CN102412277B - 一种BiCMOS工艺中的VPNP器件结构及其制造方法 - Google Patents
一种BiCMOS工艺中的VPNP器件结构及其制造方法 Download PDFInfo
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US5880002A (en) * | 1995-12-06 | 1999-03-09 | Texas Instruments Incorporated | Method for making isolated vertical PNP transistor in a digital BiCMOS process |
US20030082882A1 (en) * | 2001-10-31 | 2003-05-01 | Babcock Jeffrey A. | Control of dopant diffusion from buried layers in bipolar integrated circuits |
US20070023866A1 (en) * | 2005-07-27 | 2007-02-01 | International Business Machines Corporation | Vertical silicon controlled rectifier electro-static discharge protection device in bi-cmos technology |
CN102412278B (zh) * | 2010-09-26 | 2014-08-13 | 上海华虹宏力半导体制造有限公司 | 锗硅BiCMOS工艺中垂直型PNP三极管及制造方法 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20131219 |
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Effective date of registration: 20131219 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Shanghai, Pudong, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |