CN110031466A - A kind of contact-type linear concentration sensor and its fluid detection method based on array wave-guide grating structure - Google Patents
A kind of contact-type linear concentration sensor and its fluid detection method based on array wave-guide grating structure Download PDFInfo
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Abstract
The present invention relates to a kind of contact-type linear concentration sensor and its fluid detection method based on array wave-guide grating structure, the array waveguide grating constituted including wide spectrum optical signal input module, specific radical single mode waveguide, wide spectrum optical signal output module, spectral signal detection module；Array waveguide grating will constitute up-side down triangle region belonging to its specific root single mode waveguide as fluid media (medium) concentration and contact detection zone.The ingenious partial wave characteristic sensitive to wavelength using array waveguide grating of the present invention, i.e. waveguide core layer effective refractive index changes the change for bringing the phase difference of different wavelengths of light in adjacent waveguide, after output channel waveguide output, different waveguide sandwich layer effective refractive index corresponds to different central wavelengths, realizes the function of the fluid concentrations detection of device；Contact-type linear concentration sensor of the present invention, the refractive index sensing unit based on up-side down triangle realize device to the linearity test of fluid concentrations so as to phase change caused by Linear Amplifer refraction index changing.
Description
Technical field
The present invention relates to a kind of contact-type linear concentration sensor and its fluid detection based on array wave-guide grating structure
Method belongs to the technical field of fluid concentrations detection.
Background technique
With the development of the society, the continuous development of science and technology, environment incretion interferent will lead to acid rain, this at and
One great environmental problem, belongs to third generation environmental pollution, influences people as greenhouse effects global warming and depletion of the ozone layer
The health of class threatens the normal activity of the mankind.Moreover, the modern industries such as industrial processes brought convenience to our life it is same
When, the environmental pollution based on three industrial wastes brings serious influence to people's life.Exhaust gas can cause greenhouse in this three
The environmental problems such as effect, and waste water but will directly influence our life.
As it can be seen that surrounding the gas in our living space, they are related to me for the water body for occupying global most of area
The general level of the health, quality of life, Happiness Index.And concentration be characterize dielectric property an important parameter, so to gas,
Strength of fluid is convenient and accurately detection technique is extremely important.
Measurement method in relation to concentration at present there are many kind, using it is more be photoelectric method, ultrasonic grating method, specific gravity
Method etc..In the method for these measurement strength of fluids, photoelectric method concentration sensor is by being two between output intensity and liquid refractivity
The variation of the relationship detection liquid refractivity of power, and then strength of fluid is detected, ultrasonic grating method concentration sensor mainly passes through
Changing to detect the variation of strength of fluid for ultrasonic velocity, is also quadratic relation, the two between strength of fluid and ultrasonic velocity
Belong to non-linear sensing；Hydrometer method needs to extract sample and carries out measurement of concetration, is unfavorable for real-time sensing.
Nowadays, the concentration that fluid is measured using refractive index has become a kind of trend, due to its not malleable measured object
The property of matter itself, the method application than chemistry are more extensive.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides a kind of, and the contact Linear based on array wave-guide grating structure is dense
Spend sensor.The present invention is linear using the linear relationship progress strength of fluid between liquid refractivity and center sensor wave length shift
Detection.
The present invention also provides the methods that above-mentioned contact-type linear concentration sensor carries out fluid detection.
The technical solution of the present invention is as follows:
A kind of contact-type linear concentration sensor based on array wave-guide grating structure, including sequentially connected wide spectrum optical letter
Number input module, array waveguide grating, spectral signal detection module；The wide spectrum optical signal input module is for providing wide spectrum optical
Source；The array waveguide grating is used to correspond to the variation of fluid concentrations the drift of its own central wavelength；The spectrum letter
Number detection module is for detecting the drift of array waveguide grating output spectrum；
The single mode waveguide successively includes substrate, lower limit layer, waveguide core layer and upper limiting layer, the array from bottom to up
Waveguide optical grating includes sequentially connected input channel, input planar waveguide, the array area of 30-50 root single mode waveguide composition, output
Planar waveguide, output channel；
From top to bottom the upper limiting layer of the every single mode waveguide in forming array area is etched away into certain length respectively, forms length
The waveguide core layer exposed region for the up-side down triangle that degree reduces in equal difference, i.e. refractive index sensing unit, connect as fluid media (medium) concentration
Touch detection zone.
