CN101162283A - Method for manufacturing afebrile array wave-guide grating based on flat-plate wave-guide movement and delicate adjustment device - Google Patents
Method for manufacturing afebrile array wave-guide grating based on flat-plate wave-guide movement and delicate adjustment device Download PDFInfo
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- CN101162283A CN101162283A CNA2007101503830A CN200710150383A CN101162283A CN 101162283 A CN101162283 A CN 101162283A CN A2007101503830 A CNA2007101503830 A CN A2007101503830A CN 200710150383 A CN200710150383 A CN 200710150383A CN 101162283 A CN101162283 A CN 101162283A
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Abstract
The invention discloses a manufacturing method and a fine-adjustment device for apyrexia arrayed waveguide grating based on planar waveguide moving. The method is that: a AWG chip is reliably coupled with an input fiber array and an output fiber array; the AWG chip is cut into a movable part and a fixed part along a cutting line; and then the fixed part is stuck on a base board; the movable part is arranged on the base board; the cut faces of the two parts are tightly coupled; one side edge of a temperature compensating lever is tightly stuck to the movable part along the connection line of the two parts of the AWG chip; the fine-adjustment device is used to adjust the position of the temperature compensating lever so that the length of the output wave of the apyrexia arrayed waveguide grating satisfies the stipulation of ITU-T; and after the spectrum of the apyrexia arrayed waveguide grating has the same spectrum with the AWG, the other side edge of the temperature compensating lever is fixedly stuck to the fixed part. The fine-adjustment device of the invention is of a structure that the base board is fixedly stuck the AWG chip and the fine-adjustment device can adjust the position of the temperature compensating lever on the base. The invention is of easy operation, and greatly simplifies the technique of manufacturing apyrexia arrayed waveguide grating.
Description
Technical field
The present invention relates to a kind of method of manufacturing apyrexia arrayed waveguide grating.Particularly relating to a kind of a, b two parts of the drive AWG chip that expands with heat and contract with cold of temperature compensation rod of utilizing produces and relatively moves, thereby the wave length shift that compensation is caused by temperature, that comes manufacturing apyrexia arrayed waveguide grating moves manufacturing apyrexia arrayed waveguide grating method and adjuster based on planar waveguide.
Background technology
Continue to bring out under the stimulation of the enormous bandwidth demand that is caused jet-propelled growth of the data business volume that with IP is representative with novel business, fully excavating the optical communication technique potentiality, spare no effort to utilize in the process of the enormous bandwidth that optical fiber gives, exclusive advantage reveals wavelength-division multiplex (WDM) technology gradually so that dilatation is simple, with low cost etc.Multiplexer and demodulation multiplexer are the Primary Components in dense wave division multipurpose (DWDM) system, and the device that can finish this function at present mainly contains array waveguide grating (AWG), dielectric multi-layer optical thin film optical filter and fiber grating.On existing market and technology, dielectric multi-layer optical thin film optical filter and AWG account for absolute leading position.Adopt the multiplexing demultiplexing device of multilayered medium membrane technology can satisfy the requirement of system, reasonable performance is particularly arranged in the system that is less than 32 ripples at aspects such as channel width, isolation, polarization sensitivity and insertion losses.But in the many especially systems of the number of channel, cost is higher, and performance can not satisfy user's requirement fully.Development along with array waveguide grating (AWG) Wavelength division multiplexer/demultiplexer and Interleaver device, utilize AWG can realize the multiplex/demultiplex function that 40 ripples are above more easily, the device of performance such as dielectric loss, isolation and multilayer dielectric film is compared also the same substantially, compare also with the multilayered medium membrane module of same wave long-channel number on the cost and have superiority, and use more flexible.Based on the AWG wavelength division multiplexer of silicon based silicon dioxide slab guide technology have that volume is little, loss is low and integrated level than higher characteristics, have bigger advantage so be applied on the high number of vias close wavelength-division multiplex technology.Array waveguide grating is the Primary Component of the dense wave division multipurpose network that developing rapidly, and AWG is having the gesture that replaces Thin Film Filter and monopolizing whole multiplexing demultiplexing device market in the future greatly.
