CN109425929A - It is a kind of to realize non-heat array wave guide grating Wavelength stabilized in wide temperature range - Google Patents
It is a kind of to realize non-heat array wave guide grating Wavelength stabilized in wide temperature range Download PDFInfo
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12019—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the optical interconnection to or from the AWG devices, e.g. integration or coupling with lasers or photodiodes
- G02B6/12021—Comprising cascaded AWG devices; AWG multipass configuration; Plural AWG devices integrated on a single chip
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12026—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
- G02B6/12028—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence based on a combination of materials having a different refractive index temperature dependence, i.e. the materials are used for transmitting light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
- G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
- G02B6/12026—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
- G02B6/1203—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence using mounting means, e.g. by using a combination of materials having different thermal expansion coefficients
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Abstract
Non-heat array wave guide grating Wavelength stabilized in wide temperature range is realized the invention discloses a kind of, including array waveguide grid chip, array waveguide grid chip includes input waveguide, input plane waveguide, Waveguide array, output plane waveguide and output waveguide, array waveguide grid chip is divided into the first chip and the second chip by joint-cutting, and joint-cutting passes through input plane waveguide or output plane waveguide；The first drive rod and the second drive rod are equipped between first chip and the second chip, the first drive rod and the second drive rod both ends are all connected to the first chip and the second chip；Within the scope of set temperature, the first drive rod carries out linear undercompensation to array waveguide grid chip, and the second drive rod carries out linear overcompensation to array waveguide grid chip.First drive rod and the second drive rod carry out linear undercompensation and linear overcompensation to array waveguide grid chip respectively in the case where setting warm low temperature and the condition of high temperature, reach the lesser purpose of whole wavelength shift within the scope of set temperature.
Description
Technical field
The present invention relates to fields of communication technology, more specifically, it relates to Wavelength stabilized in a kind of realization wide temperature range
Non-heat array wave guide grating.
Background technique
Currently, Fibre Optical Communication Technology development is extremely rapid, wherein WDM(Wavelength Division
Multiplexing wavelength-division multiplex) system is the current most common photosphere group network system, it is realized by multiplexing with demultiplexing more
The transmission of road signal.Based on PLC(Planar Lightwave Circuit, planar lightwave circuit) AWG(Arrayed of technology
Wavelength Grating, array waveguide grating) it is a kind of important realization multiplexing demultiplexing device part in wdm system, it does
Method is that silica coating is deposited on Silicon Wafer, and photoetching process and reactive ion etch legal system is recycled to make AWG.Relative to
FBG(Fiber Bragg Grating, fiber bragg grating) and TFF(Thin Film Filter, Thin Film Filter), AWG
With integrated level height, wavelength channel number is more, channel spacing is small, without using optoisolator, is easy to batch automatic production etc.
Advantage.
Traditional silicon based silicon dioxide wave AWG chip, waveguide index is more sensitive for temperature, so as to cause working as
When operating ambient temperature changes, the central wavelength of AWG chip response spectrum can change therewith.As shown in Figure 1, relationship
Substantially in a linear relationship, the drift of center wavelength with temperature is about 11pm/ DEG C, narrower for the wavelength interval 100GHz or interval
For dwdm system, this AWG is not applicable.In order to which the central wavelength of AWG is fixed on target value, not by working environment temperature
The influence of degree, in the prior art, generally use following two mode: one is use heating sheet and temperature control circuit by chip temperature
It is fixed on a certain steady state value, is known as having hot AWG(Thermal AWG), but do so and can increase accordingly system power dissipation, and need pre-
Power supply interface and monitoring interface are stayed, the flexibility used is limited.Another kind is Heatless AWG, Heatless AWG without using heating sheet and
Temperature control circuit realizes AWG spectral centroid wavelength not with working environment temperature by itself special material structure or mechanical structure
The purpose of degree variation and variation.
Traditional non-heat array wave guide grating that temperature-compensating is realized by mechanical structure, as shown in Fig. 2, Waveguide array
130 grid chips 100 include input waveguide 110, input plane waveguide 120, Waveguide array 130, output plane waveguide 140 and defeated
Waveguide 150 out, 130 grid chip 100 of Waveguide array are divided into the first chip 101 and the second chip 102, and institute by joint-cutting 160
Joint-cutting 160 is stated across input plane waveguide 120, and connects the first chip 101 and the second chip 102 with metal compensation bar 220,
Under the driving that metal compensation bar 220 expands with heat and contract with cold, change the relative position of the first chip 101 and the second chip 102 to compensate wave
The drift of personal attendant's temperature.Since the thermal expansion of metal compensation bar is linear, so this packaging method is the temperature to wavelength
Characteristic carries out linear compensation, and the refractive index of silicon based silicon dioxide wave has varied with temperature higher order coefficient, as shown in figure 3, its
The actual relationship of wavelength with temperature variation is the parabola shaped of an opening upwards, in addition each output channel wavelength is different accordingly
Cause property, device has basically reached 80pm or more in -40 DEG C ~ 80 DEG C wavelength shifts, therefore this compensation method can only be limited
The stability of wavelength is kept in temperature range, the application of range of temperature larger for outdoor etc. is then difficult to meet.
Summary of the invention
It is steady in view of the deficiencies of the prior art, the present invention intends to provide wavelength in a kind of realization wide temperature range
Fixed non-heat array wave guide grating is enhanced within the scope of set temperature by the cooperation of the first drive rod and the second drive rod
The stability of the central wavelength of array waveguide grating spectrum.
To achieve the above object, the present invention provides the following technical scheme that
It is a kind of to realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, including array waveguide grid chip, it is described
Array waveguide grid chip includes input waveguide, input plane waveguide, Waveguide array, output plane waveguide and output waveguide, institute
It states array waveguide grid chip and the first chip and the second chip is divided by joint-cutting, and the joint-cutting passes through the input plane wave
It leads or output plane waveguide；
The first drive rod and the second drive rod, first drive rod and are provided between first chip and the second chip
The both ends of two drive rods are connected to first chip and the second chip；Within the scope of set temperature, described first is driven
Lever carries out linear undercompensation to the array waveguide grid chip, and second drive rod is to the array waveguide grid chip
Carry out linear overcompensation.
By using above-mentioned technical proposal, under the low-temperature condition of set temperature range, by the first drive rod driving first
Relative motion occurs for chip and the second chip, since the first drive rod carries out linear undercompensation, institute to array waveguide grid chip
With within this temperature range, wavelength shift is smaller；Under the condition of high temperature of set temperature range, by the second drive rod driving first
Relative motion occurs for chip and the second chip, since the second drive rod carries out linear overcompensation, institute to array waveguide grid chip
With within this temperature range, wavelength shift is smaller；The first drive rod and the second drive rod are integrated in the low temperature and height of set temperature
It is acted on respectively under temperature state, reaches the lesser purpose of whole wavelength shift within the scope of set temperature, enhance in set temperature
The stability of the central wavelength of array waveguide grating spectrum in range.
Further, the overall expansion amount of second drive rod is greater than the overall expansion amount of first drive rod, and described the
One drive rod one end is fixedly connected on the first chip, and perhaps the second chip other end is connected to the second chip or the first chip；
Second drive rod is fixedly connected on first chip and the second chip by elastomer block.
It is total swollen due to the second drive rod under the low-temperature condition of set temperature range by using above-mentioned technical proposal
Bulk is greater than the overall expansion amount of the first drive rod, similarly knows that the gross shrinkage of the second drive rod is greater than total receipts of the first drive rod
Contracting amount, at this point, the abutment end of the first drive rod is still abutted with the first chip or the second chip, elastomer block elongation, the first core
The relative shift of piece and the second chip is the shrinkage of the first drive rod, i.e., by the first drive rod to array waveguide grating core
Piece carries out linear undercompensation, so that wavelength shift is smaller under the low-temperature condition of set temperature range;
Under the condition of high temperature of set temperature range, since the overall expansion amount of the second drive rod is greater than the overall expansion of the first drive rod
Amount, at this point, the abutment end of the first drive rod is separated with the first chip or the second chip, deformation occurs for elastomer block, the first core
The relative shift of piece and the second chip is the swell increment of the second drive rod, i.e., by the second drive rod to array waveguide grating core
Piece carries out linear overcompensation, so that wavelength shift is smaller under the condition of high temperature of set temperature range；
I.e. under the low temperature of set temperature range and the condition of high temperature, by the first drive rod and the second drive rod respectively to Waveguide array
Grid chip carries out temperature-compensating, so that whole wavelength shift is smaller.