Since the upper limiting layer of every single mode waveguide of forming array waveguide optical grating being etched away centainly respectively from top to bottom
Length forms the waveguide core layer exposed region of up-side down triangle, injects fluid to be measured in this region, serves as the upper limitation of single mode waveguide
Layer.The central wavelength of array waveguide grating is by grating equation nc△ L=m λ0It is available, wherein ncFor waveguide effective index,
△ L is the length difference of adjacent array waveguide, and m is diffraction progression；When the fluid concentrations of injection refractive index sensing unit become
When change, corresponding refractive index will change, the effective refractive index n of waveguidecAlso it changing, variable quantity is denoted as δ n, this
When be added refractive index modifications item grating equation be nc△ L+ δ n △ S=m λ1, wherein △ S is eroded upper for adjacent array waveguide
The length difference of limiting layer.As it can be seen that central wavelength will shift when effective refractive index changes, pass through inspection center
Offset △ λ=δ n △ S/m of wavelength, can be detected the variable quantity δ n of refractive index, thus achieve the purpose that detect fluid concentrations.
It is further preferred that the wide spectrum optical signal input module, array waveguide grating, spectral signal detection module are successively
It is connected by optical fiber.
Preferred according to the present invention, the material of the substrate is silicon, silica or polymethyl methacrylate.
The material physical chemistries performance such as silicon, silica and polymethyl methacrylate is stablized, and preparation process also phase
It is the feasible selection for preparing fiber waveguide device to maturation.
Preferred according to the present invention, the single mode waveguide structure is slab waveguide or ridge waveguide, the core of the single mode waveguide
Layer width be 0.5 μm -8 μm, the sandwich layer of the single mode waveguide with a thickness of 0.5 μm -8 μm.
The method that above-mentioned contact-type linear concentration sensor carries out fluid detection, comprises the following steps that
The size for designing SiO2 bar shaped single mode waveguide, determines single mode waveguide sandwich layer width W and thickness H；According to device center
The radical of wavelength and diffraction progression and single mode waveguide designs the size for the optical device realized；According to designed optical device
Size determines the specific location and corresponding upper limiting layer of the waveguide core layer exposed region (refractive index sensing unit) of up-side down triangle
Etching length；Determining piece is encapsulated, the sensor constructed；
(1) wide spectrum optical is penetrated contact-type linear concentration sensor by the wide spectrum optical signal input module, is believed by spectrum
Number detection module analyzes contact-type linear concentration sensor output spectrum, when obtaining fluid to be measured and being not filled by refractive index sensing unit
The central wavelength lambda of device under corresponding effective refractive index1；
(2) fluid to be measured is injected into refractive index sensing unit, wide spectrum optical is penetrated into contact-type linear concentration sensor, is led to
Spectral signal detection module analysis contact-type linear concentration sensor output spectrum is crossed, is obtained corresponding effective when current fluid filling
The central wavelength lambda of device under refractive index2；
(3) central wavelength lambda that will be obtained1With central wavelength lambda2Difference △ λ substitute into formula (I):
δ n=m △ λ/△ S (I)
In formula (I), δ n is effective refractive index ncVariable quantity, m is diffraction progression, and △ S is that adjacent array waveguide erodes
Upper limiting layer length difference.
It is preferred according to the present invention, the central wavelength lambda of device in the step (1)1Seek shown in formula such as formula (II):
ncΔ L=m λ1 (Ⅱ)
In formula (II), ncFor waveguide effective index, △ L is the length difference of adjacent array waveguide, and m is diffraction progression.
It is preferred according to the present invention, the central wavelength lambda of device in the step (2)2Seek shown in formula such as formula (III):
The effective refractive index n of waveguidecIt changes, variable quantity is denoted as δ n, and the grating equation of refractive index modifications item is added such as
Shown in formula (III):
nc△ L+ δ n △ S=m λ2 (Ⅲ)
In formula (III), ncFor effective refractive index, δ n is effective refractive index ncVariable quantity, △ L be adjacent array waveguide length
Difference is spent, m is diffraction progression, and △ S is the length difference for the upper limiting layer that adjacent array waveguide erodes.
If wide spectrum light source is incident to above-mentioned device, the sensor constructed is in working condition；It is right under this state
Identified refractive index sensing unit injects fluid to be measured in step 3), then the sensor constructed works；If gauge without light source enters
It penetrates, then the sensor constructed stops working.
It is preferred according to the present invention, in the step (2), fluid to be measured is injected into refractive index sensing unit, specific side
Method are as follows: make fluid to be measured along the waveguide core layer exposed area of a piece single mode waveguide side injection up-side down triangle of array waveguide grating longest
Domain makes fluid be filled up completely the waveguide core layer exposed region of up-side down triangle, changes the folding of filling region single mode waveguide upper limiting layer
Rate is penetrated, realizes the change of filling region waveguide effective index.