But because common AWG utilizes the silicon based silicon dioxide fabrication techniques, the refractive index of silicon dioxide changes with variation of temperature, and the size of waveguide also can change with variation of temperature, thereby causes the wavelength of each passage of AWG to change with temperature.Generally, the temperature variation of the centre wavelength of such device is 0.011nm/ ℃, but the wavelength strict conformance of the wavelength of each output channel light signal of communication system requirement AWG and the Bureau of Standards of international telecommunication union telecommunication (ITU-T) regulation.In order to solve the temperature sensitivity of AWG device, generally adopt well heater or Pilter refrigeratory to carry out temperature control in the market, adopt temperature control circuit to make AWG be under the isoperibol, centre wavelength just can not drifted about like this.But it can have harmful effect, increase the complicacy and the operation cost of device and system to the stability of AWG itself.Therefore solve the temperature sensitivity problem of AWG, omit temperature control circuit, it is imperative to eliminate additional expense.In addition, existing market increases rapidly especially to the demand of temperature-insensitive AWG (below be referred to as Heatless AWG), main two reasons in addition: the one, the fast development of WDM EPON (WDM-PON), the multiplexing demultiplexing device that uses in WDM-PON is not make electric power, use the AWG of electric current, band temperature control circuit not meet the demands like this, thus can only the insensitive AWG of serviceability temperature; Second reason is that Reconfigurable Optical Add/drop Multiplexer (ROADM) and variable optical attenuation multiplexer (VMUX) have obtained being extensive use of in Metropolitan Area Network (MAN), in these two devices, use need not auxiliary circuit Heatless AWG can solve key issues such as heat and electric power consumption at an easy rate.And Heatless AWG is smaller on package dimension, and these have all given system development with bigger design freedom.All these demonstrate the design Heatless AWG and have unusual important meaning.For this reason, people have proposed the scheme of many realization Heatless AWGs, according to its feature branch, can reduce waveguide mobile model, waveguide embedding filling material type, not have hot waveguide type, piezooptical effect type.
Waveguide mobile model scheme specifically comprises mobile input waveguide, output waveguide, input planar waveguide and output planar waveguide, relative position between two parts of incision is changed, and the change of this position just can compensate common AWG centre wavelength with variation of temperature.Following patent Patent No.:US 6470119 B1, Patent No.:US6798948 B2, Patent No.:US 6865323 B2, Patent No.:US 6961498 B2, Patent No.:US 6563986 B2, Patent No.:US 6735364 B2, Patent No.:US 8626332 B2, Patent No.:US 6954566 B2, Patent No.:US 6975793 B2, Patent No.:US 6668116 B2, Patent No.:US 6668117 B2, Patent No.:US 6490395 B1, WO 2006/073229 A1, CN1302131A, the non-heat array wave guide grating scheme of CN1392961A for moving based on planar waveguide.
The prior art that moves based on planar waveguide as shown in Figure 1, 2, its scheme specifically is summarized as follows: 1) part a that relatively moves in the existing scheme and part b adopt earlier to fix, Qie Ge method again, but microtome is when cutting the AWG chip, the main shaft of microtome is with the speed high speed rotating of 3000rpm, blade has very big oscillatory forces, and this just requires fixing means very firm.Yet when subsequent adjustment ITU-T wavelength, stationary installation will unclamp or remove fully, will make the position of part a and part b produce mobile in this process.2) adjusting of ITU-T wavelength all realizes by adjustment or plastic deformation, and wavelength regulation precision and repeatability are not fine like this; 3) adhesive glue is directly to be coated between two surface in contacts, therefore between part a and the part b difference in height is arranged, in order to remedy this difference in height, between a part and substrate, scribble flexible glue, height between a, b two parts is difficult to accurately guarantee, simultaneously waveguide dimensions has only 5,6 microns, that I guess the difference in height of micron dimension will cause the very big deterioration of Insertion Loss and spectral characteristic; 4) as shown in Figure 2, prior art exists the two ends of wavelength compensation bar to be positioned at the upper surface of AWG chip, but the compensation bar two ends are come bonding by scolder, scolding tin, the welding position will be by technological processs such as photoetching, corrosion, and scolder and scolding tin will pass through the high temperature melting of several Baidu, so the technological process more complicated.
Summary of the invention
Technical matters to be solved by this invention is, provide a kind of a that utilizes expanding with heat and contract with cold of temperature compensation rod to drive the AWG chip, b two parts to produce and relatively move, thereby the wave length shift that compensation is caused by temperature, that comes manufacturing apyrexia arrayed waveguide grating moves manufacturing apyrexia arrayed waveguide grating method and adjuster based on planar waveguide.
The technical solution adopted in the present invention is: a kind ofly move manufacturing apyrexia arrayed waveguide grating method and adjuster based on planar waveguide.Wherein, the method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating includes following steps:
1) on array waveguide grid chip with input and output planar waveguide, to import, the output optical fibre array aims at array waveguide grid chip, and array waveguide grid chip and input optical fibre array, output optical fibre array can reliablely and stablely be coupled and aligned;
2) along line of cut array waveguide grid chip is cut into moveable part and fixed part;
3) fixed part with array waveguide grid chip is bonded in above the substrate with groove;
4) be placed on the moveable part of array waveguide grid chip on the substrate and be positioned at a side of the fixed part of AWG chip, make moveable part corresponding with the cut surface of fixed part, promote the moveable part of AWG chip then to the fixed part of AWG chip, and make the moveable part of AWG chip, the cut surface close-coupled of fixed part;
5) along temperature compensation rod and with a side of temperature compensation rod and moveable part fixed bonding together is set on the connecting line of the moveable part of array waveguide grid chip and fixed part;
6) utilize adjuster that the position of temperature compensation rod is adjusted, make the non-heat array wave guide grating output wavelength satisfy the ITU-T regulation, make the non-heat array wave guide grating output spectrum identical with array waveguide grid chip;
7) with another side of temperature compensation rod and fixed part fixed bonding together.
