CN102416597A - Grinding device and grinding method of baseplate - Google Patents
Grinding device and grinding method of baseplate Download PDFInfo
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- CN102416597A CN102416597A CN201010297257XA CN201010297257A CN102416597A CN 102416597 A CN102416597 A CN 102416597A CN 201010297257X A CN201010297257X A CN 201010297257XA CN 201010297257 A CN201010297257 A CN 201010297257A CN 102416597 A CN102416597 A CN 102416597A
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Abstract
The invention provides a grinding device of a baseplate which can successfully grind a glass baseplate for a long time and a grinding method of the baseplate. In the invention, an intermediate piece which has high rigidity along the drawing direction compared with an adsorption piece is clamped between a film body and the adsorption piece and is adhered. Through the grinding resistance which is produced during the grinding, the film body stretches along the drawing direction, because of the stretching movement of the film body, the intermediate piece and the film body are separated from each other at times, but because the intermediate piece is positioned between the film body and the adsorption piece and does not stretch along the drawing direction, the relative departure cannot be generated between the adsorption piece which is absorbed by the glass baseplate G for limiting the stretching and the intermediate piece which has high rigidity along the drawing direction compared with the adsorption piece, so the adsorption piece can be prevented from separating and rolling up from the intermediate piece.
Description
Technical field
The present invention relates to a kind of lapping device of substrate, relate in particular to be used for grinding glass substrate and be manufactured on uses such as flat-panel monitor glass sheet substrate substrate lapping device and use the Ginding process of the substrate of this lapping device.
Background technology
One of manufacturing approach of the glass sheet substrate of using as flat-panel monitors such as LCDs, known have a manufacturing approach of using the forming process that is called float glass process.This manufacturing approach is the method that is described below, that is, it is tabular through said float glass process melten glass to be configured as, and utilizes lapping device that the small concavo-convex or fluctuating on the surface of glass plate is ground and removed afterwards, and processing thickness thus is the lamellar of 0.5～1.1mm.
The glass sheet substrate that the application's applicant proposes particularly to use with flat-panel monitor in patent documentation 1 is the lapping device of object.This lapping device to absorption is installed and keep substrate the absorption sheet film body and be equipped with between the carriage of this film body and supply with pressure fluid, the pressure that utilizes pressure fluid remains in substrate on the absorption sheet by being pressed on the grinding plate and grinding with absorption.
In addition, patent documentation 1 disclosed film body by airtight maintenance layer, intensity keep layer, and smooth layer constitute, and the absorption sheet is made up of the foamed polyurethane sheet of the porous matter with self-absorption affinity.
But, in the patent documentation 1 disclosed lapping device, existing in the grinding of substrate, the absorption sheet is peeled off and is rolled and make the damaged problem of substrate from film body.About the substrate damage reasons that takes place in grinding, the application's applicant utilizes physical device to make an experiment, and attentively analyzes, and the result finds out by following phenomenon and produces.
That is, film body is because the relation of in substrate grinds, bearing the grinding resistance that produces between substrate and the grinding plate is born draw direction (direction of extension: the power face direction) from grinding plate.In addition, in the grinding, the rotation of carriage and grinding plate, so film body bears by above-mentioned power repeatedly power flexible on draw direction, and flexible on draw direction.
At this, be adhered on the film body and than the soft absorption sheet of this film body as long as carry out expanding-contracting action along with the flexible of film body, then no problem.But absorption maintains substrate on the sheet owing to adsorb, and the expanding-contracting action that promptly adsorbs sheet receives the restriction of substrate, therefore restriction absorption sheet stretching on draw direction.Because this type of phenomenon, produce relative depature between flexible film body and the flexible absorption sheet, because this departs from, the circumference of absorption sheet is slowly peeled off from film body.And when this released part increased, released part was rolled in grinding.Such trouble can cause the breakage of substrate, therefore needs maintenance.
Patent documentation 1: (Japan) spy opens the 2004-122351 communique
Summary of the invention
The present invention is in view of the above problems and accomplishes, its purpose be to provide can be for a long time successfully to substrate carry out attrition process substrate lapping device and use the Ginding process of the substrate of this lapping device.
To achieve these goals; The present invention provides a kind of lapping device of substrate; To absorption is installed and keep substrate the absorption sheet film body and be equipped with between the carriage of this film body and supply with pressure fluid; Utilize the pressure of said pressure fluid to be ground by being pressed on the grinding plate by the substrate that said absorption sheet absorption keeps; It is characterized in that, between said film body and said absorption sheet, be bonded with intermediate, the rigidity of the draw direction of this intermediate is higher than the rigidity of the draw direction of said absorption sheet.
Among the present invention, between film body and absorption sheet, be bonded with intermediate.Therefore, owing to because of grinding the expanding-contracting action of film body on draw direction that resistance causes, peel off between intermediate and the film body sometimes, but relative depature does not take place between intermediate and the absorption sheet.This is that the rigidity of draw direction is high and flexible at draw direction because the absorption sheet is because the absorption restriction of substrate is stretched, and intermediate is compared with the absorption sheet.Its result, the absorption sheet can not peeled off from intermediate, can prevent to adsorb sheet and peel off and roll.
In the preferred implementation of the present invention; Said absorption sheet is made up of polyurathamc, and said intermediate can use the intermediate that is made up of Merlon, esters of acrylic acid, aluminium, stainless steel, glass or carbon fiber reinforced plastic (CFRP:Carbon Fiber Reinforced Plastic).Through utilizing these made intermediates, can be provided at the higher intermediate of rigidity that on draw direction, does not stretch in the substrate grinding.If said intermediate is made up of Merlon more preferably.
In addition, except these materials, but acrylonitrile-butadiene-styrene copolymer), fiber-reinforced plastic (FRP:FiberReinforced Plastic) illustration ABS (Acrylonitrile ButadieneStyrene: also.
In addition, the present invention provides a kind of Ginding process of substrate, it is characterized in that, uses said lapping device that substrate is ground.
According to the lapping device of substrate of the present invention and the Ginding process of substrate; Because the rigidity of draw direction is clipped between film body and the absorption sheet than the high intermediate of absorption sheet; Even therefore film body is flexible on draw direction; Intermediate can not stretch on draw direction yet, therefore adsorbs between sheet and the intermediate and relative depature can not take place, and can prevent to adsorb sheet and peel off and roll from intermediate.Thus, can utilize lapping device successfully substrate to be ground for a long time.
Description of drawings
Fig. 1 is the integrally-built plane of the lapping device of expression first embodiment;
Fig. 2 is the side view of the embodiment of expression grinding head and grinding table;
Fig. 3 is the installation stereogram of grinding head;
Fig. 4 is the key diagram of three-decker of the film body of expression film frame;
What Fig. 5 was an expression film frame with respect to the construct for handling of slip ring wants portion's amplification profile;
Fig. 6 is the side view that the configuration of expression film body, intermediate, absorption sheet constitutes.
The specific embodiment
Below, be elaborated according to the preferred implementation of accompanying drawing to the Ginding process of the lapping device of substrate of the present invention and substrate.
The lapping device 10 of substrate shown in Figure 1 is that (for example surpass 2000mm on one side, thickness is that 0.5mm～one side 1.1mm) grinds to form the lapping device of the needed flatness of liquid crystal display glass substrate with large-scale glass substrate G.
This lapping device 10 is being that staple constitutes like lower component: the conveyer belt 12 of carrying the glass substrate G before grinding; Be used for glass substrate G is pasted the workbench 16 that is fixed in film frame 14; First grinding table 18; Second grinding table 20; Be used for to grind the workbench 22 that the glass substrate G after finishing unloads from film frame 14; Glass substrate is seen conveyer belt 24 off; Film frame rinsing table 26; Film frame drying table 28; And the film frame is sent conveyer belt 30 back to.
In addition, in lapping device 10, be provided with from workbench 16 to the transport 150 of first grinding table, 18 transport membrane frames 14, from first grinding table 18 to the transport 152 of second grinding table, 20 transport membrane frames 14, and from the transport 154 of second grinding table 20 to workbench 22 transport membrane frames 14.
On workbench 16, at first, glass substrate G is held in film frame 14.Then this maintenance method is described.It is that not shown lowering or hoisting gear keeps that film frame 14 is pasted solid unit at workbench 16 by glass substrate; Glass substrate G be positioned at film frame 14 below the time; Film frame 14 descends through lowering or hoisting gear and moves, with the film body 38 of the Fig. 2 that is layed in film frame 14 by being pressed on the glass substrate G.
In the lower surface bonds of film body 38 the polyurathamc system absorption sheet 200 of the porous matter property of oneself's absorption glass substrate G is arranged, and the intermediate 210 of Merlon system is between this absorption sheet 200 and film body 38, and is adhered on absorption sheet 200 and the film body 38.
Glass substrate G is pressed on absorption sheet 200 through the pressing force based on above-mentioned lowering or hoisting gear, and is adsorbed maintenance through absorption sheet 200.Afterwards, film frame 14 remains in the transport 150 of Fig. 1, carries to first grinding table 18 of Fig. 3, is installed on carriage 52 at this place.
This film body 38 constitutes the double-decker that keeps layer 44, intensity to keep layer 46 to form by airtight like Fig. 4.Airtight maintenance layer 44 is like Fig. 2 and shown in Figure 5, the lower, outer perimeter ring portion 53 that is pasted on carriage 52 for its peripheral part and the air chamber 54 of carriage 52 between the bubble-tight sheet material of maintenance.But material illustration rubber-like, silicone, fluorine-type resin, polyvinyl chloride vinyl such as (PVC), nylon-type and carbamate etc. as sheet material.In addition, to keep layer 46 be to keep the airtight sheet material that keeps layer 44 and have the hot strength that can tolerate the regulation of laying the whole tension force of film body 38 to the intensity of Fig. 4.In addition, in its lower surface bonds intermediate 210 is arranged.As this bonding agent, can suitably utilize employed bonding agent of film body etc. in the past, for example, can preferably use carbamates bonding agent or epoxies bonding agent.
The material that keeps layer 46 as intensity; Be aromatic polyamide fibre, stainless steel throwing net, steel woven wire, carbon fiber, glass fibre, nylon fiber, sheet metal, resin flake etc., aromatic polyamide fibre is because few and preferred with respect to the stretching, extension of pulling force.
Then, grinding head shown in Figure 3 50 is described, first grinding table 18 grinding head 50 and the grinding head 50 of second grinding table 20 be same structure, therefore mark identical label and describe.
Grinding head 50 constitutes the output shaft that motor is built in main body case 51 and this motor and is linked to the main shaft 56 that hangs down in vertical direction.Carriage 52 is linked to this main shaft 56.In addition, main body case 51 is linked to slide block 158 via elevating mechanism 156.Through this elevating mechanism 156; Main body case 51 goes up and down with respect to slide block 158; Carriage 52 can move with respect to grinding pad 60 advance and retreat of the grinding pad 58 of first grinding table 18 and second grinding table 20 thus, and with the grinding pressure of regulation subsides is fixed in glass substrate G on the film frame 14 by being pressed on the grinding pad 58,60.
In addition, main body case 51 is linked to not shown revolution driving mechanism, also has the function that revolves round the sun with the revolution radius of stipulating.In addition, this revolution driving mechanism also can be through at main body case 51 built-in planetary gears and the output shaft of planetary gears is linked to main shaft 56 constitutes.More than, be the formation of each grinding table 18,20, through these grinding tables 18,20, G grinds to glass substrate, removes the small concavo-convex or fluctuating on the surface of glass substrate G.
On the other hand, straight action- oriented spare 70,70 is installed on the slide block 158 of first grinding table 18.Straight action- oriented spare 70,70 is embedded in guide rail 72,72.This guide rail 72,72 is as shown in Figure 1 towards to the main shaft 56 of first grinding table 18, maintenance platform 74 that carriage 52 keeps in repair and be provided with.
In addition, as shown in Figure 2, straight action- oriented spare 70,70 is installed on the slide block 158 of second grinding table 20 too, straight action- oriented spare 70,70 is embedded in guide rail 160,160.This guide rail 160,160 is as shown in Figure 1 towards to the main shaft 56 of second grinding table 20, maintenance platform 76 that carriage 52 keeps in repair and be provided with.
The carriage 52 upper periphery portions that enhancing ring 78 are fixed on carriage 52 through not shown bolt as shown in Figure 2.Enhancing ring 78 from the outstanding flange part of the peripheral part of carriage 52; On concentric circles, equally spaced form a plurality of through holes 80,80 ..., the outstanding slip ring suspender that is provided with of the upper surface of slip ring 82 84 as shown in Figure 5 from below connect these through holes 80,80 ...In addition, 84 perforations of slip ring suspender are disposed at enhancing ring 78 and promote with the lifting spring 88 between the butterfly spring 86, and connect the through hole 90 that promotes with butterfly spring 86, and are linked to screw jack 92.
Therefore, make screw jack 92 action, and make 84 opposings of slip ring suspender promote the active force of springs 88 and when upwards promoting, slip ring 82 is raised with respect to carriage 52.Thus, the film frame 14 that loading and unloading freely are installed on slip ring 82 is raised, and applies the tension force of regulation to film body 38.
When tension force is given automation, prepare and use a plurality of film frames 14 and film body 38.But; Because there is individual difference in film body 38 with respect to the initial tension of film frame 14; There is a plurality of film body 38,38 in addition ... Initial tension there are differences because of the difference of service time, therefore be difficult to give identical use tension force to film body 38 with any tension force individual difference.In addition, if apply excessive tension force, then exist to cause film body 38 or the damaged danger of peripheral equipment to film body 38.In order to address this problem, keep watch on the amount of contraction (enhancing ring 78 and lifting are with the interval between the butterfly spring 86) that promotes spring 88.That is, not only keep watch on the lifting capacity of screw jack 92, the tension force of in fact giving film body 38 is measured through keeping watch on the amount of contraction that promotes spring 88.Owing to have this lifting spring 88, therefore can solve the problem that applies certain tension force and prevent to apply hightension to film body 38 simultaneously to film body 38.In addition; In order to be set at certain tension force, need to measure the amount of contraction that promotes spring 88, as the means of one of them; Calculate moment of torsion from the current value that is linked to the not shown motor of screw jack 92 via line shaft 96; Obtain the lifting force of screw jack 92 indirectly, and it is managed, can keep watch on the tension force of giving film body 38 thus.Line shaft 96 is axles that the driving force of above-mentioned motor is transmitted to screw jack 92.In addition, label 94 is to be used to bear at enhancing ring 78 and the latch of the reaction force of the lifting spring 88 that produces between promoting with butterfly spring 86.
On carriage 52, be formed with a plurality of jets 98,98 that spray compressed air (pressure fluid) to the air chamber 54 of Fig. 5 ...These jets 98,98 ... Via the top air chamber 100 that is formed at carriage 52, be communicated with the air supply passageway 102 shown in the dotted line on Fig. 3.Air supply passageway 102 extends setting via the not shown swivel coupling that is installed on the grinding head 50 to the outside of grinding head 50, is connected in air pump 106 via valve 104.Therefore, when opening valve 104, from the compressed air of air pump 106 via air supply passageway 102, air chamber 100, and jet 98 supply with to air chamber 54.Thus, compressed-air actuated pressure transmits to glass substrate G via film body 38, through this pressure, glass substrate G is ground by being pressed on the grinding pad 58,60.
