CN102337592A - SiC晶体生长炉测温窗 - Google Patents
SiC晶体生长炉测温窗 Download PDFInfo
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- CN102337592A CN102337592A CN2011101838188A CN201110183818A CN102337592A CN 102337592 A CN102337592 A CN 102337592A CN 2011101838188 A CN2011101838188 A CN 2011101838188A CN 201110183818 A CN201110183818 A CN 201110183818A CN 102337592 A CN102337592 A CN 102337592A
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- temperature measuring
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- sic crystal
- interlayer pipe
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- 239000013078 crystal Substances 0.000 title claims abstract description 24
- 239000011229 interlayer Substances 0.000 claims abstract description 34
- 239000010410 layer Substances 0.000 claims abstract description 14
- 239000011521 glass Substances 0.000 claims description 12
- 239000005357 flat glass Substances 0.000 abstract 3
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 201110183818 CN102337592B (zh) | 2011-07-01 | 2011-07-01 | SiC晶体生长炉测温窗 |
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CN 201110183818 CN102337592B (zh) | 2011-07-01 | 2011-07-01 | SiC晶体生长炉测温窗 |
Publications (2)
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CN102337592A true CN102337592A (zh) | 2012-02-01 |
CN102337592B CN102337592B (zh) | 2013-10-30 |
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CN 201110183818 Active CN102337592B (zh) | 2011-07-01 | 2011-07-01 | SiC晶体生长炉测温窗 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103884174A (zh) * | 2014-04-21 | 2014-06-25 | 上海千山远东制药机械有限公司 | 真空冷冻干燥机红外线测温系统 |
CN104776714A (zh) * | 2015-04-19 | 2015-07-15 | 宁夏昇力恒真空设备有限公司 | 高温真空烧结炉用红外测温装置及高温真空烧结炉 |
CN106381524A (zh) * | 2016-10-21 | 2017-02-08 | 北京鼎泰芯源科技发展有限公司 | 一种基于原位合成法的InP单晶炉用观察窗装置 |
CN106757317A (zh) * | 2016-11-25 | 2017-05-31 | 中国科学院长春应用化学研究所 | 稀土晶体生长设备、稀土晶体生长工艺及应用 |
CN112430846A (zh) * | 2020-10-30 | 2021-03-02 | 北京北方华创微电子装备有限公司 | 半导体工艺设备及其观察窗清洁方法 |
CN113106540A (zh) * | 2021-03-08 | 2021-07-13 | 北京北方华创微电子装备有限公司 | 半导体设备 |
CN113733386A (zh) * | 2021-10-18 | 2021-12-03 | 青岛科技大学 | 一种能够快速检测加工过程中胶料温度的激光测温方法及装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201213200Y (zh) * | 2008-06-27 | 2009-03-25 | 陕西虹光机电制造有限公司 | 高压配电柜用红外测温窗口 |
-
2011
- 2011-07-01 CN CN 201110183818 patent/CN102337592B/zh active Active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201213200Y (zh) * | 2008-06-27 | 2009-03-25 | 陕西虹光机电制造有限公司 | 高压配电柜用红外测温窗口 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103884174A (zh) * | 2014-04-21 | 2014-06-25 | 上海千山远东制药机械有限公司 | 真空冷冻干燥机红外线测温系统 |
CN104776714A (zh) * | 2015-04-19 | 2015-07-15 | 宁夏昇力恒真空设备有限公司 | 高温真空烧结炉用红外测温装置及高温真空烧结炉 |
CN104776714B (zh) * | 2015-04-19 | 2016-06-22 | 宁夏昇力恒真空设备有限公司 | 高温真空烧结炉用红外测温装置及高温真空烧结炉 |
CN106381524A (zh) * | 2016-10-21 | 2017-02-08 | 北京鼎泰芯源科技发展有限公司 | 一种基于原位合成法的InP单晶炉用观察窗装置 |
CN106757317A (zh) * | 2016-11-25 | 2017-05-31 | 中国科学院长春应用化学研究所 | 稀土晶体生长设备、稀土晶体生长工艺及应用 |
CN112430846A (zh) * | 2020-10-30 | 2021-03-02 | 北京北方华创微电子装备有限公司 | 半导体工艺设备及其观察窗清洁方法 |
CN113106540A (zh) * | 2021-03-08 | 2021-07-13 | 北京北方华创微电子装备有限公司 | 半导体设备 |
CN113106540B (zh) * | 2021-03-08 | 2022-07-22 | 北京北方华创微电子装备有限公司 | 半导体设备 |
CN113733386A (zh) * | 2021-10-18 | 2021-12-03 | 青岛科技大学 | 一种能够快速检测加工过程中胶料温度的激光测温方法及装置 |
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CN102337592B (zh) | 2013-10-30 |
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Effective date of registration: 20180428 Address after: 030024 115 Heping South Road, wanBerlin District, Taiyuan, Shanxi Patentee after: Taiyuan Yixing Science and Technology Co., Ltd. Address before: 030024 Heping South Road, Taiyuan, Shanxi Province, No. 115 Patentee before: China Electronic Technology Group Corporation No.2 Research Institute |
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Effective date of registration: 20180621 Address after: 030024 115 Heping South Road, wanBerlin District, Taiyuan, Shanxi Patentee after: China Electronic Technology Group Corporation No.2 Research Institute Address before: 030024 115 Heping South Road, wanBerlin District, Taiyuan, Shanxi Patentee before: Taiyuan Yixing Science and Technology Co., Ltd. |
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Effective date of registration: 20190613 Address after: 030006 Room 102, No. 5 Tanghuai Road, Tanghuai Park, Taiyuan City, Shanxi Comprehensive Reform Demonstration Area, Shanxi Province Patentee after: Shanxi Scintillation New Materials Co., Ltd. Address before: 115 Pingnan Road, Wanbailin District, Taiyuan City, Shanxi Province Patentee before: China Electronic Technology Group Corporation No.2 Research Institute |
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Effective date of registration: 20220402 Address after: 030032 No. 9, fenxiao street, Taiyuan Xiaohe Park, Shanxi comprehensive reform demonstration zone, Taiyuan City, Shanxi Province Patentee after: Shanxi Scintillation Crystal Co.,Ltd. Address before: 030006 Room 102, No. 5, Tanghuai Road, Tanghuai Park, Taiyuan, Shanxi comprehensive reform demonstration zone Patentee before: Shanxi Scintillation New Materials Co.,Ltd. |
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