Described fixed part with array waveguide grid chip is bonded in above the substrate with groove, be that elder generation is fixed together the same substrate with groove of the fixed part of the array waveguide grid chip of cleaning with anchor clamps, then glue is coated in the groove of substrate, the infiltration by glue makes the fixed part of array waveguide grid chip and substrate form bonding.
Described along the AWG chip moveable part and the connecting line of fixed part on temperature compensation rod is set, be to adopt the temperature compensation rod that constitutes by compensation bar with expansion and contraction property and the glass baffle plate that is bonded in its two ends, the width that makes temperature compensation rod is across line of cut, and a side of temperature compensation rod is arranged on the moveable part of AWG chip, another side of temperature compensation rod is arranged on the fixed part of AWG chip.
The lower surface center of the glass baffle plate of described formation temperature compensation rod all has a groove.
Described position to temperature compensation rod is adjusted, be to utilize adjuster control temperature compensation rod to move to drive moving of moveable part, the relative position of the moveable part of array waveguide grid chip and fixed part adjusted and to its purpose of fixing thereby reach.
Described temperature compensation rod is to adopt UV glue or heat-curable glue to realize with the moveable part of AWG chip and fixing of fixed part.
Method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating of the present invention, can also adopt following steps:
1) on array waveguide grid chip with input and output planar waveguide, to import, the output optical fibre array aims at array waveguide grid chip, array waveguide grid chip and input optical fibre array, output optical fibre array can reliablely and stablely be coupled and aligned, and array waveguide grid chip be divided into moveable part and fixed part by line of cut;
2) fixed part with array waveguide grid chip is bonded in above the substrate with groove;
3) along line of cut the moveable part of array waveguide grid chip and fixed part are cut into two parts separately;
4) side and the moveable part of wavelength compensation bar is bonding, and make the center line of wavelength compensation bar parallel with the cutting edge of moveable part and in same vertical plane;
5) be placed on the moveable part of bonding wavelength compensation bar on the substrate and be positioned at a side of the fixed part of array waveguide grid chip, make moveable part corresponding with the cut surface of fixed part, promote the moveable part of AWG chip then to the fixed part of array waveguide grid chip, and the moveable part of array waveguide grid chip, the cut surface of fixed part are closely connected;
6) utilize adjuster that the position of temperature compensation rod is adjusted, make the non-heat array wave guide grating output wavelength satisfy the TU-T regulation, make the non-heat array wave guide grating output spectrum identical with array waveguide grid chip;
7) with another side of temperature compensation rod and fixed part fixed bonding together.
The adjuster that is used for moving the manufacturing apyrexia arrayed waveguide grating method of the present invention based on planar waveguide, include flat board, be fixed with bonding jumper at flat board by pillar, on the described bonding jumper threaded hole is arranged, screwed first, second spring structure is fixed on the bonding jumper by threaded hole, and the end of described first, second spring structure is provided with steel ball; Side at bonding jumper one end is provided with the 3rd spring structure that the end has steel ball by pillar, and described spring structure becomes the vertical direction setting with second spring structure, and the steel ball on both ends is adjacent; The same side of bonding jumper also be provided with by pillar with bonding jumper on three trimming hand wheel of second spring structure on same straight line, the steel ball on second spring structure on the termination of described the 3rd trimming hand wheel and the bonding jumper is corresponding; Side at the bonding jumper other end is provided with first trimming hand wheel by pillar, and described first trimming hand wheel becomes the vertical direction setting with first spring structure on the bonding jumper, and both ends are adjacent; The same side of bonding jumper also be provided with by pillar with bonding jumper on second trimming hand wheel of first spring structure on same straight line, the steel ball on first spring structure on the termination of described second trimming hand wheel and the bonding jumper is corresponding.
The adjuster that is used for moving the manufacturing apyrexia arrayed waveguide grating method of the present invention based on planar waveguide, can also be to include flat board, be fixed with bonding jumper at flat board by pillar, on the described bonding jumper threaded hole arranged, the 4th, the 5th trimming hand wheel is fixed on the bonding jumper by threaded hole; Side at bonding jumper one end is provided with the 6th trimming hand wheel by pillar, and described the 6th trimming hand wheel becomes the vertical direction setting with the 5th trimming hand wheel, and both ends are adjacent; The same side of bonding jumper also be provided with by pillar with bonding jumper on three trimming hand wheel of the 5th trimming hand wheel on same straight line, the termination of described the 3rd trimming hand wheel is corresponding with the end of the 5th trimming hand wheel; Side at the bonding jumper other end is provided with first trimming hand wheel by pillar, and described first trimming hand wheel becomes the vertical direction setting with the 4th trimming hand wheel on the bonding jumper, and both ends are adjacent; The same side of bonding jumper also be provided with by pillar with bonding jumper on second trimming hand wheel of the 4th trimming hand wheel on same straight line, the end of the 4th trimming hand wheel on the termination of described second trimming hand wheel and the bonding jumper is corresponding.
