CN102460720A - 化合物半导体型太阳能电池用基板 - Google Patents
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Abstract
本发明涉及一种化合物半导体型太阳能电池用基板,其即便在形成薄膜时经过高温工序之后,依然能够维持良好的弹性。化合物半导体型太阳能电池用基板由钢板构成,在太阳能电池层的积层面一侧上具有被膜量为300~8000mg/m2的Cr层。而且,在太阳能电池层的积层面一侧上具有被膜量为500~3000mg/m2的Cr层,太阳能电池层的制膜温度不足550℃。而且,在太阳能电池层的积层面一侧上具有被膜量为2000~8000mg/m2的Cr层,太阳能电池层的制膜温度超过800℃。此外,在太阳能电池层的积层面一侧上具有被膜量为2000~5000mg/m2的Cr层,太阳能电池层的制膜温度大于等于550℃且小于等于800℃。进而,钢带中的Mn成分小于等于2wt%,Fe成分小于等于98wt%。
Description
技术领域
本发明涉及一种化合物半导体型太阳能电池用基板,其具有可挠性。
背景技术
先前,具有可挠性的化合物半导体型太阳能电池,例如,作为CuInSe2(CIS)型或Cu(In,Ga)Se2(CIGS)型等太阳能电池用基板,建议使用金属带(日本专利文献1)。至于金属带,通常使用不锈钢。
日本专利文献中记载的金属带具备一种被膜,其含有添加一种碱性金属或者多种碱性金属混合物的绝缘层,所述金属带材料在温度范围0~600℃下的热膨胀系数是12×10-6K-1,所述绝缘层至少含有一种氧化物层,该氧化物层由Al2O3、TiO2、HfO2、Ta2O5、Nb2O5、这些氧化物混合物中任一种介电性氧化物构成,最好是由Al2O3以及/或者TiO2构成。
而且,众所周知,在化合物半导体型太阳能电池用基材中,作为基材成分的Fe或其他元素一旦扩散至太阳能电池层,就会导致转换效率降低。因此,我们知道应在基材上形成防扩散层,其用于抑制基材元素向太阳能电池层扩散。
而且,在日本专利文献2中,记载有一种太阳能电池,其在玻璃、金属、陶瓷、塑料等基材上,具有由薄导体或非常薄的绝缘材料等构成的障壁层、钼等后接点层、p型半导体层等。
先前技术文献
日本专利文献
日本专利文献1:日本专利特开2007-502536号公报
日本专利文献2:日本专利特表2008-520103号公报
发明内容
但是,在日本专利文献1的文献中,并没有具体明确防扩散层的构成。
另外,实际上在化合物半导体型太阳能电池的制膜工序中存在高温处理工序,但在其具体条件下,是否能够发挥防扩散功能,并不明确。在如此状况之下,还不明确能够使用哪种基板制造出化合物半导体型太阳能电池而不会导致发电效率降低,这是一个有待解决的问题。
而且,日本专利文献2中记载的太阳能电池,是使用喷镀方法形成障壁层,但这种喷镀工序所需的设备费用高昂,无法低价提供太阳能电池中所用的原材料,这也是一个有待解决的问题。
因此,本发明是明确化具体使用哪种基板,能够有效地制造出需要进行高温热处理的化合物半导体型太阳能电池。
即,本发明的目的在于提供一种化合物半导体型太阳能电池用基板,其通过以下方式形成:化合物半导体型太阳能电池在形成薄膜时经过高温工序之后,在依然维持良好弹性的钢带表面上电镀一种皮膜层,该皮膜层能够抑制导致电池单元转换效率降低的钢带含有元素热扩散侵入至薄膜层。
(1)本发明的化合物半导体型太阳能电池用基板,其特征在于:由钢板构成,在太阳能电池层的积层面一侧上,具有被膜量为300~8000mg/m2的Cr层。
(2)所述(1)的化合物半导体型太阳能电池用基板,其特征在于:由钢板构成,在太阳能电池层的积层面一侧上,具有被膜量为500~3000mg/m2的Cr层,太阳能电池层的制膜温度不足550℃。
(3)所述(1)的化合物半导体型太阳能电池用基板,其特征在于:由钢板构成,在太阳能电池层的积层面一侧上,具有被膜量为2000~8000mg/m2的Cr层,太阳能电池层的制膜温度超过800℃。
(4)所述(1)的化合物半导体型太阳能电池用基板,其特征在于:由钢板构成,在太阳能电池层的积层面一侧上,具有被膜量为2000~5000mg/m2的Cr层,太阳能电池层的制膜温度大于等于550℃且小于等于800℃。
(5)本发明的化合物半导体型太阳能电池用基板,其特征在于:所述(1)~(4)任一项中,钢带中的Mn成分小于等于2wt%。
(6)本发明的化合物半导体型太阳能电池用基板,其特征在于:所述(1)~(4)任一项中,钢带中的Fe成分小于等于98wt%。
发明效果
本发明能够提供一种基板,其通过明确化扩散障壁层的被膜构成,能够防止导致发电效率降低的基板中杂质元素扩散至太阳能电池层中。
而且,至于扩散障壁层的形成方法,可采用电镀法,因此能够提供生产性良好、低价的材料。
附图说明
图1是模式化表示本发明的化合物半导体型太阳能电池用基板的截面说明图。
图2是热处理(550℃×30分)后的基板表面元素的测定结果。
图3是热处理(800℃×15分)后的基板表面元素的测定结果。
具体实施方式
本发明的化合物半导体型太阳能电池用基板,其特征在于:作为可挠性化合物半导体型太阳能电池用基板,由钢板(钢带)构成,在太阳能电池层的积层面一侧上,具有被膜量为300~8000mg/m2的Cr层。
通过电解处理,形成扩散障壁层,该扩散障壁层即使在形成薄膜时经过高温工序,也能够抑制不利于转换效率的Fe、Ni、Mn、Si、Al等元素扩散至太阳能电池层中。
而且,在里面一侧上最好也形成Cr层用作耐蚀层。
另外,所述钢带也可以是施加过Ni、Zn、Sn等镀层的表面处理钢板。
<扩散障壁层>
作为扩散障壁层,可列举形成Cr层,该扩散障壁层即使在形成薄膜时经过高温工序,也能够抑制不利于转换效率的Fe、Ni、Mn、Si、Al等元素扩散至太阳能电池层中。
至于Cr层的厚度,在聚光面一侧设为300~8000mg/m2。在化合物半导体型太阳能电池的制造工序中,包含在大于等于500℃的高温下进行处理的工序,这是因为需要获得最低300mg/m2的扩散障壁层。另一方面,超过8000mg/m2形成时,也未发现其有进一步效果,又考虑到成本增加方面,所以将上限设为8000mg/m2。
例如,在基板上形成薄膜后的热处理中,需要进行550℃的高温处理时,最好是500~5000mg/m2左右。超出5000mg/m2时,Fe的防扩散效果就会降低。其原因是,在550℃左右的温度区域内进行热处理时,Cr的镀层较厚的话,会因为热应力产生龟裂,降低防Fe扩散效果。
而且,进行大于等于800℃的高温处理时,最好是2000~8000mg/m2左右。
另外,如果是2000~5000mg/m2左右的厚度,在550~800℃的范围内进行热处理时,有效作为防扩散功能。
而且,考虑到太阳能电池设置在屋外,在基板的聚光面一侧的内面一侧,即反聚光面一侧上,最好是设有具有耐蚀性的处理层。至于具有耐蚀性的处理层,如果是Cr,可以是80~500mg/m2。最好是100~200mg/m2。
<钢带>
成为基板底层的钢带,为了防止经过积层的Cr层产生剥离或裂痕,需要热膨胀系数(TCE)较低。因此,钢带的线膨胀系数(TCE)在温度范围0~800℃内,最好小于等于16×10-6/K。
为了在500~800℃之间进行热处理加以制膜,因此所使用的钢带也必须赋予充分的耐热性。而且,为了防止钢带的含有成分扩散造成电池性能劣化,作为满足此条件的钢带材料,必须设为含有以下成分。
即,钢带成分设为C≤0.2%(本发明说明书中,%表示质量(wt)%)、Si≤0.5%、Mn≤2.0%、P≤0.06%、S≤0.04%、Ti≤0.15%或者Nb≤0.1%、Fe≤98%以及不可避免的杂质。
此处,就钢带中所含有的主要元素,阐述限定的理由。
C是太阳能电池层用于获得制膜后的强度的重要元素,但是如果过多,会使热延以及冷延时的压延负荷增大,导致形状劣化等,妨碍生产性,因此将上限设为0.20%。
Si在此处也可以不作特别指定,但和Mn一样地如果存在过量,就会使冷间压延的负荷增大,导致形状劣化,产生连续退火工序中的通板性障碍等,成为生产性低下的原因。因此,本发明中Si成分的上限值设为0.5%。
Mn与C一样,是太阳能电池层用于获得制膜后的高强度的必要元素,如果过多,可能会降低太阳能电池的发电效率,或增大压延负荷,因此上限设为2.0%。
P是结晶粒微细化成分,可以提高冷延钢板的强度,因此最好按照一定比例进行添加,但另一方面,偏析为结晶粒界会引起脆化,因此设为小于等于0.06%。
S是在热延过程中产生红热脆性的杂质成分,含量最好是极少,但无法完全防止从原料等中混入,且工序中的脱硫也是有限度的,所以不得不会有少量残留。少量的残留S所导致的红热脆性可以通过使用Mn得以减轻,因此S成分的上限值设为0.04%。
