CN102540350B - Temperature-insensitive arrayed waveguide grating for realizing double linear temperature compensation - Google Patents

Abstract

The invention discloses a temperature-insensitive arrayed waveguide grating for realizing double linear temperature compensation. The arrayed waveguide grating comprises a temperature compensation device (101), an input device (106), an input plane waveguide (102), an array grating (103), an output plane waveguide (104), an output waveguide (105) and a substrate (107), wherein the temperature compensation device (101) comprises a temperature compensation rod (201) and a first glass block (202) and a second glass block (203) which are arranged at two ends of the temperature compensation rod (201); the first glass block (202) and the second glass block (203) are fixed with the substrate (107); the middle part of the temperature compensation rod (201) is provided with an open pore (204) through which the input device (106) penetrates; the temperature compensation rod (201) is partitioned into an elastic area (213) and a telescopic area (205) by the open pore (204); a spring area (207) is arranged in the telescopic area (205); and one side of the spring area (207) is fixed with one side of the telescopic area (205) matched with the spring area (207), and the other side of the spring area (207) is not fixed but tightly jointed with the other side of the telescopic area (205). The arrayed waveguide grating can reduce the variable value of the wavelength together with the temperature.

Description

A kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation

Technical field

The present invention relates to a kind of temperature insensitive arrayed waveguide grating (temperature insensitive arrayed waveguide grating, Athermal Arrayed Waveguide Grating are called for short AAWG) of realizing bilinearity temperature compensation, belong to the communications field.

Background technology

AWG (Arrayed Waveguide Grating, array waveguide grating) be a kind of plane waveguiding device, it is the array waveguide grating that utilizes PLC (Planar Lightwave Circuit, planar lightwave circuit) technology to make in chip substrate.With FBG (Fiber Bragg Grating, Fiber Bragg Grating FBG) and TFF (Thin Film Filter, Thin Film Filter) compare, AWG has that integrated level is high, number of active lanes is many, insertion loss is little, is easy to the advantages such as batch automatic production.But, because traditional silica-based AWG chip is more responsive to temperature, General Central wavelength is 0.0118nm/ ℃ with the drift of temperature, therefore to traditional thermo-responsive AWG (Thermal AWG), need serviceability temperature controller and temperature-control circuit to carry out stable center output wavelength, the corresponding cost that increases AWG, size and limited its range of application.Thereby domestic and international many major companies have released AAWG product.

AAWG has opened up two new markets.One is can not power or be inconvenient to provide additional power supply to carry out temperature controlled time in frame, AAWG can replace the multiplexer/demultiplexer module of Thin Film Filter TFF for DWDM (Dense Wavelength Division Multiplexing, dense wave division multipurpose) system.Another richer potential market is emerging WDM-PON (Wavelength Division Multiplex_Passive Optical Network, wavelength-division multiplex-passive light networking) system, because WDM-PON system requirements ℃ can normally move in outdoor-30 in the temperature range of 70 ℃, and the temperature of TFF is floated greatly, system do not meet the application requirements of outdoor WDM-PON system, so may be used a large amount of AAWG to exceed 100,000,000 Fiber to the home business to provide.

Common AAWG adopts the technology of temperature compensation to keep the stable of wavelength, as connected input waveguide with metal temperature compensation bar, makes input waveguide move the drift of compensated wave personal attendant temperature under the driving of expanding with heat and contract with cold at temperature compensation rod.But all there are the following problems for existing various schemes at present: these compensation methodes are all that the temperature characterisitic of wavelength is carried out to linear compensation.But actual AWG wavelength-temperature curve is not linear, and therefore these compensation methodes can only keep the stability of wavelength in limited temperature range, for the application of larger range of temperature such as outdoor grade, are difficult to meet.

Displacement variation with temperature rate and the refractive index of input waveguide are linear to the derivative of temperature, and this conclusion represents referring to following formula.

The diffraction equation of AWG: dn _ssin θ _i+ dn _ssin θ _o+ n _cΔ L=m λ (1)

Wherein n _sand n _cbe respectively input plane waveguide, the output plane waveguide of AWG, be also the effective refractive index of Rowland circle and the effective refractive index of Waveguide array, d is the spacing of adjacent array waveguide on rowland circumference, θ _iand θ _obe the angle of diffraction of input and output slab guide, Δ L is the length difference of adjacent array waveguide.M is the order of diffraction time.λ is vacuum wavelength.