On the other hand; As shown in Figure 2; On the upper ledge 40 of film frame 14; On concentric circles, equally spaced give prominence to and be provided with a plurality of pins 108,108 ..., and be fastened on the hook 112 of the bottom that is fixed on slip ring 82 through the head 110 that will be formed at these pin big footpaths upper end, shown in Figure 5 of 108, and film frame 14 is installed on slip ring 82.The reaction force of the film body 38 of the fastening power of head 110 and hook 112 owing to utilizing screw jack 92 to hold up film body 38 becomes firmly, and the grinding resistance that bears from film body 38 during grinding can not come off head 110 from hook 112.
After second grinding table 20 shown in Figure 1 finishes the grinding of glass substrate G, at this, film frame 14 is unloaded from carriage 52, and carry to workbench 22 through transport 154.For the method that film frame 14 is unloaded from carriage 52, at first, make screw jack shown in Figure 5 92 to unscrewing the direction action, remove the tension force of film body 38.Then, make film frame 14 with respect to carriage 52 rotation predetermined angulars, and head 110 is unloaded from hook 112.Thus, film frame 14 is unloaded from carriage 52.
On workbench shown in Figure 1 22, strip down the glass substrate G that grinds after finishing from the film frame 14 that transports by transport 154.Glass substrate G by under stripping carries through conveyer belt 138; And, be installed in adsorption head 144 absorption on the mechanical arm 142 of robot 140, and the action through robot 140; Take out of with conveyer belt 24 transfers to glass substrate, be delivered to the outside of lapping device 10.
The film frame 14 that strips lower glass substrate G is delivered to film frame rinsing table 26 through conveyer belt 146, carries out water at this and cleans.The film frame 14 that cleans after finishing is delivered to film frame drying table 28 through conveyer belt 148, carries out heat drying at this.Film frame 14 behind dry the end is sent conveyer belt 30 back to through the film frame and is delivered to workbench 16, and the subsides that are used in glass substrate G again are solid.The integral body that more than is lapping device 10 constitutes.
At this; Than in the soft absorption sheet 200 of film body 38 and the directly bonding structure in the past of film body 38, when observing the movement of the absorption sheet 200 in grinding, absorption sheet 200 is as long as carry out expanding-contracting action along with the flexible of film body 38; Then no problem; But absorption maintains substrate G on the absorption sheet 200, and the expanding-contracting action that therefore promptly adsorbs sheet 200 receives the restriction of substrate G, and therefore the draw direction of restriction absorption sheet 200 is flexible.Because this type of phenomenon, produce relative depature between flexible film body 38 and the flexible absorption sheet 200, because this departs from, the circumference of absorption sheet 200 is slowly peeled off from film body 38, and this is stripped from part when increasing, released part is rolled in grinding.
So, as shown in Figure 6 in the structure of embodiment in order to prevent such trouble, will be clipped between film body 38 and the absorption sheet 200 with the high intermediate 210 of rigidity that absorption sheet 200 compared draw direction and carry out bonding.
According to this structure; Film body 38 is because the grinding resistance that produces in grinding is flexible on draw direction as previously mentioned; But because therefore intermediate 210 owing to the expanding-contracting action of film body 38, is peeled off between intermediate 210 and film body 38 between film body 38 and absorption sheet 200 sometimes; But between intermediate 210 and absorption sheet 200; Between rigidity that the absorption because of glass substrate G restricts flexible absorption sheet 200 and the draw direction intermediate 210 higher,, therefore can not produce relative depature because intermediate 210 is flexible on draw direction than absorption sheet 200.Thus, absorption sheet 200 can not peeled off from intermediate 210, therefore can prevent to adsorb sheet 200 and peel off and roll.
Therefore, according to the lapping device 10 of embodiment, can successfully grind for a long time glass substrate G.
In addition, in the embodiment, the raw material of intermediate 210 being made as Merlon, but being not limited thereto, also can be esters of acrylic acid, aluminium, stainless steel, glass or carbon fiber reinforced plastic.In addition, except these material, but acrylonitrile-butadiene-styrene copolymer), FRP (FiberReinforced Plastic: fiber-reinforced plastic) illustration ABS (AcrylonitrileButadiene Styrene: also.
