CN102427095B - Solar silicon wafer automatic wafer separator based on cyclic distribution device and wafer separation method thereof - Google Patents
Solar silicon wafer automatic wafer separator based on cyclic distribution device and wafer separation method thereof Download PDFInfo
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- CN102427095B CN102427095B CN2011102293925A CN201110229392A CN102427095B CN 102427095 B CN102427095 B CN 102427095B CN 2011102293925 A CN2011102293925 A CN 2011102293925A CN 201110229392 A CN201110229392 A CN 201110229392A CN 102427095 B CN102427095 B CN 102427095B
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Abstract
The invention discloses a solar silicon wafer automatic wafer separator based on a cyclic distribution device, which comprises a feed system, a drive system and a cyclic distribution device. The cyclic distribution device is arranged on one side of the feed system, a distribution shaft sleeve of the cyclic distribution device is connected with a plurality of vacuum generators, and each vacuum generator corresponds to one suction head assembly so that the cyclic distribution device is provided with a plurality of stations; the drive system comprises two sets of chain drive devices driven by the same driving shaft, the chain drive device No.1 drives the vacuum generators to rotate by the distribution shaft sleeve of the cyclic distribution device, and the chain drive device No.2 drives eachsuction head assembly to rotate; and a horizontal conveyor belt assembly is fixedly arranged above the drive system. According to the solar silicon wafer automatic wafer separator based on the cyclicdistribution device, disclosed by the invention, on the premise of not damaging solar silicon wafers, the solar silicon wafers can be efficiently separated, and the fragmentation rate is reduced. Theinvention further discloses a wafer separation method of the solar silicon wafer automatic wafer separator based on the cyclic distribution device.
Description
Technical field
The present invention relates to a kind of silicon chip wafer separator, be specifically related to a kind of solar silicon wafers auto plate separation machine based on the circulation air distributing device.The invention still further relates to a kind of sharding method of solar silicon wafers auto plate separation machine.
Background technology
Solar silicon wafers is finished its thickness of cutting back about 0.2mm, and owing to the gap between two solar silicon wafers is very near, easily absorption mutually is not easily separated, and silicon chip is frangible.
Summary of the invention
Technical problem to be solved by this invention provides a kind of solar silicon wafers auto plate separation machine based on the circulation air distributing device, and it can realize auto plate separation.
For solving the problems of the technologies described above, the technical solution that the present invention is based on the solar silicon wafers auto plate separation machine of circulation air distributing device is:
Comprise feed system, drive system, circulation air distributing device, one side of feed system arranges the circulation air distributing device, the distribution axle sleeve of circulation air distributing device connects a plurality of vacuum generators, and the corresponding suction nozzle assembly of each vacuum generator makes the circulation air distributing device possess a plurality of stations; Described drive system comprises the chain and sprocket driving device that two covers are driven by same driving shaft, and chain and sprocket driving device distribution axle sleeve by the circulation air distributing device drives vacuum generator and rotates, and No. two chain and sprocket driving devices drive each suction nozzle assembly rotation; The upper fixed of described drive system is provided with the horizontal conveying belt assembly.
Described drive system comprises distribution axle sleeve drive sprocket, No. two drive sprockets, No. two driving-chains, drive sprocket, driven sprocket, driving-chain, driving motor; Distribution axle sleeve drive sprocket is fixedly set on the distribution axle sleeve of circulation air distributing device, and distribution axle sleeve drive sprocket connects No. two drive sprockets by No. two driving-chains; No. two drive sprocket connects driving motor by driving shaft; Also be provided with drive sprocket on the driving shaft No. one, No. one drive sprocket is connected with two driven sprockets by a driving-chain; One of them driven sprocket be arranged at another driven sprocket directly over, this driven sprocket and a drive sprocket are horizontally disposed with.
Described feed system comprises charging box, drive link, linear electric motors, and the output shaft of linear electric motors connects an end of drive link, the fixedly connected charging box of the other end of drive link; Described charging box vertically arranges.Be provided with a plurality of guide rods between described riser and the charging box; A plurality of guide rods and drive link be arranged in parallel.
The inner chamber of the distribution axle sleeve of described circulation air distributing device is movably set with the distribution fixed axis, and the afterbody of distribution fixed axis is provided with inlet suction port; The axis body of distribution fixed axis is provided with the die cavity of fan annular, and die cavity is communicated with inlet suction port; Distribution axle sleeve upper edge circumferentially is provided with a plurality of angle couplings, and die cavity is communicated with angle coupling; Each angle coupling connects described vacuum generator respectively.
Described suction nozzle assembly comprises the sucker holder, is set with two suckers on the sucker holder, and two suckers connect the sucker fixed lever respectively; One of them sucker fixed lever is by an end of straight joint tube connector; Another sucker fixed lever connects an end of another pipe by angle coupling; The other end of pipe is used for being connected with described vacuum generator.
The present invention also provides a kind of sharding method of the solar silicon wafers auto plate separation machine based on the circulation air distributing device, and its technical solution is, may further comprise the steps:
The first step immerses feed system in the water, and silicon chip is vertically sent in the charging box of feed system;
Second step started driving motor, and driving motor drives No. two drive sprockets, a drive sprocket rotation by driving shaft, drove No. two driving-chains, a driving-chain motion; The distribution axle sleeve drive sprocket of circulation air distributing device rotates under the drive of No. two driving-chains, and distribution axle sleeve drive sprocket drives the distribution axle sleeve and connected vacuum generator rotates, and makes a certain vacuum generator turn to charging box position; Meanwhile, the suction nozzle assembly moves clockwise by fixation locus under the drive of a driving-chain, makes a certain suction nozzle assembly also move to charging box position simultaneously, and pipe and the vacuum generator of this suction nozzle assembly are connected;
The 3rd step, connect source of the gas, the circulation air distributing device passes through the vacuum generator of this station to the suction nozzle assembly air feed of this station, makes the suction nozzle assembly of this station adsorb the solar silicon wafers that is in outermost end;
The vacuum generator of described the 3rd step circulation air distributing device by this station to the method for the suction nozzle assembly air feed of this station is: gases at high pressure are by the inlet suction port air inlet, air-flow enters in the fan annular die cavity of distribution fixed axis by through hole, aperture by the distribution axle sleeve enters angle coupling again, the final vacuum generator that arrives produces vacuum, vacuum generator produces negative pressure by pipe at two sucker places again, make the suction nozzle assembly possess absorption affinity at the sucker place, draw solar silicon wafers.
In the 4th step, the suction nozzle assembly that is adsorbed with solar silicon wafers continues motion clockwise under the drive of a driving-chain;
Described the 4th step suction nozzle assembly moves to solar silicon wafers when leaving charging box position fully clockwise under the drive of a driving-chain, drive linear electric motors, promotes the distance that drive link moves forward a silicon wafer thickness; Under the drive of a driving-chain, solar silicon wafers moves to the top of horizontal conveying belt assembly.
The 5th step, when solar silicon wafers moved to the top of horizontal conveying belt assembly, circulation air distributing device automatic disconnection source of the gas made the suction nozzle assembly discharge solar silicon wafers, solar silicon wafers drops on the horizontal conveying belt assembly reposefully, and the horizontal conveying belt assembly is sent to solar silicon wafers in the loading basket; The suction nozzle assembly that discharges solar silicon wafers this moment continues motion with a driving-chain, waits for entering the next circulation of drawing.
The technique effect that the present invention can reach is:
The present invention can separate solar silicon wafers efficiently under the prerequisite of not damaging solar silicon wafers, reduce fragment rate, and can reduce the artificial pollution in the burst process, improves production efficiency and the reliability of solar panel.
Description of drawings
The present invention is further detailed explanation below in conjunction with the drawings and specific embodiments:
Fig. 1 is the schematic diagram that the present invention is based on the solar silicon wafers auto plate separation machine of circulation air distributing device;
Fig. 2 is the schematic diagram of feed system of the present invention;
Fig. 3 is the schematic diagram of circulation air distributing device of the present invention;
Fig. 4 is the cutaway view of circulation air distributing device of the present invention;
Fig. 5 is the end view of Fig. 4;
Fig. 6 is the schematic diagram of suction nozzle assembly of the present invention.
Description of reference numerals among the figure:
1 is the charging box, and 2 is solar silicon wafers,
3 is the suction nozzle assembly, and 4 is driven shaft,
5 is driven sprocket, and 6 is vacuum generator,
7 are the circulation air distributing device, and 8 is the horizontal conveying belt assembly,
9 is driving motor, and 10 is No. two drive sprockets,
11 is a drive sprocket, and 12 is driving shaft,
13 is No. two driving-chains, and 14 is a driving-chain,
15 is linear electric motors, and 16 is sucker,
17 is the sucker fixed lever, and 18 is the sucker holder,
19 is straight joint, and 20 are pipe,
21 is angle coupling, and 22 are the distribution fixed axis,
23 is locking nut, and 24 is taper roll bearing,
25 are distribution axle sleeve drive sprocket, and 26 are the distribution axle sleeve,
27 is deep groove ball bearing, and 28 is inlet suction port,
29 is drive link, and 30 is guide rod.
Embodiment
As shown in Figure 1, the present invention is based on the solar silicon wafers auto plate separation machine of circulation air distributing device, comprise feed system, drive system, circulation air distributing device 7, a side of feed system arranges the circulation air distributing device, and the circulation air distributing device is realized driving by drive system.
As shown in Figure 2, feed system comprises charging box 1, drive link 29, linear electric motors 15, and the output shaft of linear electric motors 15 connects an end of drive link 29, the fixedly connected charging box 1 of the other end of drive link 29; Linear electric motors 15 are provided with a plurality of guide rods 30 by the riser support fixation between riser and the charging box 1;
Be matched in clearance between charging box 1 and the guide rod 30; It is matched in clearance between drive link 29 and the riser;
A plurality of guide rods 30 be arranged in parallel with drive link 29;
Charging box 1 vertically arranges, so that the charging of solar silicon wafers 2.
To shown in Figure 5, circulation air distributing device 7 comprises distribution axle sleeve 26 as Fig. 3, and the inner chamber of distribution axle sleeve 26 is movably set with distribution fixed axis 22, and the head of distribution fixed axis 22 stretches out distribution axle sleeve 26 and fixedlys connected with side plate; This end of distribution fixed axis 22 is connected with an end of distribution axle sleeve 26 by taper roll bearing 24; The arranged outside of taper roll bearing 24 has locking nut 23; The middle part of distribution fixed axis 22 is connected with the inwall of distribution axle sleeve 26 by deep groove ball bearing 27; Distribution axle sleeve 26 is movably arranged on the distribution fixed axis 22 by taper roll bearing 24, deep groove ball bearing 27 and locking nut 23;
The afterbody of distribution fixed axis 22 is provided with inlet suction port 28; Distribution axle sleeve 26 upper edges circumferentially are provided with a plurality of angle couplings 21, and each angle coupling 21 connects vacuum generator 6 respectively;
The axis body of distribution fixed axis 22 is provided with the die cavity of fan annular, and die cavity is communicated with inlet suction port 28 by through hole; Die cavity is communicated with angle coupling 21 by the aperture of distribution axle sleeve 26;
Each vacuum generator 6 corresponding suction nozzle assembly 3.
As shown in Figure 6, suction nozzle assembly 3 comprises sucker holder 18, is set with 16, two suckers 16 of two suckers on the sucker holder 18 and connects sucker fixed lever 17 respectively; One of them sucker fixed lever 17 is by an end of straight joint 19 tube connectors 20, and the other end of pipe 20 is connected with vacuum generator 6; Another sucker fixed lever 17 is by an end of angle coupling 21 another pipes 20 of connection, and the other end of this pipe 20 is connected with vacuum generator 6.
Drive system comprises distribution axle sleeve drive sprocket 25, No. two drive sprockets 10, No. two driving-chains 13, drive sprocket 11, driven sprocket 5, driving-chain 14, driving motor 9;
Distribution axle sleeve drive sprocket 25 is fixedly set on the distribution axle sleeve 26, and distribution axle sleeve drive sprocket 25 connects No. two drive sprockets 10 by No. two driving-chains 13; No. two drive sprocket 10 connects driving motor 9 by driving shaft 12.
Also be provided with on the driving shaft 12 with coaxial 11, numbers drive sprockets of a drive sprocket 11 of No. two drive sprockets 10 and be connected with two driven sprockets 5 by a driving-chain 14; Two driven sprockets 5 are fixing by driven shaft 4;
One of them driven sprocket 5 be arranged at another driven sprocket 5 directly over, this driven sprocket 5 and a drive sprocket 11 are horizontally disposed with;
A plurality of suction nozzle assemblies 3 respectively by sucker holder 18 stationary distribution on driving-chain 14, make wherein that two suction nozzle assemblies 3 are in vertical station, other has two suction nozzle assemblies 3 to be in horizontal station.Be illustrated in figure 1 as six stations, circulation air distributing device 7 is by the every station angular turn of 60 degree.
Driving motor 9, driven shaft 4, horizontal conveying belt assembly 8 are fixed on the side plate.
The upper fixed of drive system is provided with horizontal conveying belt assembly 8.
Operation principle of the present invention is as follows:
The present invention is vertically immersed silicon chip in the water, sends in the charging box 1 of feed system;
Start driving motor 9, driving motor 9 drives No. two drive sprockets 10, drive sprocket 11 rotations by driving shaft 12, drives No. two driving-chains 13, driving-chain 14 motions;
The distribution axle sleeve drive sprocket 25 of circulation air distributing device 7 rotates under the drive of No. two driving-chains 13, distribution axle sleeve drive sprocket 25 drives distribution axle sleeve 26 and connected vacuum generator 6 rotates with respect to distribution fixed axis 2, make a certain vacuum generator 6 turn to charging box 1 position, the angle coupling 21 that this moment, this vacuum generator 6 connected is communicated with by the die cavity of the aperture on the distribution axle sleeve 26 with distribution fixed axis 2; Meanwhile, suction nozzle assembly 3 moves clockwise by fixation locus under the drive of a driving-chain 14, makes a certain suction nozzle assembly 3 also move to charging box 1 position simultaneously, and pipe 20 and the vacuum generator 6 of this suction nozzle assembly 3 are connected;
Connect source of the gas, circulation air distributing device 7 passes through the vacuum generator 6 of this station to suction nozzle assembly 3 air feed of this station, makes the suction nozzle assembly 3 of this station can adsorb solar silicon wafers 2, makes first solar silicon wafers 2 that is in outermost end by 3 absorption of suction nozzle assembly;
Concrete grammar is: gases at high pressure are by inlet suction port 28 air inlets, and air-flow enters in the fan annular die cavity of distribution fixed axis 2 by through hole; Aperture by distribution axle sleeve 26 enters angle coupling 21 again, finally arrives vacuum generator 6 and produces vacuum, and vacuum generator 6 produces negative pressure by pipe 20 at two sucker 16 places again, makes suction nozzle assembly 3 possess absorption affinity at sucker 16 places, draws solar silicon wafers 2.
The suction nozzle assembly 3 that is adsorbed with solar silicon wafers 2 continues motion clockwise under the drive of a driving-chain 14, solar silicon wafers 2 is moved up, other solar silicon wafers is because being immersed in the water at this moment, air between solar silicon wafers is filled by water, thereby has extracted first solar silicon wafers 2 under the souring of gravity and current out.
When solar silicon wafers 2 leaves charging box 1 position fully, drive linear electric motors 15, promote the distance that drive link 29 moves forward a silicon wafer thickness; Under the drive of a driving-chain 14, solar silicon wafers 2 moves to the top of horizontal conveying belt assembly 8;
Disconnect the source of the gas of circulation air distributing device 7, make suction nozzle assembly 3 discharge solar silicon wafers 2, solar silicon wafers 2 drops on the horizontal conveying belt assembly 8 reposefully, and horizontal conveying belt assembly 8 is sent to solar silicon wafers 2 in the loading basket; The suction nozzle assembly 3 that discharges solar silicon wafers 2 this moment continues motion with a driving-chain 14, waits for entering the next circulation of drawing.
Claims (8)
1. solar silicon wafers auto plate separation machine based on the circulation air distributing device, it is characterized in that: comprise feed system, drive system, circulation air distributing device (7), one side of feed system arranges the circulation air distributing device, the distribution axle sleeve (26) of circulation air distributing device connects a plurality of vacuum generators (6), the corresponding suction nozzle assembly (3) of each vacuum generator (6) makes the circulation air distributing device possess a plurality of stations;
Described drive system comprises the chain and sprocket driving device that two covers are driven by same driving shaft, and chain and sprocket driving device distribution axle sleeve (26) by the circulation air distributing device drives vacuum generator (6) and rotates, and No. two chain and sprocket driving devices drive each suction nozzle assembly (3) rotation;
The upper fixed of described drive system is provided with horizontal conveying belt assembly (8);
Described drive system comprises distribution axle sleeve drive sprocket (25), No. two drive sprockets (10), No. two driving-chains (13), a drive sprocket (11), driven sprocket (5), a driving-chain (14), driving motor (9); Distribution axle sleeve drive sprocket (25) is fixedly set on the distribution axle sleeve (26) of circulation air distributing device, and distribution axle sleeve drive sprocket (25) connects No. two drive sprockets (10) by No. two driving-chains (13); No. two drive sprockets (10) connect driving motor (9) by driving shaft (12); Also be provided with a drive sprocket (11) on the driving shaft (12), a drive sprocket (11) is connected with two driven sprockets (5) by a driving-chain (14); One of them driven sprocket (5) be arranged at another driven sprocket (5) directly over, this driven sprocket (5) and a drive sprocket (11) are horizontally disposed with.
2. the solar silicon wafers auto plate separation machine based on the circulation air distributing device according to claim 1, it is characterized in that: described feed system comprises charging box (1), drive link (29), linear electric motors (15), the output shaft of linear electric motors (15) connects an end of drive link (29), the fixedly connected charging box of the other end of drive link (29) (1); Described charging box (1) is vertical to be arranged.
3. the solar silicon wafers auto plate separation machine based on the circulation air distributing device according to claim 2 is characterized in that: described linear electric motors (15) are by the riser support fixation; Be provided with a plurality of guide rods (30) between described riser and the charging box (1); A plurality of guide rods (30) be arranged in parallel with drive link (29).
4. the solar silicon wafers auto plate separation machine based on the circulation air distributing device according to claim 1, it is characterized in that: the inner chamber of the distribution axle sleeve (26) of described circulation air distributing device (7) is movably set with distribution fixed axis (22), and the afterbody of distribution fixed axis (22) is provided with inlet suction port (28); The axis body of distribution fixed axis (22) is provided with the die cavity of fan annular, and die cavity is communicated with inlet suction port (28); Distribution axle sleeve (26) upper edge circumferentially is provided with a plurality of angle couplings (21), and die cavity is communicated with angle coupling (21); Each angle coupling (21) connects described vacuum generator (6) respectively.
5. the solar silicon wafers auto plate separation machine based on the circulation air distributing device according to claim 1, it is characterized in that: described suction nozzle assembly (3) comprises sucker holder (18), be set with two suckers (16) on the sucker holder 18, two suckers (16) connect sucker fixed lever 17 respectively; One of them sucker fixed lever (17) is by an end of straight joint (19) tube connector (20); Another sucker fixed lever (17) connects an end of another pipe (20) by angle coupling (21); The other end of pipe (20) is used for being connected with described vacuum generator (6).
6. the sharding method of the described solar silicon wafers auto plate separation machine based on the circulation air distributing device of a claim 1 is characterized in that, may further comprise the steps:
The first step immerses feed system in the water, and silicon chip is vertically sent in the charging box 1 of feed system;
Second step started driving motor (9), and driving motor (9) drives No. two drive sprockets (10), a drive sprocket (11) rotation by driving shaft (12), drove No. two driving-chains (13), a driving-chain (14) motion; The distribution axle sleeve drive sprocket (25) of circulation air distributing device (7) rotates under the drive of No. two driving-chains (13), distribution axle sleeve drive sprocket (25) drives distribution axle sleeve (26) and connected vacuum generator (6) rotates, and makes a certain vacuum generator (6) turn to charging box (1) position; Meanwhile, suction nozzle assembly (3) moves clockwise by fixation locus under the drive of a driving-chain (14), make a certain suction nozzle assembly (3) also move to charging box 1 position simultaneously, pipe (20) and the vacuum generator (6) of this suction nozzle assembly (3) are connected;
The 3rd step, connect source of the gas, circulation air distributing device (7) passes through the vacuum generator (6) of this station to suction nozzle assembly (3) air feed of this station, makes the suction nozzle assembly (3) of this station adsorb the solar silicon wafers (2) that is in outermost end;
In the 4th step, the suction nozzle assembly (3) that is adsorbed with solar silicon wafers (2) continues motion clockwise under the drive of a driving-chain (14);
The 5th step, when solar silicon wafers (2) moves to the top of horizontal conveying belt assembly (8), circulation air distributing device (7) automatic disconnection source of the gas, make suction nozzle assembly (3) discharge solar silicon wafers (2), solar silicon wafers (2) drops on the horizontal conveying belt assembly (8) reposefully, and horizontal conveying belt assembly (8) is sent to solar silicon wafers (2) in the loading basket; The suction nozzle assembly (3) that discharges solar silicon wafers (2) this moment continues motion with a driving-chain (14), waits for entering the next circulation of drawing.
