CN102519778A - Device convenient for grinding and polishing transmission electron microscope sample - Google Patents
Device convenient for grinding and polishing transmission electron microscope sample Download PDFInfo
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- CN102519778A CN102519778A CN2011104426955A CN201110442695A CN102519778A CN 102519778 A CN102519778 A CN 102519778A CN 2011104426955 A CN2011104426955 A CN 2011104426955A CN 201110442695 A CN201110442695 A CN 201110442695A CN 102519778 A CN102519778 A CN 102519778A
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- grinding
- bolt
- polishing
- electron microscope
- transmission electron
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Abstract
A device convenient for grinding and polishing a transmission electron microscope sample belongs to the field of metal material sample grinding and polishing equipment and is characterized by consisting of a cylinder with a central through hole and a bolt. The bolt is placed in the central through hole and closely fastened with the cylinder. The upper half part of the bolt is a standard bolt, the lower half part of the bolt is an extension rod coaxial and integrated with the standard bolt, and the extension rod is a cylindrical rod with the diameter of 3mm. By rotating the bolt, the extension rod is led to be in downward motion. When the extension rod touches a wafer, the thin wafer is pushed out little by little according to final required grinding and polishing thickness for mechanical grinding until the wafer is thinned to required size. The device convenient for grinding and polishing the transmission electron microscope sample has the advantages of 1 being strong in practical applicability, and being capable of grinding and polishing various cut wafers with the diameter of 3mm; 2 controlling wafer thickness visually, quickly and conveniently in the grinding and polishing process; 3 improving efficiency, grinding and polishing the cut wafers with the diameter of 3mm again, and capable of improving efficiency and success rate of manufacturing the transmission electron microscope sample.
Description
Technical field
The invention belongs to metal material grinding and polishing test sample devices field, a kind of device of grinding and polishing transmission electron microscope sample is provided, thereby solved the difficulty that transmission electron microscope prepares in earlier stage.
Background technology
The sample that is used for transmission electron microscope observation owing to a little less than the penetration capacity of electronics, require its thickness as thin as a wafer, is generally between the 5-200nm.Big block or tabular metal material sample generally needs through (1) mechanical reduction; (2) chemical reduction; (3) three technologies of electropolishing attenuate just can obtain the transmission electron microscope sample of suitable thickness.Usually, the metal material behind mechanical reduction needs to be cut into by the dimensional requirement of transmission electron microscope sample the disk of diameter phi 3mm, and the disk to diameter phi 3mm adopts latter two technology attenuate more afterwards, to obtain being convenient to more thin districts of penetration of electrons.In above-mentioned three technologies, mechanical reduction is the key that successfully prepares sample.If the sample thickness behind the mechanical reduction is between 100～200 μ m, this thickness is fit to cut into the disk of diameter phi 3mm, but follow-up two technologies are implemented difficulty, is difficult to obtain to be suitable for a large amount of thin district of transmission electron microscope observing.If the sample behind the mechanical reduction is thinner, material brittle is split in being cut into the disk process of diameter phi 3mm.The present invention provides a kind of device of being convenient to the mechanical reduction transmission electron microscope sample, adopts this device can be directly the disk thickness of diameter phi 3mm to be reduced to about 15 μ m.
Summary of the invention
The objective of the invention is to: a kind of device for preparing tem specimen is provided, solves the thickness problem in the mechanical reduction transmission electron microscope sample process.Transmission electron microscope grinding and polishing apparatus sectional view is as shown in Figure 1.
The invention provides a kind of device for preparing tem specimen, constitute by cylinder that has central through hole and bolt; Bolt is placed in the cylinder central through hole and with cylinder and closely fastens; The first half of bolt is a standard bolt, and the latter half is the extension rod of and one coaxial with standard bolt, and this extension rod is that diameter is the cylindrical bar of 3mm.
The required sample that carries out grinding and polishing is clamped on the bottom of cylinder central through hole.Through swivel bolt, control extension rod position, thereby can be easily with the disk sample mechanical reduction of diameter phi 3mm to desired thickness.
The device course of work of preparation tem specimen of the present invention is following:
At first bolt is twisted from the top, thereby the extension rod that drives the bolt bottom upwards promotes.Secondly the disk of shearing the diameter phi 3mm that obtains behind the mechanical reduction is embedded in the central hole of cylinder bottom, thin discs surface and cylinder bottom are on the same surface level.Once more, extension rod is moved downward, when extension rod touches thin discs,, thin discs is little by little ejected, carry out mechanical lapping, up to being thinned to required size according to final required grinding and polishing thickness through swivel bolt.
The present invention possesses following advantage: 1, practical, all can carry out the grinding and polishing operation to the various disks that are cut into φ 3mm.2, intuitively control in the grinding and polishing process assurance easily to disk thickness.3, raise the efficiency, the disk that cuts into φ 3mm is carried out grinding and polishing again, can improve the efficient and the success ratio of preparation transmission electron microscope sample.
Description of drawings
Fig. 1 is a device synoptic diagram of the present invention.
Embodiment
In conjunction with accompanying drawing the structure of preparation tem specimen device of the present invention is explained.
Claims (1)
1. a device of being convenient to the grinding and polishing transmission electron microscope sample is characterized in that: be made up of cylinder that has central through hole and bolt; Bolt is placed in the cylinder central through hole and with cylinder and closely fastens; The first half of bolt is a standard bolt, and the latter half is the extension rod of and one coaxial with standard bolt, and this extension rod is that diameter is the cylindrical bar of 3mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104426955A CN102519778A (en) | 2011-12-26 | 2011-12-26 | Device convenient for grinding and polishing transmission electron microscope sample |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011104426955A CN102519778A (en) | 2011-12-26 | 2011-12-26 | Device convenient for grinding and polishing transmission electron microscope sample |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102519778A true CN102519778A (en) | 2012-06-27 |
Family
ID=46290774
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011104426955A Pending CN102519778A (en) | 2011-12-26 | 2011-12-26 | Device convenient for grinding and polishing transmission electron microscope sample |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102519778A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103100942A (en) * | 2012-11-05 | 2013-05-15 | 洛阳轴研科技股份有限公司 | Simple processing method of removing burrs of non-metal holder inner hole and end face junction |
| CN103506927A (en) * | 2013-10-28 | 2014-01-15 | 中国科学院地球化学研究所 | Polisher loading block |
| CN104990783A (en) * | 2015-06-01 | 2015-10-21 | 南京大学 | High precision transmission electron microscope sample mill |
| CN106896014A (en) * | 2017-04-17 | 2017-06-27 | 江西省科学院应用物理研究所 | The preparation method and device of a kind of metal material cross-sectional Transmission tem sample |
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| JPH10153535A (en) * | 1996-11-22 | 1998-06-09 | Nec Corp | Thin film sample making method |
| JPH11194078A (en) * | 1998-01-07 | 1999-07-21 | Matsushita Electron Corp | Method for preparing sample for transmission electron microscope observation and apparatus for preparing sample |
| CN200960630Y (en) * | 2006-10-23 | 2007-10-17 | 宝山钢铁股份有限公司 | Sample polishing clamp |
| CN201237566Y (en) * | 2008-06-20 | 2009-05-13 | 北京科技大学 | Metallographic specimen clamper capable of saving polishing liquid |
| CN101692024A (en) * | 2009-10-28 | 2010-04-07 | 中国航空工业集团公司北京航空制造工程研究所 | Manual sample grinding tool with welding line structure for transmission electron microscope sample |
| CN201442215U (en) * | 2009-04-03 | 2010-04-28 | 大连交通大学 | Mechanical pre-thinning device used for transmission electron microscopy sample preparation process |
| CN201693449U (en) * | 2010-05-14 | 2011-01-05 | 西安交通大学 | Force regulation balance sample polishing platform |
| CN202420943U (en) * | 2011-12-26 | 2012-09-05 | 北京工业大学 | Device apt to grind and polish transmission electron microscope sample |
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2011
- 2011-12-26 CN CN2011104426955A patent/CN102519778A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH10153535A (en) * | 1996-11-22 | 1998-06-09 | Nec Corp | Thin film sample making method |
| JPH11194078A (en) * | 1998-01-07 | 1999-07-21 | Matsushita Electron Corp | Method for preparing sample for transmission electron microscope observation and apparatus for preparing sample |
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| CN201237566Y (en) * | 2008-06-20 | 2009-05-13 | 北京科技大学 | Metallographic specimen clamper capable of saving polishing liquid |
| CN201442215U (en) * | 2009-04-03 | 2010-04-28 | 大连交通大学 | Mechanical pre-thinning device used for transmission electron microscopy sample preparation process |
| CN101692024A (en) * | 2009-10-28 | 2010-04-07 | 中国航空工业集团公司北京航空制造工程研究所 | Manual sample grinding tool with welding line structure for transmission electron microscope sample |
| CN201693449U (en) * | 2010-05-14 | 2011-01-05 | 西安交通大学 | Force regulation balance sample polishing platform |
| CN202420943U (en) * | 2011-12-26 | 2012-09-05 | 北京工业大学 | Device apt to grind and polish transmission electron microscope sample |
Non-Patent Citations (1)
| Title |
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| 王燕飞等: "脆性材料界面透射电镜样品的制备", 《理化检验-物理分册》 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103100942A (en) * | 2012-11-05 | 2013-05-15 | 洛阳轴研科技股份有限公司 | Simple processing method of removing burrs of non-metal holder inner hole and end face junction |
| CN103100942B (en) * | 2012-11-05 | 2016-01-20 | 洛阳轴研科技股份有限公司 | The Simple Machining of burr is removed in non-metallic cage endoporus and end face junction |
| CN103506927A (en) * | 2013-10-28 | 2014-01-15 | 中国科学院地球化学研究所 | Polisher loading block |
| CN103506927B (en) * | 2013-10-28 | 2015-12-02 | 中国科学院地球化学研究所 | A kind of polishing machine material containing block |
| CN104990783A (en) * | 2015-06-01 | 2015-10-21 | 南京大学 | High precision transmission electron microscope sample mill |
| CN104990783B (en) * | 2015-06-01 | 2017-12-29 | 南京大学 | High-precision transmission electron microscope sample mill |
| CN106896014A (en) * | 2017-04-17 | 2017-06-27 | 江西省科学院应用物理研究所 | The preparation method and device of a kind of metal material cross-sectional Transmission tem sample |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20120627 |