CN102407352B - Cutting tool having rigid surface covering layer having excellent toughness and cutter fracturing resisting capacity - Google Patents

Cutting tool having rigid surface covering layer having excellent toughness and cutter fracturing resisting capacity Download PDF

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CN102407352B
CN102407352B CN201110273405.9A CN201110273405A CN102407352B CN 102407352 B CN102407352 B CN 102407352B CN 201110273405 A CN201110273405 A CN 201110273405A CN 102407352 B CN102407352 B CN 102407352B
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layer
upper layer
thickness
average grain
grain diameter
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CN102407352A (en
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龙冈翔
富田兴平
长田晃
中村惠滋
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Mitsubishi Materials Corp
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Mitsubishi Materials Corp
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Abstract

The invention provides a cutting tool having a rigid surface covering layer having an excellent toughness and cutter fracturing resisting capacity in high speed heavy cutting processing. The cutting tool has excellent wear resisting performance in long term use. In the invention, a (a) lower layer constituted of Ti compounds and an (b) upper layer constituted of an aluminum oxide layer are formed on the surface of a tool body composed of a WC rigid alloy and a TICN-base metal porcelain through evaporation. The average grain diameter D in thickness range areas is obtained when the thickness range interval in a thickness direction of an upper layer is taken as 0.02 micro meters. And that a plurality of areas form alternately along the thickness direction of the upper layer by a thickness range area having an average grain diameter of 0.5 to 1.5 micro meters and a thickness range area having an average grain diameter of 0.05 to 0.3 micro meters. Thus, the aluminum oxide in the upper layer is provided with grain structures having average grain diameters changing periodically in a period of 0.5 to 5 micro meters along the thickness direction.

Description

Hard coating layer possesses excellent toughness, the resistance to surface-coated cutting tool collapsing cutter
Technical field
The present invention relates to a kind of surface-coated cutting tool (hereinafter referred to as coating tool), to produce with high heat and high capacity acts in the various steel of blade or the high speed heavy cut processing of cast iron, hard coating layer possesses excellent toughness and resistance toly collapses cutter, thus in Long-Time Service, play excellent cutting ability.
Background technology
In the past, usually there will be a known the coating tool forming the hard coating layer be made up of following (a) and (b) on the surface of the matrix (below these being generically and collectively referred to as tool base) be made up of tungsten carbide (representing with WC below) base cemented carbide or titanium carbonitride (representing with TiCN below) based ceramic metal
A () lower layer is carbide (representing with the TiC below) layer of Ti, the two-layer above Ti compound layer formed in nitride (same below represent with TiN) layer, carbonitride (representing with TiCN below) layer, oxycarbide (representing with TiCO below) layer and carbon nitrogen oxide (representing with TiCNO below) layer that are formed by chemical vapor deposition
B () upper layer is that the aluminium oxide that chemical vapor deposition is formed (uses Al below 2o 3represent) layer, this coating tool known is used in the machining of various steel or cast iron etc.
But, because the cutting ability of above-mentioned coating tool especially can because forming the Al of upper layer 2o 3the institutional framework of crystal grain and being a greater impact, therefore proposes several motion for the grain structure structure of upper layer in the past.
Such as, propose in patent document 1 at the Al forming upper layer 2o 3layer film forming time, to importing HCl gas in stove and etching in its film forming procedure, carry out new Al 2o 3the karyogenesis of particle, by repeatedly carrying out this operation, forms Al 2o 3the non-columnar crystalline substance tissue of crystal grain is with the toughness improving upper layer.
In addition, propose in patent document 2 at the Al forming upper layer 2o 3layer film forming time, in its film forming procedure, temporarily stop Al 2o 3film forming, import TiCl in stove 4gas also carries out new Al 2o 3the karyogenesis of particle, is formed by the Al of coarse grain 2o 3with the Al of particulate 2o 3line and staff control form upper layer.
And then, propose in patent document 3 at the Al forming upper layer 2o 3layer film forming time, in its film forming procedure, periodically SiCl is imported to stove 4gas also makes ultra micron layer growth, thus to wait axle to be formed by the κ-Al of particulate 2o 3the upper layer of organizational composition is to improve mar proof.