Of the present inventionly move manufacturing apyrexia arrayed waveguide grating method and adjuster based on planar waveguide, be that a, the b two parts that utilize expanding with heat and contract with cold of temperature compensation rod to drive the AWG chip produce and relatively move, thereby compensation comes manufacturing apyrexia arrayed waveguide grating by the wave length shift that temperature causes.Have following characteristics:
1, the present invention is divided into behind a, b two parts the AWG chip again through coupling for the second time, and its coupling only with hand is placed on movable part a on the substrate, pushes to be close to b partly can finish, and is simple.
2, the present invention regulates the ITU-T wavelength by the wavelength adjuster that has trimming hand wheel, can improve the wavelength regulation precision to 1pm.
3, the present invention relies on the capillary force between the surface, contact position to carry out the infiltration of glue, respectively a, b two parts and substrate are bonded in one reliably, reduced the difference in height between a, b two parts widely, added losses have only about 0.1dB, and spectrum also keeps extremely intactly.
4, the glass baffle plate at Fa Ming compensation bar two ends can be across a, b two parts, come bondingly with UV or heat-curable glue, simplify technology greatly.
5, the depth of parallelism between AWG chip a, the b two parts line of cut and stitch and wide determine can adopt the trimming hand wheel of wavelength adjuster to regulate, and by microscopic, can guarantee that like this focal length of planar waveguide is constant.
Description of drawings
Fig. 1, Fig. 2 are the planar waveguide moving structure synoptic diagram of prior art;
Fig. 3 is the structural representation of common AWG chip;
Fig. 4 is the b part of cutting back AWG chip;
Fig. 5 is a part of cutting back AWG chip;
Fig. 6 is the structure behind b part and the substrate bonding of AWG chip;
Fig. 7 is the structural representation after a part of AWG chip is partly passed through to be coupled for the second time with b;
Fig. 8 is the wavelength compensation bar and structural representation after a of AWG chip part is sticking mutually;
Fig. 9 is the wavelength compensation bar and structural representation after a of AWG chip, b two parts are sticking mutually;
The structural representation of the wavelength adjuster that Figure 10 the present invention is used;
Figure 11 regulates the ITU-T wavelength, stitches the synoptic diagram of wide and the depth of parallelism by the wavelength adjuster;
Figure 12 is the board structure synoptic diagram that has groove;
Figure 13 is the used temperature compensation rod structural representation of the present invention;
Figure 14 is the structural representation of AWG chip of the present invention.
Wherein:
The 1-input waveguide; 2-imports planar waveguide; The 3-Waveguide array; 4-exports planar waveguide; The 5-output waveguide; The 6-temperature compensation rod; The 7-compensation bar; 7.1,7.2-glass baffle plate; The 8-substrate; 9-glass baffle plate lower surface every the glue groove; The 10-flat board; The 11-steel ball; The 12-pillar; The 13-bonding jumper; The 14-groove; 15-second spring structure; 16-the 3rd spring structure; 17-first spring structure; 21-first trimming hand wheel; 22-second trimming hand wheel; 23-the 3rd trimming hand wheel; The a-moveable part; The b-fixed part; The C-line of cut; The angle of θ-line of cut and planar waveguide axis.
Embodiment
Move manufacturing apyrexia arrayed waveguide grating method and adjuster make a detailed description to of the present invention based on planar waveguide below in conjunction with embodiment.
The present invention is on the common silicon based silicon dioxide AWG chip that adopts the planar optical waveguide fabrication techniques, along the line of cut C on line of cut C on the input planar waveguide or the output planar waveguide chip is divided into a and b two parts, part a comprises the part of input waveguide 1, input planar waveguide 2, and part b comprises remainder, Waveguide array 3, output planar waveguide 4 and the output waveguide 5 of importing planar waveguide 2.Substrate 8 places and plays fixing and supporting role below a of AWG chip and b two parts, temperature compensation rod 6 is across being placed on AWG chip cutting line place, wherein the glass baffle plate of temperature compensation rod one end is fixed with a part surface of AWG chip on one side, one side of other end glass baffle plate is then fixed with the b part surface of AWG chip, the present invention utilizes expanding with heat and contract with cold of temperature compensation rod to drive a, the generation of b two parts relatively moves, thereby compensate the reason of the wave length shift that causes by temperature, manufacturing apyrexia arrayed waveguide grating.
Of the present inventionly move the manufacturing apyrexia arrayed waveguide grating method, include following steps based on planar waveguide:
1) as shown in Figure 3, on the array waveguide grating with input and output planar waveguide (AWG) chip, to import, the output optical fibre array aims at the AWG chip, and AWG chip and input optical fibre array F, output optical fibre array F ' can reliablely and stablely be coupled and aligned;
2), the AWG chip cutting is become moveable part a and the fixed part b that is used for fixing with substrate 8 along line of cut C as Fig. 4, shown in Figure 5; Before section, in order to reduce the influence of cutting slit width to planar waveguide focal length and Insertion Loss, also can be earlier at AWG chip back fluting, again from the front joint-cutting.In order to prevent to collapse the limit, at line of cut C place elder generation sticking a glass sheet as thin as a wafer, can select thickness is the glass sheet of 0.1mm before the section during cutting.