The invention has the benefit that
1, contact-type linear concentration sensor of the present invention, it is ingenious sensitive to wavelength using array waveguide grating (AWG)
Partial wave characteristic, i.e., waveguide core layer effective refractive index, which changes, brings the change of the phase difference of different wavelengths of light in adjacent waveguide, warp
After output channel waveguide output, different waveguide sandwich layer effective refractive index corresponds to different central wavelengths, realizes the fluid concentrations of device
The function of detection；
2, contact-type linear concentration sensor of the present invention, the refractive index sensing unit based on up-side down triangle, so as to
With phase change caused by Linear Amplifer refraction index changing, realize device to the linearity test of fluid concentrations.
3, contact-type linear concentration sensor of the present invention designs effective to H mode (TE) or transverse magnetic wave (TM) mode
Single mode waveguide, by using this single mode waveguide constitute the sensor array waveguide grating, effectively overcome birefringent draw
The polarization insensitive characteristic of the device risen is unfavorable for the problem of realizing；
4, contact-type linear concentration sensor of the present invention, the concentration of fluid is measured using refractive index, because without
The property for changing detected fluid substance itself, it is more accurate compared to other detection method results；
5, contact-type linear concentration sensor of the present invention, the principle of interference based on array waveguide grating, therefore it is available
In the hazardous environments such as strong electromagnetic, inflammable and explosive, and zero-power energy conservation and environmental protection.
Detailed description of the invention
Fig. 1 is that the single mode waveguide of the contact-type linear concentration sensor of the present invention based on array wave-guide grating structure is cut
Face figure；
Fig. 2 is the structural schematic diagram of array waveguide grating of the present invention；
Fig. 3 is the top view of the contact-type linear concentration sensor of the present invention based on array wave-guide grating structure；
1, upper limiting layer；2, lower limit layer；3, substrate；4, waveguide core layer；5, input channel；6, planar waveguide is inputted；7,
Array area；8, planar waveguide is exported；9, output channel；10, refractive index sensing unit；11, wide spectrum optical signal input module；12 light
Spectrum signal detection module.
Specific embodiment
Below with reference to embodiment and Figure of description, the present invention will be further described, but not limited to this.
Embodiment 1
A kind of contact-type linear concentration sensor based on array wave-guide grating structure, as shown in Figures 2 and 3, including according to
The wide spectrum optical signal input module 11 of secondary connection, array waveguide grating, spectral signal detection module 12；Wide range optical signal inputs mould
Block 11 is internally integrated broadband halogen optical fiber lighting device, for providing wide spectrum light source；Array waveguide grating is used for fluid concentrations
Variation corresponds to the drift of its own central wavelength；Spectral signal detection module 12 is internally integrated small ccd spectrometer, for pair
The drift of array waveguide grating output spectrum is detected；
Single mode waveguide successively includes substrate 3, lower limit layer 2, waveguide core layer 4 and upper limiting layer 1 from bottom to up.Waveguide array
Grating includes sequentially connected input channel 5, inputs planar waveguide 6, the array area 7 that 30-50 root single mode waveguide is constituted, exports and put down
Board waveguide 8, output channel 9；
From top to bottom the upper limiting layer 1 of the every single mode waveguide in forming array area 7 is etched away into certain length respectively, is formed
4 exposed region of waveguide core layer for the up-side down triangle that length reduces in equal difference, the upper limitation that 4 exposed region of waveguide core layer is etched away
The length of layer 1 is successively successively decreased from the outside to the core, and 4 exposed regions of waveguide core layer, that is, refractive index sensing unit 10 are dense as fluid media (medium)
Degree contact detection zone.
Since the upper limiting layer 1 of every single mode waveguide of forming array waveguide optical grating being etched away centainly respectively from top to bottom
Length forms 4 exposed region of waveguide core layer of up-side down triangle, injects fluid to be measured in this region, serves as the upper limit of single mode waveguide
Preparative layer 1.The central wavelength of array waveguide grating is by grating equation nc△ L=m λ0It is available, wherein ncIt is effectively reflected for waveguide
Rate, △ L are the length difference of adjacent array waveguide, and m is diffraction progression；When the fluid concentrations hair of injection refractive index sensing unit 10
When changing, corresponding refractive index will change, the effective refractive index n of waveguidecAlso it changes, variable quantity is denoted as δ
N, the grating equation that refractive index modifications item is added at this time is nc△ L+ δ n △ S=m λ1, wherein △ S is that adjacent array waveguide erodes
Upper limiting layer 1 length difference.As it can be seen that central wavelength will shift when effective refractive index changes, pass through detection
Offset △ λ=δ n △ S/m of central wavelength, can be detected the variable quantity δ n of refractive index, thus reach detection fluid concentrations
Purpose.