Further, the first drive rod end positions are provided with the first fixed block, the first fixed block difference
It is fixedly connected with the first chip and the second chip；First drive rod is fixedly connected with one of them first fixed block, and with
The contact of another first fixed block.
By using above-mentioned technical proposal, it is solid that the connection of the first drive rod and the first chip, the second chip passes through first
Determine block, can avoid the expansion of the first drive rod or directly act on power on the first chip and the second chip when shrinking, plays guarantor
Protect the effect of chip.
Further, the second fixed block, the elasticity are fixedly connected on first chip and second chip
One end of block and one end of second drive rod are fixedly connected with two the second fixed blocks respectively, the other end of the elastomer block
It is fixedly connected with the other end of second drive rod.
By using above-mentioned technical proposal, it is solid that the connection of the second drive rod and the first chip, the second chip passes through second
Determine block, can avoid the expansion of the second drive rod or directly act on power on the first chip and the second chip when shrinking, plays guarantor
Protect the effect of chip.
Further, the elastomer block includes block compatible with second drive rod, and is provided with described piece
Body is located at the slot that is not penetrated on the side of the second drive rod length direction, the block and second drive rod one at
Type setting.
By using above-mentioned technical proposal, in block side, setting is not penetrated slot, so that entire block forms and is similar to bullet
The structure of spring has relatively stable elastic deformation power and elastic restoring force, and block and the second drive rod are integrally formed and are arranged,
Components can be reduced, structure is simplified.
Further, the elastomer block includes block compatible with second drive rod, and is provided with described piece
Body is located at the slot that is not penetrated on the side of the second drive rod length direction, and the block is seperated with second drive rod to be set
It sets, and is fixedly connected with second drive rod.
By using above-mentioned technical proposal, in block side, setting is not penetrated slot, so that entire block forms and is similar to bullet
The structure of spring has relatively stable elastic deformation power and elastic restoring force, block and the second drive rod split settings, may be selected
Block of different shapes, applicability are higher.
Further, first drive rod and the coefficient of expansion of the second driving bar material are greater than the array waveguide grating
The chip material coefficient of expansion, first drive rod and second drive rod use same material, and second drive rod
Length be greater than first drive rod length, it is equal with the vertical cross-sectional area of length direction.
By using above-mentioned technical proposal, the first drive rod and the second drive rod are expanded or are received within the scope of set temperature
The distance of contracting and array waveguide grid chip itself expansion perhaps shrink distance between have deviation so that the first drive rod or
Second drive rod is able to drive between the first chip and the second chip and relatively moves, so that temperature-compensating is realized, so that battle array
The central wavelength of train wave leaded light grating spectrum is relatively stable.
When the first drive rod and the second drive rod use same material, the expansion system of the first drive rod and the second drive rod
Number is equal, but when the bottoms such as the two are different high, the swell increment of the two is different, and the swell increment of the second drive rod is greater than the first driving
The swell increment of bar, to reach within the scope of set temperature, the first drive rod and the second drive rod cooperate stable Waveguide array light
The central wavelength of grating spectrum.
Further, first drive rod and the coefficient of expansion of the second driving bar material are greater than the array waveguide grating
The chip material coefficient of expansion, first drive rod is identical as the second drive rod geomery, and first drive rod
The coefficient of expansion that second drive rod uses material is less than using the coefficient of expansion of material.
By using above-mentioned technical proposal, the first drive rod and the second drive rod are expanded or are received within the scope of set temperature
The distance of contracting and array waveguide grid chip itself expansion perhaps shrink distance between have deviation so that the first drive rod or
Second drive rod is able to drive between the first chip and the second chip and relatively moves, so that temperature-compensating is realized, so that battle array
The central wavelength of train wave leaded light grating spectrum is relatively stable.
When the first drive rod and the second drive rod use different materials, and the first drive rod geomery it is identical when, the
The swell increment of two drive rods is greater than the swell increment of the first drive rod, to reach within the scope of set temperature, the first drive rod and
Second drive rod cooperates the central wavelength for stablizing array waveguide grating spectrum.
Further, the match materials at the joint-cutting filled with refractive index and input plane waveguide or output plane waveguide
Packing material.
By using above-mentioned technical proposal, air is generally had at joint-cutting, when signal light is traveled at joint-cutting, is be easy to cause
The filling material of the match materials of refractive index and input plane waveguide or output plane waveguide is filled in the loss of optical power at joint-cutting
Material can reduce the loss of optical power, avoid distorted signals.
Further, the material of first fixed block and second fixed block and the array waveguide grid chip
Material is consistent.
By using above-mentioned technical proposal, the first fixed block and the second fixed block can be reduced to the first chip and the second chip
Stress, improve structure entirety stability.
Compared with prior art, the invention has the advantages that
1, comprehensive first drive rod and the second drive rod under the low temperature of set temperature and the condition of high temperature respectively to the first chip and
The effect of second chip, reaches in the low-temperature zone of set temperature range, is realized using the first drive rod to array waveguide grating core
Piece carries out linear undercompensation, in high temperature section, is realized using the second drive rod and carries out linear overfill to array waveguide grid chip
It repays, to enhance the stability of the central wavelength of array waveguide grating spectrum within the scope of set temperature, expands array wave
The operating temperature range of guide grating；
2, using the mutual cooperation of the first drive rod and the second drive rod, structure is simple, and requirement on machining accuracy is relatively low, is making
It makes easier when the array waveguide grating, production efficiency can be improved；Assembly technology repeatability is high simultaneously, high yield rate；
3, the first chip and the second chip are stable on same bottom plate, avoid the first chip and the second chip the bottom of perpendicular to
On direction relative displacement occurs for plate, reduces the risk of Dissipation change.
Detailed description of the invention
Fig. 1 is not do the array waveguide grating device central wavelength of temperature-compensating with the change curve of environment temperature；
Fig. 2 is the non-heat array wave guide grating structural schematic diagram of conventional linear temperature-compensating；
Fig. 3 is not do the array waveguide grating device central wavelength of temperature-compensating with the change curve of environment temperature；
Fig. 4 is the non-heat array wave guide grating structural schematic diagram of the embodiment of the present invention；
Fig. 5 is the structural schematic diagram (one) of elastic force block of the present invention and the second drive rod；
Fig. 6 is the structural schematic diagram (two) of elastic force block of the present invention and the second drive rod；
Fig. 7 is the structural schematic diagram (three) of elastic force block of the present invention and the second drive rod；
Fig. 8 is the structural schematic diagram (four) of elastic force block of the present invention and the second drive rod；
Fig. 9 is the non-heat array wave guide grating partial schematic diagram that deformation occurs after cooling of the embodiment of the present invention；
Figure 10 is the non-heat array wave guide grating partial schematic diagram that deformation occurs after heating of the embodiment of the present invention；
Figure 11 is change curve of the array waveguide grating device central wavelength of the present invention with environment temperature.
Appended drawing reference: 100, array waveguide grid chip；101, the first chip；102, the second chip；110, input waveguide；
120, input plane waveguide；130, Waveguide array；140, output plane waveguide；150, output waveguide；160, joint-cutting；170, first
Drive rod；180, the second drive rod；190, elastomer block；191, block；192, it is not penetrated slot；200, the first fixed block；210,
Two fixed blocks；220, metal compensates bar.
Specific embodiment
With reference to the accompanying drawings and examples, the present invention will be described in detail.