Patent document 1: Japanese Patent Publication 1-83667 publication
Patent document 2: Japanese Patent Publication 2002-205205 publication
Patent document 3: Japanese Patent Publication 2003-39212 publication
Present situation is as follows: in recent years, the requirement of the saving labourization in machining and energy-saving is strengthened, with this point, coating tool uses under more harsh condition, but such as in the coating tool shown in described patent document 1 ~ 3, produce with high heat and high capacity act on use in the high speed heavy cut processing of blade time, insufficient due to the toughness of upper layer, cause, because high capacity during machining causes blade easily to collapse cutter, consequently reaching service life in the short period of time.
Summary of the invention
Therefore, the present inventors from the above point of view, even if to produce with high heat and high capacity act on use in the high speed heavy cut processing of blade time, hard coating layer also possesses excellent toughness, resistance toly collapses cutter, and the coating tool also playing excellent mar proof in Long-Time Service conducts in-depth research, result obtains following opinion.
That is, the present inventors find the hard coating layer of coating tool, particularly passing through will by Al 2o 3the grain structure Structure composing of upper layer that layer is formed is the line and staff control of columnar structure and fine particle tissue, and is configured to the grain structure structure that this columnar structure and fine particle tissue periodically alternately occur on thickness direction, thus makes by Al 2o 3high temperature hardness and the heat resistance of the upper layer that layer is formed are not subject to any loss, and can improve the toughness of upper layer and resistance toly collapse cutter.
And, there is the Al of above-mentioned grain structure structure 2o 3layer is such as by following chemical vapor deposition method film forming.
A () forms the lower layer of the target thickness be made up of common Ti compound layer at tool base surface evaporation,
B () uses AlCl on lower layer 3-HCl-H 2s-CO 2be that reacting gas evaporation forms Al 2o 3layer,
C (), in the film forming procedure of above-mentioned (b), stops the importing of above-mentioned reacting gas, imports SF simultaneously 6be that gas carries out SF 6etching,
D () then, carries out above-mentioned (b) operation and above-mentioned (c) operation repeatedly, form the Al of target thickness 2o 3layer.
By above-mentioned (a) ~ (d), lower layer and the upper layer of target thickness is formed on tool base surface, when structure observation being carried out to above-mentioned upper layer with transmission electron microscope, confirm to be formed to be made up of the line and staff control of columnar structure and fine particle tissue, and the grain structure structure that this columnar structure and fine particle tissue periodically alternately occur on thickness direction.
And find, as the upper layer of hard coating layer, evaporation forms the Al with above-mentioned grain structure structure 2o 3even if the coating tool of the present invention of layer produce with high heat and high capacity act on use in the steel of blade or the high speed heavy cut processing of cast iron time, hard coating layer also possesses excellent toughness, resistance toly collapses cutter, and in Long-Time Service, also play excellent mar proof.
The present invention completes based on above-mentioned opinion, has following feature:
(1) surface-coated cutting tool, is characterized in that, comprises the hard coating layer of following (a), (b) at the surface chemistry evaporation of the tool base be made up of tungsten carbide base carbide alloy or base titanium carbonitride,
A () lower layer is by the one deck in the carbide lamella of Ti, nitride layer, carbonitride layer, oxycarbide layer and carbon nitrogen oxide layer or two-layerly above forms, and the Ti compound layer of the average thickness of the total with 1 ~ 20 μm,
B () upper layer is have the alumina layer that average thickness is 1 ~ 25 μm,
The aluminium oxide forming the upper layer of above-mentioned (b) has average grain diameter carries out mechanical periodicity with the cycle of 0.5 ~ 5 μm grain structure structure along thickness direction.
(2) surface-coated cutting tool Gen Ju (1), it is characterized in that, the upper layer of above-mentioned (b) and tool base surface are divided into abreast the thickness amplification zone (thick み Fu Collar territory) of 0.02 μm, measure the number of grain boundaries being present in this thickness amplification zone, using the inverse of the number of grain boundaries of every 1 μm as average grain diameter D, when obtaining the change of the average grain diameter D of each thickness amplification zone along thickness direction
To be the thickness amplification zone of 0.5 ~ 1.5 μm and average grain diameter D be average grain diameter D that the thickness amplification zone of 0.05 ~ 0.3 μm is at least alternately formed with multiple region along the thickness direction of upper layer, thus the aluminium oxide forming upper layer has average grain diameter D carries out mechanical periodicity with the cycle of 0.5 ~ 5 μm grain structure structure along thickness direction.
The present invention is described in detail below.
