CN102341913B - 用于太阳能电池中的隧道结的高掺杂层 - Google Patents

用于太阳能电池中的隧道结的高掺杂层 Download PDF

Info

Publication number
CN102341913B
CN102341913B CN201080009936.0A CN201080009936A CN102341913B CN 102341913 B CN102341913 B CN 102341913B CN 201080009936 A CN201080009936 A CN 201080009936A CN 102341913 B CN102341913 B CN 102341913B
Authority
CN
China
Prior art keywords
dopant
layer
tunnel diode
photovoltaic
sub
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201080009936.0A
Other languages
English (en)
Chinese (zh)
Other versions
CN102341913A (zh
Inventor
C·M·费策尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boeing Co
Original Assignee
Boeing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boeing Co filed Critical Boeing Co
Publication of CN102341913A publication Critical patent/CN102341913A/zh
Application granted granted Critical
Publication of CN102341913B publication Critical patent/CN102341913B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/127The active layers comprising only Group III-V materials, e.g. GaAs or InP
    • H10F71/1272The active layers comprising only Group III-V materials, e.g. GaAs or InP comprising at least three elements, e.g. GaAlAs or InGaAsP
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/142Photovoltaic cells having only PN homojunction potential barriers comprising multiple PN homojunctions, e.g. tandem cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/14Photovoltaic cells having only PN homojunction potential barriers
    • H10F10/144Photovoltaic cells having only PN homojunction potential barriers comprising only Group III-V materials, e.g. GaAs,AlGaAs, or InP photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/124Active materials comprising only Group III-V materials, e.g. GaAs
    • H10F77/1248Active materials comprising only Group III-V materials, e.g. GaAs having three or more elements, e.g. GaAlAs, InGaAs or InGaAsP
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/14Shape of semiconductor bodies; Shapes, relative sizes or dispositions of semiconductor regions within semiconductor bodies
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D8/00Diodes
    • H10D8/70Tunnel-effect diodes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/544Solar cells from Group III-V materials
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Photovoltaic Devices (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Sustainable Energy (AREA)
  • Sustainable Development (AREA)
CN201080009936.0A 2009-03-16 2010-02-04 用于太阳能电池中的隧道结的高掺杂层 Active CN102341913B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/404,795 2009-03-16
US12/404,795 US9722131B2 (en) 2009-03-16 2009-03-16 Highly doped layer for tunnel junctions in solar cells
PCT/US2010/023171 WO2010107522A1 (en) 2009-03-16 2010-02-04 Highly doped layer for tunnel junctions in solar cells

Publications (2)

Publication Number Publication Date
CN102341913A CN102341913A (zh) 2012-02-01
CN102341913B true CN102341913B (zh) 2015-08-12

Family

ID=42396457

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201080009936.0A Active CN102341913B (zh) 2009-03-16 2010-02-04 用于太阳能电池中的隧道结的高掺杂层

Country Status (5)