7. the sharding method of solar silicon wafers auto plate separation machine according to claim 6, it is characterized in that, the vacuum generator (6) of described the 3rd step circulation air distributing device (7) by this station to the method for suction nozzle assembly (3) air feed of this station is: gases at high pressure pass through inlet suction port (28) air inlet, air-flow enters in the fan annular die cavity of distribution fixed axis (2) by through hole, aperture by distribution axle sleeve (26) enters angle coupling (21) again, the final vacuum generator (6) that arrives produces vacuum, vacuum generator (6) locates to produce negative pressure by pipe (20) at two suckers (16) again, make suction nozzle assembly (3) locate to possess absorption affinity at sucker (16), draw solar silicon wafers (2).
8. the sharding method of solar silicon wafers auto plate separation machine according to claim 6, it is characterized in that, described the 4th step suction nozzle assembly (3) moves to solar silicon wafers (2) when leaving charging box (1) position fully clockwise under the drive of a driving-chain (14), drive linear electric motors (15), promote the distance that drive link (29) moves forward a silicon wafer thickness; Under the drive of a driving-chain (14), solar silicon wafers (2) moves to the top of horizontal conveying belt assembly (8).
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| CN2011102293925A CN102427095B (en) | 2011-08-11 | 2011-08-11 | Solar silicon wafer automatic wafer separator based on cyclic distribution device and wafer separation method thereof |
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| CN2011102293925A CN102427095B (en) | 2011-08-11 | 2011-08-11 | Solar silicon wafer automatic wafer separator based on cyclic distribution device and wafer separation method thereof |
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| CN104555414B (en) * | 2014-11-28 | 2017-02-01 | 芜湖银星汽车零部件有限公司 | Feeding machine for pavement |
| CN104590827A (en) * | 2015-01-04 | 2015-05-06 | 无锡市源昌机械制造有限公司 | Rear-loaded ingot automatic rod pushing mechanism for flat material conveying machine |
| CN105460612A (en) * | 2015-12-31 | 2016-04-06 | 苏州博阳能源设备有限公司 | Silicon wafer separation mechanism |
| CN106115260A (en) * | 2016-08-17 | 2016-11-16 | 华天科技（昆山）电子有限公司 | Device high speed fetching device |
| CN108198912B (en) * | 2018-02-24 | 2020-01-31 | 常州亿晶光电科技有限公司 | Automatic solar cell slicing equipment |
| CN109545889A (en) * | 2018-11-12 | 2019-03-29 | 上海釜川自动化设备有限公司 | 90 degree of steering slicing apparatus of dry type and its implementation method |
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| ES2329401T3 (en) * | 2006-11-24 | 2009-11-25 | JONAS & REDMANN AUTOMATIONSTECHNIK GMBH | PROCEDURE FOR THE FORMATION OF A LOAD OF "OVER-TO-BACK" SHOULDERS TO BE POSITIONED IN A SUPPORT BOX AND HANDLING SYSTEM FOR THE FORMATION OF THE "OVER-BACK" SHOULDER LOADS. |
| CN201163620Y (en) * | 2008-01-31 | 2008-12-10 | 中芯国际集成电路制造(上海)有限公司 | Crystal boat converter capable of improving transfer flexibility |
| CN101901773B (en) * | 2010-03-17 | 2013-04-17 | 中国电子科技集团公司第四十五研究所 | Automatic loading system suitable for stacking silicon chips in automatic equipment |
| CN101866990B (en) * | 2010-06-18 | 2011-11-23 | 无锡尚德太阳能电力有限公司 | Automatic wafer ascending and descending device of quartz boat |
| CN101950778A (en) * | 2010-09-02 | 2011-01-19 | 董维来 | Solar silicon water wet-process automatic separating method |
| CN202205796U (en) * | 2011-08-11 | 2012-04-25 | 浙江大学台州研究院 | Solar silicon chip automatic wafer separator based on circulatory gas distributing device |
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