Wide spectrum optical signal input module 11, array waveguide grating, spectral signal detection module 12 pass sequentially through optical fiber connection.
Embodiment 2
According to a kind of contact-type linear concentration sensor based on array wave-guide grating structure described in embodiment 1, such as Fig. 1
Shown, difference is: the structure size of waveguide core layer 4 is by design, to constitute single mode waveguide.Upper limiting layer 1 is to flow measurement
Body filled layer.
The material of substrate 3 is silicon, silica or polymethyl methacrylate.
The material physical chemistries performance such as silicon, silica and polymethyl methacrylate is stablized, and preparation process also phase
It is the feasible selection for preparing fiber waveguide device to maturation.
Single mode waveguide structure is slab waveguide or ridge waveguide, and the width of the sandwich layer of single mode waveguide is 0.5 μm -8 μm, single mode wave
The sandwich layer led with a thickness of 0.5 μm -8 μm.
Embodiment 3
According to a kind of contact-type linear concentration sensor based on array wave-guide grating structure as described in example 2, area
Be not: the width of the sandwich layer of single mode waveguide be 2 μm, the sandwich layer of single mode waveguide with a thickness of 1 μm.
Embodiment 4
According to a kind of contact-type linear concentration sensor based on array wave-guide grating structure as described in example 2, area
Be not: array area 7 includes 30-50 root single mode waveguide structure, and diffraction progression m is 50, central wavelength 532nm.
Embodiment 5
A kind of any contact-type linear concentration sensor based on array wave-guide grating structure of embodiment 1-4 carries out
The method of fluid detection, comprises the following steps that
The size for designing SiO2 bar shaped single mode waveguide, determines the sandwich layer width W and thickness H of single mode waveguide；According in device
The radical of cardiac wave length and diffraction progression and single mode waveguide, designs the size for the optical device realized；According to designed optical device
Size determine up-side down triangle 4 exposed region of waveguide core layer (refractive index sensing unit 10) specific location and the corresponding upper limit
The etching length of preparative layer 1；Determining piece is encapsulated, the sensor constructed；
(1) wide spectrum optical is penetrated contact-type linear concentration sensor by wide spectrum optical signal input module 11, passes through spectral signal
Detection module 12 analyzes contact-type linear concentration sensor output spectrum, obtains fluid to be measured and is not filled by refractive index sensing unit 10
When corresponding effective refractive index under device central wavelength lambda1；Central wavelength lambda1Seek shown in formula such as formula (II):
ncΔ L=m λ1 (Ⅱ)
In formula (II), ncFor waveguide effective index, △ L is the length difference of adjacent array waveguide, and m is diffraction progression.
(2) fluid to be measured is injected into refractive index sensing unit 10, it may be assumed that make fluid to be measured along array waveguide grating longest one
4 exposed region of waveguide core layer of up-side down triangle is injected in root single mode waveguide side, and fluid is made to be filled up completely the waveguide core layer 4 of up-side down triangle
Exposed region changes the refractive index of filling region single mode waveguide upper limiting layer 1, realizes changing for filling region waveguide effective index
Become.Wide spectrum optical is penetrated into contact-type linear concentration sensor, contact-type linear concentration is analyzed by spectral signal detection module 12
Sensor output spectrum obtains the central wavelength lambda that device under effective refractive index is corresponded to when current fluid filling2；Central wavelength lambda2's
It seeks shown in formula such as formula (III):
The effective refractive index n of waveguidecIt changes, variable quantity is denoted as δ n, and the grating equation of refractive index modifications item is added such as
Shown in formula (III):
nc△ L+ δ n △ S=m λ2 (Ⅲ)
In formula (III), ncFor effective refractive index, δ n is effective refractive index ncVariable quantity, △ L be adjacent array waveguide length
Difference is spent, m is diffraction progression, and △ S is the length difference for the upper limiting layer 1 that adjacent array waveguide erodes.
If wide spectrum light source is incident to above-mentioned device, the sensor constructed is in working condition；It is right under this state
Identified refractive index sensing unit 10 injects fluid to be measured in step 3), then the sensor constructed works；If gauge without light source
Incidence, the then sensor constructed stop working.
(3) central wavelength lambda that will be obtained1With central wavelength lambda2Difference △ λ substitute into formula (I):
δ n=m △ λ/△ S (I)
In formula (I), δ n is effective refractive index ncVariable quantity, m is diffraction progression, and △ S is that adjacent array waveguide erodes
Upper limiting layer 1 length difference.