The Ti compound layer of lower layer:
The lower layer be made up of the one deck in the carbide lamella of Ti, nitride layer, carbonitride layer, oxycarbide layer and carbon nitrogen oxide layer or two-layer above Ti compound layer can be formed under common chemical vapor deposition condition, itself has elevated temperature strength, therefore hard coating layer possesses elevated temperature strength, in addition, also have and be attached to tool base all securely and by Al 2o 3the upper layer formed, have thus and contribute to improving the effect to the tack of the tool base of hard coating layer, if but it adds up to average thickness just can not give full play to described effect less than 1mm, if it adds up to average thickness more than 20 μm on the other hand, then easily collapse cutter, so added up to average thickness to be decided to be 1 ~ 20 μm.
The Al of upper layer 2o 3layer:
Know the Al forming upper layer already 2o 3layer possesses high temperature hardness and heat resistance, but of the present invention by Al 2o 3layer form upper layer, namely by having Al 2o 3the average grain diameter of layer is along the Al of the grain structure structure of thickness direction mechanical periodicity 2o 3even if layer upper layer formed acts in the high speed heavy cut processing of blade in high capacity, also play excellent toughness and collapse cutter with the resistance to of excellence.
In addition, of the present invention by Al 2o 3the upper layer that layer is formed, when its average thickness is less than 1 μm, can not guarantee the mar proof through Long-Time Service, on the other hand, if its average thickness is more than 25 μm, then and Al 2o 3crystal grain is easy to coarsening, and its result is except high temperature hardness, elevated temperature strength decline, and the resistance to cutter that collapses that high speed heavy cut adds man-hour also declines, and therefore its average thickness is decided to be 1 ~ 25 μm.
Upper layer (Al 2o 3layer) film forming:
Upper layer of the present invention can under with common chemical vapor deposition condition the surface of the lower layer of film forming such as by following chemical vapor deposition condition film forming.
First, use common chemical evaporation plating device, evaporation 30 ~ 60 minutes under (a) condition, evaporation forms the Al of predetermined thickness 2o 3layer,
(a) reacting gas composition (capacity %):
AlCl 3:2~3%,
CO 2:5~6%,
HCl:2~3%,
H 2S:0.1~0.5%,
H 2: residue
Reaction atmosphere temperature: 960 ~ 1000 DEG C,
Reaction atmosphere pressure: 40 ~ 60Torr.
B () then, stops the importing of above-mentioned reacting gas, replace to import to add SF with the gas composition of 0.1 ~ 2 capacity % 6the H of gas 2gas, by this SF 6gas carries out the SF of 5 ~ 60 minutes under the following conditions 6etching, namely
Reacting gas composition (capacity %):
SF 6:0.1~2%
H 2: residue
Reaction atmosphere temperature: 800 ~ 1200 DEG C,
Reaction atmosphere pressure: 50 ~ 200Torr.
C () then, stops above-mentioned SF 6be the importing of gas, import the reacting gas of above-mentioned (a) in device, evaporation 30 ~ 60 minutes under the condition identical with above-mentioned (a), evaporation forms Al again 2o 3layer.
Below, repeatedly carry out above-mentioned (b) and (c), final evaporation forms the Al of target thickness 2o 3layer.
Upper layer (Al 2o 3layer) grain structure structure:
Fig. 1 represents the upper layer (Al of the present invention formed under above-mentioned chemical vapor deposition condition 2o 3layer) the simplified diagram of grain structure structure.
As shown in Figure 1, at upper layer (Al of the present invention 2o 3layer) in, the Al of columnar structure 2o 3crystal grain forms multistage on thickness direction, and at the columnar structure Al up and down of each section 2o 3the border of crystal grain possesses the Al of fine particle tissue 2o 3the institutional framework formed assembled by crystal grain.
Fig. 2 represents that the present invention formed under above-mentioned chemical vapor deposition condition has the upper layer (Al of grain structure structure 2o 3layer) in the distribution map of average grain diameter.
The distribution map of this average grain diameter can be obtained by following method.
First, thickness amplification zone upper layer being divided into respectively abreast 0.02 μm with tool base surface (in Fig. 3, is equivalent to the thickness amplification zone of 0.02 μm by with the interval split of many parallel lines of the tool base parallel extraction in surface.), with transmission electron microscope (multiplying power 50000 times) with the number of grain boundaries n adding up to 10 μm of mensuration to be present in each thickness amplification zone of division, this n is scaled the number of grain boundaries N (=n/10) of every 1 μm, obtain the inverse of its scaled value as average grain diameter D (=1/N), by being plotted in the average grain diameter D that each thickness amplification zone is obtained along thickness direction, thus be made the thickness orientation average grain size distribution shown in Fig. 2.