The centre wavelength of AWG meets: m λ=n _cΔ L (2)

(θ under holography condition _i< < 1, θ _o< < 1), formula (1) both sides differential obtains angular dispersion formula:

$\frac{\mathrm{d\&theta;}}{\mathrm{d\&lambda;}}=\frac{m}{n_{s}d}\frac{n_g}{n_c}---\left(3\right)$

Wherein θ is input angle of diffraction, n _ggroup index, and

$n_g=n_c-\mathrm{\&lambda;}\frac{d{n}_c}{\mathrm{d\&lambda;}}---\left(4\right)$

If Rowland circle focal length is R, by transverse shifting input waveguide, keep centre wavelength constant, the transversal displacement of input waveguide under holography

x＝Rθ(5)

Its displacement dispersion is: $\frac{\mathrm{dx}}{\mathrm{d\&lambda;}}=R\frac{m}{n_{s}d}\frac{n_g}{n_c}---\left(6\right)$

The differential formulas of displacement to temperature: $\frac{\mathrm{dx}}{\mathrm{dT}}=\frac{\mathrm{dx}}{\mathrm{d\&lambda;}}\frac{\mathrm{d\&lambda;}}{\mathrm{dT}}=R\frac{m}{n_{s}d}\frac{n_g}{n_c}\frac{\mathrm{d\&lambda;}}{\mathrm{dT}}=R\frac{\mathrm{\&Delta;L}}{n_{s}d}\frac{n_g}{n_c}\frac{d{n}_c}{\mathrm{dT}}---\left(7\right)$

Based on formula (7), existing linear compensation patent " optical couping device, publication number CN1375068A, an open day 2002-10-16 " has proposed a kind of linear temperature collocation structure that adopts Metallic rod to do, Figure 11 a has provided the principle schematic of this linear compensation structure, if effective compensation part 901 length of linear compensation structure are 1, rigidity is k1, linear expansion coefficient is α, the rigidity k2 of Hookean spring part 903, and k1 > > k2, if temperature variation is Δ t, input optical fibre contact pin 902 is Δ x along the displacement in input plane waveguide forward position, so obtain input optical fibre contact pin 902, along the displacement variation with temperature in input plane waveguide forward position, be:

$\frac{\mathrm{\&Delta;x}}{\mathrm{\&Delta;t}}=\frac{k_1}{k_1+k_2}\&times;l\&times;\mathrm{\&alpha;}---\left(8\right)$

But for the AWG chip of earth silicon material, its refractive index variation with temperature be not exclusively linear relationship, therefore more aforesaid linear compensation schemes can not full remuneration wavelength-temperature drift.When the wavelength-temperature curve of AWG chip is subject to accurate once linear compensation, curve becomes the parabola shaped of an opening upwards, as shown in Figure 10 symmetrical compensation curve 801, Ji You center increases progressively toward two ends, the AAWG of common linear compensation, in the situation that full symmetric compensates, wavelength varies with temperature 50pm left and right.When the wavelength-temperature curve of AWG chip is can not fine compensation time, be divided into two kinds of situations, as under-compensation curve 802 in Figure 10 and over-compensation curve 803, central task temperature spot is departed from para-curve summit, AAWG centre wavelength is in operating temperature range, and wavelength variations reaches and approaches 130pm.And,

be worth suitable time, AWG temperature characterisitic shows as linear symmetric compensation, and the wavelength variable quantity from normal temperature to high temperature and from normal temperature to low temperature is similar; When

be worth time bigger than normal, AWG temperature characterisitic shows as linear over-compensation, and the wavelength variations from normal temperature to high temperature is smaller, but the wavelength variations during from normal temperature to high temperature is larger; When

be worth time less than normal, AWG temperature characterisitic shows as linear under-compensation, and the wavelength variations from normal temperature to low temperature is smaller, but the wavelength variations during from normal temperature to high temperature is larger.

Summary of the invention

Object of the present invention overcomes the technological deficiency that prior art exists, and a kind of temperature insensitive arrayed waveguide grating that can realize bilinearity temperature compensation based on temperature compensation means is provided.

