four planes, i.e. the 223, the 13 plane 224, the 222, the 12 plane, the 11 plane, the tenth Siping City's face 225, the contact plane of the left and right sides breathing zone that is complementary with it are respectively the 9th plane 220, the tenth plane 221 and the 226, the 17 plane 227, the 16 plane.Adopt following mode that the breathing zone of the ladder block and the left and right sides is assembled up mutually: the tenth plane 221 and the 12 plane 223 are bonding or weld; The 9th plane 220 and the 11 plane 222 fit tightly; The 13 plane 224 and the 16 plane 226 are bonding or weld, and the tenth Siping City's face 225 and the 17 plane 227 fit tightly.Temperature compensation means after assembling is accomplished is as shown in Figure 7.In the temperature-rise period from normal temperature to high temperature, the fitting surface of the breathing zone of ladder block and its coupling still fits together owing to thermal expansion closely; And cooling to the chilling process from normal temperature, because the shrinkage effect, the synthermal compensation bar breathing zone of ladder block fits tightly and does not have face bonding or welding to be drawn back, thereby realizes the bilinearity temperature compensation.Fig. 8 has provided the distortion situation of temperature compensation means in the temperature-fall period from the room temperature to low temperature.

Is that example describe the concrete course of work that it realize bilinearity temperature compensation to the present invention with the temperature insensitive arrayed waveguide grating of the spring region that comprises a square groove structure in conjunction with Fig. 1 and Fig. 2: bilinearity spring involved in the present invention is realized through on temperature compensation rod, introducing the structure that has bilinearity rigidity with temperature.Input media 106 runs through temperature compensation means 101, and when ambient temperature changed, input media 106 can be along with expanding with heat and contract with cold of temperature compensation means 101 materials moved along the edge of input plane waveguide 102.Be warming up to from normal temperature the process of high temperature; Cushion block 208 all expands with temperature compensation rod breathing zone 205; This moment, second plane 209 and Siping City's face 211 of cushion block 208 closely cooperated; Cushion block 208 is infinitely great with the rigidity of the bilinearity spring that square groove 228 is formed; Input media 106 is of formula 10A with variation of temperature along the displacement at the edge of input plane waveguide 102; And

depends primarily on the length 1 of breathing zone 205; The length 1 of adjustment breathing zone 205 makes and is warming up to the pyroprocess from normal temperature; The effect temperature compensation of temperature insensitive arrayed waveguide grating shows as linear over-compensation; Input media 106 is along the displacement at the edge of input plane waveguide 102 high-temperature part with the over-compensation curve among temperature variation such as Fig. 9; Promptly from 25 ℃ to 85 ℃, the AWG characteristic after the compensation such as the high-temperature part of the bilinearity compensated curve 804 among Figure 10 are promptly from 25 ℃ to 85 ℃ curved portion; In cooling shrinkage process;, first plane 209 of cushion block 208 and 211 on the 3rd plane be not one because fitting tightly; Certain distance can be drawn back between first plane 209 and the 3rd plane 211 in the shrinkage process; The distortion situation of cooling as shown in Figure 3 back temperature compensation rod 201; The distance of being drawn back has been offset a part and has been shunk the displacement of caused input media 106 along the edge of input plane waveguide 102 because of breathing zone 205; Cushion block 208 is k with the rigidity of the spring region that square groove 228 is formed; Input media 106 is of formula 10B with temperature variation

along the displacement at the edge of input plane waveguide 102; And; Rigidity k value is more little, and then

is also more little, through the suitable little rigidity k value of size Selection of adjustment square groove 228 and cushion block 208; Make and cool to the chilling process from normal temperature; The compensation effect of temperature insensitive arrayed waveguide grating shows as linear under-compensation, and with the low temperature part of the under-compensation curve among temperature variation such as Fig. 9 from 25 ℃ to-40 ℃, AWG characteristic after the compensation such as the under-compensation curve 802 among Figure 10 are from 25 ℃ to-40 ℃ low-temp. portion component curve along the displacement at the edge of input plane waveguide 102 for input media 106.In sum; Being warming up to high temperature and temperature from normal temperature in temperature is cooled to from normal temperature these two processes of low temperature; Input media 106 is along with expanding with heat and contract with cold of temperature compensation means 101 materials shows as bilinearity along the mobile Δ x at input plane waveguide 102 edges with temperature variation Δ t, and the bilinearity compensated curve among Fig. 9 has provided this displacement with variation of temperature.The temperature characterisitic of corresponding AWG shows as over-compensation from normal temperature to high temperature, from normal temperature to low temperature, show as under-compensation, shown in the bilinearity compensated curve among Figure 10.