Ti以及Nb是都会形成碳氮化物的元素,因此具有微细化结晶粒的效果,能够提高强度。但是,如果这些元素都含量过剩,碳氮化物会粗大化,提高强度的效果会达到饱和。而且,连续退火时的再结晶温度也会上升,会增加生产成本。因此,设为Ti≤0.15%、Nb≤0.1%的范围,设为含有Ti或者Nb其中一种或两种。
Fe会降低化合物半导体型太阳能电池的发电效率,所以设为小于等于98%。
<制钢>
成为基板底层的钢带,使用转炉或电炉加以熔解,将成分调整为所述成分范围内制成平板片,经由以下的工序制成钢带。
<热间压延>
首先,将成分调整完毕的平板片经由热间压延制成板厚1.6~2.5mm。板厚较薄时,会引起热间压延时的负荷增大,所以将下限设为1.6mm。如果板厚较厚,又会引起此后的冷间压延时的负荷增大,所以将上限设为2.5mm。
热间压延工序中,所述成分范围的平板片的加热温度设为大于等于1100℃,将绕组温度设为大于等于500℃。平板片的加热温度不到1100℃时,N的积极性分解固溶不足,热延负荷变高,因而不可取。
此外,卷取温度设为500℃~700℃。卷取温度较低时,热延钢板会引发高强度化,不利于冷延时,因此卷取温度的下限设为500℃。
另一方面,卷取温度超过700℃时,热延时会促进生成锈鳞,通过酸洗进行除锈时会引起负荷增大,所以上限设为700℃。
所述热延钢板经过常规的酸洗、冷间压延以及退火,最后通过冷间压延制成特定的板厚。
<基板厚度>
基板的形态是钢带,其厚度为0.01~0.2mm,最好设为0.025~0.05mm。
<表面粗度>
镀Cr后的基板表面上最好尽可能光滑,基板的表面粗度是很重要的一个参数。至于基板的表面粗度,最好设为Ra(中心线表面粗度)≤0.1μm、Rz(十点平均高度)≤0.3μm、Rma×(最大高度)≤0.5μm。
Ra为0.1μm,Rz为0.3μm,Rma×为0.5μm,其中任一个超过该规定值时,形成为电极的Mo膜在成膜时无法均匀形成,露出钢带,最终导致化合物半导体型太阳能电池的发电效率劣化。
<屈服应力>
镀Cr后的基板的屈服应力(Yp)最好设为大于等于200MPa。
即使经过相当于大于等于550℃的薄膜形成热处理温度以上的热历史后,屈服应力(Yp)也最好设为大于等于200MPa。
其理由,如下所述。即,对太阳能电池层制膜前的基板无需作出特定限制,由于在500~800℃左右的热间过程中进行加工,所以基板接受热处理,发生软化。
本发明的化合物半导体型太阳能电池用基板,其板厚小于等于0.2mm,最好是0.025~0.05mm,由于基板厚度极薄,一旦软化,操作使用起来难度较大,因此制膜前屈服应力设为大于等于300MPa,抗张强度设为大于等于400MPa,制膜后的屈服应力设为大于等于200MPa,抗张强度设为大于等于300MPa。
<基板的制造方法>
为了使太阳能电池的Flexibility(可挠性)最大化,积层在钢带上的Cr层必须与钢带强力密接。
为此,应对积层前的钢带进行洁净化处理。即,首先,为了清除可能会对积层处理的效率或被膜的密接性和品质产生不好影响的残留油分等,使用适当的方法加以洁净化。
其次,在生产线上对钢带进行电镀处理。
<电镀处理>的条件
至于电镀处理的条件,最好列举出以下条件。
至于电镀液,可以使用硫酸液,即在铬酸(CrO3):30~250g/L中添加有硫酸(0.3g/L)的液体。另外,为了稳定析出金属Cr和氧化物Cr,最好也使用各种助化剂。
至于助化剂,可列举出例如,NaF、硫酸(硫酸液)、氟化铵等。
至于电镀条件,
电流密度:10~70A/d m2,最好是20~40A/d m2,
液温:30~60℃,最好是40~50℃,
pH:设为小于等于1(强酸)。
实施例
<实施例1>
首先,将调整为C:0.06%、Si:0.2%、Mn:1.6%、P:0.012%、S:0.010%成分的材料经过热间压延之后,进行间隔有再结晶工序的多个工序的冷间压延,最后制造出厚度约0.1mm的冷延钢带。
在钢带的单面(聚光面一侧)上,分别进行500、1000、1500、2000、3000、5000、8000mg/m2的镀Cr,在另一面(反聚光面一侧)上,进行200mg/m2的镀Cr,制成试用品。
为了获得所述500~8000mg/m2的镀Cr厚度,更改了电解时间。例如,在钢板上,为了获得2000mg/m2的镀Cr厚度,在电流密度30A/d m2下进行40sec电镀处理。其后,在真空中加热该试用品。加热温度设为550℃×30分、800℃×15分。
