CN102377107B - 高稳定性的光源系统及制造方法 - Google Patents
高稳定性的光源系统及制造方法 Download PDFInfo
- Publication number
- CN102377107B CN102377107B CN201110219889.9A CN201110219889A CN102377107B CN 102377107 B CN102377107 B CN 102377107B CN 201110219889 A CN201110219889 A CN 201110219889A CN 102377107 B CN102377107 B CN 102377107B
- Authority
- CN
- China
- Prior art keywords
- light
- optical
- wavelength
- incidence
- optical surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/068—Stabilisation of laser output parameters
- H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/142—Coating structures, e.g. thin films multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02255—Out-coupling of light using beam deflecting elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/16—Semiconductor lasers with special structural design to influence the modes, e.g. specific multimode
- H01S2301/166—Single transverse or lateral mode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0225—Out-coupling of light
- H01S5/02251—Out-coupling of light using optical fibres
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Semiconductor Lasers (AREA)
Abstract
Description
Claims (14)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/845,570 US8502452B2 (en) | 2010-07-28 | 2010-07-28 | High-stability light source system and method of manufacturing |
US12/845,570 | 2010-07-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102377107A CN102377107A (zh) | 2012-03-14 |
CN102377107B true CN102377107B (zh) | 2014-07-16 |
Family
ID=44785192
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110219889.9A Expired - Fee Related CN102377107B (zh) | 2010-07-28 | 2011-07-28 | 高稳定性的光源系统及制造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8502452B2 (zh) |
EP (1) | EP2413440A3 (zh) |
CN (1) | CN102377107B (zh) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8902425B2 (en) | 2012-04-08 | 2014-12-02 | University Of Zagreb | Temperature-stable incoherent light source |
US9239237B2 (en) * | 2013-04-08 | 2016-01-19 | Optikos Corporation | Optical alignment apparatus and methodology for a video based metrology tool |
US9572218B2 (en) | 2013-11-19 | 2017-02-14 | Usl Technologies, Llc | High-stability light source system and method |
TWI577100B (zh) * | 2014-10-31 | 2017-04-01 | 高準精密工業股份有限公司 | 表面固定型雷射模組 |
US10050405B2 (en) | 2016-04-19 | 2018-08-14 | Lumentum Operations Llc | Wavelength locker using multiple feedback curves to wavelength lock a beam |
US9972964B2 (en) | 2016-04-19 | 2018-05-15 | Lumentum Operations Llc | Polarization-based dual channel wavelength locker |
US10012843B2 (en) * | 2016-07-13 | 2018-07-03 | Sharp Kabushiki Kaisha | Compact and effective beam absorber for frequency converted laser |
US10670803B2 (en) | 2017-11-08 | 2020-06-02 | Lumentum Operations Llc | Integrated wavelength monitor |
WO2019108766A1 (en) | 2017-11-29 | 2019-06-06 | Vixar Inc. | Power monitoring approach for vcsels and vcsel arrays |
CN111868487B (zh) * | 2018-03-20 | 2024-08-30 | 维克萨股份有限公司 | 对眼睛安全的光学模块 |
CN110544876B (zh) * | 2018-05-28 | 2021-01-12 | 华信光电科技股份有限公司 | 自动功率控制光点发射器 |
CN110429466A (zh) * | 2019-06-24 | 2019-11-08 | 东莞理工学院 | 一种高功率半导体激光器实时检测系统 |
CN113189055A (zh) * | 2021-05-08 | 2021-07-30 | 东北师范大学 | 一种利用多角度偏振光信息反演咸水湖盐度的方法 |
CN114815284B (zh) * | 2022-04-07 | 2023-11-14 | 西安应用光学研究所 | 一种带有折转光路光学镜头消除光学间隔装调误差的方法 |
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US4492436A (en) | 1983-01-03 | 1985-01-08 | At&T Bell Laboratories | Polarization independent beam splitter |
US4887900A (en) | 1987-02-20 | 1989-12-19 | Litton Systems, Inc. | Polarization maintaining fiber interferometer and method for source stabilization |
US4841157A (en) | 1988-01-06 | 1989-06-20 | Downing Jr John P | Optical backscatter turbidimeter sensor |
US4982139A (en) | 1989-04-03 | 1991-01-01 | At&T Bell Laboratories | Method and apparatus for controlling light intensity |
US5250797A (en) | 1990-10-05 | 1993-10-05 | Canon Kabushiki Kaisha | Exposure method and apparatus for controlling light pulse emission using determined exposure quantities and control parameters |
US5209112A (en) | 1991-02-28 | 1993-05-11 | Battelle Memorial Institute | Expendable oceanographic sensor apparatus |
US5657164A (en) | 1991-05-28 | 1997-08-12 | Discovision Associates | Optical beamsplitter |
US5367399A (en) | 1992-02-13 | 1994-11-22 | Holotek Ltd. | Rotationally symmetric dual reflection optical beam scanner and system using same |