3) the fixed part b with the AWG chip is bonded in above the substrate 8 with groove 14;
As shown in figure 12, have one or more grooves at the upper surface of substrate 8, the purposes difference of described groove has plenty of for gluing, has plenty of in order to guide the effect of matching fluid, gelinite, flexible glue, other liquid or cutting particle.
As shown in Figure 6, described fixed part b with the AWG chip is bonded in above the substrate 8 with groove 14, the concrete practice is: elder generation is fixed together the fixed part b of the AWG chip of cleaning tightly with the substrate 8 usefulness anchor clamps of having held groove 14 successfully, use superfine filament from the groove of having held successfully 14, to pass, on filament, put glue and spur filament, make glue be coated in the contact position of the fixed part b of groove 14 and AWG chip, rely on the capillary force between the surface, contact position to carry out the infiltration of glue, fixed part b and substrate 8 are bonded in one reliably.Also can utilize infiltration to come bonding these two parts at edge's gluing of substrate 8 with the fixed part b of AWG chip.
4) will be with the moveable part a and the fixed part b of AWG chip through coupling for the second time, the upper surface of the lower surface of AWG chip, substrate 8 has good smooth flatness, the section of line of cut C also has straight line planarization preferably, utilize the straight line and the planarization of two surface in contact planarizations, line of cut both ends of the surface just can guarantee fully that moveable part a and fixed part b can be coupled ground together well, are reduced into state shown in Figure 3.
As shown in Figure 7, be placed on the moveable part a of AWG chip on the substrate 8 and be positioned at the side of the fixed part b of AWG chip, make moveable part a corresponding with the cut surface of fixed part b, promote the moveable part a of AWG chip then to the fixed part b of AWG chip, and make the moveable part a of AWG chip, the cut surface close-coupled of fixed part b.The coupling process second time of this simple and feasible only needs a few minutes, and without any need for the coupling apparatus, only holds together to be close to hand push and get final product.
5) as Fig. 9, shown in Figure 13, along on the connecting line of the moveable part a of AWG chip and fixed part b temperature compensation rod 6 being set, be to make the width of temperature compensation rod 6 across line of cut C, a side (being one side of trimming hand wheel 23 correspondences) that is about to temperature compensation rod 6 width adopts UV glue or heat-curable glue fixed bonding together with moveable part a, and another sides of temperature compensation rod 6 width is arranged on the fixed part b of AWG chip.Described temperature compensation rod 6, be to adopt compensation bar 7 with expansion and contraction property, at the two ends of compensation bar 7 adhering glass baffle plate 7.1,7.2, throw the lower surface of class's glass baffle plate 7.1,7.2 flat then, make temperature compensation rod 6, the lower surface center of the glass baffle plate 7.1,7.2 of described formation temperature compensation rod 6 all has a groove 9, and groove 9 can be used for insulation rubber.
6) utilize adjuster that the position of temperature compensation rod 6 is adjusted, make the non-heat array wave guide grating output wavelength satisfy the Bureau of Standards of international telecommunication union telecommunication (ITU-T) regulation, make the same array waveguide grating of non-heat array wave guide grating output spectrum (AWG) chip identical;
In order to regulate the wide and depth of parallelism of seam between ITU-T wavelength and a, b two parts, designed a cover adjuster, concrete structure is as shown in figure 10.The ultra-fine tooth fine setting of 0.25mm screw thread is arranged on the trimming hand wheel, and be threaded cover, sensitivity is 1 micron.Spring structure is designed to cylindrical screw form, and the top is taper, and cylindrical and top taper constitutes the support overcoat of spring and little steel ball 11, screw thread is arranged outside it, spring and little steel ball 11 are arranged in it, because the effect of spring, little steel ball can stretch in the bellmouth of top.The pillar that projection is arranged on dull and stereotyped 10, there is circular aperture the pillar upper end, and the trimming hand wheel that is threaded cover passes circular aperture and fixed thereon.Bonding jumper is fixed on dull and stereotyped 10 by pillar, and threaded hole is arranged on the bonding jumper, and screwed spring structure 15,17 is fixed on the bonding jumper by screw thread.Spring structure 16 is fixed together with dull and stereotyped 10 by the threaded hole on the pillar.Trimming hand wheel 21 and spring structure 16 are used for regulating the ITU-T wavelength, and trimming hand wheel 22 and spring structure 17, trimming hand wheel 23 and spring structure 15 are used for regulating the wide and depth of parallelism of seam.
Described position to temperature compensation rod 6 is adjusted, be to utilize adjuster control temperature compensation rod 6 to move to drive moving of moveable part a, the relative position of the moveable part a of array waveguide grating (AWG) chip and fixed part b adjusted and to its purpose of fixing thereby reach.