Country Link
US (2) US9722131B2 (enExample)
EP (1) EP2409334B1 (enExample)
JP (2) JP5794974B2 (enExample)
CN (1) CN102341913B (enExample)
WO (1) WO2010107522A1 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11417788B2 (en) * 2010-11-19 2022-08-16 The Boeing Company Type-II high bandgap tunnel junctions of InP lattice constant for multijunction solar cells
US20120216857A1 (en) * 2011-02-28 2012-08-30 Atomic Energy Council-Institute Of Nuclear Energy Research Solar Cell Assembly with an Improved Photocurrent Collection Efficiency
JP5681607B2 (ja) * 2011-03-28 2015-03-11 株式会社東芝 光電変換素子
EP2721647A2 (en) * 2011-06-15 2014-04-23 3M Innovative Properties Company Solar cell with improved conversion efficiency
CN102244134B (zh) * 2011-08-02 2013-05-15 厦门市三安光电科技有限公司 一种高效四结太阳能电池及其制作方法
WO2013033671A1 (en) * 2011-09-02 2013-03-07 Amberwave, Inc. Solar cell
US9263611B2 (en) * 2011-11-17 2016-02-16 Solar Junction Corporation Method for etching multi-layer epitaxial material
US9178098B2 (en) * 2012-02-29 2015-11-03 The Boeing Company Solar cell with delta doping layer
EP2865016B1 (en) 2012-06-22 2024-06-05 Epiworks, Inc. Manufacturing semiconductor-based multi-junction photovoltaic devices
CN102751389A (zh) * 2012-07-19 2012-10-24 厦门市三安光电科技有限公司 一种高效多结太阳能电池的制备方法
US9997659B2 (en) * 2012-09-14 2018-06-12 The Boeing Company Group-IV solar cell structure using group-IV or III-V heterostructures
US11495705B2 (en) * 2012-09-14 2022-11-08 The Boeing Company Group-IV solar cell structure using group-IV or III-V heterostructures
US9099595B2 (en) 2012-09-14 2015-08-04 The Boeing Company Group-IV solar cell structure using group-IV or III-V heterostructures
US10903383B2 (en) 2012-09-14 2021-01-26 The Boeing Company Group-IV solar cell structure using group-IV or III-V heterostructures
US11646388B2 (en) * 2012-09-14 2023-05-09 The Boeing Company Group-IV solar cell structure using group-IV or III-V heterostructures
US9985160B2 (en) * 2012-09-14 2018-05-29 The Boeing Company Group-IV solar cell structure using group-IV or III-V heterostructures
JP6582591B2 (ja) * 2014-07-11 2019-10-02 株式会社リコー 化合物半導体太陽電池、及び、化合物半導体太陽電池の製造方法
CN104393115B (zh) * 2014-11-18 2016-07-27 上海空间电源研究所 一种多结砷化镓太阳电池一次腐蚀工艺方法
US10910506B1 (en) * 2015-04-09 2021-02-02 Solaero Technologies Corp. Solar cell with gradation in the top window layer
DE102015006379B4 (de) * 2015-05-18 2022-03-17 Azur Space Solar Power Gmbh Skalierbare Spannungsquelle
CN107093647A (zh) * 2017-04-06 2017-08-25 江苏中天科技股份有限公司 激光光伏电池及其制备方法
JP7122119B2 (ja) * 2017-05-25 2022-08-19 昭和電工光半導体株式会社 発光ダイオード
US10439103B2 (en) 2017-05-25 2019-10-08 Showa Denko K. K. Light-emitting diode and method for manufacturing tunnel junction layer
CN108493284B (zh) * 2018-05-03 2020-03-10 扬州乾照光电有限公司 一种晶格失配的多结太阳能电池及其制作方法
CN111261744A (zh) * 2018-11-30 2020-06-09 东泰高科装备科技有限公司 多结太阳能电池及其制备方法
CN111341872B (zh) * 2018-12-18 2022-10-25 紫石能源有限公司 一种砷化镓太阳能电池外延结构及其生长方法
DE102020001185A1 (de) 2020-02-25 2021-08-26 Azur Space Solar Power Gmbh Stapelförmige monolithische aufrecht-metamorphe lll-V-Mehrfachsolarzelle
US12267062B2 (en) 2020-06-17 2025-04-01 Murata Manufacturing Co., Ltd. Transversely-excited film bulk acoustic resonators with three-layer electrodes

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101010811A (zh) * 2004-05-12 2007-08-01 Rwe太空太阳能有限责任公司 具有集成的保护二极管的太阳能电池

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6437060A (en) 1987-08-03 1989-02-07 Nippon Telegraph & Telephone Semiconductor element
US5342453A (en) * 1992-11-13 1994-08-30 Midwest Research Institute Heterojunction solar cell
JP3250425B2 (ja) * 1995-09-13 2002-01-28 日立電線株式会社 化合物半導体ウエハ及び太陽電池
US6316715B1 (en) * 2000-03-15 2001-11-13 The Boeing Company Multijunction photovoltaic cell with thin 1st (top) subcell and thick 2nd subcell of same or similar semiconductor material
WO2002023640A1 (en) 2000-09-14 2002-03-21 Optowell Co., Ltd. Nitride compound semiconductor light emitting device having a tunnel junction structure and fabrication method thereof
JP2003218374A (ja) * 2002-01-23 2003-07-31 Sharp Corp Iii−v族太陽電池

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101010811A (zh) * 2004-05-12 2007-08-01 Rwe太空太阳能有限责任公司 具有集成的保护二极管的太阳能电池

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Application of δ-doping in GaAs tunnel junctions;RAGAY F W ET AL;《ELECTRONICS LETTERS, IEE STEVENAGE,GB》;19940106;第30卷(第1期);86-87 *

Also Published As

Publication number Publication date
US10326042B2 (en) 2019-06-18
US9722131B2 (en) 2017-08-01
JP5794974B2 (ja) 2015-10-14
JP6093401B2 (ja) 2017-03-08
US20170005217A1 (en) 2017-01-05
EP2409334B1 (en) 2020-09-30
US20100229930A1 (en) 2010-09-16
CN102341913A (zh) 2012-02-01
JP2012521090A (ja) 2012-09-10
WO2010107522A1 (en) 2010-09-23
EP2409334A1 (en) 2012-01-25
JP2015201659A (ja) 2015-11-12

Similar Documents

Publication Publication Date Title
CN102341913B (zh) 用于太阳能电池中的隧道结的高掺杂层
US20240405144A1 (en) Solar cell structures for improved current generation and collection
US10263129B2 (en) Multijunction photovoltaic device having SiGe(Sn) and (In)GaAsNBi cells
TWI600173B (zh) 在中間電池中具有低能隙吸收層之多接面太陽能電池及其製造方法
US10170652B2 (en) Metamorphic solar cell having improved current generation
US11417788B2 (en) Type-II high bandgap tunnel junctions of InP lattice constant for multijunction solar cells
JP5479574B2 (ja) ナノワイヤを有する多接合光電池
US10811551B2 (en) Tandem solar cell including metal disk array
CN101304051B (zh) 具渐变式超晶格结构的太阳电池
HK1147141A (en) Nanowire-based solar cell structure

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant