CN102339758B - 低温键合制备铜-陶瓷基板方法 - Google Patents
低温键合制备铜-陶瓷基板方法 Download PDFInfo
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- CN102339758B CN102339758B CN 201110310122 CN201110310122A CN102339758B CN 102339758 B CN102339758 B CN 102339758B CN 201110310122 CN201110310122 CN 201110310122 CN 201110310122 A CN201110310122 A CN 201110310122A CN 102339758 B CN102339758 B CN 102339758B
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- 239000000758 substrate Substances 0.000 title claims abstract description 55
- 239000000919 ceramic Substances 0.000 title claims abstract description 39
- 238000000034 method Methods 0.000 title claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 20
- 239000010949 copper Substances 0.000 claims abstract description 48
- 229910052802 copper Inorganic materials 0.000 claims abstract description 44
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 42
- 230000007797 corrosion Effects 0.000 claims abstract description 8
- 238000005260 corrosion Methods 0.000 claims abstract description 8
- 230000000694 effects Effects 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 230000001681 protective effect Effects 0.000 claims abstract description 8
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims description 27
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 23
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 20
- 229910045601 alloy Inorganic materials 0.000 claims description 17
- 239000000956 alloy Substances 0.000 claims description 17
- 239000007789 gas Substances 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 10
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910017083 AlN Inorganic materials 0.000 claims description 4
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 claims description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- 229910000861 Mg alloy Inorganic materials 0.000 claims description 2
- 229910018505 Ni—Mg Inorganic materials 0.000 claims description 2
- 229910001093 Zr alloy Inorganic materials 0.000 claims description 2
- OWXLRKWPEIAGAT-UHFFFAOYSA-N [Mg].[Cu] Chemical compound [Mg].[Cu] OWXLRKWPEIAGAT-UHFFFAOYSA-N 0.000 claims description 2
- XTYUEDCPRIMJNG-UHFFFAOYSA-N copper zirconium Chemical compound [Cu].[Zr] XTYUEDCPRIMJNG-UHFFFAOYSA-N 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 13
- 229910000881 Cu alloy Inorganic materials 0.000 abstract description 2
- 239000002086 nanomaterial Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 13
- 238000002360 preparation method Methods 0.000 description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical group [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 238000005538 encapsulation Methods 0.000 description 4
- 238000004506 ultrasonic cleaning Methods 0.000 description 4
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 229910018182 Al—Cu Inorganic materials 0.000 description 2
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 229960004643 cupric oxide Drugs 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000005496 eutectics Effects 0.000 description 2
- 230000005251 gamma ray Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000011800 void material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910017767 Cu—Al Inorganic materials 0.000 description 1
- HSLKFDVLUCDISN-UHFFFAOYSA-N [N].CC(O)=O Chemical compound [N].CC(O)=O HSLKFDVLUCDISN-UHFFFAOYSA-N 0.000 description 1
- JRBRVDCKNXZZGH-UHFFFAOYSA-N alumane;copper Chemical compound [AlH3].[Cu] JRBRVDCKNXZZGH-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- UNRNJMFGIMDYKL-UHFFFAOYSA-N aluminum copper oxygen(2-) Chemical compound [O-2].[Al+3].[Cu+2] UNRNJMFGIMDYKL-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 238000004100 electronic packaging Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
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- Ceramic Products (AREA)
Abstract
Description
工艺参数 | 实施例3 | 实施例4 | 实施例5 | 实施例6 |
铜合金组成 | Cu10%Zr90% | Cu30%Ni20%Mg50% | Cu40%Al60% | Cu50%Mg40% |
铜合金片厚度 | 0.1mm | 2.0mm | 0.5mm | 3.0mm |
腐蚀液及浓度 | 10%NaOH | 5%HCl | 10%H2SO4 | 8%HNO3 |
空洞尺寸 | 1.0nm | 20nm | 50nm | 100nm |
键合温度 | 200℃ | 300℃ | 350℃ | 400℃ |
键合压力 | 1.0MPa | 5.0MPa | 8.0MPa | 20.0MPa |
保护气体 | 1%乙酸+氮气 | 3%乙酸+氮气 | 3%乙酸 | 氮气 |
陶瓷片 | 96%氧化铝 | 氧化铍 | 碳化硅 | 99%氧化铝 |
Claims (6)