As shown in figure 11, position to temperature compensation rod is adjusted, concrete adjustment process is: will be placed on the flat board 10 of ready-made adjuster through AWG chip that is coupled for the second time and the integral body that glues wavelength compensation bar one end limit, the second accurate adjustment trimming hand wheel 22 and the 3rd trimming hand wheel 23, examine under a microscope two cutting edges, guarantee that it has better parallel degree and less clearance, make this gap with the seam in when section roomy cause identical, so just can guarantee that AWG chip planar waveguide focal length is roughly constant, thereby the spectrum that can make the AWG chip is in full accord basically before with section.The wavelength of monitoring output terminal, regulate first trimming hand wheel 21, promotion temperature compensation rod 6 advances or retreats, and moves thereby drive moveable part a, the accurate relative position of adjusting moveable part a and fixed part b makes the AWG output wavelength satisfy the wavelength value of ITU-T regulation.
7) after the AWG output wavelength satisfies the wavelength value of ITU-T regulation between moveable part a, fixed part b cutting edge the waveguide gap location coat less matching fluid.In order to make matching fluid more stable, can add a cover glass sewing on, if too much matching fluid is arranged, then can flow in the groove of substrate or chip back.Light path slit place be coated with add matching fluid after, with the added losses of comparing increase before the section only is about 0.1dB, after having put matching fluid, the parameter of all output channels of control and measuring again, after the test passes, the another side (being one side of spring structure 2 correspondences) of the temperature compensation rod other end is solidified with UV glue or heat-curable glue with fixed part b, and curing process can adopt edge penetration point glue, also can the bottom surface gluing.
At last device is taken off from adjuster, just produced Heatless AWG as shown in figure 14 among the present invention.
Of the present inventionly move the manufacturing apyrexia arrayed waveguide grating method, can also adopt following steps based on planar waveguide:
1) on the array waveguide grating with input and output planar waveguide (AWG) chip, to import, the output optical fibre array aims at the AWG chip, AWG chip and input optical fibre array, output optical fibre array can reliablely and stablely be coupled and aligned, and the AWG chip be divided into moveable part a and fixed part b by line of cut C;
2) the fixed part b with the AWG chip is bonded in above the substrate 8 with groove 14;
3) along line of cut C the moveable part a of AWG chip and fixed part b are cut into two parts separately;
4) side and the moveable part a of wavelength compensation bar 6 is bonding, and make the center line of wavelength compensation bar parallel with the cutting edge of moveable part a and in same vertical plane;
5) be placed on the moveable part a of bonding wavelength compensation bar on the substrate 8 and be positioned at the side of the fixed part b of AWG chip, make moveable part a corresponding with the cut surface of fixed part b, promote the moveable part a of AWG chip then to the fixed part b of AWG chip, and the moveable part a of AWG chip, the cut surface of fixed part b are closely connected;
6) utilize adjuster that the position of temperature compensation rod is adjusted, make the non-heat array wave guide grating output wavelength satisfy the ITU-T of the Bureau of Standards of international telecommunication union telecommunication regulation, make the non-heat array wave guide grating output spectrum identical with the AWG chip;
7) with another side of temperature compensation rod 6 and fixed part (b) fixed bonding together.
The temperature compensation principle of the method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating of the present invention is as follows:
The central wavelength lambda of AWG
cFor:
N wherein
EffBe the effective refractive index of waveguide, Δ L is the length difference of adjacent array waveguide, and m is that the order of diffraction is inferior.To the differentiate of formula both sides, the temperature sensitivity that gets AWG centre wavelength is expressed as:
Wherein
Be the linear expansion coefficient of substrate, because generally speaking, substrate thickness is more much bigger than the thickness of covering and sandwich layer, the linear expansion coefficient of substrate therefore commonly used.For silicon based silicon dioxide wave,
n
Eff=1.456, α
Sub=3.0 * 10
-6, at λ
c=1550nm place with corresponding numerical value substitution (2) formula, gets the temperature drift coefficient of centre wavelength
Be 0.015nm/ ℃, but in fact owing to the reasons such as deviation of manufacture craft, the actual temperature coefficient of deviation of chip
Be 0.011nm/ ℃.
According to the linear dispersion relation of AWG, the pass that obtains displacement and wave length shift is:
L wherein
fAnd n
sBe respectively the focal length and the refractive index of planar waveguide, d is the spacing of adjacent array waveguide on the output planar waveguide, n
gIt is the group index of Waveguide array.Therefore, as shown in Figure 4, if cut along the C line with arbitrarily angled inputing or outputing on the planar waveguide arbitrary position, make by temperature compensation rod and to cut two parts and can vary with temperature to produce and relatively move, so just can compensate the wave length shift that causes owing to temperature, thereby obtain Heatless AWG.
During temperature variation Δ T, centre wavelength is with variation of temperature
When cutting two-part relative movement distance and being Δ x, the centre wavelength of a certain output channel is with the variation of displacement
If make Δ λ
c=Δ λ
c 1Set up, then can obtain wavelength compensation completely.
If the linear expansion coefficient of temperature compensation rod is α, length is L, then with above-mentioned correlation formula substitution Δ λ
c=Δ λ
c 1, can obtain the following relationship formula:
Just can calculate required temperature compensation rod length L by following formula.
As shown in figure 10, the adjuster that is used for moving the manufacturing apyrexia arrayed waveguide grating method of the present invention based on planar waveguide, include dull and stereotyped 10, be fixed with bonding jumper 13 dull and stereotyped 10 by pillar 12, on the described bonding jumper 13 threaded hole is arranged, screwed first, second spring structure 17,15 is fixed on the bonding jumper 13 by threaded hole, and the end of described first, second spring structure 17,15 is provided with steel ball 11; Side at bonding jumper 13 1 ends is provided with the 3rd spring structure 16 that the end has steel ball 11 by pillar 12,15 one-tenth vertical direction settings of the described spring structure 16 and second spring structure, and the steel ball 11 on both ends is adjacent; The same side of bonding jumper 13 also be provided with by pillar 12 with bonding jumper 13 on three trimming hand wheel 23 of second spring structure 15 on same straight line, the steel ball 11 on second spring structure 15 on the termination of described the 3rd trimming hand wheel 23 and the bonding jumper 13 is corresponding; Side at bonding jumper 13 other ends is provided with first trimming hand wheel 21 by pillar 12, the 17 one-tenth vertical direction settings of first spring structure on described first trimming hand wheel 21 and the bonding jumper 13, and both ends are adjacent; The same side of bonding jumper 13 also be provided with by pillar 12 with bonding jumper 13 on second trimming hand wheel 22 of first spring structure 17 on same straight line, the steel ball 11 on first spring structure 17 on the termination of described second trimming hand wheel 22 and the bonding jumper 13 is corresponding.
The ultra-fine tooth fine setting of 0.25mm screw thread is arranged on the above-mentioned trimming hand wheel, and be threaded cover, sensitivity is 1 micron.Spring structure is designed to cylindrical screw form, and the top is taper, and cylindrical and top taper constitutes the support overcoat of spring and little steel ball 11, screw thread is arranged outside it, spring and little steel ball 11 are arranged in it, because the effect of spring, little steel ball can stretch in the bellmouth of top.Described adjuster is used for regulating the ITU-T wavelength, seam is wide and the depth of parallelism of seam.Wherein, first trimming hand wheel 21 and the 3rd spring structure 16 are used for regulating the ITU-T wavelength, and second trimming hand wheel 22 and first spring structure 17, the 3rd trimming hand wheel 23 and second spring structure 15 are used for regulating the wide and depth of parallelism of seam.
Trimming hand wheel and spring structure have been used in the adjuster of the present invention.This control method comprises that also all can drive all mechanical means that the wavelength compensation bar moves, for example: spring structure changed all into trimming hand wheel, trimming hand wheel all change spring structure into, trimming hand wheel changes stepper motor or piezoelectric etc. into.
Claims (9)
1. method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating is characterized in that: include following steps:
1) on array waveguide grid chip with input and output planar waveguide, to import, the output optical fibre array aims at array waveguide grid chip, and array waveguide grid chip and input optical fibre array, output optical fibre array can reliablely and stablely be coupled and aligned;
2) along line of cut (C) array waveguide grid chip is cut into moveable part (a) and fixed part (b);
3) fixed part (b) of array waveguide grid chip is bonded in has groove above the substrate (8) of (14);
4) moveable part (a) with array waveguide grid chip is placed on the side that the fixed part (b) of AWG chip was gone up and be positioned to substrate (8), make moveable part (a) corresponding with the cut surface of fixed part (b), promote the moveable part (a) of AWG chip then to the fixed part (b) of AWG chip, and make the moveable part (a) of AWG chip, the cut surface close-coupled of fixed part (b);
5) along temperature compensation rod (6) and with a side of temperature compensation rod (6) and moveable part (a) fixed bonding together is set on the connecting line of the moveable part (a) of array waveguide grid chip and fixed part (b);
6) utilize adjuster that the position of temperature compensation rod (6) is adjusted, make the non-heat array wave guide grating output wavelength satisfy the ITU-T regulation, make the non-heat array wave guide grating output spectrum identical with array waveguide grid chip;
7) with another side of temperature compensation rod (6) and fixed part (b) fixed bonding together.
2. the method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating according to claim 1, it is characterized in that: described fixed part with array waveguide grid chip (b) is bonded in has groove above the substrate (8) of (14), be that elder generation is fixed together the same substrate (8) with groove (14) of the fixed part (b) of the array waveguide grid chip of cleaning with anchor clamps, then glue is coated in the groove (14) of substrate (8), makes the fixed part (b) of array waveguide grid chip and substrate (8) form bonding by the infiltration of glue.
3. the method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating according to claim 1, it is characterized in that: on the connecting line of described moveable part (a) and fixed part (b) temperature compensation rod (6) is set along the AWG chip, be to adopt by the compensation bar with expansion and contraction property (7) and be bonded in the glass baffle plate (7.1 at its two ends, 7.2) temperature compensation rod (6) that constitutes, the width that makes temperature compensation rod (6) is across line of cut (C), and a side of temperature compensation rod (6) is arranged on the moveable part (a) of AWG chip, another side of temperature compensation rod (6) is arranged on the fixed part (b) of AWG chip.
4. the method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating according to claim 3 is characterized in that: the lower surface center of the glass baffle plate of described formation temperature compensation rod (6) (7.1,7.2) all has a groove (9).