It is a kind of to realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, referring to Fig. 4, including Waveguide array light
Grid chip 100, array waveguide grid chip 100 include input waveguide 110, input plane waveguide 120, Waveguide array 130, output
Slab guide 140 and output waveguide 150, array waveguide grid chip 100 are divided into the first chip 101 and second by joint-cutting 160
Chip 102, and joint-cutting 160 passes through input plane waveguide 120 or output plane waveguide 140.First chip 101 and the second chip
The first drive rod 170 and the second drive rod 180, the both ends of the first drive rod 170 and the second drive rod 180 are provided between 102
It is connected to the first chip 101 and the second chip 102；Within the scope of set temperature, the first drive rod 170 is to Waveguide array
Grid chip 100 carries out linear undercompensation, and the second drive rod 180 carries out linear overcompensation to array waveguide grid chip 100.This
In embodiment, by taking joint-cutting 160 passes through input plane waveguide 120 as an example, which is parallel to the connection of input plane waveguide 120
One side of input waveguide 110 includes input waveguide 110 and part input plane waveguide 120 on first chip 101, this
The setting in a rectangular trapezoid of one chip 101.
The material that array waveguide grid chip 100 uses can be silicon based silicon dioxide, according to the array waveguide grating core
The material property and structure of piece 100, joint-cutting 160 can be by a variety of implementations, such as resin blade cutting, diamond blade cutting
Or laser cutting etc..In order to ensure cutting after array waveguide grid chip 100 every optical index, the basis in cutting process
State of arts avoids or reduces the material loss of waveguide on array waveguide grid chip 100 as far as possible, and cutting end face should be located as far as possible
It manages smooth, reduces the optical power loss generated by end face.
Since input plane waveguide 120 is cut off at joint-cutting 160, optical signal is inputted from input waveguide 110, using first
Input plane waveguide 120 on chip 101, after by the air at joint-cutting 160, it is flat to enter back into input on the second chip 102
Surface wave leads 120.In this process, the loss by easily causing optical power when air of optical signal.To avoid distorted signals,
Two partial distances of the input plane waveguide 120 at 160 both ends of joint-cutting are less than or equal to 40 microns, especially 25 micron, at this time
Optical power loss it is minimum.In addition, in order to eliminate the variations in refractive index of air borne section Yu input plane waveguide 120, joint-cutting 160
The fillable refractive index optical material consistent with input plane waveguide 120, such as silica colloidal do not hinder the first chip
101 and second chip 102 relative movement.
First drive rod 170 and the second drive rod 180 are parallel with the joint-cutting 160 Jing Guo input plane waveguide 120, so that
First chip 101 and the second chip 102 can moved along the length direction of the first drive rod 170 and the second drive rod 180,
Spacing between first chip 101 and the second chip 102 is not easy the movement with the first drive rod 170 or the second drive rod 180
And change, reduce the loss of signal.
In addition, the overall expansion amount of the second drive rod 180 is greater than the overall expansion amount of the first drive rod 170, the first drive rod 170
One end is fixedly connected on the first chip 101, and perhaps 102 other end of the second chip is connected to the second chip 102 or the first chip
101；Second drive rod 180 is fixedly connected on the first chip 101 and the second chip 102 by elastomer block 190.And in order to avoid
The expansion of one drive rod 170 is shunk directly to the first chip 101 or the second chip 102 generation active force, in the first driving
170 end positions of bar are provided with the first fixed block 200, the first fixed block 200 respectively with the first chip 101 and the second chip
102 are fixedly connected；First drive rod 170 is fixedly connected with one of them first fixed block 200, and with another the first fixed block
200 contact, and in the present embodiment, one end of the first drive rod 170 and the first fixed block 200 being located in the second chip 102 are fixed
Connection is contacted with the first fixed block 200 being located in the first chip 101, at room temperature (or the centre of entire set temperature range
Value) in the state being exactly in contact with, do not generate mutual stress.
Likewise, being fixedly connected to the second fixed block 210, elastomer block 190 on the first chip 101 and the second chip 102
One end and one end of the second drive rod 180 be fixedly connected respectively with two the second fixed blocks 210, the other end of elastomer block 190
It is fixedly connected with the other end of the second drive rod 180.Elastomer block 190 may include block compatible with the second drive rod 180
191, and be provided with block 191 and be located on the side of 180 length direction of the second drive rod and be not penetrated slot 192, block 191 with
Second drive rod 180 is integrally formed setting.As shown in figure 5, block 191 and being not penetrated the whole W-shaped setting of slot 192；Or such as
Shown in Fig. 6, block 191 and it is not penetrated the overall U-shaped setting of slot 192.Elastomer block 190 also may include and the second drive rod 180
Compatible block 191, and be provided with block 191 and be located on the side of 180 length direction of the second drive rod and be not penetrated slot
192,180 split settings of block 191 and the second drive rod, and be fixedly connected with the second drive rod 180.As shown in fig. 7, block
191 and it is not penetrated the whole W-shaped setting of slot 192；Or as shown in figure 8, block 191 and it is not penetrated that slot 192 is overall U-shaped to be set
It sets.
It should be noted that the material of the first fixed block 200 and the second fixed block 210 and array waveguide grid chip 100
Material it is consistent, can reduce stress, improve the stability of structure entirety.
The material and size of first drive rod 170 and the second drive rod 180 should be selected suitably, so that total is being set
In temperature range, array waveguide grid chip 100 is put down because of the optical wavelength offset that temperature change is brought with the input of 160 two sides of joint-cutting
Surface wave is led the variation bring wavelength shift of 120 relative positions and is offseted, thus stable optical characteristic.In one embodiment, first
The coefficient of expansion of 180 material of drive rod 170 and the second drive rod is greater than the 100 material coefficient of expansion of array waveguide grid chip, the
One drive rod 170 and the second drive rod 180 use same material, and the length of the second drive rod 180 is greater than the first drive rod 170
Length, it is equal with the vertical cross-sectional area of length direction.In another embodiment, the first drive rod 170 and the second drive rod
The coefficient of expansion of 180 materials is greater than the 100 material coefficient of expansion of array waveguide grid chip, the first drive rod 170 and the second driving
180 geomery of bar is identical, and the first drive rod 170 uses material less than the second drive rod 180 using the coefficient of expansion of material
The coefficient of expansion.In same range of temperature, the swell increment or contraction of the second drive rod 180 of above two mode
Amount is all larger than the swell increment or shrinkage of the first drive rod 170.Preferably, the first drive rod 170 and the second drive rod 180 can
Using aluminium alloy, copper, stainless steel etc..
It is fixedly connected with mode described in the present embodiment and is all made of bonding.
Specific working mode of the invention is as follows:
Under the low-temperature condition of set temperature range, the first drive rod 170 and the second drive rod 180 are contracted on cooling, work feelings
Condition is as shown in Figure 9.Since the contracted length of the second drive rod 180 is greater than the contracted length of the first drive rod 170, first drive at this time
Corresponding the first fixed block 200 in one end that lever 170 is located at the first chip 101 contacts and generates interaction, withstands the
One chip 101 prevents it from moving, at this point, the elastomer block 190 of the second drive rod 180 connection is elongated by stress.Therefore first
Chip 101 and the distance of the second chip 102 relative movement are equivalent to the contracted length of the first drive rod 170.Due to the first driving
Bar 170 carries out linear undercompensation to array waveguide grid chip 100, in the optics occurred within the scope of entire low-temperature working at this time
The long curve of deviation of cardiac wave is that the left side Figure 11 is half side.
Under the condition of high temperature of set temperature range, 180 expanded by heating of the first drive rod 170 and the second drive rod, work
It is as shown in Figure 10 to make situation.Since the expansion length of the second drive rod 180 is greater than the expansion length of the first drive rod 170, therefore the
One chip 101 and 102 relative movement distance of the second chip are equivalent to the expansion length of the second drive rod 180, the first drive rod 170
First fixed block 200 separation corresponding positioned at one end of the first chip 101.Since the second drive rod 180 is to Waveguide array
Grid chip 100 carries out linear overcompensation, the optical centre wavelength shift curve occurred within the scope of entire hot operation at this time
It is half side for the right side Figure 11.
To sum up, the stability of the central wavelength of array waveguide grating spectrum within the scope of set temperature is enhanced, is expanded
The operating temperature range of array waveguide grating, device are approximately less than 30pm in -40 DEG C ~ 80 DEG C wavelength shifts.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
Those of ordinary skill for, several improvements and modifications without departing from the principles of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, including array waveguide grid chip
(100), the array waveguide grid chip (100) includes input waveguide (110), input plane waveguide (120), Waveguide array
(130), output plane waveguide (140) and output waveguide (150), which is characterized in that array waveguide grid chip (100) quilt
Joint-cutting (160) is divided into the first chip (101) and the second chip (102), and the joint-cutting (160) passes through the input plane wave
Lead (120) or output plane waveguide (140)；
The first drive rod (170) and the second drive rod are provided between first chip (101) and the second chip (102)
(180), the both ends of first drive rod (170) and the second drive rod (180) are connected to first chip (101)
With the second chip (102)；Within the scope of set temperature, first drive rod (170) is to the array waveguide grid chip
(100) linear undercompensation is carried out, second drive rod (180) carries out linear mistake to the array waveguide grid chip (100)
Compensation.
2. according to claim 1 realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, feature exists
In the overall expansion amount of second drive rod (180) is greater than the overall expansion amount of first drive rod (170), and described first drives
Lever (170) one end is fixedly connected on the first chip (101) or the second chip (102), the other end are connected to the second chip
(102) or the first chip (101)；Second drive rod (180) is fixedly connected on first core by elastomer block (190)
Piece (101) and the second chip (102).
3. according to claim 2 realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, feature exists
In the first drive rod (170) end positions are provided with the first fixed block (200), and first fixed block (200) is respectively
It is fixedly connected with the first chip (101) and the second chip (102)；First drive rod (170) and one of them first fixation
Block (200) is fixedly connected, and is contacted with another first fixed block (200).
4. according to claim 3 realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, feature exists
In being fixedly connected to the second fixed block (210), the elasticity on first chip (101) and second chip (102)
One end of block (190) and one end of second drive rod (180) are fixedly connected with two the second fixed blocks (210) respectively, institute
The other end for stating elastomer block (190) is fixedly connected with the other end of second drive rod (180).
5. according to claim 4 realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, feature exists
In the elastomer block (190) includes compatible block (191) with second drive rod (180), and is provided with described piece
Body (191) is located at being not penetrated slot (192) on the side of the second drive rod (180) length direction, the block (191) with
Second drive rod (180) is integrally formed setting.
6. according to claim 4 realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, feature exists
In the elastomer block (190) includes compatible block (191) with second drive rod (180), and is provided with described piece
Body (191) is located at being not penetrated slot (192) on the side of the second drive rod (180) length direction, the block (191) with
Second drive rod (180) split settings, and be fixedly connected with second drive rod (180).
7. according to claim 5 or 6 realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, feature
It is, the coefficient of expansion of first drive rod (170) and the second drive rod (180) material is greater than the array waveguide grating core
Piece (100) material coefficient of expansion, first drive rod (170) and second drive rod (180) use same material, and institute
The length for stating the second drive rod (180) is greater than the length of first drive rod (170), the cross-sectional area vertical with length direction
It is equal.
8. according to claim 5 or 6 realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, feature
It is, the coefficient of expansion of first drive rod (170) and the second drive rod (180) material is greater than the array waveguide grating core
Piece (100) material coefficient of expansion, first drive rod (170) is identical as the second drive rod (180) geomery, and institute
It states the first drive rod (170) and the coefficient of expansion that second drive rod (180) uses material is less than using the coefficient of expansion of material.
9. according to claim 1 realize non-heat array wave guide grating Wavelength stabilized in wide temperature range, feature exists
In web shaped material at the joint-cutting (160) filled with refractive index and input plane waveguide (120) or output plane waveguide (140)
The packing material matched.
10. Wavelength stabilized non-heat array wave guide grating in the realization wide temperature range according to claim 4 or 5 or 6,
It is characterized in that, the material and the array waveguide grid chip of first fixed block (200) and second fixed block (210)
(100) material is consistent.
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| CN110320595A (en) * | 2019-05-29 | 2019-10-11 | 武汉光迅科技股份有限公司 | Compensation device, array waveguide grid chip and compensation method |
| WO2021036010A1 (en) * | 2019-08-29 | 2021-03-04 | 苏州易锐光电科技有限公司 | Wavelength controllable arrayed waveguide grating |
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