Claims (8)
1. a kind of contact-type linear concentration sensor based on array wave-guide grating structure, which is characterized in that including being sequentially connected
Wide spectrum optical signal input module, array waveguide grating, spectral signal detection module；The wide spectrum optical signal input module is used for
Wide spectrum light source is provided；The array waveguide grating is used to correspond to the variation of fluid concentrations the drift of its own central wavelength；
The spectral signal detection module is for detecting the drift of array waveguide grating output spectrum；
The single mode waveguide successively includes substrate, lower limit layer, waveguide core layer and upper limiting layer, the Waveguide array from bottom to up
Grating includes sequentially connected input channel, input planar waveguide, the array area of 30-50 root single mode waveguide composition, output plate
Waveguide, output channel；
The upper limiting layer of the every single mode waveguide in forming array area is etched away into certain length respectively from top to bottom, formation length is in
The waveguide core layer exposed region for the up-side down triangle that equal difference reduces, i.e. refractive index sensing unit are contacted as fluid media (medium) concentration and are examined
Survey area.
2. a kind of contact-type linear concentration sensor based on array wave-guide grating structure according to claim 1, special
Sign is that the wide spectrum optical signal input module, array waveguide grating, spectral signal detection module pass sequentially through optical fiber connection.
3. a kind of contact-type linear concentration sensor based on array wave-guide grating structure according to claim 1, special
Sign is that the material of the substrate is silicon, silica or polymethyl methacrylate.
4. a kind of contact-type linear concentration sensor based on array wave-guide grating structure according to claim 1, special
Sign is that the single mode waveguide structure is slab waveguide or ridge waveguide, and the width of the sandwich layer of the single mode waveguide is 0.5 μm of -8 μ
M, the sandwich layer of the single mode waveguide with a thickness of 0.5 μm -8 μm.
5. the method that any contact-type linear concentration sensor of claim 1-4 carries out fluid detection, which is characterized in that
It comprises the following steps that
(1) wide spectrum optical is penetrated contact-type linear concentration sensor by the wide spectrum optical signal input module, is examined by spectral signal
Module analysis contact-type linear concentration sensor output spectrum is surveyed, obtains corresponding to when fluid to be measured is not filled by refractive index sensing unit
Effective refractive index under device central wavelength lambda1；
(2) fluid to be measured is injected into refractive index sensing unit, wide spectrum optical is penetrated into contact-type linear concentration sensor, passes through light
Spectrum signal detection module analyzes contact-type linear concentration sensor output spectrum, obtains corresponding effectively refraction when current fluid filling
The central wavelength lambda of device under rate2；
(3) central wavelength lambda that will be obtained1With central wavelength lambda2Difference △ λ substitute into formula (I):
δ n=m △ λ/△ S (I)
In formula (I), δ n is effective refractive index ncVariable quantity, m is diffraction progression, and △ S is the upper limit that adjacent array waveguide erodes
The length difference of preparative layer.
6. the method that contact-type linear concentration sensor according to claim 5 carries out fluid detection, which is characterized in that institute
State the central wavelength lambda of device in step (1)1Seek shown in formula such as formula (II):
ncΔ L=m λ1 (Ⅱ)
In formula (II), ncFor waveguide effective index, △ L is the length difference of adjacent array waveguide, and m is diffraction progression.
7. the method that contact-type linear concentration sensor according to claim 5 carries out fluid detection, which is characterized in that institute
State the central wavelength lambda of device in step (2)2Seek shown in formula such as formula (III):
nc△ L+ δ n △ S=m λ2 (Ⅲ)
In formula (III), ncFor effective refractive index, δ n is effective refractive index ncVariable quantity, △ L be adjacent array waveguide length difference
Value, m are diffraction progression, and △ S is the length difference for the upper limiting layer that adjacent array waveguide erodes.
8. the method that contact-type linear concentration sensor according to claim 5 carries out fluid detection, which is characterized in that institute
It states in step (2), fluid to be measured is injected into refractive index sensing unit, method particularly includes: make fluid to be measured along Waveguide array light
The waveguide core layer exposed region of a piece single mode waveguide side injection up-side down triangle of grid longest, makes fluid be filled up completely the wave of up-side down triangle
Sandwich layer exposed region is led, the refractive index of filling region single mode waveguide upper limiting layer is changed, realizes that filling region waveguide effectively reflects
The change of rate.
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| CN111982859A (en) * | 2020-08-31 | 2020-11-24 | 山东大学 | Refractive index sensor based on Mach-Zehnder structure and detection method thereof |
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