经过镀Cr的基板的聚光面一侧的表面粗度(Ra)是0.05μm。
图1是模式化表示化合物半导体型太阳能电池用基板的截面说明图。
表1以及表2中,表示本发明的基板经过热处理之后的镀Cr表面使用SIMS装置进行测定的元素测定结果值。
[表1]
[表2]
图2、图3中表示本发明的基板经过热处理之后的镀Cr表面的元素测定结果(使用SIMS装置进行测定)曲线图。
图2、图3中所示的结果是针对成为基板底层的钢带中Fe元素的防扩散效果进行评估的结果。
由表示评估结果的图2、图3获知:在550℃×30分条件下经过热处理时,相对于比较材料(SUS430),镀Cr厚度大于等于500mg/m2的本发明的基板,其表面的Fe量能够大幅度减少,具有Fe防扩散的效果(参照图2)。
而且,在800℃×15分条件下经过热处理时,镀Cr厚度设为大于等于2000mg/m2时,相对于比较材料,表面的Fe量也大幅度降低,具有Fe元素的防扩散效果(参照图3)。
产业上的可利用性
本发明的化合物半导体型太阳能电池用基板,其通过明确化扩散障壁层的被膜构成,防止会导致发电效率低下的钢带中的杂质元素扩散至太阳能电池层中,而且,使用电镀法作为扩散障壁层的形成方法,因此生产性良好,能够提供低价的材料,产业上的可利用性极高。
Claims (6)
1.一种化合物半导体型太阳能电池用基板,其由钢板构成,在太阳能电池层的积层面一侧上,具有被膜量为300~8000mg/m2的Cr层。
2.根据权利要求1所述的化合物半导体型太阳能电池用基板,其特征在于:由钢板构成,在太阳能电池层的积层面一侧上,具有被膜量为500~3000mg/m2的Cr层,太阳能电池层的制膜温度不足550℃。
3.根据权利要求1所述的化合物半导体型太阳能电池用基板,其特征在于:由钢板构成,在太阳能电池层的积层面一侧上,具有被膜量为2000~8000mg/m2的Cr层,太阳能电池层的制膜温度超过800℃。
4.根据权利要求1所述的化合物半导体型太阳能电池用基板,其特征在于:由钢板构成,在太阳能电池层的积层面一侧上,具有被膜量为2000~5000mg/m2的Cr层,太阳能电池层的制膜温度大于等于550℃且小于等于800℃。
5.根据权利要求1至4中任一项所述的化合物半导体型太阳能电池用基板,其钢带中的Mn成分小于等于2wt%。
6.根据权利要求1至4中任一项所述的化合物半导体型太阳能电池用基板,其钢带中的Fe成分小于等于98wt%。
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CN107851721A (zh) * | 2015-09-07 | 2018-03-27 | 杰富意钢铁株式会社 | 光电转换元件用基板 |
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- 2010-05-18 CN CN201080025477.5A patent/CN102460720B/zh not_active Expired - Fee Related
- 2010-05-18 JP JP2011515863A patent/JP5506061B2/ja not_active Expired - Fee Related
- 2010-05-18 EP EP10780216.7A patent/EP2437306A4/en not_active Withdrawn
- 2010-05-28 US US12/790,213 patent/US20100300527A1/en not_active Abandoned
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CN102460720B (zh) | 2014-10-29 |
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EP2437306A4 (en) | 2013-10-02 |
EP2437306A1 (en) | 2012-04-04 |
KR20120022905A (ko) | 2012-03-12 |
US20100300527A1 (en) | 2010-12-02 |
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