In order further to understand patent of the present invention, provide specific embodiment below in conjunction with accompanying drawing.Aluminium alloy 6061-T6 processes the metal temperature compensation bar, and the metal temperature compensation bar requires dimensional accuracy to want high, breathing zone length dimension especially, and this portion size directly influences effect temperature compensation; The breathing zone of metal temperature compensation bar leaves the hole and has a groove at a distance of 2 millimeters places, the difficulty that the groove width size can influence processing, and groove depth will directly influence the rigidity of breathing zone, thus the compensation effect when influence the low-temperature zone contraction.Cushion block can be selected glass for use under the thin situation of fluting, slot when thicker, selects the aluminium identical with temperature compensation rod for use.With heat-curable glue a side plane of cushion block and a side plane of temperature compensation rod fluting are adhesively fixed, note keeping cushion block opposite side plane this moment and fit tightly, and avoid this cushion block and fluting plane fixed bonding with a side plane of the fluting of its coupling.Perforate in the middle of the temperature compensation rod, glass capillary magnetic tape trailer is fine with heat-curable glue is fixed in the hole; Adopt the glue with soft, for example silicon rubber is fixed first glass blocks, second glass blocks and temperature compensation rod two ends.First glass blocks and second glass blocks can be selected high-boron-silicon glass for use.With glass capillary with the input plane waveguide in the AWG chip; Grinding and polishing is carried out in first glass blocks, second glass blocks and the contacted side end face of substrate; Guarantee glass capillary with AWG chip, first glass blocks, second glass blocks with contacted three side end faces of substrate on same plane, just accomplished the assembling preparation of temperature compensation means this moment.

Though the present invention has at length illustrated and described relevant certain embodiments reference, those skilled in the art can should be appreciated that, is not deviating from the spirit and scope of the present invention and can make various changes in form with on the details.These change all will fall into the desired protection domain of claim of the present invention.

Claims (9)

1. temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation; Comprise temperature compensation means (101), input media (106), input plane waveguide (102), array grating (103), output plane waveguide (104), output waveguide (105), substrate (107); It is characterized in that: said temperature compensation means (101) comprises temperature compensation rod (201) and first glass blocks (202) at its two ends, second glass blocks (203) is set; First glass blocks (202) and the same substrate of second glass blocks (203) (107) are fixing; Temperature compensation rod 201 middle parts are provided with the perforate (204) that a confession input media (106) runs through; Perforate (204) is separated into elastic region (213) and breathing zone (205) with temperature compensation rod (201); In breathing zone (205), be provided with spring region (207), spring region (207) keeps a side to fix with the breathing zone (205) that is mated, and opposite side is not fixed and fitted tightly.

2. a kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation as claimed in claim 1; It is characterized in that: said input media (106) is the grinding and polishing face with input plane waveguide (102) and first glass blocks (202), the same substrate of second glass blocks (203) (107) end face that contacts, and three surface of contact all keep same plane.

3. according to claim 1 or claim 2 a kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation; It is characterized in that: said spring region (207) is made up of one or more square groove (228) and the cushion block (208) that is complementary with it; Said square groove (228) is fixed with a side plane of cushion block (208) coupling, and the opposite side plane is not fixed and fitted tightly.

4. a kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation as claimed in claim 3 is characterized in that: the thermal expansivity of the synthermal compensation bar of thermal expansivity (201) of said cushion block (208) is identical or close.

5. according to claim 1 or claim 2 a kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation; It is characterized in that: said spring region (207) comprises one or more ladder blocks (701); (205) side planes of the breathing zone that said ladder block (701) is complementary with it are fixed, and the opposite side plane is not fixed and fitted tightly.

6. according to claim 1 or claim 2 a kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation; It is characterized in that: said elastic region (213) are staggered relatively a plurality of grooves (206) up and down, elastic region (213) along the rigidity k2 of temperature compensation rod length direction less than the breathing zone (205) of temperature compensation rod along temperature compensation rod length direction rigidity k1.

7. according to claim 1 or claim 2 a kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation, it is characterized in that: said input media (106) can be the fine glass capillary of magnetic tape trailer or the input waveguide of optical fiber contact pins or AWG waveguide.

8. a kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation as claimed in claim 7; It is characterized in that: said input media (106) with input plane waveguide (102) near and the distance remain the 8-15 micron, apart from being filled with the silicon gel in the gap.

9. a kind of temperature insensitive arrayed waveguide grating of realizing the bilinearity temperature compensation as claimed in claim 1 is characterized in that: said first glass blocks (202) and second glass blocks (203) can be high-boron-silicon glass.

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