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CN 201110310122 CN102339758B (zh) | 2011-10-13 | 2011-10-13 | 低温键合制备铜-陶瓷基板方法 |
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CN 201110310122 CN102339758B (zh) | 2011-10-13 | 2011-10-13 | 低温键合制备铜-陶瓷基板方法 |
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CN102339758A CN102339758A (zh) | 2012-02-01 |
CN102339758B true CN102339758B (zh) | 2013-05-22 |
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Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102582162A (zh) * | 2012-03-04 | 2012-07-18 | 浙江大学 | 电力电子功率模块覆铜结构 |
CN102820405B (zh) * | 2012-07-17 | 2015-06-24 | 大连理工大学 | 一种led器件的硅基板与铜微热管集成制造方法 |
CN103762181B (zh) * | 2014-01-02 | 2018-12-18 | 上海申和热磁电子有限公司 | 氮化铝覆铜陶瓷基板的制备方法 |
CN103928300B (zh) * | 2014-04-14 | 2016-06-01 | 河南省科学院应用物理研究所有限公司 | 一种基于多场耦合的键合方法 |
CN104211320B (zh) * | 2014-07-25 | 2016-01-20 | 中国电子科技集团公司第四十六研究所 | 一种微波复合介质基板制备方法 |
CN104402488B (zh) * | 2014-11-13 | 2016-03-02 | 合肥圣达电子科技实业公司 | 覆铜用氮化铝基板的预处理方法 |
CN105679684B (zh) * | 2016-01-21 | 2018-10-09 | 中山市瑞宝电子科技有限公司 | 一种dpc工艺用镜面氮化铝陶瓷基板的高活性预处理方法 |
DE102016203030A1 (de) * | 2016-02-26 | 2017-08-31 | Heraeus Deutschland GmbH & Co. KG | Kupfer-Keramik-Verbund |
EP3210956B1 (de) * | 2016-02-26 | 2018-04-11 | Heraeus Deutschland GmbH & Co. KG | Kupfer-keramik-verbund |
CN106888551A (zh) * | 2017-04-17 | 2017-06-23 | 深圳市环基实业有限公司 | 一种陶瓷基覆铜板及其制备工艺 |
CN107195559A (zh) * | 2017-04-27 | 2017-09-22 | 华中科技大学 | 一种覆锡纳米多孔铜低温键合的方法 |
CN108191449B (zh) * | 2018-01-03 | 2021-04-27 | 上海富乐华半导体科技有限公司 | 一种铜-氧化铝陶瓷基板及其制备方法 |
CN109037421A (zh) * | 2018-08-01 | 2018-12-18 | 南阳师范学院 | 一种大功率led用陶瓷覆铜板的低温制备方法 |
CN111278220A (zh) * | 2018-12-04 | 2020-06-12 | 中科院微电子研究所昆山分所 | 一种厚铜dcb板的制备方法 |
CN110459668B (zh) * | 2019-08-16 | 2020-12-25 | 国网河南省电力公司邓州市供电公司 | 一种大功率led散热基板的制备方法 |
CN110493951A (zh) * | 2019-09-27 | 2019-11-22 | 德胜光电股份有限公司 | 氮化铝陶瓷电路板结构 |
CN111092049B (zh) * | 2019-12-19 | 2022-07-15 | 深圳第三代半导体研究院 | 一种陶瓷基板覆铜及高功率电子芯片全铜互联封装方案 |
CN111341666A (zh) * | 2020-03-05 | 2020-06-26 | 哈尔滨工业大学(威海) | 功率器件模块封装用高导热氮化硅陶瓷基板与铜的连接方法 |
CN111933610B (zh) * | 2020-07-17 | 2022-03-29 | 江苏富乐华半导体科技股份有限公司 | 一种带有缓冲层的金属陶瓷基板及其制备方法 |
CN111885852A (zh) * | 2020-07-24 | 2020-11-03 | 深圳市环基实业有限公司 | 一种陶瓷覆铜板的制备方法 |
CN111945124A (zh) * | 2020-08-13 | 2020-11-17 | 气相科技(武汉)有限公司 | 一种非金属/金属/非金属三明治结构复合材料的制备方法 |
CN112331759B (zh) * | 2020-11-19 | 2022-10-11 | 郑州大学 | 一种高可靠性热电器件及制备方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6746057B2 (en) * | 2001-01-25 | 2004-06-08 | Sumitomo Metal Industries, Ltd. | Threaded joint for steel pipes having improved galling resistance and rust-preventing properties |
CN101147994A (zh) * | 2007-11-02 | 2008-03-26 | 长春市北方电子有限责任公司 | 铜膜加厚的覆铜陶瓷基板的制备方法 |
CN101853795A (zh) * | 2010-05-07 | 2010-10-06 | 华中科技大学 | 一种低温热压键合方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US20080026248A1 (en) * | 2006-01-27 | 2008-01-31 | Shekar Balagopal | Environmental and Thermal Barrier Coating to Provide Protection in Various Environments |
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2011
- 2011-10-13 CN CN 201110310122 patent/CN102339758B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6746057B2 (en) * | 2001-01-25 | 2004-06-08 | Sumitomo Metal Industries, Ltd. | Threaded joint for steel pipes having improved galling resistance and rust-preventing properties |
CN101147994A (zh) * | 2007-11-02 | 2008-03-26 | 长春市北方电子有限责任公司 | 铜膜加厚的覆铜陶瓷基板的制备方法 |
CN101853795A (zh) * | 2010-05-07 | 2010-10-06 | 华中科技大学 | 一种低温热压键合方法 |
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Application publication date: 20120201 Assignee: WUHAN LIZHIDA SCIENCE & TECHNOLOGY Co.,Ltd. Assignor: Huazhong University of Science and Technology Contract record no.: 2014420000183 Denomination of invention: Method for manufacturing copper-ceramic substrate by adopting low-temperature bonding Granted publication date: 20130522 License type: Exclusive License Record date: 20141112 |
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Denomination of invention: Preparation of copper ceramic substrate by low temperature bonding Effective date of registration: 20220317 Granted publication date: 20130522 Pledgee: Bank of China Limited Wuhan provincial branch Pledgor: WUHAN LIZHIDA TECHNOLOGY CO.,LTD. Registration number: Y2022420000066 |
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