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US5406172A (en) | 1993-12-28 | 1995-04-11 | Honeywell Inc. | Light source intensity control device |
JP3358099B2 (ja) * | 1994-03-25 | 2002-12-16 | オムロン株式会社 | 光学式センサ装置 |
US5812582A (en) | 1995-10-03 | 1998-09-22 | Methode Electronics, Inc. | Vertical cavity surface emitting laser feedback system and method |
US5812717A (en) | 1996-01-18 | 1998-09-22 | Methode Electronics, Inc. | Optical package with alignment means and method of assembling an optical package |
US5809050A (en) | 1996-01-25 | 1998-09-15 | Hewlett-Packard Company | Integrated controlled intensity laser-based light source using diffraction, scattering and transmission |
US5771254A (en) | 1996-01-25 | 1998-06-23 | Hewlett-Packard Company | Integrated controlled intensity laser-based light source |
US5835514A (en) | 1996-01-25 | 1998-11-10 | Hewlett-Packard Company | Laser-based controlled-intensity light source using reflection from a convex surface and method of making same |
US5786937A (en) | 1996-07-17 | 1998-07-28 | Industrial Technology Research Institute | Thin-film color-selective beam splitter and method of fabricating the same |
US5796481A (en) | 1997-07-23 | 1998-08-18 | Downing, Jr.; John P. | Suspended particle concentration monitor |
US5900975A (en) | 1997-10-30 | 1999-05-04 | Cognex Corporation | Ghost image extinction in an active range sensor |
US6185185B1 (en) | 1997-11-21 | 2001-02-06 | International Business Machines Corporation | Methods, systems and computer program products for suppressing multiple destination traffic in a computer network |
JP4026918B2 (ja) | 1998-03-02 | 2007-12-26 | キヤノン株式会社 | レーザ駆動装置およびその制御方法 |
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US6285139B1 (en) | 1999-12-23 | 2001-09-04 | Gelcore, Llc | Non-linear light-emitting load current control |
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JP2001356302A (ja) * | 2000-06-15 | 2001-12-26 | Seiko Epson Corp | 照明光学系及びこれを備えるプロジェクタ |
US6534756B1 (en) | 2000-06-22 | 2003-03-18 | Applied Materials Inc. | Ultra-stable, compact, high intensity fiber-coupled light source for use in monitoring and process control |
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US6596977B2 (en) | 2001-10-05 | 2003-07-22 | Koninklijke Philips Electronics N.V. | Average light sensing for PWM control of RGB LED based white light luminaries |
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JP2003188467A (ja) | 2001-12-20 | 2003-07-04 | Mitsubishi Electric Corp | 光半導体モジュール |
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JP4155166B2 (ja) * | 2003-11-10 | 2008-09-24 | コニカミノルタオプト株式会社 | 光ピックアップ装置 |
US7196343B2 (en) | 2004-12-30 | 2007-03-27 | Asml Netherlands B.V. | Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby |
US7330493B2 (en) * | 2005-06-01 | 2008-02-12 | Pavilion Integration Corporation | Method, apparatus and module using single laser diode for simultaneous pump of two gain media characteristic of polarization dependent absorption |
US7767947B2 (en) | 2005-09-20 | 2010-08-03 | Downing Jr John P | Semiconductor light source with optical feedback |
JP4253027B2 (ja) * | 2006-11-21 | 2009-04-08 | 古河電気工業株式会社 | 光モジュール |
JP2008170714A (ja) * | 2007-01-11 | 2008-07-24 | Necディスプレイソリューションズ株式会社 | 照明光学系及び投射型表示装置 |
JP2009266359A (ja) * | 2008-04-01 | 2009-11-12 | Panasonic Corp | 光学ヘッド、光ディスク装置及び情報記録及び/又は再生装置 |
-
2010
- 2010-07-28 US US12/845,570 patent/US8502452B2/en not_active Expired - Fee Related
-
2011
- 2011-07-27 EP EP11175596.3A patent/EP2413440A3/en not_active Withdrawn
- 2011-07-28 CN CN201110219889.9A patent/CN102377107B/zh not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP2413440A2 (en) | 2012-02-01 |
EP2413440A3 (en) | 2016-08-24 |
US20120025714A1 (en) | 2012-02-02 |
US8502452B2 (en) | 2013-08-06 |
CN102377107A (zh) | 2012-03-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: USL TECHNOLOGIES LLC Free format text: FORMER OWNER: DOWNING JOHN P. JR Effective date: 20130412 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20130412 Address after: Washington State Applicant after: US TECHNOLOGY CORPORATION Address before: Washington State Applicant before: John P. Downing Jr. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140716 Termination date: 20180728 |
|
CF01 | Termination of patent right due to non-payment of annual fee |