5. the method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating according to claim 1, it is characterized in that: described position to temperature compensation rod (6) is adjusted, be to utilize adjuster control temperature compensation rod (6) to move to drive moving of moveable part (a), thereby the relative position that reaches moveable part (a) to array waveguide grid chip and fixed part (b) is adjusted and to its purpose of fixing.
6. the method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating according to claim 5 is characterized in that: described temperature compensation rod (6) is to adopt UV glue or heat-curable glue to realize with the moveable part (a) of AWG chip and fixing of fixed part (b).
7. method based on planar waveguide mobile technology manufacturing apyrexia arrayed waveguide grating is characterized in that: include following steps:
1) on array waveguide grid chip with input and output planar waveguide, to import, the output optical fibre array aims at array waveguide grid chip, array waveguide grid chip and input optical fibre array, output optical fibre array can reliablely and stablely be coupled and aligned, and array waveguide grid chip be divided into moveable part (a) and fixed part (b) by line of cut (C);
2) fixed part (b) of array waveguide grid chip is bonded in has groove above the substrate (8) of (14);
3) along line of cut (C) moveable part (a) of array waveguide grid chip and fixed part (b) are cut into two parts separately;
4) side and the moveable part (a) of wavelength compensation bar (6) is bonding, and make the center line of wavelength compensation bar parallel with the cutting edge of moveable part (a) and in same vertical plane;
5) moveable part (a) with bonding wavelength compensation bar is placed on the side that the fixed part (b) of array waveguide grid chip was gone up and be positioned to substrate (8), make moveable part (a) corresponding with the cut surface of fixed part (b), promote the moveable part (a) of AWG chip then to the fixed part (b) of array waveguide grid chip, and the moveable part (a) of array waveguide grid chip, the cut surface of fixed part (b) are closely connected;
6) utilize adjuster that the position of temperature compensation rod is adjusted, make the non-heat array wave guide grating output wavelength satisfy the TU-T regulation, make the non-heat array wave guide grating output spectrum identical with array waveguide grid chip;
7) with another side of temperature compensation rod (6) and fixed part (b) fixed bonding together.
8. adjuster that is used for moving the manufacturing apyrexia arrayed waveguide grating method based on planar waveguide, it is characterized in that, include flat board (10), be fixed with bonding jumper (13) in dull and stereotyped (10) by pillar (12), described bonding jumper has threaded hole on (13), screwed first, second spring structure (17,15) is fixed on the bonding jumper (13) by threaded hole, and the end of described first, second spring structure (17,15) is provided with steel ball (11); Side at bonding jumper (13) one ends is provided with the 3rd spring structure (16) that the end has steel ball (11) by pillar (12), and described spring structure (16) becomes the vertical direction setting with second spring structure (15), and the steel ball on both ends (11) is adjacent; The same side of bonding jumper (13) also be provided with by pillar (12) with bonding jumper (13) on three trimming hand wheel (23) of second spring structure (15) on same straight line, the steel ball (11) on second spring structure (15) on the termination of described the 3rd trimming hand wheel (23) and the bonding jumper (13) is corresponding; Side at bonding jumper (13) other end is provided with first trimming hand wheel (21) by pillar (12), and described first trimming hand wheel (21) becomes the vertical direction setting with first spring structure (17) on the bonding jumper (13), and both ends are adjacent; The same side of bonding jumper (13) also be provided with by pillar (12) with bonding jumper (13) on second trimming hand wheel (22) of first spring structure (17) on same straight line, the steel ball (11) on first spring structure (17) on the termination of described second trimming hand wheel (22) and the bonding jumper (13) is corresponding.
9. adjuster that is used for moving the manufacturing apyrexia arrayed waveguide grating method based on planar waveguide, it is characterized in that, include flat board (10), be fixed with bonding jumper (13) in dull and stereotyped (10) by pillar (12), described bonding jumper has threaded hole on (13), and the 4th, the 5th trimming hand wheel is fixed on the bonding jumper (13) by threaded hole; Side at bonding jumper (13) one ends is provided with the 6th trimming hand wheel by pillar (12), and described the 6th trimming hand wheel becomes the vertical direction setting with the 5th trimming hand wheel, and both ends are adjacent; The same side of bonding jumper (13) also be provided with by pillar (12) with bonding jumper (13) on three trimming hand wheel (23) of the 5th trimming hand wheel on same straight line, the termination of described the 3rd trimming hand wheel (23) is corresponding with the end of the 5th trimming hand wheel; Side at bonding jumper (13) other end is provided with first trimming hand wheel (21) by pillar (12), and described first trimming hand wheel (21) becomes the vertical direction setting with the 4th trimming hand wheel on the bonding jumper (13), and both ends are adjacent; The same side of bonding jumper (13) also be provided with by pillar (12) with bonding jumper (13) on second trimming hand wheel (22) of the 4th trimming hand wheel on same straight line, the end of the 4th trimming hand wheel on the termination of described second trimming hand wheel (22) and the bonding jumper (13) is corresponding.
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