And, according to upper layer (Al of the present invention 2o 3layer) grain structure structure, in this thickness orientation average grain size distribution, the thickness amplification zone of the value of average grain diameter D to be thickness amplification zone and the value of average grain diameter D of maximum (in the scope of 0.5 ~ 1.5 μm) be minimum (scope of 0.05 ~ 0.3 μm is interior) at least alternately forms multiple region periodically along the thickness direction of upper layer.
Such as, in fig. 2, the value of average grain diameter D illustrates that the thickness amplification zone of maximum Dmax (in the scope of 0.5 ~ 1.5 μm) forms 3 places on thickness direction, in addition, the value of average grain diameter D illustrates that the thickness amplification zone of minimum Dmin (in the scope of 0.05 ~ 0.3 μm) forms 3 places on thickness direction.
And, from this thickness orientation average grain size distribution, at upper layer (Al of the present invention 2o 3layer) in, form Al along thickness direction 2o 3the grain structure structure of the average grain diameter mechanical periodicity of crystal grain.
The present invention is by Al 2o 3the period of change of the average grain diameter reason that is set to 0.5 ~ 5 μm be: when the above-mentioned cycle is less than 0.5 μm, the toughness and the excellent resistance to feature collapsing cutter that cannot give full play to the excellence that periodic structure has then is caused because the cycle is too short, on the other hand, the above-mentioned cycle is when being more than 5 μm, then because excessive cycle causes the above-mentioned feature that cannot give full play to periodic structure and have.
In addition, it is due to during less than 0.5 μm that the maximum Dmax of the value of average grain diameter D is decided to be in the scope of 0.5 ~ 1.5 μm by the present invention, the feature that cause cannot give full play to periodic structure have too small with the difference of very small region, on the other hand, when more than 1.5 μm, become coarse grain and cause maintaining high tenacity.
In addition, the reason be decided to be by the minimum Dmin of the value of average grain diameter D in the scope of 0.05 ~ 0.3 μm is: during less than 0.05 μm, the Al in very small region 2o 3particle between strain increase, Al 2o 3the tack of the particle in layer declines and causes maintaining Al 2o 3high tenacity, on the other hand, when more than 0.3 μm, become coarse grain and cause maintaining high tenacity.
As the upper layer (Al of hard coating layer in the present invention 2o 3layer), owing to possessing average grain diameter D, the grain structure structure that above-mentioned maximum and minimizing thickness amplification zone cycle alternately occur is shown, even if therefore to produce with high heat and high capacity acts in the high speed heavy cut processing of blade, also Al can not damaged 2o 3layer high temperature hardness inherently and heat resistance, thus play excellent toughness, resistance toly collapse cutter.
At coating tool of the present invention, the lower layer that coated formation is made up of Ti compound layer with by Al 2o 3the upper layer that layer is formed is as hard coating layer, and the Al of upper layer 2o 3layer has the grain structure structure of average grain diameter along thickness direction mechanical periodicity, even if thus steel or cast iron etc. produce with high heat and high capacity act on use in the high speed heavy cut processing of blade time, toughness, resistance to collapse cutter also excellent, in Long-Time Service, consequently play excellent mar proof, realize the long lifetime of coating tool.
Accompanying drawing explanation
Fig. 1 represents upper layer (Al of the present invention 2o 3layer) the simplified diagram of grain structure structure.
Fig. 2 represents that the present invention has the upper layer (Al of grain structure structure 2o 3layer) the average particle size distribution figure in thickness direction.
Fig. 3 represent with tool base surface parallel extraction many (imagination) parallel lines by upper layer (Al of the present invention 2o 3layer) be divided into the schematic diagram of the division state of the thickness amplification zone of 0.02 μm.
Detailed description of the invention
Then, coating tool of the present invention is illustrated by embodiment.
[embodiment]
As material powder, prepare the WC powder all with the average grain diameter of 1 ~ 3 μm, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr3C2 powder, TiN powder, TaN powder and Co powder, these material powders are fitted in the cooperation composition shown in table 1, and then add paraffin in acetone ball milling mix 24 hours, after drying under reduced pressure, the pressed compact of predetermined shape is shaped to the pressure extrusion of 98MPa, in the vacuum of 5Pa, this pressed compact of vacuum-sintering under the maintenance condition of 1 hour in predetermined temperature in the scope of 1370 ~ 1470 DEG C, after sintering, the WC base cemented carbide tool base A ~ E of blade (the イ Application サ mono-ト) shape that there is ISOCNMG120408 and specify is manufactured respectively by Honing process blade part being applied to R:0.07mm.
In addition, as material powder, prepare TiCN (by quality ratio, being TiC/TiN=50/50) powder, the Mo all with the average grain diameter of 0.5 ~ 2 μm 2c powder, ZrC powder, NbC powder, TaC powder, WC powder, Co powder and Ni powder, these material powders are fitted in the cooperation composition shown in table 2,24 hours wet mixed are carried out with ball mill, after drying, pressed compact is shaped to the pressure extrusion of 98MPa, in the nitrogen atmosphere of 1.3kPa, with temperature: keep in 1540 DEG C sintering this pressed compact under the condition of 1 hour, after sintering, formed the TiCN based ceramic metal tool base a ~ e of the blade shapes with ISO specification CNMG120408 by Honing process blade part being applied to R:0.07mm.
Then, the surface of these tool base A ~ E and tool base a ~ e uses common chemical evaporation plating device,
A (), as the lower layer of hard coating layer, the target thickness evaporation with the condition shown in table 3 and shown in table 5 forms Ti compound layer.
B () then, as the intermediate layer of hard coating layer, forms the Al of predetermined thickness with the condition evaporation shown in table 3 2o 3layer.
(c) then, with the condition shown in table 4, to Al 2o 3layer carries out scheduled time SF 6etching.
D () carries out above-mentioned (b), (c) repeatedly until obtain predetermined upper layer thickness.
According to above-mentioned (a) ~ (d), formed by evaporation and comprise the lower layer shown in table 6 and Al 2o 3layer have average grain diameter along the grain structure structure of thickness direction mechanical periodicity same table 5 shown in the hard coating layer of upper layer, thus manufacture coating tool 1 ~ 15 of the present invention.
To the Al by the invention described above coating tool 1 ~ 15 2o 3the upper layer that layer is formed, uses transmission electron microscope (multiplying power 50000 times) to observe in multiple visual field, observes the grain structure structure shown in simplified diagram of Fig. 1.
In addition, transmission electron microscope (multiplying power 50000 times) is used equally, to the Al by the invention described above coating tool 1 ~ 15 2o 3the upper layer that layer is formed, the thickness amplification zone of 0.02 μm is divided into as shown in Figure 3 on thickness direction, measure the number of grain boundaries being present in this thickness amplification zone, using the inverse of the number of grain boundaries of every 1 μm as average grain diameter D, obtain the change of the average grain diameter D of each thickness amplification zone along thickness direction, using transverse axis as average grain diameter D, using the longitudinal axis as the thickness direction degree of depth, be made the average particle size distribution figure shown in Fig. 2.
In above-mentioned Fig. 2, the maximum of average grain diameter D when being present in by average grain diameter D between 0.5 ~ 1.5 μm is set to the maximum Dmax of average grain diameter, on the other hand, the minimum of a value of average grain diameter D when being present in by average grain diameter D between 0.05 ~ 0.3 μm is set to the minimum Dmin of average grain diameter, according to the average particle size distribution figure that Fig. 2 is made, obtain Dmax and Dmin, and then according to illustrating the depth location in thickness direction of Dmax and the depth location in thickness direction that Dmin is shown, Al is obtained in thickness direction 2o 3average grain diameter change cycle C.
Table 6 illustrates the value of above-mentioned maximum Dmax, minimum Dmin and cycle C.
In addition, in order to compare, on the surface of tool base A ~ E and tool base a ~ e, using the condition shown in table 3 and the target thickness shown in table 5 forms the Ti compound layer of the lower layer as hard coating layer with the same evaporation of coating tool 1 ~ 15 of the present invention.
Then, as the upper layer of hard coating layer, wherein several target thickness evaporation with the condition shown in table 3 and shown in table 7 is formed by Al 2o 3the upper layer that layer is formed, thus the comparison coating tool 1 ~ 10 making table 7.
In addition, by forming Al to remaining several repeatedly carrying out with the condition evaporation shown in table 3 2o 3layer and with shown in table 4 condition etching SF 6, thus evaporation is formed by Al 2o 3average grain diameter change Al 2o 3the upper layer that layer is formed, makes the comparison coating tool 11 ~ 15 of table 7.
To by the Al comparing coating tool 1 ~ 10 and 11 ~ 15 2o 3the upper layer that layer is formed, uses transmission electron microscope (multiplying power 50000 times), determines Al 2o 3average grain diameter.
For comparing coating tool 1 ~ 10, Al 2o 3average grain diameter unconfirmed go out poor intentionally on thickness direction, be almost uniform average grain diameter.
Coating tool 1 ~ 10 is compared in the uniform average size of thickness direction entirety shown in table 7.
To comparing coating tool 11 ~ 15, the average grain diameter that determine thickness direction on same with the situation of coating tool 1 ~ 15 of the present invention changes.
Table 7 illustrates the value to comparing maximum Dmax, minimum Dmin that coating tool 11 ~ 15 obtains and cycle C.
In addition, use SEM to measure coating tool 1 ~ 15 of the present invention and compare the result of each structure sheaf thickness of coating tool 1 ~ 15, all demonstrating in fact identical average thickness thick in the destination layer shown in table 5 ~ table 7.
[table 1]
[table 2]
[table 3]
[table 4]
[table 5]
[table 6]
[table 7]
* represent and be in outside the scope of the invention.
Then, to the invention described above coating tool 1 ~ 15 and compare coating tool 1 ~ 15 with shown in table 8 condition implement machining test, in all cutting tests, determine the abrasion width of the rear knife face of blade.
This measurement result is represented at table 9.
[table 8]
[table 9]
(the cutting test result comparing coating tool represents the cutting time (minute) arriving the life-span because collapsing the reason such as cutter, defect)
From the result shown in table 5 ~ 9, coating tool of the present invention has Al 2o 3the average grain diameter of layer carries out the upper layer of grain structure structure as hard coating layer of mechanical periodicity using the cycle of 0.5 ~ 5 μm along thickness direction, even if thus steel or cast iron etc. produce with high heat and high capacity act on use in the high speed heavy cut processing of blade time, toughness, the resistance to cutter that collapses are excellent, in Long-Time Service, consequently play excellent mar proof.
On the other hand, the known Al for upper layer 2o 3for comparison coating tool 1 ~ 10, the comparison coating tool 11 ~ 15 of grain structure structure that will have outside the scope of the invention in addition of almost uniform average grain diameter, produce with high heat and high capacity act on use in the high speed heavy cut processing of blade time, cause reach the life-span at short notice because collapsing cutter, defect etc.
Industry utilizability
As mentioned above, coating tool of the present invention such as steel or cast iron etc. produce with high heat and high capacity acts in the high speed heavy cut processing of blade, play excellent toughness, resistance toly collapse cutter, the prolongation in service life can be realized, be not only high speed heavy cut processing conditions, certainly also can use in high-speed cutting processing conditions, high rate intermittent Cutting and machining conditions etc.

Claims (1)

1. a surface-coated cutting tool, it is characterized in that, the hard coating layer of following (a) lower layer, (b) upper layer is comprised at the surface chemistry evaporation of the tool base be made up of tungsten carbide base carbide alloy or base titanium carbonitride
A () lower layer is by the one deck in the carbide lamella of Ti, nitride layer, carbonitride layer, oxycarbide layer and carbon nitrogen oxide layer or two-layerly above forms, and the Ti compound layer of the average thickness of the total with 1 ~ 20 μm,
B () upper layer is have the alumina layer that average thickness is 1 ~ 25 μm,
Form the line and staff control that the alumina layer of above-mentioned (b) upper layer is columnar structure and fine particle tissue, and columnar structure and fine particle tissue periodically alternately occur on thickness direction,
This alumina layer has following grain structure structure:
Above-mentioned (b) upper layer and tool base surface are divided into abreast the thickness amplification zone of 0.02 μm, measure the number of grain boundaries being present in this thickness amplification zone, using the inverse of the number of grain boundaries of every 1 μm as average grain diameter, when obtaining the change of the average grain diameter of each thickness amplification zone along thickness direction
To be the thickness amplification zone of 0.5 ~ 1.5 μm and average grain diameter be average grain diameter that the thickness amplification zone of 0.05 ~ 0.3 μm is at least alternately formed with multiple region along the thickness direction of upper layer, thus the average grain diameter forming the aluminium oxide of upper layer carries out mechanical periodicity along thickness direction with the cycle of 0.5 ~ 5 μm.
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