Principle and the implementation method of the related bilinearity temperature compensation structure of the array waveguide grating of bilinearity temperature compensation of the present invention are as follows:

As shown in Figure 11 b, in the effective compensation part of linear collocation structure, introduce bilinearity spring section 904, bilinearity spring section 904 is divided into two parts effective compensation part, length is L1 and L2, L1+L2=1, and bilinearity spring section 904 has following characteristics, if its rigidity is k3:

So obtain the temperature variant displacement of input waveguide, be:

$\frac{\mathrm{\&Delta;x}}{\mathrm{\&Delta;t}}=\left\{\begin{array}{cc}\frac{k_1}{k_1+k_2}\&times;l\&times;\mathrm{\&alpha;}& (t>0)---\left(10A\right)\\ \frac{k_1\&times;k}{(k_1+k_2)\&times;k+k_1\&times;k_2}\&times;l\&times;\mathrm{\&alpha;}& (\mathrm{\&Delta;t}<0)---\left(10B\right)\end{array}\right.$

Obviously $(\frac{k_1}{k_1+k_2}\&times;l\&times;\mathrm{\&alpha;})>(\frac{k_1\&times;k}{(k_1+k_2)\&times;k+k_1\&times;k_2}\&times;l\&times;\mathrm{\&alpha;})$

From (10A) (10B) formula can find out, in the effective compensation part of collocation structure, introduce after bilinearity spring section 904, it is bilinear that input waveguide varies with temperature Δ t along the displacement x in input plane waveguide forward position, thereby realized from normal temperature to high temperature, AWG is carried out to linear over-compensation, from normal temperature to low temperature, AWG is carried out to linear under-compensation.

The technical solution adopted in the present invention is:

A kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation, comprise temperature compensation means, input media, input plane waveguide, array grating, output plane waveguide, output waveguide, substrate, described temperature compensation means comprises temperature compensation rod and first glass blocks at its two ends is set, the second glass blocks, the first glass blocks and the second glass blocks are fixed with substrate, temperature compensation rod middle part is provided with a perforate running through for input media, perforate is separated into elastic region and breathing zone by temperature compensation rod, in breathing zone, be provided with spring region, spring region keeps a side to fix with the breathing zone being mated, opposite side is not fixed and is fitted tightly.

Described input media is grinding and polishing face with input plane waveguide and the first glass blocks, the second glass blocks with the substrate end face that contacts, and three surface of contact all keep same plane.

Described spring region is comprised of one or more square groove and the cushion block that matches with it, and the side plane that described square groove mates with cushion block is fixed, and opposite side plane is fixing and fit tightly.

The thermal expansivity of the synthermal compensation bar of thermal expansivity of described cushion block is identical or close.

Described spring region comprises one or more ladder blocks, and side plane of breathing zone that described ladder block matches with it is fixed, and opposite side plane is not fixed and fitted tightly.

Described elastic region is relatively staggered multiple grooves up and down, and elastic region is less than the breathing zone of temperature compensation rod along temperature compensation rod length direction rigidity k1 along the rigidity k2 of temperature compensation rod length direction.

Described input media can be glass capillary with tail optical fiber or the input waveguide of optical fiber contact pins or AWG waveguide.

Described input media with input plane waveguide near and distance remain 8-15 micron, apart from being filled with silicon gel in gap.

Described the first glass blocks and the second glass blocks can be high-boron-silicon glass.

Tool of the present invention has the following advantages:

1, the bilinearity temperature compensation means that the present invention adopts, whole operating temperature range can be divided into two sections, high temperature section and low-temperature zone, in high temperature section, collocation structure is realized over-compensation, and low-temperature zone realizes under-compensation, thereby realizes bilinearity compensation in whole temperature range, adopt the present invention can greatly reduce the wavelength value of varying with temperature, the wavelength variations of 50pm is dropped to 15pm left and right;

2, the present invention has that cost is low, the simple advantage of technique.

Accompanying drawing explanation

The Standard figure of Fig. 1, AAWG of the present invention;

The front view of Fig. 2, the first structure temperature compensation system of the present invention;

The schematic diagram deforming after Fig. 3, the first structure temperature compensation bar of the present invention cooling;

The front view of Fig. 4, the second structure temperature compensation system of the present invention;

The schematic diagram deforming after Fig. 5, the second structure temperature compensation system of the present invention cooling;

Front view before Fig. 6, the third structure temperature compensation system assembling of the present invention;

Schematic diagram after Fig. 7, the third structure temperature compensation system assembling of the present invention;

The schematic diagram deforming after Fig. 8, the third structure temperature compensation system cooling of the present invention;

Fig. 9, bilinearity temperature compensation rod displacement curve of the present invention;

Heatless AWG temperature characterisitic after Figure 10, compensation;

Figure 11 a, linear compensation structural principle schematic diagram;

Figure 11 b, bilinearity temperature compensation structure principle schematic.

Wherein:

101, temperature compensation means; 106, input media;

102, input plane waveguide; 103, array grating;

104, output plane waveguide; 105, output waveguide;

107, substrate; 201, temperature compensation rod;

202, the first glass blocks; 203, the second glass blocks;

213, elastic region; 205, breathing zone;

207, spring region; 208, cushion block;

204, perforate; 206, groove;

901, effective compensation part; 904, bilinearity spring section;

902, input waveguide;

801, the symmetrical compensation curve of prior art; 802, the under-compensation curve of prior art;

803, the over-compensation curve of prior art; 804, bilinearity compensated curve of the present invention;

701, ladder block; 228, square groove;

Each surface of contact that 209-216, square groove coordinate with cushion block, the first plane to the eight planes;

Each surface of contact that 220-227, the synthermal compensation bar of ladder block coordinate, the 9th plane to the 17 planes.

Embodiment

Below in conjunction with embodiment and accompanying drawing, the invention will be further described.

A kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation of the present invention is specifically referring to Fig. 1, comprise temperature compensation means 101, input media 106, substrate 107, AWG chip, output waveguide 105, wherein AWG chip comprises input plane waveguide 102, array grating 103, output plane waveguide 104.Input media 106, input plane waveguide 102, array grating 103, output plane waveguide 104, output waveguide 105 are arranged in order.Input plane waveguide 102, array grating 103, output plane waveguide 104, output waveguide 105 are adhesively fixed on substrate 107, and input media 106 is through temperature compensation means 101 near AWG chip one side plane, and temperature compensation means 101 is adhesively fixed with substrate 107.Input media 106 is mutually close with input plane waveguide 102, two plan ranges are controlled in 8-15 micrometer range, middle silicon gel of filling index matching, require silicon gel stable performance within the scope of total temperature, make input media 106 with temperature change non-resistance during along the translation of input plane Waveguide end face.

Temperature compensation means 101 structures are concrete as Fig. 2, include the temperature compensation rod 201 of higher thermal expansion coefficient, and be arranged at the first glass blocks 202, second glass blocks 203 at temperature compensation rod 201 two ends, temperature compensation rod 201 middle parts are penetrated with a perforate 204, and the size of this perforate 204 and position match with size and the position of input media 106.Perforate 204 is divided into two parts by temperature compensation rod 201, i.e. elastic region 213 and breathing zone 205; On the breathing zone 205 of temperature compensation rod 201, be provided with a spring region 207, this spring region 207 can be combined by square groove 228 and pad 208.Square groove 228 runs through breathing zone 205 along the direction of vertical open pores 204, but square groove 228 does not run through breathing zone 205 along parallel perforate 204 directions.228 li of square grooves are filled with the cushion block 208 that same square groove size matches, cushion block 208 adopts the identical material of synthermal compensation bar 201, because the width along temperature compensation rod length direction of square groove 228 is smaller, so cushion block 208 also can adopt other material identical or close with the thermal expansivity of temperature compensation rod 201.Two planes of square groove 228 both sides i.e. the first plane 209 are that the 3rd plane 211 fits tightly mutually with Siping City's face 212 with two of the both sides plane of cushion block 208 respectively with the second plane 210.The wherein a pair of side that cushion block 208 is fitted with square groove 228 is carried out bonding or is welded and fixed, a pair of side just fits tightly in addition, that is: can be by integral to the first plane 209 and the 3rd plane 211 fixed bondings, the second plane 210 and Siping City's face 212 fit tightly; Or by integral to the second plane 210 and Siping City's face 212 fixed bondings, the first plane 209 and the 3rd plane 211 fit tightly.Input media 106 is through temperature compensation rod perforate 204, input media 106 can be with the glass capillary with tail optical fiber as input end, also can be the independent special waveguide that meets AWG requirement of making, can be also optical fiber contact pins, or the input waveguide of AWG waveguide.Input media 106 can adopt optical fiber contact pins conventionally, thereby now optical fiber contact pins is by being fixed on temperature compensation means 101 with perforate 204 is bonding, and the first glass blocks 202 in temperature compensation means 101, the second glass blocks 203 are adhesively fixed with substrate 107.

As shown in Figure 2, on temperature compensation rod 201, the opposite side of perforate 204 is provided with elastic region 213, elastic region 213 adopts spring structure, as shown in Figure 2, the direction that 213 regions, the elastic region of temperature compensation rod is parallel to spring region 207 processes relatively staggered multiple groove 206 up and down, and the quantity of groove 206 is even number.It is in temperature changing process that elastic region 213 fundamental purposes are set, input media 106 is when moving along input plane Waveguide end face, only have one-dimensional square to displacement, be parallel to input plane waveguide 102 place planes, along input plane waveguide 102 end faces, move, avoid input media 106 to occur displacement and the shake of other both directions.There is certain inhibition elastic region 213 to expanding with heat and contract with cold of breathing zone 205, the breathing zone 205 of temperature compensation rod is k1 along the rigidity of temperature compensation rod length direction, elastic region 213 is k2 along the rigidity of temperature compensation rod length direction, being warming up to pyroprocess from normal temperature, the size of its inhibition is embodied in the factor in formula 10A

for reducing the inhibition of elastic region, require rigidity k2 much smaller than rigidity k1.As k1 and k2, and needed effect temperature compensation after determining, with reference to formula 10A, just obtain the length of the needed breathing zone 205 of temperature compensation, $l=\frac{\mathrm{\&Delta;x}}{\mathrm{\&Delta;t}}\&times;\frac{k_1+k_2}{k_1}\&times;\frac{1}{\mathrm{\&alpha;}}.$

On the breathing zone of temperature compensation rod, embedded spring region can be a square groove, can be also multiple square grooves.Figure 4 shows that the situation of the spring region of containing two square grooves, its manufacturing process is as follows: on temperature compensation rod breathing zone 205, open up and down measure-alike, relatively and to two square grooves, the opposite face of two square grooves is respectively the first plane 209, the second plane 210 and the 5th plane 213, the 6th plane 214, in two square grooves, embed respectively the measure-alike cushion block of size and square groove, the material of cushion block is identical with temperature compensation rod or be the material that thermal expansivity is identical or close with temperature compensation rod.The plane that cushion block matches with square groove is respectively the 3rd plane 211, Siping City's face 212 and the 7th plane 215, the 8th plane 216, the assembly relation of cushion block and square groove is as follows: the first plane 209 and the 3rd plane 211 are first group, the second plane 210 and Siping City's face 212 are second group, from first group and second group, select any one group of plane adhesion, other one group of plane fits tightly; The 5th plane 213 and the 7th plane 215 are the 3rd group, and the 6th plane 214 and the 8th plane 216 are the 4th group, select arbitrarily one group of plane adhesion to get up from the 3rd group and the 4th group, and other one group of plane fits tightly.These two groups of faces that fit tightly in the temperature-rise period from normal temperature to high temperature because thermal expansion extruding still fits tightly together, in the temperature-fall period from normal temperature to low temperature because certain distance is opened in shrinkage.As Fig. 5 illustrates the temperature compensation means of this structure deformation in the temperature-fall period from normal temperature to low temperature.

It is other version that the embedded spring region of breathing zone of temperature compensation rod also can adopt.As shown in Figure 6, in breathing zone, cut out a ladder block 701, this ladder block 701 cuts into three parts by breathing zone 205, synthermal compensation bar breathing zone 205 surface of contact of this ladder block 701 have four planes, i.e. the 11 plane the 222, the 12 plane the 223, the 13 plane 224, the tenth Siping City's face 225, the contact plane of the left and right sides breathing zone matching with it is respectively the 9th plane 220, the tenth plane the 221 and the 16 plane the 226, the 17 plane 227.In the following way the breathing zone of ladder block and the left and right sides is assembled up mutually: the tenth plane the 221 and the 12 plane 223 is bonding or weld, the 9th plane the 220 and the 11 plane 222 fits tightly, the 13 plane the 224 and the 16 plane 226 is bonding or weld, and the tenth Siping City's face the 225 and the 17 plane 227 fits tightly.Temperature compensation means after having assembled as shown in Figure 7.In the temperature-rise period from normal temperature to high temperature, the fitting surface of the breathing zone that ladder block mates with it is because thermal expansion still fits together closely; And cooling to chilling process from normal temperature, due to shrinkage effect, the synthermal compensation bar breathing zone of ladder block fits tightly and do not have face bonding or welding to be opened, thereby realize bilinearity temperature compensation.Fig. 8 has provided the deformation of temperature compensation means in the temperature-fall period from room temperature to low temperature.

In conjunction with Fig. 1 and Fig. 2, the present invention as being described it, example is realized the specific works process of bilinearity temperature compensation take the temperature insensitive arrayed waveguide grating of the spring region that comprises a square groove structure: bilinearity spring involved in the present invention is realized by introduce the structure that has bilinearity rigidity with temperature on temperature compensation rod.Input media 106 runs through temperature compensation means 101, and when ambient temperature changes, input media 106 can be along with expanding with heat and contract with cold of temperature compensation means 101 materials moved along the edge of input plane waveguide 102.Being warming up to from normal temperature the process of high temperature, cushion block 208 and temperature compensation rod breathing zone 205 all expand, now the second plane 209 and Siping City's face 211 of cushion block 208 closely cooperate, cushion block 208 is infinity with the rigidity of the bilinearity spring that square groove 228 forms, and input media 106 is along the displacement variation with temperature at the edge of input plane waveguide 102

as described in formula 10A, and

depend primarily on the length 1 of breathing zone 205, the length 1 of adjusting breathing zone 205 makes to be warming up to pyroprocess from normal temperature, the effect temperature compensation of temperature insensitive arrayed waveguide grating shows as linear over-compensation, input media 106 varies with temperature as the high-temperature part of the over-compensation curve in Fig. 9 along the displacement at the edge of input plane waveguide 102, from 25 ℃ to 85 ℃, AWG characteristic after compensation is as the high-temperature part of the bilinearity compensated curve 804 in Figure 10, from the curved portion of 25 ℃ to 85 ℃, in cooling during contraction, because the first plane 209 and 211, the 3rd plane of cushion block 208 fit tightly and be not integrated, in during contraction, between the first plane 209 and the 3rd plane 211, can be opened certain distance, the deformation of temperature compensation rod 201 after cooling as shown in Figure 3, the distance being opened has been offset a part and has been shunk the displacement of caused input media 106 along the edge of input plane waveguide 102 because of breathing zone 205, cushion block 208 is k with the rigidity of the spring region that square groove 228 forms, input media 106 varies with temperature along the displacement at the edge of input plane waveguide 102

as described in formula 10B, and rigidity k value is less, also less, by adjusting the suitable little rigidity k value of size Selection of square groove 228 and cushion block 208, make to cool to chilling process from normal temperature, the compensation effect of temperature insensitive arrayed waveguide grating shows as linear under-compensation, input media 106 varies with temperature if the under-compensation curve in Fig. 9 is from the low temperature part of 25 ℃ to-40 ℃ along the displacement at the edge of input plane waveguide 102, and the AWG characteristic after compensation is if the under-compensation curve 802 in Figure 10 is from the low-temp. portion component curve of 25 ℃ to-40 ℃.In sum, in temperature, from normal temperature, being warming up to high mild temperature is cooled to from normal temperature these two processes of low temperature, input media 106 shows as bilinearity along with expanding with heat and contract with cold of temperature compensation means 101 materials varies with temperature Δ t along the mobile Δ x at input plane waveguide 102 edges, and the bilinearity compensated curve in Fig. 9 has provided this displacement variation with temperature.The temperature characterisitic of corresponding AWG shows as over-compensation from normal temperature to high temperature, shows as under-compensation, from normal temperature to low temperature as shown in the bilinearity compensated curve in Figure 10.