In addition, owing to, therefore can remove the smooth layer that is adhered to intensity maintenance layer 46, can cut down the cost of film body 38 for forming film body 38 and intermediate 210 is adhered to the structure that intensity keeps layer 46 by airtight layer 44, the intensity maintenance layer 46 of keeping.
The applicable grinding of the present invention at the glass substrate that is used for making employed glass sheet substrates such as flat-panel monitor.
In addition, quote the full content of Japanese patent application 2005-239040 specification, claim scope, accompanying drawing and the summary of on August 19th, 2005 application, adopt as the content of specification of the present invention at this.
Claims (6)
1. the lapping device of a substrate; To absorption is installed and keep substrate the absorption sheet film body and be equipped with between the carriage of this film body and supply with pressure fluid; Utilize the pressure of said pressure fluid to be ground by being pressed on the grinding plate by the substrate that said absorption sheet absorption keeps; It is characterized in that
Between said film body and said absorption sheet, be bonded with intermediate,
The rigidity of the draw direction of this intermediate is higher than the rigidity of the draw direction of said absorption sheet.
2. the lapping device of substrate as claimed in claim 1, wherein,
Said absorption sheet is made up of polyurathamc,
Said intermediate is made up of Merlon, esters of acrylic acid, aluminium, stainless steel, glass or carbon fiber reinforced plastic.
3. the lapping device of substrate as claimed in claim 2, wherein,
Said intermediate is made up of Merlon.
4. like the lapping device of each described substrate in the claim 1～3, wherein,
Said absorption sheet is bonding with the film body that is layed on the carriage via intermediate.
5. like the lapping device of each described substrate in the claim 1～4, wherein,
Said film body constitutes the double-decker that keeps layer and intensity to keep layer to form by airtight, and intermediate is adhered to the lower surface that said intensity keeps layer.
6. the Ginding process of a substrate is characterized in that,
Use the lapping device of each described substrate in the claim 1～5 that substrate is ground.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010297257XA CN102416597A (en) | 2010-09-28 | 2010-09-28 | Grinding device and grinding method of baseplate |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010297257XA CN102416597A (en) | 2010-09-28 | 2010-09-28 | Grinding device and grinding method of baseplate |
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| CN102416597A true CN102416597A (en) | 2012-04-18 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103659572A (en) * | 2012-09-05 | 2014-03-26 | 三星康宁精密素材株式会社 | Edge grinding apparatus and method for grinding glass substrate |
| CN103962907A (en) * | 2014-05-06 | 2014-08-06 | 腾辉电子（苏州）有限公司 | Semi-automatic edge grinding machine and method for grinding base plate through same |
| CN110509179A (en) * | 2018-05-21 | 2019-11-29 | 株式会社荏原制作所 | The manufacturing method of base plate keeping device, substrate grinding device, elastic component and base plate keeping device |
| CN112936039A (en) * | 2021-01-27 | 2021-06-11 | 南京晓庄学院 | Carbon-fibre composite chemical production surface treatment device |
-
2010
- 2010-09-28 CN CN201010297257XA patent/CN102416597A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103659572A (en) * | 2012-09-05 | 2014-03-26 | 三星康宁精密素材株式会社 | Edge grinding apparatus and method for grinding glass substrate |
| CN103659572B (en) * | 2012-09-05 | 2016-08-17 | 康宁精密素材株式会社 | Edge grinding apparatus and method for grinding a glass substrate |
| CN103962907A (en) * | 2014-05-06 | 2014-08-06 | 腾辉电子（苏州）有限公司 | Semi-automatic edge grinding machine and method for grinding base plate through same |
| CN110509179A (en) * | 2018-05-21 | 2019-11-29 | 株式会社荏原制作所 | The manufacturing method of base plate keeping device, substrate grinding device, elastic component and base plate keeping device |
| CN112936039A (en) * | 2021-01-27 | 2021-06-11 | 南京晓庄学院 | Carbon-fibre composite chemical production surface treatment device |
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Application publication date: 20120418 |