In order further to understand patent of the present invention, below in conjunction with accompanying drawing, provide specific embodiment.Aluminium alloy 6061-T6 processes metal temperature compensation bar, and metal temperature compensation bar requires dimensional accuracy to want high, especially breathing zone length dimension, and this portion size directly affects effect temperature compensation; The breathing zone of metal temperature compensation bar leaves hole and has a groove in 2 millimeters of places apart, and groove width size can affect the difficulty of processing, and groove depth will directly affect the rigidity of breathing zone, thus the compensation effect while affecting low-temperature zone contraction.Cushion block can be selected glass at fluting thinner in the situation that, slots when thicker, selects the aluminium identical with temperature compensation rod.A side plane of side plane of cushion block and temperature compensation rod fluting is adhesively fixed by heat-curable glue, now notes keeping cushion block opposite side plane and a side plane of the fluting that mates with it fits tightly, and avoid this cushion block and fluting plane fixed bonding.Perforate in the middle of temperature compensation rod, will be fixed in hole with the glass capillary of tail optical fiber by heat-curable glue; Adopt the glue by soft, for example silicon rubber is fixed the first glass blocks, the second glass blocks and temperature compensation rod two ends.The first glass blocks and the second glass blocks can be selected high-boron-silicon glass.By glass capillary with the input plane waveguide in AWG chip, grinding and polishing is carried out in the side end face that the first glass blocks, the second glass blocks and substrate contact, guarantee that three side end faces that glass capillary contacts with substrate with AWG chip, the first glass blocks, the second glass blocks, in same plane, have now just completed the assembling preparation of temperature compensation means.

Although the present invention has at length illustrated and described relevant specific embodiment reference, those skilled in the art can should be appreciated that, can make in the form and details various changes not deviating from the spirit and scope of the present invention.These change all will fall into the desired protection domain of claim of the present invention.

Claims (8)

1. realize the temperature insensitive arrayed waveguide grating of bilinearity temperature compensation for one kind, comprise temperature compensation means (101), input media (106), input plane waveguide (102), array grating (103), output plane waveguide (104), output waveguide (105), substrate (107), it is characterized in that: described temperature compensation means (101) comprises temperature compensation rod (201) and is arranged at first glass blocks (202) at its two ends, the second glass blocks (203), the first glass blocks (202) and the same substrate of the second glass blocks (203) (107) are fixing, temperature compensation rod (201) middle part is provided with a perforate (204) running through for input media (106), perforate (204) is separated into elastic region (213) and breathing zone (205) by temperature compensation rod (201), in breathing zone (205), be provided with spring region (207), spring region (207) keeps a side to fix with the breathing zone (205) being mated, opposite side is not fixed and is fitted tightly, described input media (106) is grinding and polishing face with input plane waveguide (102) and the first glass blocks (202), the same substrate of the second glass blocks (203) (107) end face that contacts, and three surface of contact all keep same plane.

2. a kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation as claimed in claim 1, it is characterized in that: described spring region (207) are comprised of one or more square groove (228) and the cushion block (208) that matches with it, the side plane that described square groove (228) mates with cushion block (208) is fixed, and opposite side plane is not fixed and fitted tightly.

3. a kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation as claimed in claim 2, is characterized in that: the thermal expansivity of the synthermal compensation bar of thermal expansivity (201) of described cushion block (208) is identical or close.

4. a kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation as claimed in claim 1, it is characterized in that: described spring region (207) comprise one or more ladder blocks (701), (205) side planes of breathing zone that described ladder block (701) matches with it are fixed, and opposite side plane is not fixed and fitted tightly.

5. a kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation as claimed in claim 1, it is characterized in that: described elastic region (213) are relatively staggered multiple grooves (206) up and down, and elastic region (213) are less than the breathing zone (205) of temperature compensation rod along temperature compensation rod length direction rigidity k1 along the rigidity k2 of temperature compensation rod length direction.

6. a kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation as claimed in claim 1, is characterized in that: described input media (106) is glass capillary with tail optical fiber or the input waveguide of optical fiber contact pins or AWG waveguide.

7. a kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation as claimed in claim 6, it is characterized in that: described input media (106) with input plane waveguide (102) near and distance remain 8-15 micron, apart from being filled with silicon gel in gap.

8. a kind of temperature insensitive arrayed waveguide grating of realizing bilinearity temperature compensation as claimed in claim 1, is characterized in that: described the first glass blocks (202) and the second glass blocks (203) are high-boron-silicon glass.

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